CN114034164A

CN114034164A - Vacuum drying device

Info

Publication number: CN114034164A
Application number: CN202011626754.XA
Authority: CN
Inventors: 谢仕昭
Original assignee: Guangdong Juhua Printing Display Technology Co Ltd
Current assignee: Guangdong Juhua Printing Display Technology Co Ltd
Priority date: 2020-12-30
Filing date: 2020-12-30
Publication date: 2022-02-11

Abstract

The invention discloses a vacuum drying device. The vacuum drying device comprises a vacuum drying box body, a bearing mechanism and a rotating mechanism; the vacuum drying box body is provided with a vacuum drying cavity capable of presetting vacuum degree and temperature, the bearing mechanism is movably arranged in the vacuum drying cavity and used for bearing an object to be dried, and the rotating mechanism is connected with the bearing mechanism and used for driving the bearing mechanism to rotate. When the vacuum drying device is used for drying the film layer after ink-jet printing, the drying effect is good, and the dried film layer is uniformly distributed.

Description

Vacuum drying device

Technical Field

The invention relates to the field of display, in particular to a vacuum drying device.

Background

In the display technology, the functional layers are generally prepared by vacuum evaporation technology and inkjet printing technology. The existing vacuum evaporation technology has low material utilization rate, a large-size high-precision mask is required to be used when a large-size display panel is prepared, and the large-size high-precision mask is easy to droop or deform, so that the appearance of each functional layer is uneven, the product yield is low, and the production cost is high.

The inkjet printing process can greatly improve the utilization rate of materials, reduce the production cost, and realize the advantages of large-size OLED (Organic Light-Emitting Diode) and QLED (Quantum Dot Light-Emitting Diode) display panel printing. In a conventional OLED/QLED inkjet printing process, an inkjet printing technology is usually adopted to print and form each functional layer in a pixel pit of an existing ITO (Indium Tin Oxide) patterned substrate, the printed functional layer needs to be subjected to vacuum drying treatment, and in the vacuum drying treatment process, appropriate vacuum drying conditions such as vacuum degree, time, temperature and the like need to be set according to the printed functional layer to obtain a film layer.

Disclosure of Invention

Based on this, it is necessary to provide a vacuum drying apparatus. The vacuum drying device can realize good drying effect and uniform distribution of the film layer after ink-jet printing, and avoids the accumulation phenomenon of the object to be dried, such as the edge of a substrate.

A vacuum drying device comprises a vacuum drying box body, a bearing mechanism and a rotating mechanism;

the vacuum drying box body is provided with a vacuum drying cavity capable of presetting vacuum degree and temperature, the bearing mechanism is movably arranged in the vacuum drying cavity and used for bearing an object to be dried, and the rotating mechanism is connected with the bearing mechanism and used for driving the bearing mechanism to rotate.

In one embodiment, the bearing mechanism has a bearing surface, the bearing surface has a bearing groove for bearing the object to be dried, and the depth of the bearing groove is smaller than the thickness of the object to be dried.

In one embodiment, the vacuum drying device further comprises an adsorption mechanism, the adsorption mechanism is connected with the vacuum drying box body, an adsorption hole is formed in the bottom surface of the bearing groove, and the adsorption mechanism can suck air through the adsorption hole to fix the object to be dried.

In one embodiment, the bottom surface of the bearing groove is provided with an adsorption area consisting of a plurality of adsorption holes, and the adsorption holes are distributed in a matrix.

In one embodiment, the pore diameter of the adsorption pores is 0.3-0.5 mm;

and/or the plurality of adsorption holes are distributed in a matrix with the number of rows equal to the number of columns, and the number of the adsorption holes in each row and/or each column of the matrix is not less than 3.

In one embodiment, the adsorption area is in a square structure, the side length of the adsorption area is smaller than the side length a of the object to be dried, the diagonal length b of the adsorption area is smaller than the side length a of the object to be dried, and the difference between the side length a of the object to be dried and the diagonal length b of the adsorption area is 5-7 mm.

In one embodiment, the number of the adsorption holes is n²N is TRUNC (L/10/r), and n is a natural number not less than 3; wherein L is the diagonal length of the object to be dried, and r is the aperture of the adsorption hole.

