CN202729813U - Exhaust gas recycling device of polysilicon distillation system - Google Patents
Exhaust gas recycling device of polysilicon distillation system Download PDFInfo
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- CN202729813U CN202729813U CN 201220395277 CN201220395277U CN202729813U CN 202729813 U CN202729813 U CN 202729813U CN 201220395277 CN201220395277 CN 201220395277 CN 201220395277 U CN201220395277 U CN 201220395277U CN 202729813 U CN202729813 U CN 202729813U
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- polysilicon
- storage tank
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Abstract
The utility model discloses an exhaust gas recycling device of a polysilicon distillation system and belongs to the technical field of polysilicon production. The exhaust gas recycling device of the polysilicon distillation system mainly comprises a condenser group, a storage tank group and a rectifying tower, wherein an inlet of the condenser group is connected with each exhaust emission pipeline of the distillation system, an outlet of the condenser group is connected with the storage tank group, and an outlet of the storage tank group is connected with a feed port of the rectifying tower. By the aid of the exhaust gas recycling device of the polysilicon distillation system, trichlorosilane of exhaust gas of the polysilicon distillation system can be effectively recovered, separated and purified, and therefore utilization ratio of raw material is enhanced, production cost is effectively saved and environmental pollution is reduced.
Description
Technical field
The utility model relates to a kind of polysilicon tail gas retrieving arrangement, and particularly a kind of polysilicon rectifying system device for recovering tail gas belongs to technical field of polysilicon production.
Background technology
In the improved Siemens polycrystalline silicon production system, in the liquid reduction chlorosilane that the CDI operation reclaims, hydrogenation chlorosilane and the synthetic chlorosilane, the light constituent impurity such as low-boiler that contain trichlorosilane, silicon tetrachloride and dichloro-dihydro silicon, hydrogenchloride, B need to be sent to rectification working process and carry out could continuing to use in the input coefficient after the rectification process.
In distillation system, reduction tai gas of rectifying phlegma and hydrogenation tai gas of rectifying phlegma can recycle, and slightly heat up in a steamer tail gas condensing liquid, synthetic tai gas of rectifying phlegma and lightness-removing column overhead extraction liquid and then send processing outside as industrial trichlorosilane.The continuous circulation use of reduction tai gas of rectifying phlegma and hydrogenation tai gas of rectifying phlegma can cause the B impurity enriched and have a strong impact on the quality of polysilicon product, in recycling process, also can cause simultaneously and slightly heat up in a steamer tail gas and the increase of synthetic tai gas of rectifying quantity discharged, cause the vent gas treatment cost to increase, process the processing power of loading even exceeding system, in treating processes, also have huge potential safety hazard and inevitably environmental pollution; The industry trichlorosilane is sent the waste that processing not only causes raw material trichlorosilane outside, has increased production cost, owing to wherein containing 25% left and right sides dichloro-dihydro silicon, gives to store and transport and bring very large potential safety hazard.
Summary of the invention
Goal of the invention of the present utility model is: for the problem of above-mentioned existence, a kind of polysilicon rectifying system device for recovering tail gas is provided, this device can be to the reduction tai gas of rectifying phlegma that recycles, hydrogenation tai gas of rectifying phlegma and slightly heat up in a steamer tail gas condensing liquid as what industrial trichlorosilane was sent processing outside, synthetic tai gas of rectifying phlegma and lightness-removing column overhead extraction liquid are processed, remove dichloro-dihydro silicon wherein, hydrogenchloride, the light constituent impurity such as the low-boiler of B are to satisfy the processing requirement that again puts into production, to reduce the use of raw material continuous circulation to the disadvantageous effect of system's quality of production, reduce distillation system vent gas treatment amount, reduce simultaneously industrial trichlorosilane and send the expense of processing outside, improve raw material availability, environmental contamination reduction reduces potential safety hazard.
