CN206945539U - Waveguide Raman scattering chamber based on couple prism twice - Google Patents
Waveguide Raman scattering chamber based on couple prism twice Download PDFInfo
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- CN206945539U CN206945539U CN201720752931.6U CN201720752931U CN206945539U CN 206945539 U CN206945539 U CN 206945539U CN 201720752931 U CN201720752931 U CN 201720752931U CN 206945539 U CN206945539 U CN 206945539U
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Abstract
The utility model discloses a kind of waveguide Raman scattering chamber based on couple prism twice, including glass substrate, glass seal and the glass prism being sequentially stacked, sample room is formed between the glass substrate and glass prism, the sample room is provided with sample intake passage and sample output passage, the upper surface deposition lower metal film of the glass substrate, the lower surface deposited overlayers metal film of the glass prism, the glass prism meet：The light incident from glass prism side is totally reflected after the reflection of the lower surface of glass prism in the upper surface of glass prism, then by being emitted after the lower surface reflection of glass prism from the another side of glass prism.The structure can not use bandreject filtering piece to realize low transmission narrow-band filtering and obtain highly sensitive Raman spectrum.
Description
Technical field
A kind of waveguide Raman scattering chamber is the utility model is related to, more particularly to a kind of waveguide based on couple prism twice
Raman scattering chamber.
Background technology
Raman spectrum (Raman spectrosopy) is the spectrum analysis skill to be grown up based on Raman scattering effect
Art, the same with Fourier transform infrared spectroscopy, Raman spectrum can provide molecular vibration and rotation information for compound analysis.Due to
Raman spectrum bandwidth is suitable, has very high spectral resolution so that the signal that people can be close to spectrum interval carries out essence
Really distinguish, obtain more accurate molecular structure information.And Raman spectrum also has that detection time is short, simple to operate, sample institute
The features such as requirement is few, so that with the continuous development of LASER Light Source, Raman spectrum food, biological monitoring, medicine, criminal justice,
The fields such as petrochemical industry, geology archaeology, Gemstone Identification have all been widely used.Although there are above-mentioned advantage, Raman spectrum
Also have it is clearly disadvantageous, such as：Because raman scattering cross section is small, caused Raman scattering signal is weak, and its quantum efficiency only has 10-10-10-4.Secondly as Raman scattering signal frequency is near from light frequency is excited, therefore, in the design of Raman spectrometer, it is necessary to
The interference of Rayleigh scattering light can be excluded, and there is high sensitivity, (high s/n ratio for being embodied in Testing of Feeble Signals) could be effective
Collect Raman spectrum.In order to improve the signal intensity of Raman spectrum, existing Raman spectrometer be typically all equipped with superpower laser,
High-efficient filter wave plate and high-resolution monochromator, high-grade Raman spectrometer are even furnished with two filter plates and double monochromator.Although mesh
Before produce a variety of Portable Raman spectrometers, but its precision and reliability need further to improve.At the same time, people go back
Carry out substantial amounts of fruitful research, it is proposed that some new Raman spectroscopies, such as Fourier transform-Raman spectroscopy, table
Face enhancing Raman spectrum, laser resonant Raman spectrum, high-temperature laser Raman spectrum etc..But for fluid sample, Raman light
The sensitivity of spectrum is still not high enough, and its scope of application is still rather narrow, and is typically only capable to sample of the detection with higher concentration.In recent years
Come, it is thus proposed that a kind of liquid-core optical fibre resonance Raman chamber, exciting light and the distance of sample interaction are effectively increased, and
So that scattering luminous energy is more effectively collected, so as to improve detection sensitivity.But the covering folding of this structural requirement optical fiber
The refractive index that rate is less than fluid sample is penetrated, so as to eliminate the possibility of most part liquid sample.
Utility model content
The defects of for above-mentioned prior art, the utility model provide a kind of waveguide Raman based on couple prism twice
Chamber is scattered, low transmission narrow-band filtering is realized in the case where not using the filtering chip architecture of costliness and obtains highly sensitive Raman spectrum.
Technical solutions of the utility model are as follows：A kind of waveguide Raman scattering chamber based on couple prism twice, including successively
Stacked glass substrate, glass seal and glass prism, sample room, the sample are formed between the glass substrate and glass prism
Product room is provided with sample intake passage and sample output passage, and the upper surface of the glass substrate deposits lower metal film, the glass prism
Lower surface deposited overlayers metal film, the glass prism meet：Following table of the light incident from glass prism side in glass prism
It is totally reflected after the reflection of face in the upper surface of glass prism, then by the opposite side after the lower surface reflection of glass prism from glass prism
Face is emitted.
