CN206834191U - A kind of device film layer processing unit - Google Patents
A kind of device film layer processing unit Download PDFInfo
- Publication number
- CN206834191U CN206834191U CN201720672893.3U CN201720672893U CN206834191U CN 206834191 U CN206834191 U CN 206834191U CN 201720672893 U CN201720672893 U CN 201720672893U CN 206834191 U CN206834191 U CN 206834191U
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- temperature control
- control panel
- film layer
- chamber
- processing unit
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a kind of device film layer processing unit, the device film layer processing unit includes multiple chambers, and each chamber interior includes：At least one temperature control panel, for being heated or cooled, temperature control panel is provided with least one vacuum absorption holes；At least one load carrier, is arranged on temperature control panel, and vacuum absorption holes homonymy, and one or more load carriers on same temperature control panel are to bearing substrate, and substrate surface is formed with wet film or film layer；At least one drive mechanism, for driving load carrier to be moved relative to temperature control panel, to adjust the distance between substrate and temperature control panel, a vacuum chamber is comprised at least in multiple chambers.When device film layer or wet film are dried or cooled down, substrate is placed on load carrier, by drive mechanism load carrier can be driven to be moved relative to temperature control panel, to realize adjustment the distance between substrate and temperature control panel, so that the film layer on substrate carries out gradual drying or cooling treatment, make thicknesses of layers more uniform, improve product quality.
Description
Technical field
The utility model belongs to photoelectric device processing technique field, and in particular to a kind of device film layer processing unit.
Background technology
With the development of science and technology, in each manufacturing field, the technique and equipment of modernization just gradually substitute craft and manpower
Operation, so improves production capacity, product yield, but the input cost of installation space, equipment and material is affected simultaneously, closely
A little years, the improvement to technique and equipment are always popular research topic.
In illumination, display or the field such as solar cell, generally use water-laid film is come the film layer in the device that makes, and one
As after wet film is set, processing, the existing usual function of wet film processing equipment such as to be dried, heat, cooling down to wet film
It is single, the processing needs of complexity can not be met, and the membrane uniformity after preparation is poor.
In the prior art typically by the way that two function devices are integrated, vacuum drying and heating are such as incorporated into one
In device, to shorten the processing time between two technique, but still can not effectively solve even film layer sex chromosome mosaicism, and above-mentioned dress
A collection of wet film can only be handled every time by putting, and production efficiency and utilization rate are relatively low.
Utility model content
In order to solve the above problems, the utility model provides a kind of device film layer processing unit, to film layer or forms film
Wet film before layer carries out progressive drying or cooling treatment, and causes film layer to have preferable uniformity.
The technical solution of the utility model is：A kind of device film layer processing unit, the device film layer processing unit include
Multiple chambers, each chamber interior include：
At least one temperature control panel, for being heated or cooled, the temperature control panel is provided with least one vacuum absorption holes；
At least one load carrier, is arranged on temperature control panel, and the vacuum absorption holes homonymy, and one on same temperature control panel
Individual or multiple load carriers to bearing substrate, wherein, the substrate surface is formed with wet film or film layer；
At least one drive mechanism, moved for one or more driving load carrier relative to temperature control panel, to adjust base
Distance between plate and temperature control panel, wherein, a vacuum chamber is comprised at least in the multiple chamber, the vacuum chamber, which has, to be taken out
The chamber of vacuum function.
Typically substrate is directly adjacent to or be placed on temperature control panel and is brought rapidly up or is cooled, it is uniform to be unfavorable for wet membrane formation
Device film layer, result even in the decline of the optical property of device film layer, thus the utility model to device film layer in itself or
When the wet film formed before the film layer is dried or cooled down, substrate of the surface formed with wet film or film layer is placed in load carrier
On, because load carrier is arranged on temperature control panel, and load carrier is connected with drive mechanism, therefore can be driven by drive mechanism
Dynamic load carrier moves relative to temperature control panel, to realize adjustment the distance between substrate and temperature control panel, or passes through drive mechanism
The substrate on load carrier is stayed for some time in a certain position, realize Double-side Heating or cooling treatment to substrate, make base
Wet film or film temperature on plate are able to gradual change, in order to substrate be dried or cooling treatment.This practicality is new
Type is additionally provided with vacuum absorption holes on temperature control panel, can pass through the direct vacuum suction substrate of vacuum absorption holes so that substrate is straight
Connect and contacted with temperature control panel, thus the utility model can to maintain a certain distance between substrate and temperature control panel be dried or
Cooling, can also directly contact with temperature control panel and be dried or cool down.In addition, the addition of vacuum absorption holes, can play fixation
The effect of substrate, avoid being heated or cooled the heated or inequality that is cooled caused by substrate off normal in processing procedure.