The technical solution adopted in the utility model is as follows:
A kind of polysilicon rectifying system device for recovering tail gas mainly comprises condenser group, tank battery and rectifying tower; Each exhaust emission pipeline of the import of described condenser group and distillation system is connected, and the outlet of condenser group is connected with tank battery, and the outlet of described tank battery is connected with the opening for feed of rectifying tower, also is provided with pump on the connecting tube of described tank battery and rectifying tower.
Further, described condenser group comprises mutually the first condenser, the second condenser, the 3rd condenser and the 4th condenser arranged side by side.
Described tank battery comprises mutually the first storage tank and the second storage tank arranged side by side.
Further, described the first condenser be connected the outlet of condenser and all be connected with the first storage tank, the outlet of described the 3rd condenser and the 4th condenser all is connected with the second storage tank.
Described the first storage tank also is connected with the top extraction pipeline of lightness-removing column in the distillation system.
Further, the outlet conduit of described the first tank bottom is provided with the first control valve, and the outlet conduit of described the second tank bottom is provided with the second control valve.
Be provided with the 3rd control valve on the top exhaust pipe of described rectifying tower, be provided with the 4th control valve on the top extraction pipeline, be provided with the 5th control valve on the bottom extraction pipeline.
Described the first condenser, the second condenser, the 3rd condenser and the 4th condenser are the vertical array tubular condenser, and described rectifying tower is sieve-tray tower.
In technique scheme, described condenser group is carried out condensation to the tail gas of each exhaust emissions point in the distillation system respectively, the chlorosilane liquid produced that condensation obtains enters in the tank battery and stores, by pump the chlorosilane liquid produced in the tank battery is sent into again and carried out rectification process in the rectifying tower, obtain qualified recovery chlorosilane.
Each condenser of condenser group can be corresponding one by one with exhaust port in the distillation system, the first condenser is connected with the tail gas that slightly heats up in a steamer in the distillation system, the second condenser is connected with synthetic tai gas of rectifying in the distillation system, the 3rd condenser is connected with reduction tai gas of rectifying in the distillation system, the 4th condenser is connected with synthetic tai gas of rectifying in the distillation system, carry out respectively the individual curing of tail gas condensing, the condensation parameter of being convenient to optimize each condenser reaches best condensation effect; The first storage tank and the second storage tank have been realized the chlorosilane classification recovery that the condenser group reclaims in the polysilicon rectifying system device for recovering tail gas and have been processed, simultaneously the first storage tank is introduced in the top extraction of lightness-removing column in the distillation system, the recovery chlorosilane that needed in the past to recycle and the industrial trichlorosilane of sending processing outside are separately stored, be convenient to rectifying tower and respectively two class raw materials carried out individual curing, improved the handiness of rectifying quality and production operation technique, also can practical situation only adopt one or more storage tanks to store the material that each exhaust port of distillation system reclaims, the condenser number also can be done increase and decrease according to the actual demand of producing in the condenser group, and the tail gas in the different rectifying tower shares a condenser and carries out condensation.
Described the first control valve and the second control valve are convenient to control respectively the discharging of each storage tank, described the 3rd control valve, the 4th control valve and the 5th control valve are that rectifying tower is realized operation control, the 4th control valve generally is normal off status aborning, it is the extraction operation that cat head is not carried out in the rectifying tower total reflux, the light constituent impurity such as low-boiler of dichloro-dihydro silicon, hydrogenchloride and B in the rectifying tower charging enter the processing of vent gas treatment operation by described the 3rd control valve exhaust port of overhead condenser, and the tower reactor of rectifying tower is carried out the extraction of product.
