CN206923040U - Vibrating diaphragm and microphone - Google Patents
Vibrating diaphragm and microphone Download PDFInfo
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- CN206923040U CN206923040U CN201720877731.3U CN201720877731U CN206923040U CN 206923040 U CN206923040 U CN 206923040U CN 201720877731 U CN201720877731 U CN 201720877731U CN 206923040 U CN206923040 U CN 206923040U
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- vibrating diaphragm
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- vacantly
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- 230000010355 oscillation Effects 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims description 16
- 230000004888 barrier function Effects 0.000 claims description 15
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000008646 thermal stress Effects 0.000 abstract description 5
- 230000035882 stress Effects 0.000 description 12
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Abstract
The utility model embodiment provides a kind of vibrating diaphragm and microphone, including：Principal oscillation portion, the attached vibration section of multiple arcs, multiple arcs are vacantly open and connecting portion；The attached vibration section of arc is arranged between principal oscillation portion and connecting portion, vacantly opening is arranged between the attached vibration section of arc and principal oscillation portion arc, the hanging opening of arc corresponds with the attached vibration section of arc to be set, and arc, which is vacantly open, wraps up the curved edge of the attached vibration section of arc；Connecting portion includes outward flange and inward flange, and outward flange is the edge of vibrating diaphragm, and two end points that arc is vacantly open are extended on inward flange；Symmetric figure centered on vibrating diaphragm, the angle of the line between the midpoint of two end points lines and the center of vibrating diaphragm that two arcs of arbitrary neighborhood are vacantly open are identical.The utility model embodiment provides a kind of vibrating diaphragm and microphone, improves the sensitivity of vibrating diaphragm and microphone, reduces in production process, influence of the thermal stress to vibrating diaphragm, improves the yield and reliability of MEMS microphone.
Description
Technical field
The utility model embodiment is related to microphone techniques field, more particularly to a kind of vibrating diaphragm and microphone.
Background technology
As the development of wireless telecommunications, Global Mobile Phone Users are more and more.Requirement of the people to speech quality is more next
It is higher.That application is more at present is microphone of microelectromechanicsystem system (micro electro mechanical system
Microphone, MEMS).
MEMS silicon microphone uses capacitive principle, by forming capacitive junctions between the backboard in a vibrating diaphragm and microphone
Structure.When vibrating diaphragm experience outside audio sound pressure signal after, the distance between vibrating diaphragm and backboard change, change capacitance and
Voltage, then capacitance variations are converted into by the change of voltage signal by follow-up cmos amplifier and exported.
The structure design of vibrating diaphragm in prior art microphone, its reliability, sensitivity and yield can not be improved very well.
Utility model content
In view of this, the utility model embodiment provides a kind of vibrating diaphragm and microphone, improves vibrating diaphragm and microphone
Sensitivity, reduce in production process, influence of the thermal stress to vibrating diaphragm, improve the yield and reliability of MEMS microphone.
In a first aspect, the utility model embodiment provides a kind of vibrating diaphragm, including：
Principal oscillation portion, the attached vibration section of multiple arcs, multiple arcs are vacantly open and connecting portion；
The attached vibration section of arc is arranged between the principal oscillation portion and the connecting portion, and vacantly opening is set the arc
Put between the attached vibration section of the arc and the principal oscillation portion, the arc is vacantly open with the attached vibration section of the arc one by one
It is correspondingly arranged, the arc, which is vacantly open, wraps up the curved edge of the attached vibration section of arc；
The connecting portion includes outward flange and inward flange, and the outward flange is the edge of the vibrating diaphragm, and the arc is hanging
Two end points of opening are extended on the inward flange；
Symmetric figure centered on the vibrating diaphragm, in two end points lines that two arcs of arbitrary neighborhood are vacantly open
Point is identical with the angle of the line between the symmetrical centre of the vibrating diaphragm.
Alternatively, the vibrating diaphragm is circle, and the connecting portion is the annulus concentric with the vibrating diaphragm.
Alternatively, the number of the attached vibration section of the arc is N number of that the angle isN is more than or equal to 2, is less than
Or the integer equal to 8.
Alternatively, the vibrating diaphragm is regular polygon, and the attached vibration section of the arc of equal amount is distributed in each edge.