When film layer being dried using the utility model, by drive mechanism load carrier can also be driven to move, made
Relatively large distance is kept between substrate and temperature control panel, then slowly adjustment further between load carrier and temperature control panel away from
From, or the mode that stays for some time in centre etc., so as to realize gradual baking or cooling, when drying is gone in based Dehumidification Membranes
After most of solvent, substrate is then driven not touch temperature control panel now close to temperature control panel, make substrate progressively start to add
Heat, after certain time, driving substrate contacted with temperature control panel, and by the vacuum absorption holes on temperature control panel by substrate vacuum suction in
On temperature control panel, start to toast.Therefore the utility model can be to substrate Double-side Heating or cooling, and can realize wet film or film layer temperature
Spend gradual change.
Multiple chambers include at least one vacuum chamber in other the utility model, can when processing is dried to film layer
To be dried in vacuo, in order to the drying process of film layer.And the utility model is in use, when needing to put substrate
When being placed on load carrier or removing substrate from load carrier, when load carrier lifts substrate, it is easy to putting for substrate
Put or take out so that be more steady when substrate picks and places.
Preferably, offer at least one through hole on the temperature control panel, load carrier include it is at least one be arranged in it is logical
Support member in hole, drive mechanism is arranged at one or more via bottoms, and is connected with one or more load carriers, is used for
Driving support member penetrates in through hole or leant out through hole.Substrate is placed on support member by the utility model, when needing to adjust substrate
During height, it is only necessary to adjust drive mechanism, moved up and down by drive mechanism driving support member.Driven in the utility model
Mechanism can be connected with the controller of outside, by way of controller control, realize the gradual control of drive mechanism.
Can also there is a variety of the structure of support member, steadily moved in order that obtaining substrate, preferably, respectively in the utility model
Support member is support column that is isometric and being parallel to each other；Drive mechanism includes：
Driving plate, it is connected with one end of multiple support columns, for controlling multiple support columns synchronously to penetrate through hole or leaning out logical
Hole；
Drive rod, it is connected with driving plate, for controlling driving plate to be moved relative to temperature control panel.
When driving substrate movement, control drive rod movement, because driving plate is fixedly connected with drive rod, therefore driving plate
It will be synchronized with the movement, simultaneously because multiple support columns may be contained within the driving plate, and support column is isometric, therefore can cause base
Plate realizes smoothly gradual movement.There is a variety of the connected mode of support column and driving plate, such as can be in the utility model
Magnet is set in driving plate, be also provided with the support columns with the opposite polarity magnet of driving plate upper magnet, pass through the magnetic of magnet
Suction is fixed.
Wherein, drive rod can be a straight profiled bat in the utility model, drive rod and driving plate are vertically arranged, therefore
When needing to control driving plate to move up and down, it is only necessary to control drive rod to move up and down.It can also be incited somebody to action in the utility model
Drive rod is arranged to other structures form, such as is arranged to linkage form, drive rod include first connecting rod and with driving
The second connecting rod that plate is fixedly connected, it is first connecting rod is horizontally disposed, it is necessary to when controlling the driving plate to move up and down, it is only necessary to drive
One connecting rod moves in the horizontal direction.There is a variety of the structure of drive mechanism, in the utility model preferably, the driving
Mechanism is cylinder, and the drive shaft of the cylinder is fixedly connected with the bottom of support member.Cylinder in the utility model can with it is outer
The controller in portion is connected, and the keying of cylinder is controlled by controller.
In order that obtaining substrate can steadily move, preferably, the load carrier is four, four load carriers difference
It is arranged at four diagonal angles of quadrangle.
Preferably, the alignment device with load carrier position correspondence is additionally provided with the temperature control panel.Substrate is placed in
When on load carrier, the putting position of substrate can be adjusted by alignment device.
There is a variety of the structure of alignment device, in the utility model preferably, alignment device includes two perpendicular pairs
Position baffle plate.
