CN207050670U - A kind of Spectral Confocal measuring system caliberating device - Google Patents
A kind of Spectral Confocal measuring system caliberating device Download PDFInfo
- Publication number
- CN207050670U CN207050670U CN201720388267.1U CN201720388267U CN207050670U CN 207050670 U CN207050670 U CN 207050670U CN 201720388267 U CN201720388267 U CN 201720388267U CN 207050670 U CN207050670 U CN 207050670U
- Authority
- CN
- China
- Prior art keywords
- wavelength
- displacement
- measuring system
- spectrometer
- dispersion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003595 spectral effect Effects 0.000 title claims abstract description 55
- 238000006073 displacement reaction Methods 0.000 claims abstract description 49
- 239000006185 dispersion Substances 0.000 claims abstract description 36
- 239000013307 optical fiber Substances 0.000 claims abstract description 21
- 239000000835 fiber Substances 0.000 claims abstract description 9
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 10
- 238000000034 method Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- -1 201 Substances 0.000 description 1
- 238000005495 investment casting Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The utility model discloses a kind of Spectral Confocal measuring system caliberating device, the device includes tunable laser, double branch optical fibers, fiber exit beam, dispersion object lens, dispersion objective lens exit light beam, determinand, displacement platform, displacement transducer, spectrometer and computer.Operation wavelength of the monochromatic light as Spectral Confocal measuring system known to the wavelength that the device is sent using tunable laser, pass through the positional information of displacement sensor measured object, basis for estimation is used as using the maximum amplitude spectral signal of spectrometer, the displacement of measured object is obtained simultaneously, pixel number in the wavelength size and spectrometer of tunable laser outgoing laser beams corresponding to its peak of the spectral signal of amplitude maximum, so as to establish the relation of the relation of spectrometer pixel number and wavelength and wavelength and displacement, effectively reduce the requirement to the dispersion object lens linearity in Spectral Confocal measuring system, and improve the measurement accuracy of Spectral Confocal measuring system.
Description
Technical field
It the utility model is related to field of optical measuring technologies, and in particular to a kind of demarcation of Spectral Confocal measuring system.
Background technology
Spectral Confocal method is a kind of contactless microdisplacement measurement method based on wavelength shift modulation, has measurement accuracy
Height, speed is fast, and the factor such as texture, inclination to measured surface is insensitive, the advantages that to material without particular/special requirement, in precision manufactureing
There is important application and development prospect with the precision engineering such as super hot investment casting, micromachine, fine and superstructure technologies.
Influence Spectral Confocal the measuring precision factor it is more, such as spectrometer resolution ratio, the dispersion object lens linearity because
Element, it usually needs particular design and individually demarcation are carried out to each factor for influenceing Spectral Confocal the measuring precision, to dispersion thing
The requirement of the mirror linearity is even more very strict.But the dispersion object lens of ideal linearity degree are difficult to realize in practice, first, in light
The design phase is learned, it is difficult to preferable linear dispersion object lens be designed, secondly, even if having devised the good dispersion thing of the linearity
Mirror, due to dispersion object lens, inevitable error also becomes the dispersion object lens linearity during machining eyeglass, plated film, adjustment
Difference.Therefore how the relation of Accurate Calibration dispersion object lens wavelength and displacement, be that Spectral Confocal measuring system realizes high-acruracy survey
Important guarantee.
The utility model provides a kind of Spectral Confocal measuring system caliberating device and scaling method, is sent out with tunable laser
Operation wavelength of the monochromatic light as Spectral Confocal measuring system known to the wavelength gone out, passes through displacement sensor measured object
Positional information, using the maximum amplitude spectral signal of spectrometer as basis for estimation, while obtain the displacement, adjustable of measured object
In the wavelength size and spectrometer of humorous laser emitting laser beam corresponding to its peak of the spectral signal of amplitude maximum
Pixel number.So as to establish the relation of the relation of spectrometer pixel number and wavelength and wavelength and displacement, avoid to color
The rigors of the object lens linearity are dissipated, are advantageous to improve the measurement accuracy of Spectral Confocal measuring system.
Utility model content
The purpose of this utility model is achieved through the following technical solutions.
A kind of Spectral Confocal measuring system caliberating device, it is characterised in that the device includes tunable laser (10), double
Branch optical fiber (20), fiber exit beam (201), dispersion object lens (30), dispersion objective lens exit light beam (301), determinand (40),
Displacement platform (50), displacement transducer (60), spectrometer (70) and computer (80), wherein, tunable laser (10) outgoing
The first branch end that the laser beam of known wavelength enters double branch optical fibers (20) is coupled into double branch optical fibers (20), through double branches
Fiber exit beam (201) is obtained after optical fiber (20) always end transmission, fiber exit beam (201) obtains after dispersion object lens (30)
Dispersion objective lens exit light beam (301), dispersion objective lens exit light beam (301) by determinand (40) reflect after through dispersion object lens (30),
Always end, the second branch end of double branch optical fibers (20) enter spectrometer (70) to double branch optical fibers (20), and measured object (40) is in displacement
On platform (50), certain displacement is applied to measured object (40) by displacement platform (50), measured by displacement transducer (60) tested
The displacement of thing (40), obtained by the spectral signal of spectrometer (70) adjustable corresponding to the displacement of measured object (40)
The wavelength information of humorous laser (10) outgoing beam.
