CN101181711A - Automatic vertical quartz tube cleaning machine and cleaning technique thereof - Google Patents
Automatic vertical quartz tube cleaning machine and cleaning technique thereof Download PDFInfo
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- CN101181711A CN101181711A CNA2006101451314A CN200610145131A CN101181711A CN 101181711 A CN101181711 A CN 101181711A CN A2006101451314 A CNA2006101451314 A CN A2006101451314A CN 200610145131 A CN200610145131 A CN 200610145131A CN 101181711 A CN101181711 A CN 101181711A
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- cleaning machine
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Abstract
The invention discloses a cleaning machine and a cleaning technique of an automatic vertical quartz tube, pertaining to the technical field of cleaning. The machine is formed by integrating a horizontal part cleaning cabinet and a vertical quartz cleaning cabinet into a whole. Each cabinet is respectively and internally provided with a water spraying device, an acid spraying device and a gas spraying device, a liquid storage tank and a heating tank are arrange at the lower part of the cabinet, and a acid liquid recovery tank and a circulation pump are fixed between both tanks. The invention has continuous cleaning and fine cleaning procedures, and a workpiece can be acid washed, rinsed, dewatered and blow-dried in a cabinet or two cabinets, or be roughly washed and fine washed to enhance the cleanness of workpiece to ensure good quality; acid liquid and water can be circulated and recovered, thus saving the cost.
Description
Technical field
The invention belongs to the cleaning technique field, particularly a kind of automatic vertical quartz tube (bell jar) cleaning machine and cleaning thereof.
Background technology
The tube that existing glass, quartz, pottery etc. are bigger, the cleaning of pipe mostly are to be placed on horizontal descaling bath bubble to wash, then with big water gaging flushing, dehydration of alcohol or hot nitrogen oven dry again.Often have residual acid solution and still stay the quartz ampoule inwall, be not easy to wash down, influence cleaning quality.The operation of process is many, back and forth carrying, frangible, dangerous.
Summary of the invention
The purpose of this invention is to provide a kind of automatic vertical quartz tube cleaning machine and cleaning thereof, it is characterized in that, described vertical quartz tube cleaning machine is fused by horizontal part cleaning cabinet and vertical quartzy cleaning cabinet and constitutes.Embed descaling bath 5 and rinsing bowl 6 on the work top 13 of horizontal part cleaning cabinet 1, also be provided with liquid spray gun 3 and gas spray gun 4 on the table top 13, liquid spray gun 3 is used for water spray or spray acid; Gas spray gun 4 is used for jet, and table top 13 following fluid reservoir 9 and the heating tanks 12 placed are fixed with acid solution recycling can 10 between two jars, connect circulating pump 11 down, on the rear wall of part cleaning cabinet 1 exhaust outlet 2 are arranged, and fluorescent lamp 24 and exhaust duct 23 are installed on the top; The front of previous cleaning cabinet 1 is control panel 22 fixedly, and place vertically on the cabinet top, light crossing-signal 21.Cleaning vertical quartzy the cleaning in the cabinet 20 that cabinet 1 links to each other with part, motor 14 is installed in the bottom, rotating disk 15 is arranged on the motor 14, fixation workpiece support 18 on the inwall of middle part, workpiece is supported on the rotating disk 15 by work support 18, shower 16 is installed on rotating disk 15 both sides relatively, the cabinet top inner face tube nozzle 19 that is hung.
Be fixed with down liquid level warning 8 and last liquid level warning 7 on described fluid reservoir 9 madial walls.
There are gas pipeline and fluid pipeline to pass through in the described heating tank.
Described exhaust outlet is louvre type or rectangular mouthful of formula.
Described circulating pump 11 is communicated with spray gun, shower and tube nozzle by plastic tube.
Quartz ampoule (bell jar) inside and outside wall in the described vertical cleaning cabinet 20 can spray the adjustable angle of acid, spray DIW, the hot nitrogen of spray and nozzle.
Described descaling bath 5 and rinsing bowl 6 are all established and are had the leakage fluid dram and the slag-drip opening of considering net.
The cleaning of described automatic vertical quartz tube cleaning machine, its cleaning process flow is as follows:
1) at first will clean other part puts on the rotating disk 15 on the vertical quartzy motor 14 that cleans cabinet 20 of cleaning machine and is fixed on the work support 18 of vertical activity;
2) check whether water, electricity, gas are normal, the start-up operation button compresses moving cylinder automatically and cleans other part then;
3) close the vertical quartzy dodge gate that cleans cabinet 20;
4) starter motor 14 switches, rotating disk 15 rotates with the speed of 7 commentaries on classics/MIN and rotates;
5) by the following step in proper order: part is carried out inside and outside wall spray acid automatically, enter the pickling program, automatically unload acid, heat water valve, high-pressure water jet inside and outside wall, while draining valve are opened draining, and monitor at any time that water quality, the qualified warning of water quality, hot nitrogen dry up, qualified warning, finish whole matting by the existing formula resistivity detector that is installed in discharge outlet, operating personnel will clean other part cover and take out, and pack, deposit.