In one embodiment, the bearing groove is a circular groove, the diameter R of the bearing groove is larger than the diagonal length L of the object to be dried, and the difference between R and L is 1-2 mm.

In one embodiment, the rotational mechanism is a magnetic fluid drive.

In one embodiment, the vacuum drying device further comprises a vacuumizing mechanism, wherein the vacuumizing mechanism is connected with the vacuum drying box body and is used for controlling the vacuum degree in the vacuum drying cavity to be a preset value; the vacuumizing mechanism comprises a dry pump and a molecular pump which are connected in series, and the dry pump is connected with the vacuum drying box body.

In one embodiment, the vacuum drying apparatus further includes a filtering mechanism, the filtering mechanism includes a filtering cover body and a filtering membrane, the filtering cover body has a flow guide channel, a first opening for being matched with the bearing mechanism, and a second opening opposite to the first opening, both the first opening and the second opening are communicated with the flow guide channel, the filtering membrane is connected in the filtering cover body and closes the second opening, and the filtering membrane has a filtering hole.

In one embodiment, the number of the filter membranes is multiple, and the filter membranes are arranged in sequence with a space between adjacent filter membranes.

In one embodiment, the filtering membrane has a plurality of concentric filtering rings, each of the filtering rings has a plurality of filtering holes, and the porosity of the filtering rings increases gradually from the center of the filtering membrane to the edge of the filtering membrane.

In one embodiment, the filter mechanism further comprises a moving member connected to the filter housing for driving the filter housing to move.

In one embodiment, the moving member includes a moving screw and a moving driver connected to the filter housing through the moving screw.

In one embodiment, the radial dimension of the flow guide channel gradually narrows from the first opening to the second opening.

In one embodiment, the vacuum drying apparatus further includes a heating mechanism connected to the carrying mechanism for controlling the temperature in the vacuum drying chamber to a preset temperature.

Among the foretell vacuum drying device, treat that the dry article is in order to predetermine the temperature, predetermine vacuum drying in the vacuum drying intracavity and predetermine the time, when dry, treat that the dry article can be in order to predetermine the slow uniform velocity of rotational speed rotation under slewing mechanism's drive, so can realize treating that the dry article has better drying effect, the rete distributes evenly like the rete after the inkjet printing, has avoided the pile up phenomenon that the base plate edge appears among the traditional drying method.

Foretell vacuum drying device realizes shunting the air current when the evacuation through setting up filtering mechanism, has improved the membrane effect after the drying. When the vacuum pumping is carried out, the airflow is shunted through the filtering holes on the filter membrane, so that the distribution of the membrane layer is more uniform, and the phenomenon of edge accumulation of the object to be dried is greatly reduced.

Drawings

FIG. 1 is a schematic view of a vacuum drying apparatus according to example 1 of the present invention;

FIG. 2 is a schematic view of a carrying mechanism of the vacuum drying apparatus shown in FIG. 1;

FIG. 3 is a schematic top view of a carrying mechanism of the vacuum drying apparatus shown in FIG. 2;

FIG. 4 is a schematic view of a vacuum drying apparatus according to example 2 of the present invention;

FIG. 5 is a schematic view of a filter mechanism of the vacuum drying apparatus shown in FIG. 4;

FIG. 6 is a schematic view of a filter membrane of the filter mechanism shown in FIG. 5;

fig. 7 is a schematic view of an object to be dried.

Description of the reference numerals

10. A vacuum drying device; 100. vacuum drying the box body; 110. a vacuum drying chamber; 200. a carrying mechanism; 210. a bearing surface; 211. a bearing groove; 2111. an adsorption zone; 2112. an adsorption hole; 300. a heating mechanism; 400. a rotating mechanism; 500. a vacuum pumping mechanism; 510. a dry pump; 520. a molecular pump; 600. an adsorption mechanism; 700. a filtering mechanism; 710. a filtering cover body; 711. a flow guide channel; 712. a first opening; 713. a second opening; 720. a filtration membrane; 721. a filtration pore; 7221. a first region; 7222. a second region; 7223. a third region; 7224. a first region; 7225. a fifth region; 730. a moving member; 731. moving the screw rod; 732. a movement driver; 800. a control mechanism; 20. and (5) drying the object.