Preferably, the operating wave of the wavelength covering dispersion object lens (30) of tunable laser (10) outgoing laser beams
Section, and tunable laser (10) is only emitted the one-wavelength laser light beam of specific wavelength every time.
Preferably, the laser beam of tunable laser (10) outgoing is continuous light beam or pulsed light beam.
Preferably, when certain displacement occurs for measured object (40), tunable laser (10) will send covering color successively
The one-wavelength laser light beam of object lens (30) service band is dissipated, when there is the spectral signal of amplitude maximum on spectrometer (70), is calculated
Machine (80) while the displacement D for recording now measured object (40), the wavelength of tunable laser (10) outgoing laser beams are big
Pixel number n in small λ and spectrometer (70) corresponding to its peak of the spectral signal of amplitude maximum；Carried out according to following formula
The fitting of wavelength and displacement relation,
D=C0+C1λ+C2λ2+…+Cmλm(1) in formula, C0, C1, C2..., CmFor constant, m is polynomial highest power.
Preferably, m is determined according to the requirement of the measurement accuracy of Spectral Confocal measuring system；The regression criterion of formula (1)
Δ is
In formula, j is numbering, and its value be j=1,2 ..., k, k be survey wavelength number, if regression criterion Δ is less than specified
During value ε, then m values meet the measurement accuracy requirement of Spectral Confocal measuring system.
Preferably, established between the pixel number of the spectrometer (70) and the operation wavelength of Spectral Confocal measuring system
Corresponding relation, the wavelength information under current state is obtained by the pixel number of the spectrum peak of spectrometer (70), so as in light
Compose the demarcation that spectrometer (70) pixel number and wavelength relationship are completed in confocal measuring system.
Spectral Confocal measuring system caliberating device provided by the utility model, known to the wavelength sent with tunable laser
Operation wavelength of the monochromatic light as Spectral Confocal measuring system, by the positional information of displacement sensor measured object, with
The maximum amplitude spectral signal of spectrometer as basis for estimation, while obtain the displacement of measured object, tunable laser goes out
Penetrate laser beam wavelength size and spectrometer in pixel number corresponding to the spectral signal of amplitude maximum its peak,
So as to avoid the rigors to the dispersion object lens linearity, be advantageous to improve the measurement accuracy of Spectral Confocal measuring system.
Brief description of the drawings
By reading the detailed description of hereafter preferred embodiment, it is various other the advantages of and benefit it is common for this area
Technical staff will be clear understanding.Accompanying drawing is only used for showing the purpose of preferred embodiment, and is not considered as to this practicality
New limitation.And in whole accompanying drawing, identical part is denoted by the same reference numerals.In the accompanying drawings：
Fig. 1 is the Spectral Confocal measuring system caliberating device schematic diagram according to the utility model embodiment；
Fig. 2 is the Spectral Confocal measuring system scaling method flow chart according to the utility model embodiment；
Wherein, Spectral Confocal measuring system caliberating device：10th, tunable laser, 20, double branch optical fibers, 201, optical fiber
Outgoing beam, 30, dispersion object lens, 301, dispersion objective lens exit light beam, 40, determinand, 50, displacement platform, 60, displacement transducer,
70th, spectrometer, 80, computer.
Embodiment
Illustrative embodiments of the present utility model are more fully described below with reference to accompanying drawings.Although shown in accompanying drawing
Illustrative embodiments of the present utility model, it being understood, however, that may be realized in various forms the utility model without should be by
Embodiments set forth herein is limited.Conversely, there is provided these embodiments are to be able to be best understood from this practicality newly
Type, and the scope of the utility model can be completely communicated to those skilled in the art.
As shown in figure 1, Spectral Confocal measuring system caliberating device schematic diagram described in the utility model, tunable laser
(10), double branch optical fibers (20), fiber exit beam (201), dispersion object lens (30), dispersion objective lens exit light beam (301), to be measured
Thing (40), displacement platform (50), displacement transducer (60), spectrometer (70) and computer (80).
