CN100551555C - Automatic vertical quartz tube cleaning machine and cleaning thereof - Google Patents
Automatic vertical quartz tube cleaning machine and cleaning thereof Download PDFInfo
- Publication number
- CN100551555C CN100551555C CNB2006101451314A CN200610145131A CN100551555C CN 100551555 C CN100551555 C CN 100551555C CN B2006101451314 A CNB2006101451314 A CN B2006101451314A CN 200610145131 A CN200610145131 A CN 200610145131A CN 100551555 C CN100551555 C CN 100551555C
- Authority
- CN
- China
- Prior art keywords
- cabinet
- cleaning
- quartz tube
- cleaning machine
- automatic vertical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006101451314A CN100551555C (en) | 2006-11-13 | 2006-11-13 | Automatic vertical quartz tube cleaning machine and cleaning thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006101451314A CN100551555C (en) | 2006-11-13 | 2006-11-13 | Automatic vertical quartz tube cleaning machine and cleaning thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101181711A CN101181711A (en) | 2008-05-21 |
CN100551555C true CN100551555C (en) | 2009-10-21 |
Family
ID=39447214
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006101451314A Expired - Fee Related CN100551555C (en) | 2006-11-13 | 2006-11-13 | Automatic vertical quartz tube cleaning machine and cleaning thereof |
Country Status (1)
Country | Link |
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CN (1) | CN100551555C (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102513318A (en) * | 2011-12-13 | 2012-06-27 | 北京航天凯恩化工科技有限公司 | Full-automatic sealed cleaning device |
Families Citing this family (20)
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CN101856660B (en) * | 2009-04-10 | 2012-01-25 | 同济大学 | Building rubbish epidemic-preventing and dust removing device |
DK2415532T3 (en) * | 2010-08-02 | 2015-11-16 | Nch Corp | Component washing apparatus and method for washing components |
CN101934411B (en) * | 2010-08-25 | 2013-04-03 | 盐城市康杰机械制造有限公司 | Device for recycling brazing flux and automatically cleaning pipelines |
CN102211881A (en) * | 2011-05-10 | 2011-10-12 | 浙江桑乐数字化太阳能有限公司 | Inner tube cleaning machine with drying function for all-glass vacuum solar collector tube |
CN102274843A (en) * | 2011-05-30 | 2011-12-14 | 天津金牛电源材料有限责任公司 | Cleaning method for package barrel for electrolyte for lithium ion battery |
CN102618863A (en) * | 2012-04-18 | 2012-08-01 | 北京田氏制冷设备安装工程有限公司 | Anticorrosive treatment equipment and method of metal part |
CN104624571B (en) * | 2015-03-04 | 2016-06-01 | 烽火通信科技股份有限公司 | The automatic tube cleaner of crystal reaction tube and automatically wash pipe method |
CN104984967A (en) * | 2015-06-30 | 2015-10-21 | 温州市天瑞制药机械有限公司 | Automatic glue barrel cleaning device |
CN106040683B (en) * | 2016-07-29 | 2018-06-08 | 上海旭熠电子技术有限公司 | The automatic flushing device of ferrule |
CN106824860A (en) * | 2016-12-23 | 2017-06-13 | 无锡市湖昌机械制造有限公司 | Possesses the cleaning case of Simple heating heat insulation function |
CN106824929B (en) * | 2017-03-10 | 2020-04-03 | 北京北方华创微电子装备有限公司 | Vertical multi-station quartz tube cleaning machine and cleaning method |
CN107999459B (en) * | 2017-12-12 | 2023-08-15 | 南通星球石墨股份有限公司 | Stone pickling equipment and method |
CN108687062A (en) * | 2018-05-23 | 2018-10-23 | 芜湖拓达电子科技有限公司 | Water pipe printing cleaning device |
CN109226115B (en) * | 2018-11-04 | 2024-08-16 | 湖南中航精工有限公司 | Vertical deep hole saturated steam cleaning machine |
CN110170476A (en) * | 2019-05-14 | 2019-08-27 | 四川吉度科技有限公司 | A kind of mobile cleaning and sterilizing sterilization cassette with cleaning and sterilizing function |
CN112170411B (en) * | 2019-07-05 | 2024-01-12 | 长鑫存储技术有限公司 | Automatic cleaning and detecting device and method for carrier |
CN110465523B (en) * | 2019-08-01 | 2023-09-29 | 上海至纯洁净系统科技股份有限公司 | Automatic cleaning machine and cleaning method for vertical quartz tube |
CN112295318B (en) * | 2020-09-17 | 2022-06-28 | 武汉宏伟传奇市政建设工程有限公司 | Sewage filtering pipe cleaning machine |
CN113798242B (en) * | 2021-08-30 | 2022-09-23 | 杭州康碳尔环保科技有限公司 | High-temperature high-pressure cleaning machine |
CN114798554B (en) * | 2022-04-14 | 2022-11-04 | 北京华林嘉业科技有限公司 | Vertical semiconductor epitaxial quartz furnace bell jar and quartz piece cleaning machine |
-
2006
- 2006-11-13 CN CNB2006101451314A patent/CN100551555C/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102513318A (en) * | 2011-12-13 | 2012-06-27 | 北京航天凯恩化工科技有限公司 | Full-automatic sealed cleaning device |
CN102513318B (en) * | 2011-12-13 | 2013-12-25 | 北京航天凯恩化工科技有限公司 | Full-automatic sealed cleaning device |
Also Published As
Publication number | Publication date |
---|---|
CN101181711A (en) | 2008-05-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Assignor: Xu Zhulin Contract record no.: 2010320000696 Denomination of invention: Automatic vertical quartz tube cleaning machine and cleaning technique thereof Granted publication date: 20091021 License type: Exclusive License Open date: 20080521 Record date: 20100526 |
|
ASS | Succession or assignment of patent right |
Owner name: JIANGSU HUACAN PHOTOELECTRIC TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: XU ZHULIN Effective date: 20120914 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 100053 XUANWU, BEIJING TO: 226500 NANTONG, JIANGSU PROVINCE |
|
TR01 | Transfer of patent right |
Effective date of registration: 20120914 Address after: 226500, 90 Peach Road, Taoyuan Town, Nantong, Jiangsu, Rugao Patentee after: Jiangsu Hua can Photoelectric Technology Co. Ltd. Address before: 100053, Beijing Xuanwu District reservoir Camp No. nine Patentee before: Xu Zhulin |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091021 Termination date: 20151113 |
|
EXPY | Termination of patent right or utility model |