The invention has the beneficial effects as follows that part cleans and the vertical marrow matting of quartz ampoule (bell jar) links up, workpiece can be finished pickling, wash down in a cabinet, dewater and dry up and wait each procedure, also can pass through previous cleaning earlier, through fine purifiation, improve the cleanliness factor that cleans again, guarantee good quality.Acid solution and water can be recycling, save cost.
Description of drawings
Fig. 1 is a vertical quartz tube poacher structural representation.
The specific embodiment
The invention provides a kind of automatic vertical quartz tube (bell jar) cleaning machine and cleaning thereof.Described automatic vertical quartz tube cleaning machine is fused by horizontal cleaning cabinet and vertical quartzy cleaning cabinet and constitutes.Also the amount of establishing has liquid on embedding descaling bath 5 and rinsing bowl 6 table tops 13 on the work top 13 of horizontal part cleaning cabinet 1, spray gun 3 and gas spray gun 4, liquid spray gun 3 is used for water spray or spray acid, dash with water with certain pressure or the sour quartz ampoule inside and outside wall is sprayed, dashed by press water attached to dirt on the pipe inside and outside wall, be easy to come off, again through dehydration, the hot nitrogen that gas spray gun 4 usefulness are 40～80 ℃ is to managing the inside and outside residual acid that exists, the winding-up of water liquid film, oven dry, shorten drying time, place fluid reservoir 9 and heating tank 12 below the table top 13, be fixed with down liquid level alert 8 and liquid level warning 7 on fluid reservoir 9 madial walls.There are gas pipeline and fluid pipeline to pass through in the heating tank 12, for equipment provides hot water, hot acid and hot gas; Between two jars, be fixed with acid solution recycling can 10, with the spent acid of crossing, waste water is through the processing of recycling can 10, by under connect circulating pump 11 and be back to fluid reservoir 9, reused, the exhaust outlet 2 that louvre type or rectangular mouthful of formula are arranged on the rear wall of part cleaning cabinet 1 is discharged acid gas suction exhaust duct 23, ensures workman's safety.There are gas pipeline and fluid pipeline to pass through in the heating tank 12, for equipment provides hot water, hot acid and hot gas; Between two jars, be fixed with acid solution recycling can 10, with the spent acid of crossing, waste water is through the processing of recycling can 10, by under connect circulating pump 11 and be back to fluid reservoir 9, reused, on the top of part cleaning cabinet 1 fluorescent lamp 24 and exhaust duct 23 are installed, the front is control panel 22 fixedly, cabinet is placed light crossing-signal 21 vertically on the top.Clean vertical quartzy the cleaning in the cabinet 20 that cabinet 1 links to each other with part, motor 14 is installed in the bottom, rotating disk 15 is arranged on the motor 14, fixation workpiece support 18 on the inwall of middle part, workpiece is supported on the rotating disk 15 by work support 18, shower 16 is installed on rotating disk 15 both sides relatively, the cabinet top inner face tube nozzle 19 that is hung.Above-mentioned circulating pump 11 is communicated with spray gun, shower and tube nozzle by plastic tube, vertical quartzy the cleaning in the cabinet 20, quartz ampoule is cleaned clean automatically, and its cleaning process flow is as follows:
1) at first will clean other part puts on the rotating disk 15 on the vertical quartzy motor 14 that cleans cabinet 20 of cleaning machine and is fixed on the work support 18 of vertical activity;
2) check whether water, electricity, gas are normal, the start-up operation button compresses moving cylinder automatically and cleans other part then;
3) close the vertical quartzy dodge gate that cleans cabinet 20;
4) starter motor 14 switches, rotating disk 15 rotates with the speed of 7 commentaries on classics/MIN and rotates;
5) order by the following step: part is carried out inside and outside wall spray acid (by the pickle of common processes preparation) automatically, enter the pickling program, unload acid automatically, be back to after fluid reservoir 9 handles, reused by circulating pump 11.Heat water valve, high-pressure water jet inside and outside wall, while draining valve are opened draining, and monitor water quality, overproof water quality at any time by the resistivity detector that is installed in discharge outlet and report to the police, dry up, qualified warning, finish whole matting with 70 ℃ hot nitrogens, operating personnel will clean other part cover and take out, and pack, deposit.