There is a variety of the structure of temperature control panel, in the utility model preferably, temperature control panel includes thermostat units and is arranged on tune
Heat-conducting plate on warm unit, vacuum absorption holes are arranged on heat-conducting plate.Thermostat units transfer heat to heat-conducting plate, heat-conducting plate pair
Processing is dried in film layer on substrate, when the vacuum absorption holes on heat-conducting plate are by substrate adsorption, substrate can be caused with leading
Hot plate completely attaches to, so as to the uniform treatment of substrate.Heat-conducting resin can also be set between thermostat units and heat-conducting plate, passed through
Heat-conducting resin is transmitted the heat between thermostat units and heat-conducting plate.
Preferably, a chamber includes multiple temperature control panels, multiple temperature control panels are arranged one by one from top to bottom.This practicality is new
Type can carry out mass production, and multiple substrates are respectively placed in a chamber and handled, greatly improve production efficiency.
Vacuum can be kept in chamber in the utility model, inert gas can also be filled with, therefore can be according to reality
Need to set cavity environment, preferably, at least one chamber also includes being used to be passed through compressed air or inert gas plenum connects
Mouthful, wherein, inert gas includes nitrogen.
Preferably, multiple chambers include at least two in vacuum bakeout chamber, vacuum drying chamber and cooling chamber,
Wherein, vacuum bakeout chamber and vacuum drying chamber belong to vacuum chamber.
Vacuum bakeout chamber and vacuum drying chamber include inflatable interface, and the temperature control panel for heating；
Cooling chamber includes the temperature control panel for cooling down.
The utility model can be set according to technique needs and be used to handle the chamber of film layer accordingly, for example, dry or
Cooling treatment, help to shorten process cycle of the equipment to film layer.
It is vacuum bakeout chamber in device film layer processing unit, true preferably, device film layer processing unit includes body
Empty drying chamber and cooling chamber are stacked from high to low on the body.Multiple chambers can handle simultaneously more batches it is wet
Film, improve operating efficiency.
Compared with prior art, the beneficial effects of the utility model are embodied in：
During making devices film layer, by the utility model to being dried or to film for forming the wet film of device film layer
Layer carries out cooling treatment, and substrate of the surface formed with wet film or film layer is placed on load carrier, can be driven by drive mechanism
Dynamic load carrier moves relative to temperature control panel, and to realize adjustment the distance between substrate and temperature control panel, and the utility model exists
Vacuum absorption holes are provided with temperature control panel, can not only to maintain a certain distance between temperature control panel and substrate, can also lead to
Cross vacuum absorption holes substrate is entered it is vacuum adsorbed so that substrate directly contacts with temperature control panel, therefore the utility model causes base
Film layer on plate carries out gradual drying or cooling treatment so that film layer handles more uniform, improves product quality.
Brief description of the drawings
Fig. 1 is that device film layer processing unit is bowed to structural representation in the utility model.
Fig. 2 is substrate and structural representation during temperature control panel holding certain distance in the utility model.
Fig. 3 is that substrate is located at the structural representation on temperature control panel in the utility model.
Fig. 4 is structural representation when multiple chambers are engaged in the utility model.
Fig. 5 is a kind of structural representation of embodiment of drive mechanism in the utility model.
Fig. 6 is the structural representation when drive mechanism in Fig. 5 is engaged with temperature control panel.
Embodiment
As shown in Figure 1 to 4, the utility model includes body 4, includes multiple chambers on body 4, in multiple chambers at least
Including a vacuum chamber, in above-mentioned multiple chambers, each chamber interior includes：At least one temperature control panel 1, for heat or
Cooling, temperature control panel 1 are provided with least one vacuum absorption holes 11；At least one load carrier 2, is arranged on temperature control panel 1, and true
The empty homonymy of adsorption hole 11, one or more load carriers 2 on same temperature control panel 1 to bearing substrate 3, wherein, the surface of substrate 3
Formed with wet film or film layer；At least one drive mechanism (not shown in figure 1), for driving load carrier 2 relative to temperature control panel 1
It is mobile, to adjust the distance between substrate 3 and temperature control panel 1.