Further, the glass prism is the prism that section is in isosceles trapezoid, the base angle of the isosceles trapezoid for 35 °~
45°。
Further, the refractive index of the glass prism is 1.75~1.80.
Further, the lower surface of the upper strata metal film and the deposition silica protection of the upper surface of lower metal film
Film.
Preferably, the thickness of the silicon dioxide protective film is 60nm, refractive index 1.5.
Preferably, the material of the upper strata metal film is silver, and thickness is 35~37nm.
Preferably, the material of the lower metal film is silver, and thickness is more than 200nm.
Further, the upper surface of the glass substrate is provided with glass substrate, and the lower metal film is deposited on the glass
The upper surface of glass substrate.
Preferably, the material of the glass substrate is optical glass, and thickness is 480 μm, and the glass seal material is light
Glass is learned, thickness is 500 μm.
The advantages of technical scheme provided by the utility model, is：(1) it is totally reflected using prisms waveguide structure and decay
Principle realizes two secondary couplings of light, minimizes the intensity of the secondary reflection of exciting light two, can save with expensive bandreject filtering
Piece (Notch Filter)；(2) scatter light and the distance to be interacted with sample is added after two secondary reflections, scattering section obtains
To enhancing, and because the bandwidth of above-mentioned filter structure is less than Δ λ<1nm, scattering light is set effectively to be collected；(3) except with
Narrow-band filtering function, the structure also have sufficiently large Free Spectral Range FSR>90nm, it can effectively exclude ATR absworption peaks and bring
Interference；(4) double-sided metal cladding waveguiding structure of the use with high power density, and utilization has high-quality-factor and Gao Ling
The high order guided modes of sensitivity characteristic are probe, Raman scattering is further enhanced.
Brief description of the drawings
Fig. 1 is waveguide Raman scattering cavity configuration schematic diagram of the embodiment 1 based on couple prism twice.
Fig. 2 is the ATR curve maps that reflectivity square changes with incidence angle.
Fig. 3 is the ATR curve maps that reflectivity square changes with excitation wavelength.
Fig. 4 is waveguide Raman scattering cavity configuration schematic diagram of the embodiment 2 based on couple prism twice.
Embodiment
With reference to embodiment, the utility model is described in further detail, but not as to restriction of the present utility model.
Embodiment 1：Incorporated by reference to shown in Fig. 1, the waveguide Raman scattering chamber of the couple prism twice involved by the present embodiment, its
Structure is glass prism 1, upper strata silverskin 2, upper strata silicon dioxide protective film 3, glass seal 4, lower floor's dioxy successively from top to bottom
SiClx diaphragm 5, lower floor's silverskin 6, glass substrate 7, glass substrate 8.Upper strata silverskin 2 and upper strata silicon dioxide protective film 3 are successively
The bottom surface of glass prism 1 is deposited on, lower floor's silverskin 6 and underlying silica diaphragm 5 are sequentially deposited to the table of glass substrate 7
Face, then glass prism 1, glass seal 4, glass substrate 7 and glass substrate 8 are combined into one using optical cement technology.Glass lined
The material of bottom 7 and glass substrate 8 is optical glass, and the thickness of glass substrate 7 is less than glass seal 4, and both differences form one
It is individual can infusion fluid cavity, the cavity storage liquid sample.Two through holes are opened on glass seal 4, are that sample leads to respectively
Road 9 and sample output passage 10.
In the present embodiment, glass prism 1 is the prism that section is in isosceles trapezoid, and the base angle of isosceles trapezoid is 40 °.Assuming that enter
Penetrate the wavelength 532nm of laser, the refractive index of glass prism 1 is 1.75, and the thickness of upper strata silverskin 2 is 36nm, the thickness of lower floor's silverskin 6
Spend for 200nm, silver-colored dielectric coefficient is -10.5+i0.8, upper strata silicon dioxide protective film 3 and underlying silica diaphragm 5
Thickness is 60nm, refractive index 1.50.The thickness of glass seal 4 is 500 μm, and the thickness of glass substrate 7 is 480 μm.The incident laser
It is incident in the side of the glass prism 1 of isosceles trapezoid, by the top surface of glass prism 1 after the bottom surface primary event of glass prism 1
Total reflection, and then secondary reflection is carried out by the bottom surface of glass prism 1, finally projected by the another side of glass prism 1.Analyze
Penetrate light and obtain decay total reflection (ATR) curve, as shown in Figures 2 and 3.