Detailed Description

To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

Referring to fig. 1, a vacuum drying apparatus 10 is provided according to an embodiment of the present invention.

A vacuum drying device 10 comprises a vacuum drying box 100, a bearing mechanism 200, a heating mechanism 300, a rotating mechanism 400 and a vacuumizing mechanism 500.

The vacuum drying cabinet 100 has a vacuum drying chamber 110. The carrying mechanism 200 is movably disposed in the vacuum drying chamber 110 for carrying the object 20 to be dried. The object to be dried 20 includes, but is not limited to, a substrate, a display device, etc.

The heating mechanism 300 is connected to the carrying mechanism 200 for controlling the temperature inside the vacuum drying chamber 110 to a preset temperature. Preferably, the heating mechanism 300 is preferably connected below the carrying mechanism 200.

The rotating mechanism 400 is connected to the supporting mechanism 200 for driving the supporting mechanism 200 to rotate synchronously with the heating mechanism 300. The speed of the rotation mechanism 400 driving the carrying mechanism 200 to rotate is 10rpm-60rpm, and the carrying mechanism rotates at a constant speed.

The vacuum pumping mechanism 500 is connected to the vacuum drying chamber 100 for controlling the vacuum degree in the vacuum drying chamber 110 to a predetermined vacuum degree.

In one embodiment, please refer to fig. 2, the supporting mechanism 200 has a supporting surface 210. Preferably, the carrying surface 210 is disposed in a horizontal state. The carrying surface 210 has a carrying groove 211 for carrying the object 20 to be dried. The depth of the carrying groove 211 is smaller than the thickness of the object 20 to be dried. The depth of the carrying groove 211 is 0.2-1mm smaller than the thickness of the object 20 to be dried. Preferably, the depth of the carrying groove 211 is smaller than the thickness of the object 20 to be dried by 0.5 mm.

In one embodiment, the vacuum drying apparatus 10 further includes an adsorption mechanism 600. The adsorption mechanism 600 is connected to the vacuum drying chamber 100. The bottom surface of the carrier groove 211 has an adsorption hole 2112. The adsorption mechanism 600 can suck air through the adsorption holes 2112 to achieve fixing of the items to be dried 20.

In one embodiment, the bottom surface of the carrier tank 211 has an adsorption region 2111 consisting of a plurality of adsorption holes 2112, and the plurality of adsorption holes 2112 are arranged in a matrix.

In one embodiment, the pores of the adsorption holes 2112 have a diameter r of 0.3 to 0.5 mm. Preferably, the aperture r of the adsorption holes 2112 is 0.4mm ± 0.05 mm.

In one embodiment, the plurality of chucking holes 2112 are distributed in a matrix having a number of rows equal to a number of columns, and the number of chucking holes 2112 in each row and/or each column of the matrix is not less than 3.

In one embodiment, when the item to be dried 20 is square, as shown in fig. 7, the suction region 2111 has a square configuration, and the size of the suction region 2111 is smaller than that of the item to be dried 20. Specifically, the side length of the adsorption region 2111 is smaller than the side length a of the to-be-dried object 20. The diagonal length b of the adsorption region 2111 is smaller than the side length a of the item to be dried 20, and the difference between the side length a of the item to be dried 20 and the diagonal length b of the adsorption region 2111 is 5-7 mm. At this time, referring to fig. 3, the supporting groove 211 is a circular groove, and the diameter R of the supporting groove 211 depends on the size of the object 20 to be dried. The diameter R of the carrying groove 211 is larger than the diagonal length L of the object 20 to be dried, and the difference between R and L is 1-2 mm. It will be appreciated that in other embodiments, the bearing slots 211 may have other shapes, such as square slots, oval slots, etc.

In one embodiment, the number S ═ n of the adsorption holes 2112²N is TRUNC (L/10/r), and n is a natural number not less than 3; wherein L is a diagonal length of the object 20 to be dried, and r is a hole diameter of the adsorption hole 2112.

In one embodiment, the rotation mechanism 400 is a magnetic fluid drive. The magnetic fluid driver comprises a magnetic field control assembly and an adsorption magnetic fluid capable of being magnetically attracted with the magnetic field control assembly, the magnetic field control assembly is connected with the vacuum drying box body 100, and the adsorption magnetic fluid is connected with the bearing mechanism 200.

