CN207013371U - A kind of long epidermis descaling bath - Google Patents

A kind of long epidermis descaling bath Download PDF

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Publication number
CN207013371U
CN207013371U CN201720886155.9U CN201720886155U CN207013371U CN 207013371 U CN207013371 U CN 207013371U CN 201720886155 U CN201720886155 U CN 201720886155U CN 207013371 U CN207013371 U CN 207013371U
Authority
CN
China
Prior art keywords
chamber
montant
cell body
pickling
washing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201720886155.9U
Other languages
Chinese (zh)
Inventor
左丙辰
曹飞超
王建全
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NINGJIN JINGXING ELECTRONIC MATERIAL CO Ltd
Original Assignee
NINGJIN JINGXING ELECTRONIC MATERIAL CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NINGJIN JINGXING ELECTRONIC MATERIAL CO Ltd filed Critical NINGJIN JINGXING ELECTRONIC MATERIAL CO Ltd
Priority to CN201720886155.9U priority Critical patent/CN207013371U/en
Application granted granted Critical
Publication of CN207013371U publication Critical patent/CN207013371U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of long epidermis descaling bath, it includes cell body and the cleaning support of washing is treated for holding, completely cut off pickling chamber and washing chamber provided with L-shaped dividing plate in the inner chamber of cell body, the corner of described cleaning support is extended with hook, cleaning support by hook be arranged on be connected in pickling chamber with pickling chamber being communicated with or being washed in chamber on cell body, oral siphon and outlet pipe are communicated with cell body with what washing chamber was connected, with being communicated with cell body into acid tube of being connected of pickling chamber and going out acid tube, the integraty of integral device is preferable, it is simple in construction efficient, it is highly suitable for carrying out cleaning.

Description

A kind of long epidermis descaling bath
Technical field
The utility model belongs to silicon single crystal preparation field, especially suitable for a kind of rinse bath for being exclusively used in cleaning silicon single crystal Body.
Background technology
Silicon single crystal needs to carry out preamble processing to silicon rod before section, and in general processing mode has pickling or alkali cleaning, acid Different types of impurity, such as metallic particles/carbonization impurity can be rejected respectively with alkali cleaning by washing, and silicon single crystal is general in the prior art All it is to reject epidermis impurity by soaking, and soaks and pick deimpurity processing mode also there is many deficiencies, and soaks and set Standby outmoded, using relatively complicated time-consuming longer, pickling and alkali cleaning can all cause a large amount of wastes of cleaning solution, long-term sudden and violent leakage Cleaning fluid can be caused to fail, so as to cause to waste.
Utility model content
Purpose of utility model, the utility model for above-mentioned existing pickling easily cause cleaning fluid waste and it is existing Cleaning device is difficult with problem, and provides a kind of long epidermis descaling bath, has the scavenger circuit of circulation, ensures significantly.
Problem to be solved in the utility model is realized by following technical scheme:
A kind of long epidermis descaling bath is provided, it includes cell body and the cleaning support of washing is treated for holding, in cell body Completely cut off pickling chamber and washing chamber provided with L-shaped dividing plate in inner chamber, the corner of described cleaning support is extended with hook, cleans support By hook be arranged on be connected in pickling chamber with pickling chamber being communicated with or wash in chamber on cell body, with wash chamber connect Logical is communicated with oral siphon and outlet pipe on cell body, with being communicated with cell body into acid tube of being connected of pickling chamber and going out acid Pipe.
Further, described cleaning support includes the first montant, the second montant, the 3rd montant and the 4th montant, and first It is provided with inclined first oblique rod between the bottom of montant and the bottom of the second montant, the bottom of the 3rd montant and the 4th montant Inclined second oblique rod is provided between bottom, the first oblique rod is connected with the second oblique rod.
Further, respectively it is respectively equipped with hook on the top of the first montant, the second montant, the 3rd montant and the 4th montant.
Further, described pickling chamber is bar shaped, and described washing chamber is L-shaped.
Further, described to enter acid tube and go out acid tube to be connected to acid storage tank, described oral siphon and outlet pipe are connected to Water tank.
The utility model has the advantage that for existing:
Using the handling process of recirculated water tank body, treatment liquid handles circulation status all the time in preparation process, has handled It can be reclaimed after finishing by the corresponding pump housing, ensure that exposure in atmosphere, does not ensure the life-span for the treatment of fluid to treatment fluid for a long time.
Two cavitys are set in same box body, the washing chamber of L-shaped, ensure that the vertically and horizontally section in L-shaped can be held Receive object to be cleaned, ensure that silicon wafer infiltrates by the cleaning support of hook joint, it is simple efficiently.
The integraty of integral device is preferable, simple in construction efficient, is highly suitable for carrying out cleaning.
Brief description of the drawings
Fig. 1 is overall structure diagram of the present utility model.
Fig. 2 is side structure schematic view of the present utility model.
Wherein, L-shaped dividing plate 3, cell body 4, pickling chamber a, washing chamber b, oral siphon 1b, outlet pipe 2b, enter acid tube 1a, go out acid tube 2a。
Embodiment
Shown in reference picture 1, Fig. 2, the utility model provides a kind of long epidermis descaling bath, and its spy includes cell body 4 and is used for The cleaning support for treating washing is held, completely cuts off pickling chamber a and washing chamber b provided with L-shaped dividing plate 3 in the inner chamber of cell body, it is described Pickling chamber is bar shaped, and described washing chamber is L-shaped, and described cleaning support is bar shaped support, and cleaning supporting band has for accommodating The accommodating chamber of washing is treated, the corner for cleaning support is extended with hook, and cleaning support is arranged in pickling chamber and pickling by hook What chamber was connected being communicated with cell body or washing in chamber, with washing chamber be connected be communicated with cell body oral siphon 1b and Outlet pipe 2b, with being communicated with cell body into acid tube 1a of being connected of pickling chamber and going out acid tube 2a.
Described cleaning support includes the first montant, the second montant, the 3rd montant and the 4th montant, the bottom of the first montant Inclined first oblique rod is provided between the bottom of the second montant, is set between the bottom of the 3rd montant and the bottom of the 4th montant There is inclined second oblique rod, the first oblique rod is connected with the second oblique rod, in the first montant, the second montant, the 3rd montant Hook is respectively respectively equipped with the top of the 4th montant.
Described entering acid tube and go out acid tube is connected to acid storage tank, is provided with and is used on the pipeline between acid storage tank and pickling chamber The liquid-feeding pump of acid solution is conveyed, described oral siphon and outlet pipe are connected to water tank, are used in fluid reservoir with being provided with washing chamber In the water-delivery pump of conveying aqueous.
The utility model is described further below according to accompanying drawing:
Thing to be cleaned is inserted in bar shaped support first in use, starts liquid-feeding pump, liquid-feeding pump starts interruption The acid solution of acid solution and cycle pickling intracavitary is extracted, bar shaped support is hung over into pickling intracavitary first, after the completion of waiting cleaning, by bar shaped branch Mount in washing chamber, start water-delivery pump, drainage pump extracts cleaning fluid and the liquid of circulating water wash intracavitary.

