CN206986327U - A kind of CZ crystal for straight drawing monocrystal stove thermal field graphite three-part crucible takes assembling device - Google Patents
A kind of CZ crystal for straight drawing monocrystal stove thermal field graphite three-part crucible takes assembling device Download PDFInfo
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- CN206986327U CN206986327U CN201720738238.3U CN201720738238U CN206986327U CN 206986327 U CN206986327 U CN 206986327U CN 201720738238 U CN201720738238 U CN 201720738238U CN 206986327 U CN206986327 U CN 206986327U
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Abstract
The utility model discloses a kind of CZ crystal for straight drawing monocrystal stove thermal field graphite three-part crucible to take assembling device, include the steel plate disk above graphite three-part crucible, multiple poles are distributed with the circumferential position of steel plate disk, the pole locus between graphite heater and graphite three-part crucible respectively, the bottom of pole is provided with three-part crucible support hand by axis of rotation respectively, the steel wire clutch disk of corresponding cooperation is provided with above steel plate disk, steel wire clutch disk is connected with the middle part of steel plate disk by vertical loading board, the steel wire rope with pole both sides position correspondence below is distributed with the circumferential position of steel wire clutch disk, the other end of steel wire rope is each passed through the both ends that steel plate disk is connected to the three-part crucible support hand both sides rotating shaft of pole bottom.The utility model dramatically saves on artificial labour, improve production efficiency, reduces personnel well and handles and loads the potential safety hazard brought manually, and the risk for graphite piece of being collided with caused by manually carrying heavier large scale graphite piece.
Description
Technical field：
Mechanical design field is the utility model is related to, relates generally to a kind of CZ crystal for straight drawing monocrystal stove thermal field graphite three-part crucible
Take assembling device.
Background technology：
Photovoltaic too can new energy popularization and used in IC semiconductor wafer manufacture view be all silicon original
Material.No matter the silicon chip of solar level, still apply the semiconductor silicon wafer piece in terms of IC chip, it is straight substantially to adopt CZ
Daraf(reciprocal of farad) silicon single crystal technology.In the environmental protection of inert gas, with high-purity graphite resistance heater, by polycrystalline silicon semiconductor height
Temperature is melted, and grows a kind of dislocation-free silicon single crystal rod with the mode of vertical pulling method, qualified silicon is finally formed by multiple working procedure
Wafer.The main graphite field of CZ crystal for straight drawing monocrystal has upper, middle and lower heat-preservation cylinder, high purity graphite resistance heater, the valve of graphite three
Crucible, graphite pallet, guide shell etc..
With the continuous improvement of monocrystalline crystal growing technology and the driving in market, now to the diametric requirements of the silicon single crystal rod of production
It is increasing.The diameter of silicon single crystal rod is from 2 inches, 4 inches, 6 inches, 8 inches, then to 12 inches, 18 inches, in the market
The size of main flow is at 8 inches, 12 inches.This result in we needs thermal field size it is also increasing, graphite field element
Size, weight all increase, for example, in 12 inches of graphite field graphite three-part crucible weight about in 100KG or so.For before
Element, which causes, in artificial unloading installation thermal field difficult tears ring section, graphite device open along with running into blowing out in actual production process
Part is taking out quickening thermal field cooling by the incomplete cooling required of long-time high-temperature calcination, and high temperature is taken by hand for 2-3 personnel
Security in protective gloves unloading and taking fills damage risk increasing of colliding with during these graphite devices, is unfavorable for normal
Production.
Utility model content：
The purpose of the utility model is exactly to solve the size for the graphite device that large scale thermal field in pulling of silicon single crystal is brought
The artificial inconvenience for taking dress that increase, graphite device weight increase are brought, potential safety hazard and artificial graphite piece is knocked when taking dress
The increase of the bad risk of clashing and breaking, exist additionally, due to the gap very little between graphite three-part crucible and high purity graphite resistance heater
Between 20mm-25mm, few corresponding dismounting devices solve the problems, such as this link, there is provided a kind of CZ crystal for straight drawing monocrystal
Stove thermal field graphite three-part crucible takes assembling device.