In sum, owing to having adopted technique scheme, the beneficial effects of the utility model are:
Polysilicon rectifying of the present utility model system device for recovering tail gas, can be to the reduction tai gas of rectifying phlegma that recycles, hydrogenation tai gas of rectifying phlegma and slightly heat up in a steamer tail gas condensing liquid as what industrial trichlorosilane was sent processing outside, synthetic tai gas of rectifying phlegma and lightness-removing column overhead extraction liquid are processed, remove dichloro-dihydro silicon wherein, hydrogenchloride, the light constituent impurity such as the low-boiler of B, improved the quality of the recovery chlorosilane that recycles, guaranteed the quality of production of polysilicon, reduced distillation system vent gas treatment amount, improved simultaneously raw material availability, save industrial trichlorosilane and sent the expense of processing outside, reduced environmental pollution and potential safety hazard.
Description of drawings
Fig. 1 is connection diagram of the present utility model.
Mark among the figure: 1-the first condenser, 2-the second condenser, 3-the 3rd condenser, 4-the 4th condenser, 5-the first storage tank, 6-the second storage tank, 7-the first control valve, 8-the second control valve, 9-pump, 10-rectifying tower, 11-the 3rd control valve, 12-the 4th control valve, 13-the 5th control valve.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in detail.
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explaining the utility model, and be not used in restriction the utility model.
Embodiment
A kind of polysilicon rectifying system device for recovering tail gas, as shown in Figure 1, main condenser group is mainly by the condenser group, tank battery and rectifying tower form, described condenser group is mainly by the first condenser 1, the second condenser 2, the 3rd condenser 3 and the 4th condenser 4 condensers arranged side by side form, described the first condenser 1 with slightly heat up in a steamer exhaust emission pipeline and be connected, described the second condenser 2 is connected with the synthetic tai gas of rectifying discharge tube of distillation system, described the 3rd condenser 3 is connected with the protocercal tail tai gas of rectifying discharge tube of going back of distillation system, and described the 4th condenser 4 is connected with the hydrogenation tai gas of rectifying discharge tube of distillation system; Described tank battery mainly is comprised of the first storage tank 5 arranged side by side and the second storage tank 6; The outlet of described the first condenser 1 and the second condenser 2 is connected with the first storage tank 5, the outlet of described the 3rd condenser 3 and the 4th condenser 4 is connected with the second storage tank 6, the top extraction pipeline of lightness-removing column is connected with a storage tank 5 in the distillation system, the outlet conduit of the first storage tank 5 bottoms is provided with the first control valve 7, the outlet conduit of the second storage tank 6 bottoms is provided with the second control valve 8, the outlet conduit of the first storage tank 5 and the second storage tank 6 is connected with the centre inlet pipeline of rectifying tower 10 by three-way pipeline, and also is provided with pump 9 on the intake header road of rectifying tower 10; The overhead condenser exhaust pipe of described rectifying tower 10 links to each other with the tail gas raffinate treatment system of production system, and also be provided with the 3rd control valve 11 on this connecting tube, be provided with the 4th control valve 12 on the overhead extraction pipeline, be provided with the 5th control valve 13 on the tower reactor extraction pipeline, extraction is product after reclaim purifying on described the 5th control valve 13 pipelines, as the storage tank that slightly heats up in a steamer system's raw material and be sent to the system of slightly heating up in a steamer; Polysilicon rectifying of the present utility model system device for recovering tail gas, the valves and fittings that also comprises necessity required in the pipeline, described the first condenser 1, the second condenser 2, the 3rd condenser 3 and the 4th condenser 4 all adopt the vertical array tubular condenser, and described rectifying tower 10 is sieve-tray tower.
Polysilicon rectifying of the present utility model system device for recovering tail gas, simple in structure, unit operation is reliable, can be to the reduction tai gas of rectifying phlegma that recycles, hydrogenation tai gas of rectifying phlegma and slightly heat up in a steamer tail gas condensing liquid as what industrial trichlorosilane was sent processing outside, synthetic tai gas of rectifying phlegma and lightness-removing column overhead extraction liquid are processed, remove dichloro-dihydro silicon wherein, the light constituent impurity such as low-boiler of hydrogenchloride and B, improved the quality of the recovery chlorosilane that recycles, guaranteed the quality of production of polysilicon, reduced distillation system vent gas treatment amount, improved simultaneously raw material availability, save industrial trichlorosilane and sent the expense of processing outside, reduced environmental pollution and potential safety hazard.