Alternatively, the hanging opening includes two smooth camber lines of radian identical, and two radian identicals
Gap between smooth camber line；
The less smooth camber line of arc length overlaps with the curved edge of the corresponding attached vibration section of arc.
Alternatively, the width range in the gap is more than or equal to 0.5 micron, less than or equal to 2 microns.
Alternatively, the smooth camber line is a part for positive round or a part for ellipse.
Alternatively, the smooth camber line is any one in semicircle, major arc or minor arc.
Second aspect, the utility model embodiment provide a kind of microphone, including：
Including microphone chip, ASIC circuit chip, pedestal and metal coating shell；
The microphone chip and the ASIC circuit chip are fixed on the pedestal, the microphone chip and described
Electrically connected between ASIC circuit chip；
The microphone chip includes the vibrating diaphragm as described in any one in above-mentioned technical scheme.
Alternatively, the microphone chip includes semiconductor chip；
Form the first insulating barrier on the semiconductor chip；
Form the vibrating diaphragm on first insulating barrier；
The second insulating barrier with via on the vibrating diaphragm is formed, the first metal electricity formed in the via
Pole, the first surface of first metal electrode directly contact with the vibrating diaphragm, and the second surface of first metal electrode is low
In the surface of second insulating barrier；
Form the back pole plate on second insulating barrier；
Form the second metal electrode on the back pole plate.
The utility model embodiment provides a kind of vibrating diaphragm and microphone, and the vibrating diaphragm of use is divided into some, main
Independent reciprocating motion is made in vibration section in the presence of acoustic pressure, and the presence that arc is vacantly open can cause the hardness in principal oscillation portion to drop
Low, the amplitude of vibration is bigger, and sensitivity can be higher, while improves the sensitivity of microphone.Vacantly opening is not any for arc
Turning, stress concentration is reduced, avoid vibrating diaphragm and impacted by hyperbar, or fall the moment bottomed out, because of vibrating diaphragm deformation
Caused mechanical stress can be evenly distributed on the hanging edge of opening of arc, avoid stress concentration, reduce vibrating diaphragm rupture
Possibility, improve the measuring body reliability of MEMS microphone antidetonation.Symmetric figure centered on vibrating diaphragm, two arcs of arbitrary neighborhood
The angle of line between the midpoint of two end points lines being vacantly open and the symmetrical centre of vibrating diaphragm is identical so that arc is hanging
Be open the symmetric design on vibrating diaphragm so that the stress distribution that vibrating diaphragm is born is uniform, reduces in production process, and thermal stress is to shaking
The influence of film, improve the yield of product.
Brief description of the drawings
Fig. 1 is a kind of structural representation for vibrating diaphragm that the utility model embodiment one provides；
Fig. 2 is the structural representation for another vibrating diaphragm that the utility model embodiment one provides；
Fig. 3 is the structural representation for another vibrating diaphragm that the utility model embodiment one provides；
Fig. 4 is the structural representation for another vibrating diaphragm that the utility model embodiment one provides；
Fig. 5 is the structural representation for another vibrating diaphragm that the utility model embodiment one provides；
Fig. 6 is the structural representation for another vibrating diaphragm that the utility model embodiment one provides；
Fig. 7 is the structural representation for another vibrating diaphragm that the utility model embodiment one provides
Fig. 8 is the structural representation for another vibrating diaphragm that the utility model embodiment one provides；
Fig. 9 is the structural representation for another vibrating diaphragm that the utility model embodiment one provides；
Figure 10 is the structural representation for another vibrating diaphragm that the utility model embodiment one provides；
Figure 11 is a kind of structural representation for microphone that the utility model embodiment two provides；
Figure 12 is the structural representation for another microphone that the utility model embodiment two provides；
Figure 13 is a kind of structural representation for microphone chip that the utility model embodiment two provides.
Embodiment
The utility model is described in further detail with reference to the accompanying drawings and examples.It is understood that herein
Described specific embodiment is used only for explaining the utility model, rather than to restriction of the present utility model.Further need exist for
It is bright, for the ease of description, the part related to the utility model rather than entire infrastructure are illustrate only in accompanying drawing.