The utility model is achieved through the following technical solutions：
A kind of CZ crystal for straight drawing monocrystal stove thermal field graphite three-part crucible takes assembling device, it is characterised in that：Include and be located at graphite
Multiple poles are distributed with steel plate disk above three-part crucible, the circumferential position of the steel plate disk, and the pole is located at stone respectively
Locus between black heater and graphite three-part crucible, the bottom of the pole are provided with three-part crucible by axis of rotation respectively
Hand is held in the palm, the steel wire clutch disk of corresponding cooperation, the steel wire clutch disk and steel are provided with above the steel plate disk
The middle part of plate disk is connected by vertical loading board, and pin hole, the circumference position of the steel wire clutch disk are distributed with the vertical loading board
The steel wire rope being distributed with pole both sides position correspondence below is put, the other end of the steel wire rope is each passed through steel plate disk
It is connected to the both ends of pole bottom three-part crucible support hand both sides rotating shaft.
Described pole is uniformly distributed on the circumferential position along steel plate disk.
The thickness of described pole is 12-14mm, the 3-5mm reserved between the pole and graphite three-part crucible gap.
Miniature laser is installed on the steel plate disk of the bottom face of described vertical loading board.
The rugosity of described steel wire rope is in 3-5mm.
The utility model has the advantages that：
（1）Artificial labour is dramatically saves on, improves production efficiency.
（2）Reduce personnel handles and loads the potential safety hazard that large scale pyrographite thermal field element is brought manually well, and
The risk for graphite piece of being collided with caused by manually carrying heavier large scale graphite piece.
（3）The apparatus structure is simple, practical, conveniently can be very good to solve to run into this problem in actual life link production,
Conveniently promote the use of.
Brief description of the drawings：
Fig. 1 is the structural representation after assembling high purity graphite heater of the present utility model.
Fig. 2 is structural representation of the present utility model.
Embodiment：
Referring to accompanying drawing.
A kind of CZ crystal for straight drawing monocrystal stove thermal field graphite three-part crucible takes assembling device, includes above graphite three-part crucible 1
Steel plate disk 2, multiple poles 3 are distributed with the circumferential position of the steel plate disk 2, and the pole 3 is located at graphite heating respectively
Locus between device 4 and graphite three-part crucible, the bottom of the pole 3 are provided with three-part crucible support hand by axis of rotation respectively
5, the top of the steel plate disk 2 is provided with the steel wire clutch disk 6 of corresponding cooperation, the steel wire clutch disk 6 and steel
The middle part of plate disk 2 is connected by vertical loading board 7, and pin hole 8, the circle of the steel wire clutch disk 6 are distributed with the vertical loading board 7
The steel wire rope 9 with the both sides position correspondence of pole 3 below is distributed with all positions, the other end of the steel wire rope 9 is each passed through
Steel plate disk 2 is connected to the both ends of the both sides rotating shaft of pole bottom three-part crucible support hand 5.
Described pole 3 is uniformly distributed on the circumferential position along steel plate disk 2.
The thickness of described pole 3 is 12-14mm, between the 3-5mm reserved between the pole 3 and graphite three-part crucible 1
Gap.
Miniature laser 10 is installed on the steel plate disk of the bottom face of described vertical loading board 7.
The rugosity of described steel wire rope 9 is in 3-5mm.
The relevant design explanation of the application：
（1）Because the gap very little between the high purity graphite three-part crucible and high purity graphite resistance heater to be lifted is in 20-
25mm, it is desirable to which the thickness for 6 poles that steel disk connects below is designed in 12-14mm.
（2）In view of the 3-5mm reserved between 6 poles and graphite three-part crucible gap, by the rugosity of steel wire rope in 3-
5mm, and the three-part crucible support below each pole has two steel wire ropes on hand, ensures that enough pulling force reduce risk.
（3）It is mounted with that a miniature laser is used for positioning three-part crucible bottom centre at steel disk bottom center, is easy to whole
Body device declines along space between three-part crucible and heater.
（4）12 root long degree identical steel wire ropes are connected under disk, and above and below disk, all steel wire ropes are together
Action, ensure that the crucible tray hand of bottom 6 acts simultaneously.
Its operation principle is：
（1）When stove cooling thermal field link is torn in the production blowing out cooling of CZ czochralski silicon monocrystals open, the graphite above heater is removed
Three-part crucible is elevated to suitable height after device in thermal field.