The laser beam of the known wavelength of tunable laser (10) outgoing enters the first branch of double branch optical fibers (20)
End is coupled into double branch optical fibers (20), obtains fiber exit beam (201) after double branch optical fibers (20) always end transmission, optical fiber goes out
Irradiating light beam (201) obtains dispersion objective lens exit light beam (301), dispersion objective lens exit light beam (301) quilt after dispersion object lens (30)
Always held through dispersion object lens (30), double branch optical fibers (20) after determinand (40) reflection, the second branch end of double branch optical fibers (20)
Into spectrometer (70), certain displacement is applied to measured object (40) by displacement platform (50), surveyed by displacement transducer (60)
The displacement of measured object (40) is measured, the displacement institute that measured object (40) can be obtained by the spectral signal of spectrometer (70) is right
The wavelength information of tunable laser (10) outgoing beam answered.By entering to the displacement corresponding to multigroup wavelength and the wavelength
Row fitting of a polynomial, the relation of Spectral Confocal measuring system wavelength and displacement can be obtained, so as to realize Spectral Confocal measuring system
Demarcation.
The wavelength of above-mentioned tunable laser (10) outgoing laser beams can cover the service band of dispersion object lens (30), and
Tunable laser (10) is only emitted the one-wavelength laser light beam of specific wavelength every time.
The laser beam of above-mentioned tunable laser (10) outgoing can be continuous light beam or pulsed light beam.
When certain displacement occurs for measured object (40), tunable laser (10) will send covering dispersion object lens successively
(30) the one-wavelength laser light beam of service band, when there is the spectral signal of amplitude maximum on spectrometer (70), computer (80)
The displacement D of record now measured object (40) simultaneously, the wavelength size λ of tunable laser (10) outgoing laser beams and
Pixel number n in spectrometer (70) corresponding to its peak of the spectral signal of amplitude maximum.According to following formula carry out wavelength and
The fitting of displacement relation,
D=C0+C1λ+C2λ2+…+Cmλm (1)
In formula, C0, C1, C2..., CmFor constant, m is polynomial highest power.
Above-mentioned m is determined according to the requirement of the measurement accuracy of Spectral Confocal measuring system.The regression criterion Δ of formula (1) is
In formula, j is numbering, and its value be j=1,2 ..., k, k be survey wavelength number, if regression criterion Δ is less than specified
During value ε, then m values meet the measurement accuracy requirement of Spectral Confocal measuring system.
Corresponding pass is established between the pixel number of the spectrometer (70) and the operation wavelength of Spectral Confocal measuring system
System, the wavelength information under current state can be obtained by the pixel number of the spectrum peak of spectrometer (70), so as in spectrum
The demarcation of spectrometer (70) pixel number and wavelength relationship is completed in confocal measuring system.
As shown in Fig. 2 being a kind of Spectral Confocal measuring system scaling method flow chart described in well-behaved utility model, work as use
It is Spectral Confocal measuring system demarcation side that above-mentioned Spectral Confocal measuring system caliberating device, which carries out the demarcation of Spectral Confocal measuring system,
Method comprises the following steps：
S1, apply certain displacement to measured object (40) by displacement platform (50), and recorded by displacement transducer (60)
The now position of measured object (40)；
S2, the output wavelength scope for setting tunable laser (10), make tunable laser (10) send covering successively
The one-wavelength laser light beam of dispersion object lens (30) service band；
S3, when there is the spectral signal of amplitude maximum on spectrometer (70), by computer (80) and meanwhile record now
Its peak of the spectral signal of amplitude maximum in the wavelength size λ and spectrometer (70) of tunable laser (10) outgoing laser beams
It is worth the pixel number n corresponding to position；
S4, repeat step S1~S3, obtain corresponding to multigroup wavelength X and displacement D and the wavelength corresponding to the wavelength
Spectrometer (70) in pixel number n corresponding to the spectral signal of amplitude maximum its peak；
S5, the corresponding relation established between spectrometer (70) pixel number n and wavelength X；
S6, fitting of a polynomial is carried out to the displacement D corresponding to wavelength X and the wavelength, establish wavelength and measured object (40)
Relation between displacement,
D=C0+C1λ+C2λ2+…+Cmλm (1)
In formula, C0, C1, C2..., CmFor constant, m is polynomial highest power, and m is according to Spectral Confocal measuring system
Measurement accuracy requirement determine；Wherein, the regression criterion Δ of formula (1) is
In formula, j is numbering, and its value be j=1,2 ..., k, k be survey wavelength number, if regression criterion Δ is less than specified
During value ε, then m values meet the measurement accuracy requirement of Spectral Confocal measuring system.
It is described above, the only preferable embodiment of the utility model, but the scope of protection of the utility model is not
This is confined to, any one skilled in the art can readily occur in the technical scope that the utility model discloses
Change or replacement, should all cover within the scope of protection of the utility model.Therefore, the scope of protection of the utility model should be with
The scope of the claims is defined.
