CN207031536U - A kind of throttling arrangement and vacuum equipment - Google Patents
A kind of throttling arrangement and vacuum equipment Download PDFInfo
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- CN207031536U CN207031536U CN201720418859.3U CN201720418859U CN207031536U CN 207031536 U CN207031536 U CN 207031536U CN 201720418859 U CN201720418859 U CN 201720418859U CN 207031536 U CN207031536 U CN 207031536U
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- throttling arrangement
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- dynamic
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- 210000003205 muscle Anatomy 0.000 claims description 14
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical group C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 claims description 3
- 230000003068 static effect Effects 0.000 claims description 2
- 239000012530 fluid Substances 0.000 abstract description 27
- 238000000034 method Methods 0.000 description 5
- 238000001771 vacuum deposition Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
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Abstract
Throttling arrangement in this programme, mainly include quiet plate with holes and dynamic plate, quiet plate fixes geo-stationary, and dynamic plate then rotates under the drive of drive mechanism, in dynamic plate rotary course, when the hole on the Kong Yujing plates on dynamic plate is completely relative, fluid can flow through the throttling arrangement with axis direction of the flow of maximum along dynamic plate and quiet plate, and when the hole on dynamic plate is staggered completely with the hole on corresponding quiet plate, fluid can only flow through the throttling arrangement with the flow of minimum or can not be by the throttling arrangement.The relative position between the hole on the Kong Yujing plates on dynamic plate can be adjusted by revolving rotor plate can finally adjust the purpose that fluid flows through the flow of the throttling arrangement and realizes throttling.This new throttling arrangement is not only simple in structure, and Flow-rate adjustment speed is fast.Also disclose a kind of vacuum equipment using the throttling arrangement simultaneously.
Description
Technical field
Fluid device field is the utility model is related to, refers in particular to a kind of throttling arrangement and vacuum equipment.
Background technology
In vacuum coating, coating chamber and vavuum pump are the indispensable two large divisions of vacuum coating equipment；In metal
Because technique needs during PVD plated films, process gas flow changes at any time；The change of gas flow can cause vacuum chamber
Vacuum changes；Pumping adjusting means has been installed additional among vacuum chamber and vavuum pump in order to stablize vacuum, by taking out
Gas control device can adjust the flow of vavuum pump pumping to reach the purpose of stable vacuum.Claim in metal PVD plated film industries
This pumping adjusting means is " grating ".
Usual grating has 2 kinds of structures, and one kind is rotation harden structure, and similar with the structure of butterfly valve, one kind is shutter.
The optical grating construction of harden structure is rotated relative to the grating of shutter, it is simple in construction, but the action adjusted is larger, and reaction is inadequate
It hurry up, the grating of shutter, parts are more, easily produce the failures such as clamping stagnation.
Utility model content
In order to solve the above-mentioned technical problem, the utility model discloses a kind of throttling arrangement, the throttling arrangement includes setting
Quiet plate and dynamic plate on the same axis, quiet plate are provided with hole, quiet plate fixed static, and dynamic plate is provided with hole, the dynamic plate connection
There is the drive mechanism for driving its rotation.
Further, the non-bore region on the quiet plate/dynamic plate between two neighboring hole be muscle, and quiet plate/move is each on plate
Bar muscle possesses can be by corresponding hole is completely covered on dynamic plate/quiet plate shapes and sizes.
Further, the distance between the quiet plate and dynamic plate is less than or equal to 5mm.
Further, the hole on the hole and dynamic plate on the quiet plate be of similar shape, size and number.
Further, the quantity in the hole on the quiet plate/dynamic plate is not less than two, and each hole is uniformly arranged in quiet plate/dynamic
On plate.
Further, the quiet plate and dynamic plate are all discoid that battle array in a ring is cut in hole on the quiet plate/dynamic plate for sector
Column is arranged.
Further, the drive mechanism includes motor, and motor is connected with the dynamic plate and drives dynamic plate to rotate.