The present invention has operation and links up, and finishes each procedure in a cabinet, improves the cleanliness factor that cleans, and protects The card good quality. Acid solution and water can be recycling, save the characteristics of cost.
Claims (10)
1. an automatic vertical quartz tube cleaning machine is characterized in that, described automatic vertical quartz tube cleaning machine is made of control power supply, the horizontal part cleaning cabinet that fuses and the vertical quartzy cabinet that cleans; Clean the work top (13) of cabinet (1) at horizontal part and go up embedding descaling bath (5) and rinsing bowl (6), also be provided with liquid spray gun (3) and gas spray gun (4) on the table top (13), liquid spray gun (3) is used for water spray or spray acid; Gas spray gun (4) is used for jet; Place fluid reservoir (9) and heating tank (12) below the table top (13), between two jars, be fixed with acid solution recycling can (10), under connect circulating pump (11), cleaning at part on the rear wall of cabinet (1) has exhaust outlet (2), and fluorescent lamp (24) and exhaust duct (23) are installed on the top; The front of part cleaning cabinet (1) is control panel (22) fixedly, and place vertically on the cabinet top, light crossing-signal ((21); Cleaning vertical quartzy the cleaning in the cabinet (20) that cabinet (1) links to each other with part, motor (14) is installed in the bottom, rotating disk (15) is arranged on the motor (14), fixation workpiece support (18) on the inwall of middle part, workpiece is supported on the rotating disk (15) by work support (18), shower (16) is installed on rotating disk (15) both sides relatively, the cabinet top inner face tube nozzle (19) that is hung.
2. according to the described automatic vertical quartz tube cleaning machine of claim 1, it is characterized in that, be fixed with down liquid level warning (8) and last liquid level warning (7) on described fluid reservoir (9) madial wall.
3. according to the described automatic vertical quartz tube cleaning machine of claim 1, it is characterized in that having gas pipeline and fluid pipeline to pass through in the described heating tank.
4. according to the described automatic vertical quartz tube cleaning machine of claim 1, it is characterized in that described exhaust outlet is louvre type or rectangular mouthful of formula.
5. according to the described automatic vertical quartz tube cleaning machine of claim 1, it is characterized in that described circulating pump is communicated with spray gun, shower and tube nozzle by plastic tube.
6. according to the described automatic vertical quartz tube cleaning machine of claim 1, its feature, gas spray gun gas is nitrogen.
7. according to the described automatic vertical quartz tube cleaning machine of claim 1, it is characterized in that the described vertical quartzy shower of the quartz ampoule inside and outside wall spray in the cabinet (20) and the adjustable angle of tube nozzle of cleaning.
8. according to the described automatic vertical quartz tube cleaning machine of claim 1, it is characterized in that described descaling bath (5) and rinsing bowl (6) are all established and had the leakage fluid dram and the slag-drip opening of considering net.
9. the cleaning of the described automatic vertical quartz tube cleaning machine of claim 1 is characterized in that, its cleaning process flow is as follows:
1) at first will clean other part puts on the rotating disk (15) on the vertical quartzy motor (14) that cleans cabinet (20) of cleaning machine and is fixed on the work support (18) of vertical activity;
2) check whether water, electricity, gas are normal, the start-up operation button compresses moving cylinder automatically and cleans other part then;
3) close the vertical quartzy dodge gate that cleans cabinet (20);
4) starter motor (14) switch, rotating disk (15) rotate with the speed of 7 commentaries on classics/MIN and rotate;
5) by the following step in proper order: part is carried out inside and outside wall spray acid automatically, enter the pickling program, automatically unload acid, heat water valve, high-pressure water jet inside and outside wall, while draining valve are opened draining, and monitor at any time that water quality, overproof water quality are reported to the police, hot nitrogen dries up, qualified warning, finish whole matting by the existing formula electric conductivity detector that is installed in discharge outlet, operating personnel will clean other part cover and take out, and pack, deposit.