Embodiment one
Fig. 1 is a kind of structural representation for vibrating diaphragm that the utility model embodiment one provides；Fig. 2 is implemented for the utility model
The structural representation for another vibrating diaphragm that example one provides；Fig. 3 is the knot for another vibrating diaphragm that the utility model embodiment one provides
Structure schematic diagram；Fig. 4 is the structural representation for another vibrating diaphragm that the utility model embodiment one provides；Fig. 5 is the utility model
The structural representation for another vibrating diaphragm that embodiment one provides；Fig. 6 is another vibrating diaphragm that the utility model embodiment one provides
Structural representation；Fig. 7 is the structural representation for another vibrating diaphragm that the utility model embodiment one provides；Fig. 8 is this practicality
The structural representation for another vibrating diaphragm that new embodiment one provides；Fig. 9 is another that the utility model embodiment one provides
The structural representation of vibrating diaphragm；Figure 10 is the structural representation for another vibrating diaphragm that the utility model embodiment one provides.
The utility model embodiment provides a kind of vibrating diaphragm 1, and the utility model embodiment is by taking the vibrating diaphragm 1 shown in Fig. 1 as an example
Illustrate, vibrating diaphragm 1 includes：Principal oscillation portion 2, the attached vibration section 3 of multiple arcs, multiple arcs are vacantly open 4 and connecting portion 5；
Vibrating diaphragm 1 shown in Fig. 1 is shaped as circle, and connecting portion 5 is the annulus concentric with vibrating diaphragm 1.The attached vibration section 3 of arc is arranged on master and shaken
Dynamic between portion 2 and connecting portion 5, arc, which is vacantly open, 4 to be arranged between the attached vibration section 3 of arc and principal oscillation portion 2, and arc is vacantly opened
Mouthfuls 4 correspond with the attached vibration section 3 of arc and set, and arc is vacantly open the curved edge of the attached vibration section 3 of 4 parcel arcs；Connection
Portion 5 includes outward flange 50 and inward flange 51, and the solid line of the outside of connecting portion 5 is outward flange 50, and dotted portion is inward flange 51, outside
Edge 50 is the edge of vibrating diaphragm 1, and be vacantly open 4 two end points of arc extend on inward flange 51 that (i.e. A1, A2 and B1 and B2 exists
On inward flange 51)；Symmetric figure centered on vibrating diaphragm 1, symmetrical centre O, two ends of the hanging opening 4 of two arcs of arbitrary neighborhood
The angle of line between the midpoint of point line and the symmetrical centre of vibrating diaphragm 1 is identical.I.e. point C, D, E and F is respectively that arc is hanging
The midpoint of two end points lines of opening 4, and ∠ COD=∠ DOE=∠ EOF=∠ COF.
The utility model embodiment provides a kind of vibrating diaphragm 1, and whole vibrating diaphragm 1 is divided into some, and principal oscillation portion 2 exists
Make in the presence of acoustic pressure it is independent move back and forth, be vacantly open 4 presence of arc can cause the hardness in principal oscillation portion 2 to reduce, and shake
Dynamic amplitude is bigger, and sensitivity can be higher.Vacantly opening 4 without any turning, reduces stress concentration, avoids vibrating diaphragm arc
Impacted by hyperbar, or fall the moment bottomed out, mechanical stress caused by the deformation of vibrating diaphragm 1 can be evenly distributed on arc
4 edges of the hanging opening of shape, avoid stress concentration, reduce the possibility of the rupture of vibrating diaphragm 1.Symmetric figure centered on vibrating diaphragm 1, appoint
The angle of line between the midpoint of two end points lines of the hanging opening 4 of two neighboring arc of anticipating and the symmetrical centre of vibrating diaphragm 1
It is identical so that arc is vacantly open 4 symmetric designs on vibrating diaphragm 1 so that the stress distribution that vibrating diaphragm 1 is born is uniform, reduces
Arc is vacantly open 4 in process of production, influence of the thermal stress to vibrating diaphragm 1, improves the yield of product.
Alternatively, the utility model embodiment defines symmetric figure centered on vibrating diaphragm, but for specific shape simultaneously
Do not limit.The shape that Fig. 1 is exemplarily illustrated vibrating diaphragm can be circle, and connecting portion is the annulus concentric with vibrating diaphragm.Vibrating diaphragm
Shape can also be that vibrating diaphragm is regular polygon, and the attached vibration section of arc of equal amount, exemplarily, Fig. 2 are distributed in each edge
The vibrating diaphragm 1 shown is regular hexagon, and the attached vibration section 3 of 1 arc is distributed in each edge.