Claims (5)

  1. A kind of 1. long epidermis descaling bath, it is characterised in that:The cleaning support of washing is treated including cell body (4) and for holding, in groove Completely cut off pickling chamber (a) and washing chamber (b) provided with L-shaped dividing plate (3) in the inner chamber of body, the corner of described cleaning support is extended with Hook, cleaning support by hook be arranged on be connected in pickling chamber with pickling chamber chamber is communicated with or washed on cell body In, with washing chamber be connected oral siphon (1b) and outlet pipe (2b) are communicated with cell body, with pickling chamber be connected in groove It is communicated with body into acid tube (1a) and goes out acid tube (2a).
  2. A kind of 2. long epidermis descaling bath according to claim 1, it is characterised in that:It is perpendicular that described cleaning support includes first Inclined the is provided between the bottom of bar, the second montant, the 3rd montant and the 4th montant, the bottom of the first montant and the second montant One oblique rod, is provided with inclined second oblique rod between the bottom of the 3rd montant and the bottom of the 4th montant, the first oblique rod with Second oblique rod is connected.
  3. A kind of 3. long epidermis descaling bath according to claim 2, it is characterised in that:In the first montant, the second montant, the 3rd The top of montant and the 4th montant is respectively respectively equipped with hook.
  4. A kind of 4. long epidermis descaling bath according to claim 1, it is characterised in that:Described pickling chamber is bar shaped, described Washing chamber be L-shaped.
  5. A kind of 5. long epidermis descaling bath according to claim 1, it is characterised in that:The described acid tube that enters connects with acid tube is gone out To acid storage tank, described oral siphon and outlet pipe are connected to water tank.
CN201720886155.9U 2017-07-21 2017-07-21 A kind of long epidermis descaling bath Expired - Fee Related CN207013371U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720886155.9U CN207013371U (en) 2017-07-21 2017-07-21 A kind of long epidermis descaling bath

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720886155.9U CN207013371U (en) 2017-07-21 2017-07-21 A kind of long epidermis descaling bath

Publications (1)

Publication Number Publication Date
CN207013371U true CN207013371U (en) 2018-02-16

Family

ID=61481420

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720886155.9U Expired - Fee Related CN207013371U (en) 2017-07-21 2017-07-21 A kind of long epidermis descaling bath

Country Status (1)

Country Link
CN (1) CN207013371U (en)

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GR01 Patent grant
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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180216

CF01 Termination of patent right due to non-payment of annual fee