Further, the throttling arrangement also includes a pipeline, and the quiet plate and dynamic plate are all in pipeline, quiet plate, dynamic plate
It is arranged at pipeline three on same axis, quiet plate is fixed in pipeline.
Further, the diameter of quiet plate and the internal diameter of pipeline are equal, and the edge of quiet plate is in contact with the inwall of pipeline.
In addition, this programme also discloses a kind of vacuum equipment, the vacuum equipment includes vacuum chamber, any one above-mentioned section
Device, vavuum pump are flowed, pipeline one end of the throttling arrangement is connected with vacuum chamber, opposite end is connected with vavuum pump.
Throttling arrangement in this programme, mainly including quiet plate with holes and dynamic plate, quiet plate fixes geo-stationary, and dynamic plate is then
Rotated under the drive of drive mechanism, in dynamic plate rotary course, the complete phase in hole on the Kong Yujing plates on dynamic plate
Pair when, fluid can flow through the throttling arrangement with axis direction of the flow of maximum along dynamic plate and quiet plate, and when the hole on dynamic plate
When being staggered completely with the hole on corresponding quiet plate, fluid can only flow through the throttling arrangement with the flow of minimum or can not lead to
Cross the throttling arrangement.The relative position between the hole on the Kong Yujing plates on dynamic plate can be adjusted by revolving rotor plate
Final regulation fluid flows through the flow of the throttling arrangement and realizes the purpose of throttling.The not only structure letter of this new throttling arrangement
It is single, and Flow-rate adjustment speed is fast.
Brief description of the drawings
Concrete structure of the present utility model is described in detail below in conjunction with the accompanying drawings
Fig. 1 is the structural representation of throttling arrangement of the present utility model；
Fig. 2 is the structural representation of quiet plate in the utility model.
In figure, 1- moves the quiet plate of plate, 2-, 3- pipelines, 4- vavuum pumps connection end, 5- vacuum chambers connection end, 6- holes, 7- muscle.
Embodiment
To describe technology contents of the present utility model, construction feature, the objects and the effects in detail, below in conjunction with implementation
Mode simultaneously coordinates accompanying drawing to be explained in detail.
It is the utility model discloses a kind of throttling arrangement, i.e., a kind of adjusting flow of fluid with reference to accompanying drawing 1 and accompanying drawing 2
Device, such as to the regulation of the liquid or gas that flow through the device.The throttling arrangement includes setting quiet plate 2 on the same axis
With dynamic plate 1, quiet plate 2 is provided with hole 6, and dynamic plate 1 is provided with hole, and the dynamic plate 1 is connected with the drive mechanism for driving its rotation.Fluid
By the throttling arrangement mainly using the hole opened up on the throttling arrangement, i.e. fluid is by the devices of Kong Ercong thereon
Side flow to opposite side, so when thereon, hole size changes, its Fluid Volume flowed through is also just changed
Become, realize throttling purpose.In order to change the size in wherein that hole, this programme utilizes quiet plate 2 and the phase knot of rotatable dynamic plate 1
Close so that fluid just can must at last pass through the throttling arrangement by moving the hole 6 on the hole and quiet plate 2 on plate 1 simultaneously.Pass through rotation
Rotor plate 1, the intersection in hole 6 on hole and quiet plate 2 on dynamic plate 1 can be changed, that is, change the size of the common factor in hole on two plates,
So as to change the size of flow.In the dynamic rotation process of plate 1, when the hole 6 on the Kong Yujing plates 2 on dynamic plate 1 is completely superposed, two
The common factor in the hole on plate is maximum, now can be also just maximum by the Fluid Volume of the throttling arrangement.And when the Kong Yujing plates on dynamic plate 1
When hole 6 on 2 is staggered completely, the common factor in the hole on two plates is minimum or does not occur simultaneously, and now fluid passes through the section
Flow the flow minimum of device or even the throttling arrangement can not be passed through completely.