Alternatively, the quantity that Fig. 1 schematically illustrates the attached vibration section of arc is 4, but the utility model embodiment
Number for the attached vibration section of arc is simultaneously not specifically limited, the amplitude size and shake that related practitioner can be as needed
The actual size sets itself quantity of film.When the number of the attached vibration section of arc is N number of, angle isN be more than or equal to 2,
Integer less than or equal to 8.Referring to Fig. 3-Fig. 8, the situation that N is 2,3,5,6,7 and 8 exemplarily, in figure is respectively illustrated.
The number of the attached vibration section 3 of arc is more, the area of each attached vibration section 3 of arc, and person skilled can be according to the spirit of vibrating diaphragm 1
Two radian identicals of the requirement of sensitivity, the appropriate area for reducing the attached vibration section 3 of arc or the hanging opening 4 of arc are smooth
Gap L between camber line.
Alternatively, referring to Fig. 1, arc is vacantly open and 4 includes the smooth camber line 41 and 42 of two radian identicals, and two
Gap L between the smooth camber line of radian identical；The arc of the less smooth vibration section 3 attached with corresponding arc of camber line 41 of arc length
Coincident.
Alternatively, the width range of gap L is more than or equal to 0.5 micron, less than or equal to 2 microns.The presence in gap
Reduce the hardness of vibrating diaphragm.So that principal oscillation portion amplitude increases.But gap is too greatly, especially in the relatively low situation of frequency
Under, it is impossible to enough amplitudes are provided.
Alternatively, smooth camber line 41 and 42 is a part for positive round or a part for ellipse.Referring to Fig. 9 and Figure 10,
In Fig. 9, smooth camber line 41 and 42 is minor arc, the area of positive round of the area less than 1/2 of the attached vibration section 3 of arc, in Fig. 10, is put down
Curved stroke 41 and 42 is major arc, and the area of the attached vibration section 3 of arc is more than the area of 1/2 positive round, in the vibrating diaphragm shown in Fig. 1,
Smooth camber line 41 and 42 is semicircle, and the area of the attached vibration section 3 of arc is equal to the area of 1/2 positive round.Similarly, when smooth camber line is
When oval, smooth camber line can be oval 1/2, can also be the ellipse less than or greater than 1/2.Because principal oscillation portion 2 is in sound
Make in the presence of pressure it is independent move back and forth, be vacantly open 4 presence of arc can cause the hardness in principal oscillation portion 2 to reduce, vibration
Amplitude it is bigger, sensitivity can be higher.Person skilled can be according to microphone for vibrating diaphragm sensitivity demand, voluntarily select
The shape and length of smooth camber line are selected, correspondingly the attached vibration section area of arc and shape also change therewith.
Embodiment two
Figure 11 is a kind of structural representation for microphone that the utility model embodiment two provides；Figure 12 is the utility model
The structural representation for another microphone that embodiment two provides；Figure 13 is a kind of Mike that the utility model embodiment two provides
The structural representation of wind chip.
Based on same design utility model, on the basis of above-described embodiment, the utility model embodiment provides one kind
Microphone, referring to Figure 11 and Figure 12, including：Including microphone chip 6, ASIC circuit chip 7, pedestal 8 and metal coating shell 9.
Microphone chip 6 and ASIC circuit chip 7 are fixed on pedestal 8, are electrically connected between microphone chip 6 and ASIC circuit chip 7.
Microphone chip 6 includes any described vibrating diaphragm 1 in the technical scheme in above-described embodiment.It should be noted that Figure 11 is shown
Microphone to carry on the back into sound microphone, enter sound mouth A on microphone pedestal.Microphone shown in Figure 12 is advance sound microphone,
Enter sound mouth B on metal coating shell 9.The microphone of both structures can use the vibrating diaphragm 1 that above-described embodiment is mentioned.
Alternatively, microphone chip 6 includes semiconductor chip 10.Form the first insulating barrier on semiconductor chip 10
11.Form the vibrating diaphragm 1 on the first insulating barrier 11.The second insulating barrier 13 with via 12 on vibrating diaphragm 1 is formed, is formed
The first metal electrode 14 in via 12, the first surface 141 of the first metal electrode 14 directly contact with vibrating diaphragm 1, the first metal
The second surface 142 of electrode 14 is less than the surface 131 of the second insulating barrier 13.The back pole plate 15 on the second insulating barrier 13 is formed,
Exemplarily, multiple acoustic holes 17 are dispersed with back pole plate 15.Form the second metal electrode 16 on back pole plate 15.