In one embodiment, the vacuum pumping mechanism 500 includes a dry pump 510 and a molecular pump 520 connected in series, the dry pump 510 being connected to the vacuum drying chamber 100.

In one embodiment, referring to fig. 4, the vacuum drying apparatus 10 further comprises a filtering mechanism 700. The filter mechanism 700 includes a filter housing 710 and a filter membrane 720. Referring to fig. 5, the filtering cover 710 has a flow guiding channel 711, a first opening 712 for matching with the supporting mechanism 200, and a second opening 713 disposed opposite to the first opening 712, both the first opening 712 and the second opening 713 are communicated with the flow guiding channel 711, the filtering membrane 720 is connected in the filtering cover 710 and closes the second opening 713, and the filtering membrane 720 has a filtering hole 721. According to the invention, the filtering mechanism 700 is arranged to realize the diversion of the air flow during the vacuumizing, so that the film forming effect after drying is improved, and the air flow is diverted through the filtering holes 721 on the filtering film 720 during the vacuumizing, so that the film layer distribution is more uniform, and the edge accumulation phenomenon of the object 20 to be dried is greatly reduced.

In one embodiment, the number of the filtering membranes 720 is plural, and the plural filtering membranes 720 are sequentially arranged with a space between the adjacent filtering membranes 720. Referring to fig. 5, the number of the filter membranes 720 is three, the three filter membranes 720 are sequentially stacked, and the adjacent filter membranes 720 have an equal distance therebetween, and the distance between the adjacent filter membranes 720 is 5mm ± 1 mm. Because the positions of the filter membranes 720 are different, the size of the filter needs to be adjusted adaptively, and the centers of the three filter membranes 720 are ensured to be positioned on the same axis. The periphery of the filter membrane 720 is hermetically connected with the inner wall of the flow guide channel 711, so as to ensure that the air flow passes through the filter holes 721. Preferably, the radial cross-section of the flow guiding channel 711 is circular, in which case the filter membrane 720 is circular. The triple-layer filter membranes 720 are sequentially formed to have a 10 ° cross-phase from the second opening 713 to the first opening 712.

In one embodiment, the shape and size of the first opening 712 correspond to the shape and size of the carrying surface 210 of the carrying mechanism 200, respectively. For example, when the bearing surface 210 is circular, the first opening 712 has a circular shape, and the inner diameter of the first opening 712 is equal to the diameter of the bearing surface 210, so that the filter housing 710 can cover the entire bearing surface 210. When the supporting surface 210 is circular, the supporting groove 211 is located at the middle position of the supporting surface 210.

In one embodiment, the filter membrane 720 has a plurality of concentric filter rings, each of which has a plurality of filter holes 721, and the porosity of the filter rings increases from the center of the filter membrane 720 to the edge of the filter membrane 720. Referring to FIG. 6, each filter membrane 720 is provided with 4 filter rings, and the 4 filter rings divide the filter membrane 720 into 5 regions, namely a first region 7224, a first region 72247221, a second region 7222, a third region 7223, a fourth region and a central fifth region 7225, which are located on the four filter rings. Wherein, the porosity T1 of the first region 72247221 of the first region 7224 > the porosity T2 of the second region 7222 > the porosity T3 of the third region 7223 > the porosity T4 of the fourth region > the porosity T5 of the fifth region 7225, wherein the porosity is the total area of the filter holes 721 on the filter ring/the area of the filter ring. When the porosity T1 of the first region 72247221 of the first region 7224 > the porosity T2 of the second region 7222 > the porosity T3 of the third region 7223 > the porosity T4 of the fourth region > the porosity T5 of the fifth region 7225, it indicates that the pore size of the filter pores 721 in the first region 72247221 of the first region 7224 < the pore size of the filter pores 721 in the second region 7222 < the pore size of the filter pores 721 in the third region 7223 < the pore size of the filter pores 721 in the fourth region < the pore size of the filter pores 721 in the fifth region 7225. The fifth region 7225 may be one complete filter aperture 721, i.e., the area of the fifth region 7225 is the area of one filter aperture 721.