Preferably, the non-bore region that the quiet plate 2/ moves on plate 1 between two neighboring hole is muscle, such as the quiet plate muscle in Fig. 2
7, quiet plate 2/ moves that each muscle on plate 1 possess can be by corresponding hole is completely covered on the quiet plate 2 of dynamic plate 1/ shapes and sizes.Quiet plate
The design of muscle, can cause the hole of two plates when being staggered on 2/ dynamic plate 1, can be hole and another plate of a plate
Muscle partly or completely omnidirectional pair.Also i other words, as the muscle of non-dummy section, the work for covering corresponding hole on another plate is primarily served
With.Either cover the hole on another plate completely when the muscle portion on a plate point, can part either prevent completely fluid from
The side of the throttling arrangement flows to opposite side, the final purpose for realizing throttling.
Preferably, the distance between the quiet plate 2 and dynamic plate 1 is less than or equal to 5mm.Close dynamic position between plate 1 and quiet plate 2
System, processing need to be positioned on same axis, and convenient dynamic plate 1 can change the coincidence in hole on two plates in rotary course
Degree.Meanwhile moving the distance between plate 1 and quiet plate 2, i.e. axial distance between two plates preferably must be held in certain scope.It is if dynamic
Distance between plate 1 and quiet plate 2 is zero, i.e., dynamic face between plate 1 and quiet plate 2 contacts, because dynamic plate 1 needs to rotate to change hole on two plates
Registration, therefore the contact of the face of two plates has larger frictional force, is unfavorable for the rotary motion of dynamic plate 1.If dynamic plate 1 and quiet plate
Distance between 2 is excessive, then the space that a larger similar cavity will be formed between plate 1 and quiet plate 2 is moved, due to the body in the space
Product is larger, and in the case that the hole on two plates is staggered in time, the hole that fluid can also be first passed through on the quiet plate 2 of dynamic plate 1/ flows into
The space, then the fluid in the space flows out the space from the hole that quiet plate 2/ is moved on plate 1 again, and finally realizes and filled from the throttling
The side put flows to opposite side, and does not reach expected throttling purpose.
Preferably, the hole on the hole and dynamic plate 1 on the quiet plate 2 be of similar shape, size and number.In order to move plate
In 1 rotation process, the hole on the Kong Yujing plates 2 on plate 1 is worked good as far as possible, being completely superposed for Kong Yukong can be realized,
Maximum circulation is realized, and can realizes being staggered completely for Kong Yukong, realizes the circulation of minimum or can not circulate.
Preferably, the quiet plate 2/ moves the quantity in the hole on plate 1 and is not less than two, and it is dynamic that each hole is uniformly arranged in quiet plate 2/
On plate 1.For the ease of fluid circulation, it is necessary to design more hole, while this some holes need to be uniformly distributed in the quiet plate 2 of dynamic plate 1/ it
On, it can also make the even fluid distribution of flowing, improve flow regime.
Preferably, the quiet plate 2 and dynamic plate 1 are all discoid that the hole that the quiet plate 2/ is moved on plate 1 is cut in a ring for sector
Array is arranged.In view of in practice, dynamic plate 1 is designed as justifying to need the revolving part rotated, therefore for dynamic plate 1
Plate-like is more reasonable.Simultaneously, it is to cooperate to move plate 1 and quiet plate 2, and hole on dynamic plate 1 and the design of muscle be also with
The design of hole 6 and muscle is corresponding on quiet plate 2, therefore dynamic plate 1 is preferably consistent with the global shape of quiet plate 2.It is quiet just because of dynamic plate 1/
This disc design of plate 2 so that hole thereon may be designed as fan-shaped and circular array formula and arrange.
Preferably, the drive mechanism includes motor, and motor is connected with the dynamic plate 1 and drives dynamic plate 1 to rotate.Adjusting
During fluid flow, mainly change the coincidence degree in hole between dynamic plate 1 and quiet plate 2 by the dynamic rotation of plate 1.Herein
Drive device used in the rotation of dynamic plate 1 can be motor or other drive devices., can be at the dynamic center of plate 1 when motor drives
One axis hole is set, while the axis connection of motor is in the axis hole, and then drive dynamic plate 1 to rotate.Or motor can also pass through one
A little driving members are connected with the axis hole at the dynamic center of plate 1, and driving member can be some decelerators either other speed controls.
