CN206425286U - Silicon wafer cutting equipment annex circulation cleaning device - Google Patents
Silicon wafer cutting equipment annex circulation cleaning device Download PDFInfo
- Publication number
- CN206425286U CN206425286U CN201621493194.4U CN201621493194U CN206425286U CN 206425286 U CN206425286 U CN 206425286U CN 201621493194 U CN201621493194 U CN 201621493194U CN 206425286 U CN206425286 U CN 206425286U
- Authority
- CN
- China
- Prior art keywords
- net
- spacer
- silicon wafer
- cutting equipment
- cleaning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model is related to silicon chip cutting technique field, specially a kind of silicon wafer cutting equipment annex circulation cleaning device.During existing silicon wafer cutting equipment annex cleaning, generally directly it is sprayed using running water, not only water consumption is big, cost is high, and the mortar rinsed can not be reclaimed, therefore, the utility model discloses a kind of silicon wafer cutting equipment annex circulation cleaning device, including casing, longitudinal baffle, net-like spacer, washer jet and water pump, casing is divided into purge chamber and pump chamber by longitudinal baffle, net-like spacer is horizontally set at purge chamber's inner upper and is flexibly connected with cleaning chamber interior walls, it is reservoir space below net-like spacer, washer jet is above net-like spacer, water pump is provided with pump chamber, the water inlet of washer jet is connected by flexible pipe with the delivery port of water pump, the water inlet of water pump is connected with reservoir space.The utility model has simple in construction, achievable wash cycles, the characteristics of being reclaimed to the mortar rinsed.
Description
Technical field
The utility model is related to silicon chip cutting technique field, specially a kind of silicon wafer cutting equipment annex wash cycles dress
Put.
Background technology
In existing silicon chip cutting technique, it usually needs the annex of silicon chip equipment is carried out clearly after the completion of silicon chip cutting
Wash, the way generally used is：Annex is placed on into running water pipe to rinse directly below.This method is although simple and convenient, but punching
Scouring water amount is big, and the mortar got off is rinsed on waste water resource, and annex, and water is discharged directly under running water, does not reclaim profit
With waste of resource.
Utility model content
For the problems of the prior art, the utility model provides a kind of silicon wafer cutting equipment annex circulation cleaning device
To realize above technical purpose, the technical solution of the utility model is：A kind of silicon wafer cutting equipment annex circulation cleaning
Casing is divided into cleaning by cleaning device, including casing, longitudinal baffle, net-like spacer, washer jet and water pump, the longitudinal baffle
Room and pump chamber, the net-like spacer are horizontally set at purge chamber's inner upper and are flexibly connected with cleaning chamber interior walls, the net
It is reservoir space below shape dividing plate, the washer jet is provided with water pump above net-like spacer in the pump chamber, described clear
The water inlet for washing nozzle is connected by flexible pipe with the delivery port of water pump, and the water inlet of the water pump is connected with reservoir space.
From the above, it can be seen that the utility model possesses advantages below：
1. being reused for the waste water in liquid storage tank using water pump rinsing, recycle, saving water resource；
2. the mortar online recycling system that the mortar that net-like spacer is filtered can put into factory again is utilized, reduction production
Cost.
As an improvement, the bottom half is additionally provided with roller；By roller movable cleaning device, it is easy to many places to apply.
As an improvement, the outer wall of the purge chamber is provided with the observation window for being used for observing reservoir space；Seen by observation window
Examine liquid case in reservoir space, it is determined whether continue cycling through utilization.
As an improvement, the outer wall bottom of the purge chamber is provided with leakage fluid dram；It will be unable to what is reused by leakage fluid dram
Cleaning fluid discharge.
As an improvement, being additionally provided with funnel filter net, the funnel filter net and purge chamber below the net-like spacer
Inwall is flexibly connected；Two heavy filtrations, improve the cleanliness factor of liquid in reservoir space, increase recycles number of times, while screen pack
The mortar of collection can enter mortar online recycling system and re-use.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the structural representation of the utility model funnel filter net；
Reference：1. casing, 2. longitudinal baffles, 3. net-like spacers, 4. washer jets, 5. water pumps, 6. reservoir spaces, 7.
Roller, 8. observation windows, 9. leakage fluid drams, 10. funnel filter nets.
Embodiment
With reference to Fig. 1 to Fig. 2, a specific embodiment of the present utility model is described in detail, but not to power of the present utility model
Profit requires to do any restriction.
As shown in figure 1, a kind of silicon wafer cutting equipment accessory cleaning device, including casing 1, longitudinal baffle 2, net-like spacer 3,
Casing 1 is divided into purge chamber and pump chamber by washer jet 4 and water pump 5, the longitudinal baffle 2, and the net-like spacer 3 is laterally set
It is placed in purge chamber's inner upper and is flexibly connected with cleaning chamber interior walls, the lower section of net-like spacer 3 is reservoir space 6, described clear
Wash nozzle 4 and be provided with water pump 5 in the top of net-like spacer 3, the pump chamber, the water inlet of the washer jet 4 passes through flexible pipe
It is connected with the delivery port of water pump 5, the water inlet of the water pump 5 is connected with reservoir space 6.