In one embodiment, filter mechanism 700 further includes a moving member 730. The moving member 730 is coupled to the filtering enclosure 710 for driving movement of the filtering enclosure 710.

In one embodiment, the moving part 730 includes a moving screw 731 and a moving driver 732. The displacement actuator 732 is connected to the filtering enclosure 710 by a displacement screw 731. The movement driver 732 may be a servo motor.

In one embodiment, the radial dimension of the flow guide channel 711 gradually narrows from the first opening 712 to the second opening 713. That is, the size of the first opening 712 is larger than that of the second opening 713, and thus it is possible to ensure that the air flow is concentrated from the peripheral edge of the object 20 to be dried to the central portion during the drying, thereby preventing the edge of the object 20 to be dried from being piled up.

The embodiment of the invention also provides a vacuum drying method.

A vacuum drying method using the vacuum drying device 10 comprises the following steps:

the object 20 to be dried is placed on the carrying mechanism 200 in the vacuum drying chamber 110.

Controlling the heating mechanism 300 to make the interior of the vacuum drying chamber 110 reach a preset temperature; controlling the vacuum pumping mechanism 500 to make the vacuum degree in the vacuum drying chamber 110 reach a preset value; the control rotation mechanism 400 drives the bearing mechanism 200 to rotate according to a preset rotation speed.

The object 20 to be dried is dried for a predetermined time.

In one embodiment, the method further comprises the following steps: the suction mechanism 600 is controlled to suck air through the suction holes 2112 of the carrying mechanism 200 to fix the object 20 to be dried.

In one embodiment, the predetermined speed is 10-60 rpm.

According to the vacuum drying device 10, the bearing mechanism 200, the heating mechanism 300 and the vacuumizing mechanism 500 are arranged to be matched with each other, so that the object 20 to be dried is dried in the vacuum drying cavity 110 at a preset temperature and a preset vacuum degree for a preset time, and the object 20 to be dried can slowly rotate at a constant speed at a preset rotating speed under the driving of the rotating mechanism 400 during drying, so that a film layer after ink-jet printing has a good drying effect and is uniformly distributed, and the accumulation phenomenon of the edge of a substrate in the traditional drying method is avoided.

Example 1

The present embodiment provides a vacuum drying apparatus 10.

Referring to fig. 1-3, a vacuum drying apparatus 10 includes a vacuum drying box 100, a carrying mechanism 200, a heating mechanism 300, a rotating mechanism 400, a vacuum pumping mechanism 500, an absorbing mechanism 600, and a control mechanism 800.

The vacuum drying cabinet 100 has a vacuum drying chamber 110.

The carrying mechanism 200 is movably disposed in the vacuum drying chamber 110 for carrying the object 20 to be dried. The supporting mechanism 200 has a supporting surface 210, and the supporting surface 210 is disposed in a horizontal state. The carrying surface 210 is circular, the diameter R of the carrying groove 211 depends on the size of the object 20 to be dried, when the object 20 to be dried is square, the diameter R of the carrying groove 211 is greater than the diagonal length L of the object 20 to be dried, and the difference between R and L is 1 mm.

The central position of the carrying surface 210 has a carrying groove 211 with a circular cross section for carrying the object 20 to be dried. The depth of the bearing groove 211 is less than the thickness of the object 20 to be dried, and the depth of the bearing groove 211 is 0.5mm less than the thickness of the object 20 to be dried. The bottom surface of the carrier tank 211 has a plurality of adsorption holes 2112, the adsorption holes 2112 form an adsorption region 2111, and the adsorption holes 2112 are arranged in a matrix. The aperture r of the adsorption holes 2112 is 0.4 mm. + -. 0.05 mm. The plurality of chucking holes 2112 are arranged in a matrix having the same number of rows and columns, and the number of chucking holes 2112 in each row or each column is the same.