Preferably, the throttling arrangement also includes a pipeline 3, and the quiet plate 2 and dynamic plate 1 quiet plate 2, move all in pipeline 3
Plate 1 and the three of pipeline 3 are arranged on same axis, and quiet plate 2 is fixed in pipeline 3.Preferably, the diameter of quiet plate 2 and pipeline 3
Internal diameter is equal, and the edge of quiet plate 2 is in contact with the inwall of pipeline 3.Fluid is often flowed in the pipeline 3, therefore the control flow of fluid
The throttling arrangement of situation is also inevitable directly to be contacted with pipeline 3.Under the cooperation of pipeline 3, quiet plate 2 is pressed and 3 same axis of pipeline
It is fixed in pipeline 3, if not moving plate 1 now, fluid flows in pipeline 3 is, stably can lead to from the side of quiet plate 2
Cross hole thereon and flow to opposite side, overall flow does not change.And when the dynamic plate that is coaxially set in the side of quiet plate 2
1, move in the rotation process of plate 1, flow through the flow of two plates then can constantly change according to the coincidence degree in hole on two plates, and then
The purpose of throttling.
In addition, this programme also discloses a kind of vacuum equipment, the vacuum equipment includes vacuum chamber, any one above-mentioned section
Device, vavuum pump are flowed, one end of pipeline 3 of the throttling arrangement is vacuum chamber connection end 5, and the end is connected with vacuum chamber, phase
Opposite end is vavuum pump connection end 4, and the end is connected with vavuum pump.This kind of vacuum equipment can be used in vacuum coating technology, and this is saved
Install pipes 3 one end of stream is connected with coating chamber (i.e. vacuum chamber), and the other end of pipeline 3 is then connected with vavuum pump, passes through
The dynamic plate 1 of throttling arrangement is rotated, changes the speed of evacuation of the vavuum pump to vacuum chamber, so as to be stablized using the throttling arrangement
The vacuum of vacuum chamber.
Throttling arrangement in this programme, mainly including quiet plate with holes and dynamic plate, quiet plate fixes geo-stationary, and dynamic plate is then
Rotated under the drive of drive mechanism, in dynamic plate rotary course, the complete phase in hole on the Kong Yujing plates on dynamic plate
Pair when, fluid can flow through the throttling arrangement with axis direction of the flow of maximum along dynamic plate and quiet plate, and when the hole on dynamic plate
When being staggered completely with the hole on corresponding quiet plate, fluid can only flow through the throttling arrangement with the flow of minimum or can not lead to
Cross the throttling arrangement.The relative position between the hole on the Kong Yujing plates on dynamic plate can be adjusted by revolving rotor plate
Final regulation fluid flows through the flow of the throttling arrangement and realizes the purpose of throttling.The throttling arrangement also includes supplying fluid stream simultaneously
Dynamic pipeline, and corresponding equipment can be connected on the pipeline and is applied in industry.One end of pipeline can such as be connected
Coating chamber, other end connection vavuum pump, so as to be used for vacuum coating.This new throttling arrangement is not only simple in structure, and
And Flow-rate adjustment speed is fast.
Herein, up, down, left, right, before and after only represents its relative position and does not indicate that its absolute position.It the foregoing is only
Embodiment of the present utility model, the scope of the claims of the present utility model is not thereby limited, it is every to utilize the utility model specification
And the equivalent structure made of accompanying drawing content or equivalent flow conversion, or other related technical areas are directly or indirectly used in,
Similarly it is included in scope of patent protection of the present utility model.
Claims (10)
- A kind of 1. throttling arrangement, it is characterised in that：The throttling arrangement includes setting quiet plate on the same axis and dynamic plate, quiet plate Hole, quiet plate fixed static are provided with, dynamic plate is provided with hole, and the dynamic plate is connected with the drive mechanism for driving its rotation.