The above only is preferred embodiment of the present utility model; not in order to limit the utility model; all any modifications of within spirit of the present utility model and principle, doing, be equal to and replace and improvement etc., all should be included within the protection domain of the present utility model.
Claims (8)
1. a polysilicon rectifying system device for recovering tail gas is characterized in that: mainly comprise condenser group, tank battery and rectifying tower (10); Each exhaust emission pipeline of the import of described condenser group and distillation system is connected, the outlet of condenser group is connected with tank battery, the outlet of described tank battery is connected with the opening for feed of rectifying tower (10), also is provided with pump (9) on the connecting tube of described tank battery and rectifying tower (10).
2. polysilicon rectifying as claimed in claim 1 system device for recovering tail gas, it is characterized in that: described condenser group comprises mutually the first condenser (1), the second condenser (2), the 3rd condenser (3) and the 4th condenser (4) arranged side by side.
3. polysilicon rectifying as claimed in claim 2 system device for recovering tail gas, it is characterized in that: described tank battery comprises mutually the first storage tank (5) and the second storage tank (6) arranged side by side.
4. polysilicon rectifying as claimed in claim 3 system device for recovering tail gas, it is characterized in that: described the first condenser (1) be connected the outlet of condenser (2) and all be connected with the first storage tank (5), the outlet of described the 3rd condenser (3) and the 4th condenser (4) all is connected with the second storage tank (6).
5. polysilicon rectifying as claimed in claim 4 system device for recovering tail gas, it is characterized in that: described the first storage tank (5) also is connected with the top extraction pipeline of lightness-removing column in the distillation system.
6. such as each described polysilicon rectifying system device for recovering tail gas of claim 3 to 5, it is characterized in that: the outlet conduit of described the first storage tank (5) bottom is provided with the first control valve (7), and the outlet conduit of described the second storage tank (6) bottom is provided with the second control valve (8).
7. such as each described polysilicon rectifying system device for recovering tail gas of claim 1 to 5, it is characterized in that: be provided with the 3rd control valve (11) on the top exhaust pipe of described rectifying tower (10), be provided with the 4th control valve (12) on the top extraction pipeline, be provided with the 5th control valve (13) on the bottom extraction pipeline.
8. such as each described polysilicon rectifying system device for recovering tail gas of claim 2 to 5, it is characterized in that: described the first condenser (1), the second condenser (2), the 3rd condenser (3) and the 4th condenser (4) are the vertical array tubular condenser, and described rectifying tower (10) is sieve-tray tower.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220395277 CN202729813U (en) | 2012-08-10 | 2012-08-10 | Exhaust gas recycling device of polysilicon distillation system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220395277 CN202729813U (en) | 2012-08-10 | 2012-08-10 | Exhaust gas recycling device of polysilicon distillation system |
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| CN202729813U true CN202729813U (en) | 2013-02-13 |
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| CN 201220395277 Expired - Fee Related CN202729813U (en) | 2012-08-10 | 2012-08-10 | Exhaust gas recycling device of polysilicon distillation system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103550948A (en) * | 2013-11-05 | 2014-02-05 | 昆明冶研新材料股份有限公司 | Method for processing waste gas and waste liquor in chlorosilane distillation process |
-
2012
- 2012-08-10 CN CN 201220395277 patent/CN202729813U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103550948A (en) * | 2013-11-05 | 2014-02-05 | 昆明冶研新材料股份有限公司 | Method for processing waste gas and waste liquor in chlorosilane distillation process |
| CN103550948B (en) * | 2013-11-05 | 2015-08-12 | 昆明冶研新材料股份有限公司 | To the method that waste gas and the waste liquid of chlorosilane rectification and purification operation process |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130213 Termination date: 20140810 |
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| EXPY | Termination of patent right or utility model |