CN201899898U - Exhaust gas treatment device for synthesis of trichlorosilane - Google Patents
Exhaust gas treatment device for synthesis of trichlorosilane Download PDFInfo
- Publication number
- CN201899898U CN201899898U CN2010206537949U CN201020653794U CN201899898U CN 201899898 U CN201899898 U CN 201899898U CN 2010206537949 U CN2010206537949 U CN 2010206537949U CN 201020653794 U CN201020653794 U CN 201020653794U CN 201899898 U CN201899898 U CN 201899898U
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- absorption tower
- condenser
- exhaust gas
- trichlorosilane
- circulation
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Abstract
The utility model relates to an exhaust gas treatment device for synthesis of trichlorosilane, which comprises a diaphragm compressor, a rear water-cooling condenser, a rear cryogenic condenser, a circulating absorption tower and a falling film absorption tower connected in series through a pipeline. The diaphragm compressor is provided with an exhaust gas feeding port, and the falling film absorption tower is provided with a discharging port and an emptying port. During operation, exhaust gases produced in a trichlorosilane synthesis section and a trichlorosilane distillation section are pressurized and compressed by the diaphragm compressor, pass through a three-stage absorption system with the water-cooling condenser, the cryogenic condenser and the circulating absorption tower in sequence so as to recycle chlorosilane, and then pass through the two-stage falling film absorption tower to recycle hydrogen chloride after flowing out of the circulating absorption tower, and hydrochloric acid with a concentration of 30 percent can be prepared. Basically hydrogen is left after the exhaust gases are processed by the falling film absorption tower, only a small amount of nitrogen is doped, and the exhaust gases can be directly emptied. By adopting the exhaust gas treatment device, 99.5 percent of chlorosilane and hydrogen chloride can be recycled. Therefore, the exhaust gas treatment device not only realizes recycling of most of the chlorosilane and hydrogen chloride in the exhaust gases, but also facilitates environmental protection.
Description
Technical field
The utility model relates to the exhaust gas processing device of a kind of trichlorosilane synthesizing section and trichlorosilane fractionation workshop section.
Background technology
Contain 5.4% chlorosilane, 30% hydrogen chloride gas, 0.2% nitrogen and 64.2% hydrogen in the tail gas of trichlorosilane synthesizing section and trichlorosilane fractionation workshop section, other gas comprises 0.2%.The direct emptying of this part tail gas will pollute environment, therefore is necessary to design a kind of exhaust gas processing device.
Summary of the invention
The purpose of this utility model is at above-mentioned present situation, aims to provide a kind of most of chlorosilane and hydrogen chloride that can absorb in the tail gas, utilizes, again the exhaust gas processing device of environmentally friendly synthesizing trichlorosilane again.
The implementation of the utility model purpose is, the exhaust gas processing device of synthesizing trichlorosilane, form by deep cooling condenser, circulation absorption tower and film-falling absorption tower behind water-cooled condenser, the machine before the diaphragm type compressor that is connected in series with pipeline, the machine, diaphragm type compressor has the tail gas charging aperture, film-falling absorption tower has discharging opening and drain
There are upper end end socket, lower end end socket in the tower body upper and lower part of deep cooling condenser behind the machine, on the end socket of upper end gas feed, gas vent are arranged, establish condenser in the tower body, there are condensation-water drain, condensed water import in the condenser upper and lower part, under the end socket of lower end liquid outlet is arranged, be provided with dividing plate in the middle of upper end end socket and the tower body, it is arranged evenly that the cooling pipe in the condenser is pressed equilateral triangle
Connect the circulation tourie under the absorption tower on circulation absorption tower, circulation tourie one side has the circulating absorption solution outlet, the circulating absorption solution import, one side connects canned motor pump, canned motor pump links to each other with condenser by pipeline, condenser advances the absorption tower mouth of pipe with the condenser on absorption tower and links to each other, the connecting pipe termination has shower nozzle, air inlet is arranged at the bottom, absorption tower, in the ring intalox packing layer is arranged, between the ring intalox packing layer redistributor is arranged, the vapor riser at top, absorption tower, the liquid return tube of upper lateral part links to each other with demister, and silicone oil dipping mineral wool is arranged in the demister, gas vent is arranged at the top, and a plurality of holes that distribute are again arranged on the distribution grid of redistributor.
