KR101191737B1 - Deposition apparatus of organic for light emitting diodes - Google Patents

Abstract

The present invention relates to an evaporation deposition apparatus for organic materials of an organic light emitting device, comprising: a deposition chamber including a tray on which a substrate is supported and the deposition of organic materials; A plurality of organic material supply chambers disposed in the deposition chamber so as to face each other with the substrate and having an outlet through which organic materials stored therein flow out; A supply fan disposed at an outlet of each of the organic material supply chambers to form an air flow to transfer the organic material inside the organic material supply chambers to the substrate; The supply fan is driven by a fan driver, and the fan driver comprises a driving source provided outside the organic material supply chamber; A drive magnet coupled to the drive shaft of the drive source and rotating; It is coupled to the rotation shaft of the supply fan and provided with a polarity opposite to the drive magnet, and comprises a driven magnet that rotates by the magnetic force in accordance with the rotation of the drive magnet is made evenly deposited throughout the entire area even if the oil substrate is large Can be.

Description

Evaporation and Deposition of Organic Substances in Organic Light-Emitting Devices

The present invention relates to an organic material evaporation evaporation apparatus, and more particularly, to an organic material evaporation evaporation apparatus for evaporating and evaporating organic material on the surface of an organic light emitting device.

An organic light emitting device such as an OLED is a self-luminous display device using a phenomenon in which electrons and holes injected through an anode and a cathode are recombined into an organic thin film to form excitons, and light of a specific wavelength is generated by energy from the formed excitons. to be.

In order to form a light emitting layer on the surface of the organic light emitting device, a low molecular or organic polymer material must be deposited on the surface of the substrate.

The organic material evaporation deposition apparatus of the conventional organic light emitting device includes a crucible capable of self heating, and a plurality of nozzles for spraying the organic material heated in the crucible to the substrate. However, in the conventional organic material evaporation deposition apparatus of the organic light emitting device, the crucible has a circular shape, and since the organic material is injected by the nozzle, organic materials are deposited in a concentric shape corresponding to the shape of the crucible.

As a result, there is a problem that the organic material is not evenly deposited on the substrate.

In addition, as the size of the substrate increases, it is difficult to massify the evaporation amount of the organic material through the crucible, and it is difficult to control the deposition uniformity.

In addition, the organic material discharged from the crucible may not be actually deposited on the substrate and is discharged to the outside, resulting in an increase in manufacturing cost.

An object of the present invention is to solve the above problems, to provide an organic material evaporation deposition apparatus of an organic light emitting device capable of uniformly depositing an organic material on the surface of the substrate.

In addition, another object of the present invention is to provide an evaporation deposition apparatus that can be used by simply adjusting the evaporation amount of the organic material in response to the increase in the size of the substrate.

In addition, another object of the present invention is to provide an organic material evaporation deposition apparatus that can effectively reduce the amount of the organic material is not deposited and discharged to the outside.

One aspect of the present invention for achieving the above technical problem relates to an organic material evaporation deposition apparatus. The organic material evaporation deposition apparatus of the organic light emitting device of the present invention, the substrate is provided with a tray, the deposition chamber which proceeds the deposition of the organic material; A plurality of organic material supply chambers disposed in the deposition chamber so as to face each other with the substrate and having an outlet through which organic materials stored therein flow out; An organic material evaporation evaporation apparatus of an organic light emitting device, comprising: a supply fan disposed at an outlet of each organic material supply chamber to form an air flow to transfer organic materials within the organic material supply chamber to the substrate; The supply fan is driven by a fan driver, and the fan driver comprises: a driving source provided outside the organic material supply chamber; A drive magnet coupled to the drive shaft of the drive source and rotating; It is coupled to the rotation shaft of the supply fan and provided with the opposite polarity to the drive magnet, characterized in that it comprises a driven magnet to rotate by the magnetic force in accordance with the rotation of the drive magnet.

According to an embodiment of the present invention, the organic material supply chamber may include: an organic material storage body in which an outlet formed through the entire front area is formed toward the substrate, and the organic material is accommodated in the lower area; It may include a heater coupled to the outer region of the organic material storage body for heating the organic material storage body.

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According to an embodiment, the plurality of organic material supply chambers may accommodate organic materials having different colors.

According to an embodiment, the tray may support a pair of substrates on both sides, and a plurality of organic material supply chambers stacked up and down may be disposed on the left and right sides of the tray.

According to one embodiment, the supply fan may be provided as an axial flow fan to supply the organic material in the transverse direction of the axial direction of the supply fan.

According to one embodiment, the supply fan is characterized in that the two supply fans are formed in the organic material supply chamber spaced apart from the left and right.

 On the other hand, an object of the present invention is provided with a tray for supporting the substrate, the deposition chamber in which the deposition of the organic material proceeds; An organic material supply chamber disposed in the deposition chamber and having a plurality of outlets through which organic materials stored therein flow out in a vertical direction; It may be achieved by the organic material evaporation deposition apparatus of the organic light emitting device, characterized in that it comprises a supply fan disposed in the organic material supply chamber to form an air flow to transfer the organic material inside the organic material supply chamber to the substrate. .

According to one embodiment, the organic material supply chamber is provided so as to increase in size as the plurality of outlets in the upward direction.