When the object 20 to be dried is square, the adsorption region 2111 has a square structure, and the size of the adsorption region 2111 is smaller than that of the object 20 to be dried. Specifically, the side length of the adsorption region 2111 is smaller than the side length a of the to-be-dried object 20. The diagonal length b of the adsorption region 2111 is smaller than the side length a of the item to be dried 20, and the difference between the side length a of the item to be dried 20 and the diagonal length b of the adsorption region 2111 is 5 mm. The number S of the adsorption holes 2112 is n²N is TRUNC (L/10/r), and n is a natural number not less than 3; wherein L is a diagonal length of the object 20 to be dried, and r is a hole diameter of the adsorption hole 2112. In this embodiment, the number S of the adsorption holes 2112 is 9.

The adsorption mechanism 600 is connected to the vacuum drying cabinet 100, and the adsorption mechanism 600 can suck air through the adsorption holes 2112 to fix the object 20 to be dried. The adsorption mechanism 600 is electrically connected to the control mechanism 800, and the adsorption mechanism 600 is a suction fan.

The heating mechanism 300 is connected to the carrying mechanism 200 for heating the object 20 to be dried to a predetermined temperature. The heating mechanism 300 is preferably attached below the carrying mechanism 200. The heating mechanism 300 is electrically connected to the control mechanism 800.

The rotating mechanism 400 is connected to the supporting mechanism 200 for driving the supporting mechanism 200 to rotate synchronously with the heating mechanism 300. The speed of the rotation mechanism 400 driving the carrying mechanism 200 to rotate is 10rpm-60rpm, and the carrying mechanism rotates at a constant speed. The rotation mechanism 400 is a magnetic fluid driver. The magnetic fluid driver comprises a magnetic field control assembly and an adsorption magnetic fluid capable of being magnetically attracted with the magnetic field control assembly, the magnetic field control assembly is connected with the vacuum drying box body 100, and the adsorption magnetic fluid is connected with the bearing mechanism 200.

The vacuum pumping mechanism 500 is connected to the vacuum drying chamber 100 for controlling the vacuum degree in the vacuum drying chamber 110 to a predetermined value. The vacuum pumping mechanism 500 includes a dry pump 510 and a molecular pump 520 connected in series, and the dry pump 510 is connected to the vacuum drying chamber 100. The dry pump 510 and the molecular pump 520 are electrically connected to the control mechanism 800. The preset value of the degree of vacuum required in the vacuum drying chamber 110 and the time for vacuuming can be realized by the control mechanism 800.

Example 2

The present embodiment provides a vacuum drying apparatus 10.

Referring to fig. 4 and fig. 2 to fig. 3, a vacuum drying apparatus 10 includes a vacuum drying cabinet 100, a carrying mechanism 200, an adsorbing mechanism 600, a heating mechanism 300, a rotating mechanism 400, a vacuum-pumping mechanism 500, a filtering mechanism 700, and a control mechanism 800.

The vacuum drying cabinet 100 has a vacuum drying chamber 110.

The carrying mechanism 200 is movably disposed in the vacuum drying chamber 110 for carrying the object 20 to be dried. The supporting mechanism 200 has a supporting surface 210, and the supporting surface 210 is disposed in a horizontal state. The carrying surface 210 is circular, the diameter R of the carrying groove 211 depends on the size of the object 20 to be dried, when the object 20 to be dried is square, the diameter R of the carrying groove 211 is greater than the diagonal length L of the object 20 to be dried, and the difference between R and L is 2 mm.

When the object 20 to be dried is square, the adsorption region 2111 has a square structure, and the size of the adsorption region 2111 is smaller than that of the object 20 to be dried. Specifically, the side length of the adsorption region 2111 is smaller than the side length a of the to-be-dried object 20. The diagonal length b of the adsorption region 2111 is smaller than the side length a of the item to be dried 20, and the difference between the side length a of the item to be dried 20 and the diagonal length b of the adsorption region 2111 is 7 mm. The number S of the adsorption holes 2112 is n²N is TRUNC (L/10/r), and n is a natural number not less than 3; wherein L is a diagonal length of the object 20 to be dried, and r is a hole diameter of the adsorption hole 2112. In this embodiment, the number of the adsorption holes 2112S＝9。

The rotating mechanism 400 is connected to the supporting mechanism 200 for driving the supporting mechanism 200 to rotate synchronously with the heating mechanism 300. The speed of the rotation mechanism 400 driving the carrying mechanism 200 to rotate is 10rpm-60rpm, and the carrying mechanism rotates at a constant speed. The rotation mechanism 400 is a magnetic fluid driver. The magnetic fluid driver comprises a magnetic field control assembly and an adsorption magnetic fluid capable of being magnetically attracted with the magnetic field control assembly, the magnetic field control assembly is connected with the vacuum drying box body 100, and the adsorption magnetic fluid is connected with the bearing mechanism 200. The magnetic field control element is electrically connected to the control mechanism 800.