In order that obtaining substrate can steadily move, generally, as shown in figure 1, load carrier 2 is four in the present embodiment
Individual, four load carriers 2 are respectively arranged four diagonal angles in quadrangle.It is additionally provided with temperature control panel 1 and the position of load carrier 2
Corresponding alignment device 13.When substrate is placed on four load carriers 2, the pendulum of substrate 3 can be adjusted by alignment device 13
Put position.There is a variety of the structure of alignment device 13, alignment device 13 is perpendicular including two in the present embodiment in the utility model
Contraposition baffle plate.
Typically substrate 3 is directly adjacent to or be placed on temperature control panel and is brought rapidly up or is cooled, it is equal to be unfavorable for wet membrane formation
Even device film layer, results even in the decline of the optical property of device film layer, thus the utility model to device film layer in itself
Or substrate of the surface formed with wet film or film layer is placed in together when being dried or cooling down by the wet film formed before the film layer first
On one or more load carriers 2 on one temperature control panel, because load carrier 2 is arranged on temperature control panel 1, and load carrier and drive
Motivation structure connects, therefore by drive mechanism load carrier 2 can be driven to be moved relative to temperature control panel 1, to realize adjustment substrate 3
The distance between temperature control panel 1, in order to carry out gradual drying or cooling treatment to substrate 3.
The utility model is additionally provided with vacuum absorption holes 11 on temperature control panel 1, can be directly true by vacuum absorption holes 11
Empty sorbing substrate 3, that is, substrate 3 is directly contacted with temperature control panel 1, therefore the utility model can cause substrate 3 and temperature control panel
Between maintain a certain distance and be dried or cool down, see Fig. 2, can also directly be contacted with temperature control panel 1 and be dried or cool down,
See Fig. 3, wherein, drive mechanism not shown in Fig. 2 and Fig. 3.
Such as when wet film is dried using device film layer processing unit of the present utility model, driving machine can be passed through
Structure driving load carrier 2 is moved, and to keep relatively large distance between substrate and temperature control panel 1, then slowly adjustment is drawn
Nearly the distance between load carrier 2 and temperature control panel 1, or the mode that stays for some time in centre etc., it is gradual so as to realize
Baking, when dry remove most of solvent after, then drive substrate 3 not touch temperature control panel 1 now close to temperature control panel 1,
Substrate 3 is set progressively to begin to warm up, after certain time, driving substrate 3 contacts with temperature control panel 1, and is inhaled by the vacuum on temperature control panel 1
The vacuum suction of substrate 3 on temperature control panel 1, is started to toast by attached hole.It can also be connected in the utility model with peripheral control unit, lead to
When crossing controller to be regulated and controled, such as carrying out gradual processing, drive mechanism is controlled by controller, in order to more accurate
Control driving progress.
Multiple chambers include at least one vacuum chamber in the utility model, such as, when processing is dried to film layer,
It can be dried in vacuo, in order to the drying process of film layer.There is a variety of the structure type of temperature control panel 1, such as in the utility model
Shown in Fig. 1, offer at least one through hole 12 in the present embodiment on temperature control panel 1, load carrier 2 include it is at least one be arranged in it is logical
Support member 21 in hole 12, drive mechanism is arranged at the bottom of through hole 12, and is connected with one or more load carriers 2, for driving
Dynamic support member 21 penetrates in through hole 12 or leant out through hole 12.Substrate is placed on one end of support member 21 by the utility model, support
The other end of part 21 is connected through through hole 12 with drive mechanism, substrate and the driving machine below temperature control panel not shown in Fig. 1
Structure.When needing to adjust the height of substrate 3, it is only necessary to adjust drive mechanism, drive four support members 21 same by drive mechanism
Step moves up and down.Drive mechanism can be connected with the controller of outside in the utility model, be controlled by controller
Mode, the gradual control of drive mechanism is realized, controller is also not shown in Fig. 1.