In the utility model embodiment, the microphone chip 6 in microphone is by shape between a vibrating diaphragm 1 and back pole plate 15
Into capacitance structure.(audio sound pressure signal is carried on the back into sound mouth from the A in Figure 11 after vibrating diaphragm 1 experiences the audio sound pressure signal of outside
Or B advances sound mouth enters microphone in Figure 12), the distance between vibrating diaphragm 1 and back pole plate change, and change capacitance and electricity
Pressure, then capacitance variations are converted into by the change of voltage signal by ASIC circuit chip 7 and exported.
The utility model embodiment provides a kind of microphone, and the vibrating diaphragm of use is divided into some, principal oscillation portion
Make independent reciprocating motion in the presence of acoustic pressure, the presence that arc is vacantly open can cause the hardness in principal oscillation portion to reduce, shake
Dynamic amplitude is bigger, and sensitivity can be higher, while improves the sensitivity of microphone.Arc is vacantly open no any turning,
Stress concentration is reduced, vibrating diaphragm is avoided and is impacted by hyperbar, or falls the moment bottomed out, because produced by vibrating diaphragm deformation
Mechanical stress can be evenly distributed on the hanging edge of opening of arc, avoid stress concentration, reduce vibrating diaphragm rupture possibility
Property, improve the measuring body reliability of MEMS microphone antidetonation.Symmetric figure centered on vibrating diaphragm, two arcs of arbitrary neighborhood are vacantly opened
The angle of line between the midpoint of two end points lines of mouth and the symmetrical centre of vibrating diaphragm is identical so that vacantly opening exists arc
Symmetric design on vibrating diaphragm so that the stress distribution that vibrating diaphragm is born is uniform, reduces in production process, shadow of the thermal stress to vibrating diaphragm
Ring, improve the yield of product.
Pay attention to, above are only preferred embodiment of the present utility model and institute's application technology principle.Those skilled in the art's meeting
Understand, the utility model is not limited to specific embodiment described here, can carried out for a person skilled in the art various bright
Aobvious change, readjust, be combined with each other and substitute without departing from the scope of protection of the utility model.Therefore, although passing through
Above example is described in further detail to the utility model, but the utility model is not limited only to above implementation
Example, in the case where not departing from the utility model design, other more equivalent embodiments can also be included, and it is of the present utility model
Scope is determined by scope of the appended claims.
Claims (10)
- A kind of 1. vibrating diaphragm, it is characterised in that including：Principal oscillation portion, the attached vibration section of multiple arcs, multiple arcs are vacantly open and connecting portion；The attached vibration section of arc is arranged between the principal oscillation portion and the connecting portion, and vacantly opening is arranged on the arc Between the attached vibration section of arc and the principal oscillation portion, vacantly opening corresponds the arc with the attached vibration section of the arc Set, the arc, which is vacantly open, wraps up the curved edge of the attached vibration section of arc；The connecting portion includes outward flange and inward flange, and the outward flange is the edge of the vibrating diaphragm, and the arc is vacantly open Two end points extend on the inward flange；Symmetric figure centered on the vibrating diaphragm, the midpoint for two end points lines that two arcs of arbitrary neighborhood are vacantly open with The angle of line between the symmetrical centre of the vibrating diaphragm is identical.
- 2. vibrating diaphragm according to claim 1, it is characterised in thatThe vibrating diaphragm is circle, and the connecting portion is the annulus concentric with the vibrating diaphragm.
- 3. vibrating diaphragm according to claim 1, it is characterised in that the number of the attached vibration section of arc is N number of, the angle ForN is the integer less than or equal to 8 more than or equal to 2.
- 4. vibrating diaphragm according to claim 1, it is characterised in thatThe vibrating diaphragm is regular polygon, and the attached vibration section of the arc of equal amount is distributed in each edge.
- 5. vibrating diaphragm according to claim 1, it is characterised in thatThe hanging opening is included between two smooth camber lines of radian identical, and the smooth camber line of two radian identicals Gap；The less smooth camber line of arc length overlaps with the curved edge of the corresponding attached vibration section of arc.