The present apparatus is first in use, annex to be cleaned is placed on net-like spacer 3, and introducing running water pipe is rinsed,
Rinse after the sewage produced is filtered through net-like spacer 3 and enter reservoir space 6, when the filtering water level in reservoir space 6 reaches one
When determining height, running water pipe is broken, water pump is opened, the filter water in reservoir space 6 is pumped into washer jet, is reused for by water pump
Rinse, rinse after the sewage produced is filtered through net-like spacer 3 and be again introduced into reservoir space, so that the function of wash cycles is realized,
The mortar online recycling system that the mortar that net-like spacer is filtered simultaneously can put into factory again is utilized, and reduces production cost.
In order to be applied in different places, roller 7 is additionally arranged at the bottom of in casing 1, the easily movable cleaning device of roller 7 is utilized.
After the certain number of times of wash cycles, it is necessary to change, therefore the water in reservoir space 6 no longer meet cleaning requirement
The observation window 8 for observing reservoir space 6 and the row for discharging filter water in reservoir space 6 are set up on the outer wall of purge chamber
Liquid mouthful 9, observes filter water situation in reservoir space 6, it is determined whether continue cycling through utilization using observation window 8, if necessary to stop
Recycle and then discharged the filter water in reservoir space 6 using leakage fluid dram 9.
Still containing the slurry composition that can be recycled in the filter water that produces after due to being filtered through net-like spacer 3, therefore
Funnel filter net 10 (as shown in Figure 2) is set up below net-like spacer 3, funnel filter net 10 connects with the activity of cleaning chamber interior walls
Connect, 10 pairs of funnel filter net rinses the filter water produced and carries out two heavy filtrations, can not only improve filter water in reservoir space
Cleanliness factor, increase filtering water circulation use number of times, but also mortar can be collected, when mortar, which accumulates, arrives a certain amount of, remove net
Shape dividing plate 3, further takes out funnel filter net 10, and the mortar in funnel filter net 10 is added to the mortar online recycling system of factory
System, is re-used.
In summary, the utility model has advantages below：
1. realized using net-like spacer, washer jet and water pump and clean recycling for waste water, saving water resource；
2. the mortar online recycling system that the mortar that net-like spacer is filtered can put into factory again is utilized, reduction production
Cost.
3. bottom half is provided with roller, conveniently moving is quick, is easy to different places to apply；
4. setting observation window and leakage fluid dram, it is easy to the timing of clean cycle filter water to change；
5. realizing two heavy filtrations using funnel filter net, filter water cleanliness factor is improved, increases filter water cycle-index, together
Shi Zaici collects the mortar of recoverable.
It is understood that specifically described above with respect to of the present utility model, be merely to illustrate the utility model and not
It is limited to the technical scheme described by the utility model embodiment.It will be understood by those within the art that, still can be with
The utility model is modified or equivalent substitution, to reach identical technique effect；As long as satisfaction uses needs, all in this reality
Within new protection domain.
Claims (5)
1. a kind of silicon wafer cutting equipment annex circulation cleaning device, it is characterised in that：Including casing (1), longitudinal baffle (2), net
Casing (1) is divided into purge chamber and pump chamber by shape dividing plate (3), washer jet (4) and water pump (5), the longitudinal baffle (2),
The net-like spacer (3) is horizontally set at purge chamber's inner upper and is flexibly connected with cleaning chamber interior walls, the net-like spacer (3)
Lower section is reservoir space (6), and the washer jet (4) is provided with water pump (5) above net-like spacer (3) in the pump chamber,
The water inlet of the washer jet (4) is connected by flexible pipe with the delivery port of water pump (5), the water inlet of the water pump (5) and storage
Liquid space (6) is connected.
2. silicon wafer cutting equipment annex circulation cleaning device according to claim 1, it is characterised in that：The casing (1)
Bottom is additionally provided with roller (7).
3. silicon wafer cutting equipment annex circulation cleaning device according to claim 1, it is characterised in that：The purge chamber
Outer wall is provided with the observation window (8) for being used for observing reservoir space (6).
4. silicon wafer cutting equipment annex circulation cleaning device according to claim 1, it is characterised in that：The purge chamber
Outer wall bottom is provided with leakage fluid dram (9).
5. silicon wafer cutting equipment annex circulation cleaning device according to claim 1, it is characterised in that：The net-like spacer
(3) lower section is additionally provided with funnel filter net (10), and the funnel filter net (10) is flexibly connected with cleaning chamber interior walls.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621493194.4U CN206425286U (en) | 2016-12-30 | 2016-12-30 | Silicon wafer cutting equipment annex circulation cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621493194.4U CN206425286U (en) | 2016-12-30 | 2016-12-30 | Silicon wafer cutting equipment annex circulation cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206425286U true CN206425286U (en) | 2017-08-22 |
Family
ID=59585484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621493194.4U Expired - Fee Related CN206425286U (en) | 2016-12-30 | 2016-12-30 | Silicon wafer cutting equipment annex circulation cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206425286U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109092746A (en) * | 2018-08-17 | 2018-12-28 | 天马（安徽）国药科技股份有限公司 | A kind of Chinese medicine material crushing machine Omnibearing cleaning device |
-
2016
- 2016-12-30 CN CN201621493194.4U patent/CN206425286U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109092746A (en) * | 2018-08-17 | 2018-12-28 | 天马（安徽）国药科技股份有限公司 | A kind of Chinese medicine material crushing machine Omnibearing cleaning device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170822 Termination date: 20181230 |