(2) take the related lifting machine power-assisted arm assembly of assembling device to lift by crane three-part crucible, be slowly moved to the upper of thermal field
Orientation is put, and is navigated to the center of thermal field using the middle-size and small-size laser of device, is found at three-part crucible bottom centre.
（3）Starting steel wire clutch disk being lowered to correct position declines steel wire rope, ensures that bottom three-part crucible support hand hangs down
It is straight sagging.Slowly decline and take assembling device, make 6 poles gently deep along the gap between graphite three-part crucible and graphite heater
Enter down, stop declining after three-part crucible bottom position is dropped to.
（4）Steel wire clutch disk is adjusted up to be fixed to correct position, the drawing of following three-part crucible support hand in steel wire rope
Certain angle is all rotated up together under dynamic.
（5）Slowly lifted, allow 6 three-part crucible support hand rests to lift the bottom of three-part crucible, because three-part crucible inwall is equipped with use
In the high-purity silica pot for containing silicon material, three-part crucible inwall is outwards played a supporting role, lifting three-part crucible is likely to occur
Slope inwardly per valve crucible and play further safety guarantee.
（6）After the high temperature three-part crucible with silica crucible is slowly safely removed with boom hoisting, specified location is placed on
Quickly cooled down, clear up thermal field.
（7）After thermal field has all cooled down, cleaning thermal field link is completed.Will preparing installation graphite field link to be fed
Silica crucible first installs position with three-part crucible on graphite pallet, then with the graphite pallet for taking assembling device to be lifted into thermal field.
Three-part crucible support hand is unclamped again, slowly takes out the device, is placed into the heat that specified location is used for preparing other straight pulling silicon single crystal furnaces
Field three-part crucible takes dress.
Claims (5)
1. a kind of CZ crystal for straight drawing monocrystal stove thermal field graphite three-part crucible takes assembling device, it is characterised in that：Include and be located at graphite three
Multiple poles are distributed with steel plate disk above valve crucible, the circumferential position of the steel plate disk, and the pole is located at graphite respectively
Locus between heater and graphite three-part crucible, the bottom of the pole are provided with three-part crucible support by axis of rotation respectively
Hand, the steel wire clutch disk of corresponding cooperation, the steel wire clutch disk and steel plate are provided with above the steel plate disk
The middle part of disk is connected by vertical loading board, and pin hole, the circumferential position of the steel wire clutch disk are distributed with the vertical loading board
On steel wire rope with pole both sides position correspondence below is distributed with, the other end of the steel wire rope is each passed through steel plate disk company
It is connected to the both ends of pole bottom three-part crucible support hand both sides rotating shaft.
2. CZ crystal for straight drawing monocrystal stove thermal field graphite three-part crucible according to claim 1 takes assembling device, it is characterised in that：Institute
The pole stated is uniformly distributed on the circumferential position along steel plate disk.
3. CZ crystal for straight drawing monocrystal stove thermal field graphite three-part crucible according to claim 2 takes assembling device, it is characterised in that：Institute
The thickness for the pole stated is 12-14mm, the 3-5mm reserved between the pole and graphite three-part crucible gap.
4. CZ crystal for straight drawing monocrystal stove thermal field graphite three-part crucible according to claim 1 takes assembling device, it is characterised in that：Institute
Miniature laser is installed on the steel plate disk of the bottom face for the vertical loading board stated.
5. CZ crystal for straight drawing monocrystal stove thermal field graphite three-part crucible according to claim 1 takes assembling device, it is characterised in that：Institute
The rugosity for the steel wire rope stated is in 3-5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720738238.3U CN206986327U (en) | 2017-06-23 | 2017-06-23 | A kind of CZ crystal for straight drawing monocrystal stove thermal field graphite three-part crucible takes assembling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720738238.3U CN206986327U (en) | 2017-06-23 | 2017-06-23 | A kind of CZ crystal for straight drawing monocrystal stove thermal field graphite three-part crucible takes assembling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206986327U true CN206986327U (en) | 2018-02-09 |
Family
ID=61398977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720738238.3U Active CN206986327U (en) | 2017-06-23 | 2017-06-23 | A kind of CZ crystal for straight drawing monocrystal stove thermal field graphite three-part crucible takes assembling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206986327U (en) |
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2017
- 2017-06-23 CN CN201720738238.3U patent/CN206986327U/en active Active
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