- 6. vibrating diaphragm according to claim 5, it is characterised in thatThe width range in the gap is more than or equal to 0.5 micron, less than or equal to 2 microns.
- 7. vibrating diaphragm according to claim 5, it is characterised in thatThe smooth camber line is a part for positive round or a part for ellipse.
- 8. vibrating diaphragm according to claim 7, it is characterised in thatThe smooth camber line is any one in semicircle, major arc or minor arc.
- A kind of 9. microphone, it is characterised in that including：Including microphone chip, ASIC circuit chip, pedestal and metal coating shell；The microphone chip and the ASIC circuit chip are fixed on the pedestal, the microphone chip and the ASIC Electrically connected between circuit chip；The microphone chip includes the vibrating diaphragm as described in any one in above-mentioned claim 1-8.
- 10. microphone according to claim 9, it is characterised in thatThe microphone chip includes semiconductor chip；Form the first insulating barrier on the semiconductor chip；Form the vibrating diaphragm on first insulating barrier；Form the second insulating barrier with via on the vibrating diaphragm, the first metal electrode formed in the via, institute The first surface for stating the first metal electrode directly contacts with the vibrating diaphragm, and the second surface of first metal electrode is less than described The surface of second insulating barrier；Form the back pole plate on second insulating barrier；Form the second metal electrode on the back pole plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720877731.3U CN206923040U (en) | 2017-07-19 | 2017-07-19 | Vibrating diaphragm and microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720877731.3U CN206923040U (en) | 2017-07-19 | 2017-07-19 | Vibrating diaphragm and microphone |
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| Publication Number | Publication Date |
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| CN206923040U true CN206923040U (en) | 2018-01-23 |
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ID=61347359
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| Application Number | Title | Priority Date | Filing Date |
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| CN201720877731.3U Active CN206923040U (en) | 2017-07-19 | 2017-07-19 | Vibrating diaphragm and microphone |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108337617A (en) * | 2018-03-02 | 2018-07-27 | 上海微联传感科技有限公司 | Piezoelectric microphone |
| CN109195075A (en) * | 2018-11-29 | 2019-01-11 | 华景科技无锡有限公司 | A kind of microphone diaphragm and microphone |
| CN109286883A (en) * | 2017-07-19 | 2019-01-29 | 上海微联传感科技有限公司 | Vibrating diaphragm and microphone |
| CN112272350A (en) * | 2020-10-26 | 2021-01-26 | 无锡韦尔半导体有限公司 | Microphone chip and microphone |
-
2017
- 2017-07-19 CN CN201720877731.3U patent/CN206923040U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109286883A (en) * | 2017-07-19 | 2019-01-29 | 上海微联传感科技有限公司 | Vibrating diaphragm and microphone |
| CN108337617A (en) * | 2018-03-02 | 2018-07-27 | 上海微联传感科技有限公司 | Piezoelectric microphone |
| CN109195075A (en) * | 2018-11-29 | 2019-01-11 | 华景科技无锡有限公司 | A kind of microphone diaphragm and microphone |
| CN109195075B (en) * | 2018-11-29 | 2024-04-12 | 华景科技无锡有限公司 | Microphone vibrating diaphragm and microphone |
| CN112272350A (en) * | 2020-10-26 | 2021-01-26 | 无锡韦尔半导体有限公司 | Microphone chip and microphone |
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Effective date of registration: 20190129 Address after: Room 118, Building 20, No. 83 Lane 1-42, Hongxiang North Road, Wanxiang Town, Pudong New Area, Shanghai, 201318 Patentee after: Maigan Microelectronics (Shanghai) Co.,Ltd. Address before: 201203 2, 3 building, 439 Chunchun Road, Pudong New Area, Shanghai. Patentee before: MICROLINK SENSTECH SHANGHAI Ltd. |
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Effective date of registration: 20240510 Address after: 214135 China Sensor Network International Innovation Park F2, 200 Linghu Avenue, Xinwu District, Wuxi City, Jiangsu Province Patentee after: SV SENSTECH (WUXI) CO.,LTD. Country or region after: China Address before: Room 118, Building 20, No. 83 Lane 1-42, Hongxiang North Road, Wanxiang Town, Pudong New Area, Shanghai, 201318 Patentee before: Maigan Microelectronics (Shanghai) Co.,Ltd. Country or region before: China |