The filter mechanism 700 includes a filter housing 710, a filter membrane 720, and a moving member 730.

The filter membrane 720 is circular. The filtering cover body 710 has a flow guide channel 711, a first opening 712 for matching with the bearing mechanism 200, and a second opening 713 disposed opposite to the first opening 712, the radial section of the flow guide channel 711, the first opening 712, and the second opening 713 are all circular, and the inner diameter of the first opening 712 is equal to the diameter of the bearing surface 210, so as to ensure that the filtering cover body 710 covers the entire bearing surface 210. The radial dimension of the flow guide channel 711 narrows from the first opening 712 to the second opening 713. That is, the size of the first opening 712 is larger than the size of the second opening 713. The first opening 712 and the second opening 713 are both communicated with the flow guide channel 711, the filter membrane 720 is connected in the filter cover body 710 and closes the second opening 713, and the filter membrane 720 is provided with filter holes 721.

Referring to fig. 5, the number of the filter membranes 720 is three, the three filter membranes 720 are sequentially stacked, and the adjacent filter membranes 720 have an equal distance therebetween, and the distance between the adjacent filter membranes 720 is 5mm ± 1 mm. Because the positions of the filtering membranes 720 are different, the filtering size needs to be adjusted adaptively, the centers of the three filtering membranes 720 are located on the same axis, and the peripheries of the filtering membranes 720 are connected with the inner wall of the flow guide channel 711 in a sealing manner, so that the airflow can pass through the filtering holes 721. The triple-layer filter membranes 720 are sequentially formed to have a 10 ° cross-phase from the second opening 713 to the first opening 712.

Each layer of filtering membrane 720 is provided with 4 concentric filtering rings, each filtering ring is provided with a plurality of filtering holes 721, and the porosity of the filtering rings is gradually increased from the center of the filtering membrane 720 to the edge direction of the filtering membrane 720. Referring to FIG. 6, the 4 filter rings divide the filter membrane 720 into 5 regions, a first region 7224, a first region 72247221, a second region 7222, a third region 7223, a fourth region, and a central fifth region 7225, all of which are located on the four filter rings. Wherein, the porosity T1 of the first region 72247221 of the first region 7224 > the porosity T2 of the second region 7222 > the porosity T3 of the third region 7223 > the porosity T4 of the fourth region > the porosity T5 of the fifth region 7225, wherein the porosity is the total area of the filter holes 721 on the filter ring/the area of the filter ring.

The moving member 730 is coupled to the filtering enclosure 710 for driving movement of the filtering enclosure 710. Specifically, the moving part 730 includes a moving screw 731 and a moving driver 732. The displacement actuator 732 is connected to the filtering enclosure 710 by a displacement screw 731. The movement driver 732 is electrically connected to the control mechanism 800. In this embodiment, the moving driver 732 is a servo motor.

Example 3

The present example provides a vacuum drying method.

A vacuum drying method for an OLED display device, the OLED display device is square in shape. The vacuum drying apparatus 10 (as shown in fig. 4) in example 2 was used, and specifically includes the following steps:

the vacuum drying chamber 110 is opened, and the control mechanism 800 controls the moving driver 732 to drive the moving screw 731 to move so as to drive the filtering enclosure 710 to ascend to open the carrying surface 210.

The OLED display device is held by tweezers and is sent into the vacuum drying chamber 110, and the OLED display device is placed in the carrying groove 211 of the carrying mechanism 200, where the placing position of the OLED display device corresponds to the absorption area 2111, that is, four sides of the OLED display device correspond to and are parallel to four sides of the square absorption area 2111. The vacuum drying chamber 110 is closed.

The control mechanism 800 controls the adsorption mechanism 600 to work, and the adsorption mechanism 600 sucks air through each adsorption hole 2112 to adsorb and fix the OLED display device.