10. the cleaning of the described automatic vertical quartz tube cleaning machine of claim 1 is characterized in that, described hot nitrogen is 40～80 ℃.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101451314A CN100551555C (en) | 2006-11-13 | 2006-11-13 | Automatic vertical quartz tube cleaning machine and cleaning thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101451314A CN100551555C (en) | 2006-11-13 | 2006-11-13 | Automatic vertical quartz tube cleaning machine and cleaning thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101181711A true CN101181711A (en) | 2008-05-21 |
| CN100551555C CN100551555C (en) | 2009-10-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101451314A Expired - Fee Related CN100551555C (en) | 2006-11-13 | 2006-11-13 | Automatic vertical quartz tube cleaning machine and cleaning thereof |
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| CN101934411A (en) * | 2010-08-25 | 2011-01-05 | 盐城市康杰机械制造有限公司 | Device for recycling brazing flux and automatically cleaning pipelines |
| CN102211881A (en) * | 2011-05-10 | 2011-10-12 | 浙江桑乐数字化太阳能有限公司 | Inner tube cleaning machine with drying function for all-glass vacuum solar collector tube |
| CN102274843A (en) * | 2011-05-30 | 2011-12-14 | 天津金牛电源材料有限责任公司 | Cleaning method for package barrel for electrolyte for lithium ion battery |
| CN101856660B (en) * | 2009-04-10 | 2012-01-25 | 同济大学 | Building rubbish epidemic-preventing and dust removing device |
| CN102618863A (en) * | 2012-04-18 | 2012-08-01 | 北京田氏制冷设备安装工程有限公司 | Anticorrosive treatment equipment and method of metal part |
| CN103201051A (en) * | 2010-08-02 | 2013-07-10 | Nch公司 | Parts washer |
| CN104624571A (en) * | 2015-03-04 | 2015-05-20 | 烽火通信科技股份有限公司 | Automatic quartz reaction tube cleaning machine and automatic tube cleaning method thereof |
| CN104984967A (en) * | 2015-06-30 | 2015-10-21 | 温州市天瑞制药机械有限公司 | Automatic glue barrel cleaning device |
| CN106040683A (en) * | 2016-07-29 | 2016-10-26 | 上海旭熠电子技术有限公司 | Automatic cleaning device of optical fiber sleeve |
| CN106824860A (en) * | 2016-12-23 | 2017-06-13 | 无锡市湖昌机械制造有限公司 | Possesses the cleaning case of Simple heating heat insulation function |
| CN106824929A (en) * | 2017-03-10 | 2017-06-13 | 北京北方华创微电子装备有限公司 | A kind of vertical multi-stage quartz tube cleaner and cleaning method |
| CN107999459A (en) * | 2017-12-12 | 2018-05-08 | 南通星球石墨设备有限公司 | A kind of pickling stone device and method |
| CN108687062A (en) * | 2018-05-23 | 2018-10-23 | 芜湖拓达电子科技有限公司 | Water pipe printing cleaning device |
| CN109226115A (en) * | 2018-11-04 | 2019-01-18 | 湖南中航精工有限公司 | Vertical deep hole saturated vapor cleaning machine |
| CN110170476A (en) * | 2019-05-14 | 2019-08-27 | 四川吉度科技有限公司 | A kind of mobile cleaning and sterilizing sterilization cassette with cleaning and sterilizing function |
| CN110465523A (en) * | 2019-08-01 | 2019-11-19 | 上海至纯洁净系统科技股份有限公司 | A kind of vertical quartz tube automatic rinser and cleaning method |
| CN112170411A (en) * | 2019-07-05 | 2021-01-05 | 长鑫存储技术有限公司 | Automatic carrier cleaning and detecting device and method |
| CN112295318A (en) * | 2020-09-17 | 2021-02-02 | 陈坤明 | Sewage filtering pipe cleaning machine |
| CN113798242A (en) * | 2021-08-30 | 2021-12-17 | 杭州康碳尔环保科技有限公司 | High-temperature high-pressure cleaning machine |
| CN114798554A (en) * | 2022-04-14 | 2022-07-29 | 北京华林嘉业科技有限公司 | Vertical semiconductor epitaxial quartz furnace bell jar and quartz piece cleaning machine |
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| CN101856660B (en) * | 2009-04-10 | 2012-01-25 | 同济大学 | Building rubbish epidemic-preventing and dust removing device |
| CN103201051A (en) * | 2010-08-02 | 2013-07-10 | Nch公司 | Parts washer |
| CN103201051B (en) * | 2010-08-02 | 2016-06-22 | Nch公司 | parts washer |
| CN101934411B (en) * | 2010-08-25 | 2013-04-03 | 盐城市康杰机械制造有限公司 | Device for recycling brazing flux and automatically cleaning pipelines |