From Figure 2 it can be seen that when incidence angle is θATRDuring=40.37 ° of scanning nearby, it is calculated by simulation softward from glass rib
The reflectivity twice of the side emergent light of mirror 1 is R2=7.6 × 10-9。
And as seen from Figure 3, a width of Δ λ=0.5nm of band of the waveguide Raman scattering cavity configuration of couple prism twice, quality
The factorLong wave and the Free Spectral Range FSR in shortwave area>90nm.
Embodiment 2：Incorporated by reference to the waveguide Raman scattering chamber of couple prism, its structure can also be by upper twice shown in Fig. 4
It is down glass prism 101, upper strata silverskin 102, upper strata silicon dioxide protective film 103, glass seal 104, lower floor's dioxy successively
SiClx diaphragm 105, lower floor's silverskin 106, glass substrate 107.Upper strata silverskin 102 and upper strata silicon dioxide protective film 103 are successively
The bottom surface of glass prism 101 is deposited on, lower floor's silverskin 106 and underlying silica diaphragm 105 are sequentially deposited to glass substrate
107 surface, then glass prism 101, glass seal 104 and glass substrate 107 are combined into one using optical cement technology.Glass
The cavity of storage liquid sample is formed between prism 101 and glass substrate 107.Two through holes are opened up on glass substrate 107,
It is sample channel 108 and sample output passage 109 respectively.The example structure eliminates glass lined compared with the structure of embodiment 1
Bottom, cavity thickness are directly determined by the thickness of glass seal 104.When remaining structure is with embodiment 1, have with structure described in embodiment 1
There is constructed effect.
Claims (9)
- A kind of 1. waveguide Raman scattering chamber based on couple prism twice, it is characterised in that：Including be sequentially stacked glass substrate, Glass seal and glass prism, form sample room between the glass substrate and glass prism, the sample room leads to provided with sample introduction Road and sample output passage, the upper surface deposition lower metal film of the glass substrate, the lower surface deposited overlayers of the glass prism Metal film, the glass prism meet：The light incident from glass prism side is after the reflection of the lower surface of glass prism in glass The upper surface total reflection of prism, then by being emitted after the lower surface reflection of glass prism from the another side of glass prism.
- 2. the waveguide Raman scattering chamber according to claim 1 based on couple prism twice, it is characterised in that the glass Prism is the prism that section is in isosceles trapezoid, and the base angle of the isosceles trapezoid is 35 °~45 °.
- 3. the waveguide Raman scattering chamber according to claim 1 based on couple prism twice, it is characterised in that the glass The refractive index of prism is 1.75~1.80.
- 4. the waveguide Raman scattering chamber according to claim 1 based on couple prism twice, it is characterised in that the upper strata The lower surface of metal film and the upper surface deposition silicon dioxide protective film of lower metal film.
- 5. the waveguide Raman scattering chamber according to claim 4 based on couple prism twice, it is characterised in that the dioxy The thickness of SiClx diaphragm is 60nm, refractive index 1.5.
- 6. the waveguide Raman scattering chamber according to claim 1 based on couple prism twice, it is characterised in that the upper strata The material of metal film is silver, and thickness is 35~37nm.
- 7. the waveguide Raman scattering chamber according to claim 1 based on couple prism twice, it is characterised in that the lower floor The material of metal film is silver, and thickness is more than 200nm.
- 8. the waveguide Raman scattering chamber according to claim 1 based on couple prism twice, it is characterised in that the glass The upper surface of substrate is provided with glass substrate, and the lower metal film is deposited on the upper surface of the glass substrate.
- 9. the waveguide Raman scattering chamber according to claim 8 based on couple prism twice, it is characterised in that the glass The material of substrate is optical glass, and thickness is 480 μm, and the glass seal material is optical glass, and thickness is 500 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720752931.6U CN206945539U (en) | 2017-06-27 | 2017-06-27 | Waveguide Raman scattering chamber based on couple prism twice |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720752931.6U CN206945539U (en) | 2017-06-27 | 2017-06-27 | Waveguide Raman scattering chamber based on couple prism twice |
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| Publication Number | Publication Date |
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| CN206945539U true CN206945539U (en) | 2018-01-30 |
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| CN201720752931.6U Active CN206945539U (en) | 2017-06-27 | 2017-06-27 | Waveguide Raman scattering chamber based on couple prism twice |
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2017
- 2017-06-27 CN CN201720752931.6U patent/CN206945539U/en active Active
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