CN207088225U - Dual drive silicon single crystal rod double side cutting machine - Google Patents

Abstract

A kind of dual drive silicon single crystal rod double side cutting machine, including annular diamond fretsaw, scroll saw travelling mechanism, feed mechanism, frame, it is characterized by：Scroll saw travelling mechanism is made up of drive mechanism, follower, rocking arm strainer, and drive mechanism includes driving wheel, drive shaft, servomotor, motor connection seat, and two sets of identical drive mechanisms have been mounted opposite in frame, have there is two sets of followers；Using integral type two-wire rocking arm strainer, it is made up of two weights, rocking lever, power transmission shaft, tensioning wheel assembly, tensioning rocking arm, two power transmission shafts are nested together by bearing, free to rotate each other, different weights drives respective tensioning wheel assembly to swing, non-interference.The utility model uses two groups of annular diamond fretsaw travelling mechanisms, has the efficiency of more than 2 times of about 6 times of grinding machine or common saw blade cutting equipment, and manufacturing cost increases less than 10% relative to similar devices.The utility model is compact-sized, and processing synchronism is easily controlled.

Description

Dual drive silicon single crystal rod double side cutting machine

Technical field

The utility model belongs to the cutting equipment of hard brittle material, specifically a kind of diamond fretsaw cutting equipment.

Background technology

Monocrystalline silicon body is the crystal with basic complete lattice structure, and different directions has different property, is one The good semiconducting material of kind, it is widely used in fields such as manufacture semiconductor devices, solar cells.The polysilicon of high-purity exists Be drawn into ingot casting in single crystal growing furnace, then to ingot casting evolution, block after form the bar of all size.Silicon rod chamfering refers to after cutting Silicon rod sharpened edge by processing be trimmed to arc angle or oblique angle, the purpose is to eliminate edge cuts stress, prevent edge break And particle comes off.

It is as follows to the chamfering method of single-crystal silicon bar materials：

1st, using grinding machine chamfering：

Using skive, 45 ° of corner angle quadriplanar to single-crystal silicon bar materials cuboid are processed with method for grinding.With grinding Method is processed, and surface accuracy is high, but low production efficiency, waste material can not utilize, and waste material is easily made after incorporating cutting fluid to environment Into pollution.

2 are cut using horizontal, vertical ring diamond single line saw equipment：

1.）Diamond fretsaw linear velocity about 30m ∕ seconds~40m ∕ seconds of annular diamond wire saw equipment, cutting efficiency is high, table Face quality is good, and waste material being capable of 100% utilization.Its scroll saw travelling mechanism can only all run a scroll saw.For silicon single crystal rod this four The material that side will process, to be loaded and unloaded again after one side is processed, not only increase workload, long processing time, and respectively The morpheme work difference precision of individual machined surface is low.

The content of the invention：

In view of the shortcomings of the prior art, the purpose of this utility model is that providing one kind can be used for processing single-crystal silicon bar materials rib Side, rib, crest line cutting, silicon single crystal rod double side cutting machine high in machining efficiency, simple in construction.

Technical scheme is a kind of dual drive silicon single crystal rod double side cutting machine used by the utility model, including annular Buddha's warrior attendant Stone line saw, scroll saw travelling mechanism, feed mechanism, frame, it is characterized by the frame driven wheeling supporting frame, frame ground under Seat, chassis panel, train installation side plate, Workbench base, upper driven pulley supporting framework are into the feed mechanism, by carrying rod Expect that the crystal bar bearing platform of workpiece, crystal bar bearing nylon sheet, line slideway, rack, sliding block are formed, with fastener by crystal bar bearing Buddhist nun Imperial plate, crystal bar bearing platform are fixed on feeding workbench, and entering for whole feeding workbench is driven by feeding workbench motor Give, the scroll saw travelling mechanism is made up of drive mechanism, follower, rocking arm strainer, and the drive mechanism includes two sets Driving wheel, drive shaft, servomotor, motor connection seat, servomotor is connected by motor connection seat with frame, and passes through shaft coupling Device is driven, and installing plate on the right side of frame side installing plate and frame is respectively fixed with above frame, and driving wheel is positioned at drive On driving wheel centring ring, coupling sleeve is inserted in drive shaft seam, and screw fastens through wheel gland, is kept off outside bearing, bearing block, bearing Circle, bearing inner shield ring, bearing internal gland, bearing outer press cover form slewing equipment, and servomotor passes through motor connection seat and frame Side installing plate is connected, and is driven by shaft coupling, and another set of identical drive mechanism is then arranged on right frame side installing plate On；Equipped with two sets of followers；The rocking arm strainer is two-wire rocking arm strainer, by two weights, rocking lever A, is shaken Armed lever B, power transmission shaft A, power transmission shaft B, two tensioning wheel assemblies, tensioning rocking arm B, tensioning rocking arm A are formed, and two weights pass through respectively Hinge couples with rocking lever A, rocking lever B, and rocking lever A is connected with power transmission shaft A, and the power transmission shaft A other end is fixed with tensioning rocking arm A, rocking lever B are connected with power transmission shaft B, and the power transmission shaft B other end, which is fixed with, is tensioned rocking arm B, and power transmission shaft B is being driven by bearing holder (housing, cover) Outside axle A, weight passes to tensioning rocking arm A by power transmission shaft A to torsion caused by rocking lever A and drives one group of tensioning wheel assembly to put Dynamic, another weight passes to tensioning rocking arm B by power transmission shaft B to torsion caused by rocking lever B and drives another group of tensioning wheel group Part is swung.