| CN101934411A (en) * | 2010-08-25 | 2011-01-05 | 盐城市康杰机械制造有限公司 | Device for recycling brazing flux and automatically cleaning pipelines |
| CN102211881A (en) * | 2011-05-10 | 2011-10-12 | 浙江桑乐数字化太阳能有限公司 | Inner tube cleaning machine with drying function for all-glass vacuum solar collector tube |
| CN102274843A (en) * | 2011-05-30 | 2011-12-14 | 天津金牛电源材料有限责任公司 | Cleaning method for package barrel for electrolyte for lithium ion battery |
| CN102618863A (en) * | 2012-04-18 | 2012-08-01 | 北京田氏制冷设备安装工程有限公司 | Anticorrosive treatment equipment and method of metal part |
| CN104624571A (en) * | 2015-03-04 | 2015-05-20 | 烽火通信科技股份有限公司 | Automatic quartz reaction tube cleaning machine and automatic tube cleaning method thereof |
| CN104984967A (en) * | 2015-06-30 | 2015-10-21 | 温州市天瑞制药机械有限公司 | Automatic glue barrel cleaning device |
| CN106040683B (en) * | 2016-07-29 | 2018-06-08 | 上海旭熠电子技术有限公司 | The automatic flushing device of ferrule |
| CN106040683A (en) * | 2016-07-29 | 2016-10-26 | 上海旭熠电子技术有限公司 | Automatic cleaning device of optical fiber sleeve |
| CN106824860A (en) * | 2016-12-23 | 2017-06-13 | 无锡市湖昌机械制造有限公司 | Possesses the cleaning case of Simple heating heat insulation function |
| CN106824929A (en) * | 2017-03-10 | 2017-06-13 | 北京北方华创微电子装备有限公司 | A kind of vertical multi-stage quartz tube cleaner and cleaning method |
| CN107999459B (en) * | 2017-12-12 | 2023-08-15 | 南通星球石墨股份有限公司 | Stone pickling equipment and method |
| CN107999459A (en) * | 2017-12-12 | 2018-05-08 | 南通星球石墨设备有限公司 | A kind of pickling stone device and method |
| CN108687062A (en) * | 2018-05-23 | 2018-10-23 | 芜湖拓达电子科技有限公司 | Water pipe printing cleaning device |
| CN109226115A (en) * | 2018-11-04 | 2019-01-18 | 湖南中航精工有限公司 | Vertical deep hole saturated vapor cleaning machine |
| CN110170476A (en) * | 2019-05-14 | 2019-08-27 | 四川吉度科技有限公司 | A kind of mobile cleaning and sterilizing sterilization cassette with cleaning and sterilizing function |
| CN112170411A (en) * | 2019-07-05 | 2021-01-05 | 长鑫存储技术有限公司 | Automatic carrier cleaning and detecting device and method |
| CN112170411B (en) * | 2019-07-05 | 2024-01-12 | 长鑫存储技术有限公司 | Automatic cleaning and detecting device and method for carrier |
| CN110465523A (en) * | 2019-08-01 | 2019-11-19 | 上海至纯洁净系统科技股份有限公司 | A kind of vertical quartz tube automatic rinser and cleaning method |
| CN110465523B (en) * | 2019-08-01 | 2023-09-29 | 上海至纯洁净系统科技股份有限公司 | Automatic cleaning machine and cleaning method for vertical quartz tube |
| CN112295318A (en) * | 2020-09-17 | 2021-02-02 | 陈坤明 | Sewage filtering pipe cleaning machine |
| CN113798242A (en) * | 2021-08-30 | 2021-12-17 | 杭州康碳尔环保科技有限公司 | High-temperature high-pressure cleaning machine |
| CN114798554B (en) * | 2022-04-14 | 2022-11-04 | 北京华林嘉业科技有限公司 | Vertical semiconductor epitaxial quartz furnace bell jar and quartz piece cleaning machine |
| CN114798554A (en) * | 2022-04-14 | 2022-07-29 | 北京华林嘉业科技有限公司 | Vertical semiconductor epitaxial quartz furnace bell jar and quartz piece cleaning machine |
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| CN100551555C (en) | 2009-10-21 |
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| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Assignor: Xu Zhulin Contract record no.: 2010320000696 Denomination of invention: Automatic vertical quartz tube cleaning machine and cleaning technique thereof Granted publication date: 20091021 License type: Exclusive License Open date: 20080521 Record date: 20100526 |
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Owner name: JIANGSU HUACAN PHOTOELECTRIC TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: XU ZHULIN Effective date: 20120914 |
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Effective date of registration: 20120914 Address after: 226500, 90 Peach Road, Taoyuan Town, Nantong, Jiangsu, Rugao Patentee after: Jiangsu Hua can Photoelectric Technology Co. Ltd. Address before: 100053, Beijing Xuanwu District reservoir Camp No. nine Patentee before: Xu Zhulin |
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