Can also there is a variety of the structure of support member 21 in the utility model, in order that substrate 3 steadily moves, such as Fig. 5 and
Shown in Fig. 6, support member 21 is support column that is isometric and being parallel to each other in the present embodiment；Drive mechanism includes：Driving plate 5 is and more
One end connection of individual support column 21, for controlling multiple support columns 21 to be synchronized with the movement；Drive rod 6 is connected with driving plate 5, for controlling
Driving plate 5 processed is relative to the relative motion of temperature control panel 1.Each support member 21 can slide through the through hole 12 of temperature control panel 1 respectively with driving
Dynamic plate 5 connects, and the other end of each support member 21 is used for bearing substrate 3.When driving the movement of substrate 3, control drive rod 6 moves, by
Be fixedly connected in driving plate 5 with drive rod 6, therefore driving plate 5 will also be synchronized with the movement, simultaneously because multiple support columns (column
Support member 21) it may be contained within the driving plate 5, and support column is isometric, therefore it is smoothly gradual make it that substrate 3 is realized
It is mobile.Wherein, drive rod 6 can be a straight profiled bat in the utility model, drive rod 6 and driving plate 5 are vertically arranged, therefore
When needing to control driving plate 5 to move up and down, it is only necessary to control drive rod 6 to move up and down.Can also in the utility model
Drive rod 6 is arranged to other structures form, such as is arranged to linkage form, drive rod include first connecting rod and with drive
The second connecting rod that dynamic plate 5 is fixedly connected, first connecting rod is horizontally disposed with, as long as during Level Promoting first connecting rod, second connecting rod will
Driving plate 5 is driven to move up and down, so as to realize the driving to driving plate 5.Certainly, in the utility model can also there is drive rod 6
Other existing structure forms.
Drive mechanism can also have an other structures in the utility model, such as drive mechanism is cylinder, the drive shaft of cylinder
It is fixedly connected with the bottom of support member 21.Cylinder can be connected with the controller of outside, and opening for cylinder is controlled by controller
Close.
There is a variety of the structure of temperature control panel 1, as shown in Figures 2 and 3, temperature control panel 1 includes in the present embodiment in the utility model
Thermostat units and the heat-conducting plate being arranged on thermostat units, vacuum absorption holes are arranged on heat-conducting plate.Thermostat units pass heat
Be handed to heat-conducting plate, or thermostat units absorb heat from heat-conducting plate, heat-conducting plate the film layer on substrate is thermally dried or
Cooling treatment, when the vacuum absorption holes 11 on heat-conducting plate are by substrate adsorption, substrate 3 can be caused to be completely attached to heat-conducting plate,
So as to the uniform treatment of substrate 3.Heat-conducting resin can also be set between thermostat units and heat-conducting plate, will be adjusted by heat-conducting resin
Heat between warm unit and heat-conducting plate is transmitted.
Multiple temperature control panels 1 can be included in the utility model in a chamber, multiple temperature control panels 1 are arranged one by one from top to bottom
Cloth.The utility model can carry out mass production, and multiple substrates are respectively placed in a chamber and handled, are carried significantly
High efficiency.
Vacuum can be kept in vacuum chamber in the utility model, compressed air or inert gas can also be filled with, because
This can also include being used to be passed through compressed air or inertia according to being actually needed setting cavity environment, such as at least one chamber
The inflatable interface of gas.
As shown in figure 4, multiple chambers include vacuum bakeout chamber 41, vacuum drying chamber 42 and cooling chamber in the present embodiment
At least two in room 43, wherein, vacuum bakeout chamber 41 and vacuum drying chamber 42 belong to above-mentioned vacuum chamber, and vacuum is dried
Include suction interface, and the temperature control panel 1 for heating in roasting chamber 41 and vacuum drying chamber 42；Cooling chamber 43 includes using
In the temperature control panel 1 of cooling.The utility model can be set according to technique needs and be used for the chamber for handling film layer accordingly, such as
Dry or cooling treatment, help to shorten process cycle of the equipment to film layer.And the vacuum in device film layer processing unit
Baking chamber 41, vacuum drying chamber 42 and cooling chamber 43 are stacked from high to low on body 4.Dried in the utility model
It is roasting and dry, cooling can be a series of processing procedure, and mode of the above-mentioned arrangement high temperature in upper low temperature under, be easy to by
Carry out according to the making step of device film layer, with mechanical arm can be used cooperatively during practical operation one by one, realize full-automatic behaviour
Make so that processing is more convenient, and allows multiple chambers to handle more batches of wet films simultaneously, improves operating efficiency.