Often set follower has two driven wheel assemblys, and the axial connecting line of two driven pulleys is vertical with frame surface.

It is described to drive the feeding of whole feeding workbench to refer to by feeding workbench motor：Feeding workbench driving electricity Machine band moving gear, is engaged by gear and rack, and driving feeding workbench is in line slideway upper feeding.

It is described to drive the feeding of whole feeding workbench to refer to by feeding workbench motor：Feeding workbench driving electricity Machine and diaphragm coupling band moving gear, rack, and feeding, or ball screw, nut body reality are implemented by line slideway, sliding block Apply feeding.

The utility model uses two groups of annular diamond fretsaw travelling mechanisms, and feeding workbench drives charge bar primary feed, Complete the excision to single-crystal silicon bar materials two edges seamed edge, rib, crest line simultaneously by two annular diamond fretsaws, there is grinding machine about 6 times of cutting efficiency, or the efficiency of more than 2 times of common annular diamond fretsaw cutting equipment, the utility model is sent on part Material mechanism is maintained the original state, and frame is slightly changed on scroll saw travelling mechanism fixed structure, increase only a set of scroll saw travelling mechanism, And the rocking arm strainer in scroll saw travelling mechanism is integral type, hang two sets of tensioning wheels on a set of axle, manufacturing cost relative to The increase of similar single rope diamond fretsaw cutting equipment is less than 10%, has obviously economic benefit.The utility model is only It is to add a right frame side installing plate again simply in frame, a set of driving wheel is installed, small, processing technology is changed to prior art Simply, while rocking arm strainer is also integral two-wire, and two power transmission shafts are set in together by bearing, each other can be free Rotating, different weights drives respective tensioning wheel assembly to swing, non-interference, compact-sized, is advantageous to the miniaturization of equipment, Synchronism when processing simultaneously is easily controlled.

Brief description of the drawings

Fig. 1 is structural representation of the present utility model

Fig. 2 is the fundamental diagram of scroll saw travelling mechanism

Fig. 3 is two-wire rocking arm strainer structural representation

Fig. 4 is the structural representation of drive mechanism

Wherein：The driving wheel 114 of 101 servomotor, 102 motor connection seat, 107 shaft coupling, 110 bearing, 111 coupling sleeve 113 The drive shaft 130 of screw 116, driving wheel cover 140, the driven wheel assembly 4 of 3 follower of right 2 drive mechanism of frame side installing plate 302 The rocking lever B404 tensioning wheel assemblies 405 of 401 weight of rocking arm strainer, 402 rocking lever A 403 tensioning rocking arm B 406 is tensioned rocking arm The straight line of 501 feeding workbench motor of A 407 power transmission shaft A, 408 power transmission shaft B, 410 flat key, 411 nut, 412 bearings 502 is led Driven wheeling supporting frame 902 under the monocrystalline silicon material 901 of 503 rack of rail, 504 sliding block, 505 crystal bar bearing platform, 506 crystal bar bearing nylon sheet 8 Driven wheeling supporting frame on the Workbench base 906 of 903 chassis panel of gantry base, 904 train installation side plate 905.