- 2. throttling arrangement as claimed in claim 1, it is characterised in that：It is non-between two neighboring hole on the quiet plate/dynamic plate Bore region is muscle, and possess can be by corresponding hole is completely covered on dynamic plate/quiet plate shape and big for each muscle on quiet plate/dynamic plate It is small.
- 3. throttling arrangement as claimed in claim 2, it is characterised in that：Distance between the quiet plate and dynamic plate is less than or equal to 5mm.
- 4. throttling arrangement as claimed in claim 3, it is characterised in that：The hole on hole and dynamic plate on the quiet plate has identical Shape, size and number.
- 5. throttling arrangement as claimed in claim 4, it is characterised in that：The quantity in the hole on the quiet plate/dynamic plate is not less than two Individual, each hole is uniformly arranged on quiet plate/dynamic plate.
- 6. throttling arrangement as claimed in claim 5, it is characterised in that：The quiet plate and dynamic plate be all it is discoid, the quiet plate/ The arrangement of circular array formula is cut for sector in hole on dynamic plate.
- 7. throttling arrangement as claimed in claim 6, it is characterised in that：The drive mechanism includes motor, and motor moves with described Plate is connected and drives dynamic plate to rotate.
- 8. the throttling arrangement as described in claim any one of 1-7, it is characterised in that：The throttling arrangement also includes a pipeline, institute Quiet plate and dynamic plate are stated all in pipeline, quiet plate, dynamic plate and pipeline three are arranged on same axis, and quiet plate is fixed on pipeline It is interior.
- 9. throttling arrangement as claimed in claim 8, it is characterised in that：The diameter of quiet plate is equal with the internal diameter of pipeline, quiet plate Edge is in contact with the inwall of pipeline.
- A kind of 10. vacuum equipment, it is characterised in that：Including vacuum chamber, throttling arrangement as claimed in claim 9, vavuum pump, Pipeline one end of the throttling arrangement is connected with vacuum chamber, opposite end is connected with vavuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720418859.3U CN207031536U (en) | 2017-04-20 | 2017-04-20 | A kind of throttling arrangement and vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720418859.3U CN207031536U (en) | 2017-04-20 | 2017-04-20 | A kind of throttling arrangement and vacuum equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207031536U true CN207031536U (en) | 2018-02-23 |
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ID=61479014
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720418859.3U Active CN207031536U (en) | 2017-04-20 | 2017-04-20 | A kind of throttling arrangement and vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207031536U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108177977A (en) * | 2018-03-01 | 2018-06-19 | 浙江大学 | Locking device |
| CN109799055A (en) * | 2019-02-14 | 2019-05-24 | 重庆交通大学 | Can continuous uniform adjust and unload the shock tunnel of quick-fried efficiency and unload quick-fried device |
-
2017
- 2017-04-20 CN CN201720418859.3U patent/CN207031536U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108177977A (en) * | 2018-03-01 | 2018-06-19 | 浙江大学 | Locking device |
| CN109799055A (en) * | 2019-02-14 | 2019-05-24 | 重庆交通大学 | Can continuous uniform adjust and unload the shock tunnel of quick-fried efficiency and unload quick-fried device |
| CN109799055B (en) * | 2019-02-14 | 2020-09-01 | 重庆交通大学 | Shock tunnel explosion-discharging device capable of continuously and uniformly adjusting explosion-discharging efficiency |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200908 Address after: 523000 Second Floor, Building B, 99 Jinghai West Road, Shatou Community, Chang'an Town, Dongguan City, Guangdong Province Patentee after: GUANGDONG TISNAWELL NEW MATERIAL TECHNOLOGY Co.,Ltd. Address before: 518000 Guangdong Province, Shenzhen Baolong Avenue Baoqing Lu Hua Feng Digital Technology Park 7 building three layer, four layer Patentee before: Shao Haiping |