Claims (10)
1. a kind of device film layer processing unit, it is characterised in that the device film layer processing unit includes multiple chambers, each chamber
Inside includes：
At least one temperature control panel (1), for being heated or cooled, the temperature control panel (1) is provided with least one vacuum absorption holes
(11)；
At least one load carrier (2), is arranged on temperature control panel (1), with the vacuum absorption holes (11) homonymy, same temperature control panel
(1) one or more load carriers (2) on to bearing substrate (3), wherein, substrate (3) surface formed with wet film or
Film layer；
At least one drive mechanism, for driving one or more load carriers (2) mobile relative to temperature control panel (1), with adjustment
Distance between substrate (3) and temperature control panel (1),
Wherein, a vacuum chamber is comprised at least in the multiple chamber.
2. device film layer processing unit as claimed in claim 1, it is characterised in that offered at least on the temperature control panel (1)
One through hole (12), the load carrier (2) include at least one support member (21) being arranged in through hole (12), the driving
Mechanism is arranged at one or more through holes (12) bottom, and is connected with one or more load carriers (2), for driving support member
(21) penetrate in through hole (12) or lean out through hole (12).
3. device film layer processing unit as claimed in claim 2, it is characterised in that each support member (21) is isometric and phase
Mutually parallel support column；The drive mechanism includes：
Driving plate (5), is connected with one end of multiple support columns, for controlling multiple support columns synchronously to penetrate through hole (12) or leaning out
Through hole (12)；
Drive rod (6), it is connected with driving plate (5), for controlling driving plate (5) to be moved relative to temperature control panel (1).
4. device film layer processing unit as claimed in claim 1, it is characterised in that the load carrier (2) is four, four
Load carrier (2) is respectively arranged at four diagonal angles of quadrangle.
5. device film layer processing unit as claimed in claim 1, it is characterised in that be additionally provided with the temperature control panel (1) with
The alignment device (13) of load carrier (2) position correspondence.
6. device film layer processing unit as claimed in claim 1, it is characterised in that the temperature control panel (1) includes thermostat units
With the heat-conducting plate being arranged on thermostat units, the vacuum absorption holes (11) are arranged on heat-conducting plate.
7. device film layer processing unit as claimed in claim 1 a, it is characterised in that chamber includes multiple temperature control panels
(1), multiple temperature control panels (1) are arranged one by one from top to bottom.
8. device film layer processing unit as claimed in claim 1, it is characterised in that also include using at least one chamber
In being passed through compressed air or inert gas plenum interface.
9. the device film layer processing unit as described in claim 1 to 8 any one, it is characterised in that the multiple chamber bag
At least two in vacuum bakeout chamber (41), vacuum drying chamber (42) and cooling chamber (43) are included, wherein,
The vacuum bakeout chamber (41) and the vacuum drying chamber (42) include inflatable interface, and the temperature adjustment for heating
Plate (1)；
The cooling chamber (43) includes the temperature control panel (1) for cooling down.
10. device film layer processing unit as claimed in claim 9, it is characterised in that the device film layer processing unit includes
Body (4), vacuum bakeout chamber (41), vacuum drying chamber (42) and cooling chamber in the device film layer processing unit
(43) it is stacked from high to low on the body (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720672893.3U CN206834191U (en) | 2017-06-09 | 2017-06-09 | A kind of device film layer processing unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720672893.3U CN206834191U (en) | 2017-06-09 | 2017-06-09 | A kind of device film layer processing unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206834191U true CN206834191U (en) | 2018-01-02 |
Family
ID=60775394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720672893.3U Active CN206834191U (en) | 2017-06-09 | 2017-06-09 | A kind of device film layer processing unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206834191U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109735813A (en) * | 2019-01-21 | 2019-05-10 | 深圳市华星光电半导体显示技术有限公司 | A kind of substrate film coating equipment |
| CN114034164A (en) * | 2020-12-30 | 2022-02-11 | 广东聚华印刷显示技术有限公司 | Vacuum drying device |
-
2017
- 2017-06-09 CN CN201720672893.3U patent/CN206834191U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109735813A (en) * | 2019-01-21 | 2019-05-10 | 深圳市华星光电半导体显示技术有限公司 | A kind of substrate film coating equipment |
| CN109735813B (en) * | 2019-01-21 | 2021-02-02 | 深圳市华星光电半导体显示技术有限公司 | Substrate coating equipment |
| CN114034164A (en) * | 2020-12-30 | 2022-02-11 | 广东聚华印刷显示技术有限公司 | Vacuum drying device |
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