During the utility model work, the tail gas of trichlorosilane synthesizing section and trichlorosilane fractionation workshop section reclaims chlorosilane by water-cooled condenser, deep cooling condenser, the three grades of absorption systems in circulation absorption tower successively after diaphragm type compressor pressurization compression is handled.Tail gas after the circulation absorption tower absorbs is made 30% hydrochloric acid through the hydrogen chloride in the two-stage film-falling absorption tower recovery tail gas.Tail gas after film-falling absorption tower absorbs is hydrogen substantially, wherein has only a spot of nitrogen, directly emptying.
The utility model can reclaim 99.5% chlorosilane and hydrogen chloride.
Description of drawings
Fig. 1 is the utility model structural representation,
Fig. 2 is a deep cooling condenser structure schematic diagram behind the machine,
Fig. 3 is the condenser structure cut-away view in the deep cooling condenser behind the machine.
Fig. 4 is a circulation absorption tower structural representation,
Fig. 5 is a circulation absorption tower housing structure schematic diagram.
The specific embodiment
With reference to Fig. 1, the utility model is by forming with deep cooling condenser 4, circulation absorption tower 5 and film-falling absorption tower 6 behind water-cooled condenser 3, the machine before the diaphragm type compressor 1 of pipeline serial connection, the machine, diaphragm type compressor has tail gas charging aperture 2, and film-falling absorption tower has discharging opening 7 and drain 8.
Wherein water-cooled condenser 3 and film-falling absorption tower 6 adopt equipment therefor in the present production line behind diaphragm type compressor 1, the machine.
The device of the applicant's development is adopted on deep cooling condenser 4 and circulation absorption tower 5 behind the machine.
With reference to Fig. 2, there are upper end end socket 14, lower end end socket 10 in the tower body top and the bottom of deep cooling condenser 4 behind the machine, on the end socket 14 of upper end gas feed 18, gas vent 15 are arranged, establish condenser 12 in the tower body, there are condensation-water drain 13, condensed water import 16 in the condenser top and the bottom, the lower end end socket has liquid outlet 9 10 times, is provided with dividing plate 17 in the middle of upper end end socket 14 and the tower body.
With reference to Fig. 3, it is arranged evenly that the cooling pipe 12 in the condenser is pressed equilateral triangle.
With reference to Fig. 4,5, the 22 times companies in absorption tower in the circulation absorption tower 5 tourie 20 that circulates, circulation tourie 20 1 sides have circulating absorption solution outlet 9, circulating absorption solution import 26, one side connects canned motor pump 19, canned motor pump 19 links to each other with circulation absorptive condenser 21 by pipeline, circulation absorptive condenser 21 enters the mouth of pipe 33 places in absorption tower by pipeline at the circulation absorptive condenser and is connected with absorption tower 22, the connecting pipe top is connected to shower nozzle 24, absorption tower air inlet 27 is arranged at 22 bottoms, absorption tower, in ring intalox packing layer 23 is arranged, redistributor 32 is arranged between the ring intalox packing layer 23, the vapor riser mouth of pipe 35 at 22 tops, absorption tower, the liquid return tube mouth of pipe 34 of upper lateral part is respectively by vapor riser 25, liquid return tube 28 links to each other with demister 29, silicone oil dipping mineral wool 30 is arranged in the demister, and circulation absorption tower gas vent 31 is arranged at the top.A plurality of holes that distribute are again arranged on the distribution grid of redistributor.
During the utility model work, the tail gas of trichlorosilane synthesizing section and trichlorosilane fractionation workshop section is after diaphragm type compressor pressurization compression is handled, and successively by water-cooled condenser condensation behind the machine, deep cooling condenser deep cooling coagulates behind the machine, the circulation absorption tower absorbs, and reclaims chlorosilane.Tail gas after the circulation absorption tower absorbs is made 30% hydrochloric acid through the hydrogen chloride in the two-stage film-falling absorption tower recovery tail gas.Tail gas after film-falling absorption tower absorbs is hydrogen substantially, wherein has only a spot of nitrogen, directly emptying.
According to the actual production operation, the utility model can reclaim 99.5% chlorosilane and hydrogen chloride.