Embodiment：

The utility model is described in detail with reference to view, cited embodiment can make this professional skill Art personnel more understand the utility model, but do not limit the utility model in any form

As Figure 1-4, a kind of dual drive silicon single crystal rod double side cutting machine, including the operation of annular diamond fretsaw, scroll saw Mechanism, feed mechanism, frame, the frame 9 driven wheeling supporting frame 901, gantry base 902, chassis panel 903, train under Installation side plate 904, Workbench base 905, upper driven wheeling supporting frame 906 are formed, the feed mechanism, by carrying bar work Crystal bar bearing platform 505, crystal bar bearing nylon sheet 506, line slideway 502, rack 503, sliding block 504 are formed, with fastener by crystalline substance Rod bearing nylon sheet 506, crystal bar bearing platform 505 are fixed on feeding workbench, are driven by feeding workbench motor 501 Gear, engaged by gear and rack 503, drive whole feeding workbench in the upper feeding of line slideway 502.

The scroll saw travelling mechanism is made up of drive mechanism 2, follower 3, rocking arm strainer 4, and drive mechanism 2 includes Two sets of driving wheels, drive shaft, servomotor, motor connection seat, servomotor 101 pass through motor connection seat 102 and the phase of frame 1 Even, and it is driven by shaft coupling 107, is respectively fixed with the right side of frame side installing plate 103 and frame and pacifies in the top of frame 1 Loading board 140, driving wheel 113 are positioned on driving wheel centring ring 112, and coupling sleeve 111 is inserted in the seam of drive shaft 116, and screw 114 is worn Cross wheel gland 130 to fasten, bearing 110, bearing block 104, bearing outer back-up ring 105, bearing inner shield ring 106, bearing internal gland 108th, bearing outer press cover 109 forms slewing equipment, and servomotor 101 is connected by motor connection seat 102 with frame side installing plate, And be driven by shaft coupling 107, another set of identical drive mechanism is then arranged on right frame side installing plate 140；It is furnished with Two sets of followers 3；The rocking arm strainer 4 is two-wire rocking arm strainer, by two weights 401, rocking lever A402, is shaken Armed lever B403, power transmission shaft A407, power transmission shaft B408, two tensioning wheel assemblies 404, tensioning rocking arm B405, tensioning rocking arm A406 structures Into two weights are coupled by hinge with rocking lever A402, rocking lever B403 respectively, and rocking lever A402 and power transmission shaft A407 connects Connect, the power transmission shaft A407 other end, which is fixed with, is tensioned rocking arm A406, and rocking lever B403 is connected with power transmission shaft B408, power transmission shaft B408 The other end be fixed with tensioning rocking arm B405, power transmission shaft B408 by bearing holder (housing, cover) outside power transmission shaft A407, weight to rocking lever A produce Raw torsion passes to tensioning rocking arm A406 by power transmission shaft A407 and drives one group of counter-clockwise swing of tensioning wheel assembly 404, another Individual weight passes to tensioning rocking arm B405 by power transmission shaft B408 to torsion caused by rocking lever B403 and drives another group of tensioning wheel Component 404 is swung.

Often set follower 3 has two driven wheel assemblys 302, and axial connecting line and the frame surface of two driven pulleys hang down Directly.Remaining not described part is same as the prior art.

The table feed by feeding workbench motor 501 and diaphragm coupling band moving gear, rack 503, And feeding is implemented by line slideway 502, sliding block 504, gear, rackwork can also be changed into ball screw, nut body Implement feeding.

The course of work of the utility model new types of cutting devices：

Annular diamond fretsaw 3 is installed on scroll saw travelling mechanism, applies appropriate tensile strength by rocking arm strainer 4, is driven Dynamic motor 101 driving driving wheel operating, drives scroll saw travelling mechanism and held stationary operation by shaft coupling.Monocrystalline silicon material 8 is pacified Loaded on feed mechanism, positioned by the gravity and frictional force caused by crystal bar bearing nylon sheet 506 of charge bar, feeding workbench drives Dynamic motor 501 rotates with moving gear, and rack 503 is fixed on motionless in frame, after wheel and rack engagement, promotes sliding block 504 to exist Slided on line slideway 502, so as to drive whole feed mechanism to do feed motion, during continuous feeding, two annular gold Diamond wire saw 2 completes the seamed edge to silicon wafer charge bar, rib, the cutting processing of crest line.After the completion of cutting, feed mechanism retracts to original Point, workpiece is removed, waste material is reclaimed, into next working cycles.