Claims (3)
- A kind of 1. Spectral Confocal measuring system caliberating device, it is characterised in that the device include tunable laser (10), double points Branch optical fiber (20), fiber exit beam (201), dispersion object lens (30), dispersion objective lens exit light beam (301), determinand (40), position Moving stage (50), displacement transducer (60), spectrometer (70) and computer (80), wherein, tunable laser (10) is emitted Know that the first branch end of laser beam into the double branch optical fibers (20) of wavelength is coupled into double branch optical fibers (20), through double branch's light Fiber exit beam (201) is obtained after fine (20) always end transmission, fiber exit beam (201) obtains color after dispersion object lens (30) Dissipate objective lens exit light beam (301), dispersion objective lens exit light beam (301) reflected by determinand (40) after through dispersion object lens (30), double Always end, the second branch end of double branch optical fibers (20) enter spectrometer (70) to branch optical fiber (20), and measured object (40) is in displacement platform (50) on, certain displacement is applied to measured object (40) by displacement platform (50), measured object is measured by displacement transducer (60) (40) displacement, obtained by the spectral signal of spectrometer (70) tunable corresponding to the displacement of measured object (40) The wavelength information of laser (10) outgoing beam.
- 2. a kind of Spectral Confocal measuring system caliberating device according to claim 1, it is characterised in that described tunable sharp The service band of the wavelength covering dispersion object lens (30) of light device (10) outgoing laser beams, and tunable laser (10) is each only It is emitted the one-wavelength laser light beam of specific wavelength.
- 3. a kind of Spectral Confocal measuring system caliberating device according to claim 2, it is characterised in that described tunable sharp The laser beam of light device (10) outgoing is continuous light beam or pulsed light beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720388267.1U CN207050670U (en) | 2017-04-14 | 2017-04-14 | A kind of Spectral Confocal measuring system caliberating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720388267.1U CN207050670U (en) | 2017-04-14 | 2017-04-14 | A kind of Spectral Confocal measuring system caliberating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207050670U true CN207050670U (en) | 2018-02-27 |
Family
ID=61489687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720388267.1U Active CN207050670U (en) | 2017-04-14 | 2017-04-14 | A kind of Spectral Confocal measuring system caliberating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207050670U (en) |
-
2017
- 2017-04-14 CN CN201720388267.1U patent/CN207050670U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107131855A (en) | A kind of Spectral Confocal measuring system caliberating device and scaling method | |
| KR101819006B1 (en) | Optical measuring apparatus | |
| CN101238348B (en) | Device and method for measurement of surfaces | |
| CN111220090A (en) | Line focusing differential color confocal three-dimensional surface topography measuring system and method | |
| CN102494615B (en) | Step distance measuring device based on femtosecond optical-frequency comb and measuring method thereof | |
| CN101561296B (en) | Low-coherence measuring method and system for fiber retardation | |
| CN108431545A (en) | For measuring, there are the device and method of height when thin layer | |
| CN104215176B (en) | High accuracy optical interval measurement device and method | |
| US4900151A (en) | Device for measuring the distance between the device and a measuring surface | |
| CN211876977U (en) | Line focusing differential color confocal three-dimensional surface topography measuring system | |
| JP4384463B2 (en) | FOCUS DETECTION UNIT, REFLECTRICITY MEASURING DEVICE AND NONCONTACT THERMOMETER | |
| US20110235049A1 (en) | Wavefront Sensing Method and Apparatus | |
| JPS6324115A (en) | Method and device for measuring flotating quantity of magnetic head | |
| DE102009035635A1 (en) | Displacement gauge and displacement measurement method | |
| US8289525B2 (en) | Optical surface measuring apparatus and method | |
| CN104792269B (en) | A kind of calculation method of the fiber end face height value insensitive to linear phase-shift error | |
| CN105783771B (en) | The method of white light interference vertical scanning method non-linear open-loop scanning | |
| CN103697832A (en) | Method of vertical white light scanning interference open-loop control | |
| CN207050670U (en) | A kind of Spectral Confocal measuring system caliberating device | |
| CN104964641A (en) | Magnetic micro displacement platform-type cascade step angle reflector laser interferometer, calibration method and measurement method | |
| CN103712553A (en) | Interference method with phase method and vertical scanning method compatible | |
| CN107421448A (en) | A kind of micro-displacement measuring device and measuring method | |
| CN110243760B (en) | Line domain frequency domain optical coherence tomography system and longitudinal coordinate calibration method thereof | |
| CN112540044A (en) | Elliptical polarization measuring equipment and focusing method and measuring method thereof | |
| CN105043265A (en) | Novel multi-light-source multi-wavelength laser interference absolute range finder |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200819 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Aerospace Information Research Institute,Chinese Academy of Sciences Effective date of registration: 20200819 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Aerospace Information Research Institute,Chinese Academy of Sciences Address before: 9 Dengzhuang South Road, Haidian District, Beijing 100094 Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |
|
| TR01 | Transfer of patent right |