The pressure of diaphragm type compressor: 0.5～0.8Mpa,
Water-cooled condenser condensation behind the machine, deep cooling condenser deep cooling coagulates behind the machine, condensation temperature :-30 ℃～-25 ℃,
Circulation absorption tower temperature :-25 ℃～-20 ℃, pressure: 0.5～0.55Mpa
The film-falling absorption tower temperature :-15 ℃～0 ℃, pressure: 0.1～0.25Mpa
Adopt the utility model, reclaimed most of chlorosilane and the hydrogen chloride in the tail gas on the one hand, utilize again; Tail gas after handling on the other hand reaches environmental requirement, and directly emptying has reduced the environmental protection pressure of enterprise, helps environmental protection.
Claims (1)
1. the exhaust gas processing device of synthesizing trichlorosilane, it is characterized in that forming by deep cooling condenser, circulation absorption tower and film-falling absorption tower behind water-cooled condenser, the machine before the diaphragm type compressor that is connected in series with pipeline, the machine, diaphragm type compressor has the tail gas charging aperture, and film-falling absorption tower has discharging opening and drain
There are upper end end socket, lower end end socket in the tower body upper and lower part of deep cooling condenser behind the machine, on the end socket of upper end gas feed, gas vent are arranged, establish condenser in the tower body, there are condensation-water drain, condensed water import in the condenser upper and lower part, under the end socket of lower end liquid outlet is arranged, be provided with dividing plate in the middle of upper end end socket and the tower body, it is arranged evenly that the cooling pipe in the condenser is pressed equilateral triangle
Connect the circulation tourie under the absorption tower on circulation absorption tower, circulation tourie one side has the circulating absorption solution outlet, the circulating absorption solution import, one side connects canned motor pump, canned motor pump links to each other with condenser by pipeline, condenser advances the absorption tower mouth of pipe with the condenser on absorption tower and links to each other, the connecting pipe termination has shower nozzle, air inlet is arranged at the bottom, absorption tower, in the ring intalox packing layer is arranged, between the ring intalox packing layer redistributor is arranged, the vapor riser at top, absorption tower, the liquid return tube of upper lateral part links to each other with demister, and silicone oil dipping mineral wool is arranged in the demister, gas vent is arranged at the top, and a plurality of holes that distribute are again arranged on the distribution grid of redistributor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206537949U CN201899898U (en) | 2010-12-08 | 2010-12-08 | Exhaust gas treatment device for synthesis of trichlorosilane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206537949U CN201899898U (en) | 2010-12-08 | 2010-12-08 | Exhaust gas treatment device for synthesis of trichlorosilane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201899898U true CN201899898U (en) | 2011-07-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206537949U Expired - Fee Related CN201899898U (en) | 2010-12-08 | 2010-12-08 | Exhaust gas treatment device for synthesis of trichlorosilane |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201899898U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102101000A (en) * | 2010-12-08 | 2011-06-22 | 湖北江钻天祥化工有限公司 | Process and device for treating tail gas during producing trichlorosilane |
| CN103331076A (en) * | 2012-08-06 | 2013-10-02 | 河南省中原大化集团有限责任公司 | A mass and heat transfer device combining an absorbing tower and a heat exchanger and a preparation method of the mass and heat transfer device |
| CN104740964A (en) * | 2015-03-05 | 2015-07-01 | 鲁西化工集团股份有限公司硅化工分公司 | Recycling system containing 'Si-O' link body and recycling method |
| US11612869B2 (en) | 2017-11-20 | 2023-03-28 | Tokuyama Corporation | Production method for trichlorosilane, and pipe |
-
2010
- 2010-12-08 CN CN2010206537949U patent/CN201899898U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102101000A (en) * | 2010-12-08 | 2011-06-22 | 湖北江钻天祥化工有限公司 | Process and device for treating tail gas during producing trichlorosilane |
| CN103331076A (en) * | 2012-08-06 | 2013-10-02 | 河南省中原大化集团有限责任公司 | A mass and heat transfer device combining an absorbing tower and a heat exchanger and a preparation method of the mass and heat transfer device |
| CN103331076B (en) * | 2012-08-06 | 2015-11-18 | 河南省中原大化集团有限责任公司 | The mass-and heat-transfer device that a kind of absorption tower and heat exchanger unite two into one and preparation method |
| CN104740964A (en) * | 2015-03-05 | 2015-07-01 | 鲁西化工集团股份有限公司硅化工分公司 | Recycling system containing 'Si-O' link body and recycling method |
| US11612869B2 (en) | 2017-11-20 | 2023-03-28 | Tokuyama Corporation | Production method for trichlorosilane, and pipe |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110720 Termination date: 20131208 |