The control mechanism 800 controls the moving driver 732 to drive the moving screw 731 to move so as to drive the filtering cover 710 to reset to close the bearing surface 210.

The rotating mechanism 400 is controlled to drive the bearing mechanism 200 to rotate at a constant speed according to the rotating speed of 10-60 rpm.

The control mechanism 800 controls the heating mechanism 300 to operate, so that the temperature in the vacuum drying chamber 110 reaches a preset temperature.

The control mechanism 800 controls the vacuum pumping mechanism 500 to work, so that the vacuum degree in the vacuum drying chamber 110 reaches a preset value, and the vacuum pumping is kept for a preset time.

After the drying is completed, the control mechanism 800 controls the adsorption mechanism 600 to stop working to release the OLED display device, controls the rotation mechanism 400 to drive the bearing mechanism 200 to stop working, controls the heating mechanism 300 to stop working, and controls the vacuum-pumping mechanism 500 to stop working by the control mechanism 800. The control mechanism 800 controls the moving driver 732 to drive the moving screw 731 to move so as to drive the filtering cover 710 to lift up to open the bearing surface 210. And opening the vacuum drying cavity 110, and taking out the OLED display device through tweezers to perform subsequent processing procedures.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. A vacuum drying device is characterized by comprising a vacuum drying box body, a bearing mechanism and a rotating mechanism;

2. The vacuum drying apparatus of claim 1, wherein the carrying mechanism has a carrying surface, the carrying surface has a carrying groove for carrying the object to be dried, and the depth of the carrying groove is smaller than the thickness of the object to be dried.

3. The vacuum drying device according to claim 2, further comprising an adsorption mechanism, wherein the adsorption mechanism is connected to the vacuum drying box, the bottom surface of the carrying groove is provided with an adsorption hole, and the adsorption mechanism can suck air through the adsorption hole to fix the object to be dried.

4. The vacuum drying apparatus according to claim 3, wherein the bottom surface of the carrier tank has an adsorption region consisting of a plurality of adsorption holes, and the adsorption holes are arranged in a matrix.

5. The vacuum drying apparatus according to claim 4, wherein the diameter of the adsorption hole is 0.3-0.5 mm;

6. A vacuum drying apparatus according to any one of claims 1 to 5, in which the rotary mechanism is a magnetic fluid actuator.

7. The vacuum drying device according to any one of claims 1 to 5, further comprising a vacuum pumping mechanism connected to the vacuum drying box for controlling the vacuum degree in the vacuum drying chamber to a predetermined value; the vacuumizing mechanism comprises a dry pump and a molecular pump which are connected in series, and the dry pump is connected with the vacuum drying box body.

8. The vacuum drying apparatus according to any one of claims 1 to 5, further comprising a filtering mechanism, the filtering mechanism comprising a filtering housing and a filtering membrane, the filtering housing having a flow guide channel, a first opening for engaging with the carrying mechanism, and a second opening opposite to the first opening, the first opening and the second opening both communicating with the flow guide channel, the filtering membrane being connected inside the filtering housing and closing the second opening, the filtering membrane having a filtering hole thereon.

9. The vacuum drying apparatus according to claim 8, wherein the number of the filter membranes is plural, and plural filter membranes are sequentially arranged with a space between adjacent filter membranes.

10. The vacuum drying apparatus as claimed in claim 8, wherein the filtering membrane has a plurality of concentric filtering rings, each of the filtering rings has a plurality of filtering holes, and the porosity of the filtering rings increases from the center of the filtering membrane to the edge of the filtering membrane.

11. The vacuum drying apparatus of claim 8, wherein the filter mechanism further comprises a moving member coupled to the filter housing for driving movement of the filter housing.

12. The vacuum drying apparatus of claim 11, wherein the moving means comprises a moving screw and a moving driver, the moving driver being connected to the filter housing through the moving screw.

13. The vacuum drying apparatus of claim 8, wherein the radial dimension of the flow guide channel gradually narrows from the first opening to the second opening.

14. The vacuum drying device according to any one of claims 1 to 5 and 9 to 13, further comprising a heating mechanism connected to the carrying mechanism for controlling the temperature in the vacuum drying chamber to a preset temperature.