Claims (4)

1. a kind of dual drive silicon single crystal rod double side cutting machine, including annular diamond fretsaw, scroll saw travelling mechanism, feed mechanism, Frame, it is characterised in that：The frame driven wheeling supporting frame under（901）, gantry base（902）, chassis panel（903）, wheel It is installation side plate（904）, Workbench base（905）, upper driven wheeling supporting frame（906）Form, the feed mechanism, by carrying rod Expect the crystal bar bearing platform of workpiece（505）, crystal bar bearing nylon sheet（506）, line slideway（502）, rack（503）, sliding block（504） Form, with fastener by crystal bar bearing nylon sheet（506）, crystal bar bearing platform（505）It is fixed on feeding workbench, by feeding work Make platform motor（501）The feeding of whole feeding workbench is driven, the scroll saw travelling mechanism is by drive mechanism（2）, it is driven Mechanism（3）, rocking arm strainer（4）Form, the drive mechanism（2）Including two sets of driving wheels, drive shaft, servomotor, electricity Machine connection seat, servomotor（101）Pass through motor connection seat（102）With frame（1）It is connected, and passes through shaft coupling（107）Carry out Driving, in frame（1）Top be respectively fixed with frame side installing plate（103）With installing plate on the right side of frame（140）, driving wheel （113）It is positioned at driving wheel centring ring（112）On, coupling sleeve（111）It is inserted in drive shaft（116）Seam, screw（114）Through wheel Sub- gland（130）Fastening, bearing（110）, bearing block（104）, the outer back-up ring of bearing（105）, bearing inner shield ring（106）, in bearing Gland（108）, bearing outer press cover（109）Form slewing equipment, servomotor（101）Pass through motor connection seat（102）With frame Side installing plate is connected, and passes through shaft coupling（107）It is driven, another set of identical drive mechanism is then arranged on right frame side and pacified Loading board（140）On；Equipped with two sets of followers（3）；The rocking arm strainer（4）For two-wire rocking arm strainer, by two Weight（401）, rocking lever A（402）, rocking lever B（403）, power transmission shaft A（407）, power transmission shaft B（408）, two tensioning wheel assemblies （404）, tensioning rocking arm B（405）, tensioning rocking arm A（406）Form, two weights（401）Pass through hinge and rocking lever A respectively （402）, rocking lever B（403）Connection, rocking lever A（402）With power transmission shaft A（407）Connection, power transmission shaft A（407）The other end consolidate Surely there is tensioning rocking arm A（406）, rocking lever B（403）With power transmission shaft B（408）Connection, power transmission shaft B（408）The other end be fixed with It is tensioned rocking arm B（405）, power transmission shaft B（408）By bearing holder (housing, cover) in power transmission shaft A（407）Outside, weight（401）To rocking lever A（402） Caused torsion passes through power transmission shaft A（407）Pass to tensioning rocking arm A（406）Drive one group of tensioning wheel assembly（404）Swing, be another One weight（401）To rocking lever B（403）Caused torsion passes through power transmission shaft B（408）Pass to tensioning rocking arm B（405）Drive Another group of tensioning wheel assembly（404）Swing.

A kind of 2. dual drive silicon single crystal rod double side cutting machine according to claim 1, it is characterised in that：Often cover follower （3）With two driven wheel assemblys（302）, the axial connecting line of two driven pulleys is vertical with frame surface.

A kind of 3. dual drive silicon single crystal rod double side cutting machine according to claim 1, it is characterised in that：It is described by feeding work Make platform motor（501）The feeding of whole feeding workbench is driven to refer to：Feeding workbench motor（501）Band moving teeth Wheel, passes through gear and rack（503）Engagement, driving feeding workbench is in line slideway（502）Upper feeding.

A kind of 4. dual drive silicon single crystal rod double side cutting machine according to claim 1, it is characterised in that：It is described by feeding work Make platform motor（501）The feeding of whole feeding workbench is driven to refer to：Feeding workbench motor（501）Join with diaphragm Axle device band moving gear, rack（503）, and pass through line slideway（502）, sliding block（504）Implement feeding, or ball screw, nut Mechanism for implementing is fed.