On the other hand, an object of the present invention, the substrate is provided with a tray, the deposition chamber in which the deposition of the organic material proceeds; An organic material supply chamber disposed in the deposition chamber and having a plurality of outlets through which organic materials stored therein flow out in a vertical direction; The organic material evaporation deposition apparatus of the organic light emitting device, characterized in that it comprises a partition disposed in a direction perpendicular to the inside of the organic material supply chamber to form a circulation path so that the organic material rises and descends upwards and is discharged through the outlet. Can be achieved by

According to one embodiment, the plurality of outlets may be provided with a smaller size gradually toward the upper direction.

The organic material evaporation deposition apparatus according to the present invention is provided with a plurality of organic material supply chambers for supplying the organic material in a direction perpendicular to one side of the substrate to supply the organic material from the side of the substrate. Therefore, the deposition amount of the organic material can be easily controlled and the deposition can be uniformly performed over the entire area of the substrate.

In addition, the supply fan is provided in the shape of the axial flow fan to minimize the organic materials scattered to the outside to be scattered to the outside can be efficiently deposited organic materials.

In addition, as the substrate is enlarged, the organic material supply chamber may be disposed vertically or horizontally to increase the organic material supply area, thereby actively responding to the size of the substrate.

On the other hand, an object of the present invention, the substrate is provided with a tray, the deposition chamber in which the deposition of the organic material proceeds; An organic material supply chamber disposed in the deposition chamber and having a plurality of outlets through which organic materials stored therein flow out in a vertical direction; It may be achieved by the organic material evaporation deposition apparatus of the organic light emitting device, characterized in that it comprises a supply fan disposed in the organic material supply chamber to form an air flow to transfer the organic material inside the organic material supply chamber to the substrate. .

According to an embodiment, the organic material supply chamber may be provided such that the plurality of outlets increases in size toward the upper direction.

On the other hand, an object of the present invention, the substrate is provided with a tray, the deposition chamber in which the deposition of the organic material proceeds; An organic material supply chamber disposed in the deposition chamber and having a plurality of outlets through which organic materials stored therein flow out in a vertical direction; The organic material evaporation deposition apparatus of the organic light emitting device, characterized in that it comprises a partition disposed in a direction perpendicular to the inside of the organic material supply chamber to form a circulation path so that the organic material rises and descends upwards and is discharged through the outlet. It may also be achieved by.

According to one embodiment, the plurality of outlets may be provided with a smaller size gradually toward the upper direction.

1 is a schematic diagram schematically showing a cross-sectional configuration of an organic material evaporation deposition apparatus of the present invention,
Figure 2 is a schematic diagram showing the movement path of the organic material by the air flow of the supply fan of the organic material evaporation deposition apparatus of the present invention,
Figure 3 is a schematic diagram showing another embodiment of the fan drive unit of the organic material evaporation deposition apparatus of the present invention,
4 is a schematic view showing another embodiment of the supply fan of the present invention.
5 to 10 are schematic views showing various embodiments of the organic material evaporation deposition apparatus of the present invention,
11 is an exemplary view showing an embodiment of a mask used in the organic material evaporation deposition apparatus.

In order to fully understand the present invention, preferred embodiments of the present invention will be described with reference to the accompanying drawings. The embodiments of the present invention may be modified into various forms, and the scope of the present invention should not be construed as being limited to the embodiments described in detail below. This embodiment is provided to more completely explain the present invention to those skilled in the art. Therefore, the shapes and the like of the elements in the drawings can be exaggeratedly expressed to emphasize a clearer description. It should be noted that in the drawings, the same members are denoted by the same reference numerals. Detailed descriptions of well-known functions and constructions which may be unnecessarily obscured by the gist of the present invention are omitted.

1 is a schematic view showing a cross-sectional configuration of an organic material evaporation deposition apparatus 100 according to the present invention.

As illustrated, the organic material evaporation deposition apparatus 100 according to the present invention includes a deposition chamber 110 in which evaporation of a substrate is evaporated, and a plurality of organic materials A stored in the deposition chamber 110. Organic material supply chamber (130, 140, 150, 160).

In addition, the organic material evaporation deposition apparatus 100 of the organic light emitting device according to the present invention is an organic material supply source 190 for supplying the organic material to the organic material supply chamber (130,140,150,160), and to supply the dilution gas to the organic material supply chamber (130,140,150,160) The diluent gas supply source 170 and a heater power source 180 for supplying power to the heater 133 is included.

The deposition chamber 110 provides a space in which the deposition of the organic material A is performed on the substrate W. In each side region of the deposition chamber 110, an inlet (not shown) into which the substrate W is introduced and an outlet (not shown) from which the substrate W having been deposited are discharged are formed, respectively. Although not shown in the figure, a transfer means (not shown) for transferring the substrate W from the inlet (not shown) to the outlet (not shown) at a constant speed is provided in the deposition chamber 110. The transfer means (not shown) moves the substrate from one side to the other side.

At this time, the substrate W moves inside the deposition chamber 110 while being coupled to the tray 120. The mask M on which the pattern m is formed is disposed on the entire surface of the substrate W. FIG. The tray 120 supports the substrate W such that the deposition surface of the substrate W faces the plurality of organic material supply chambers 130, 140, 150, and 160. The tray 120 may adsorb the substrate by hydraulic pressure or may fix and support the substrate by mechanical means.

One side of the deposition chamber 100 is connected to a vacuum pump 117 for maintaining the interior of the deposition chamber 100 in a vacuum state.

The organic material supply chambers 130, 140, 150, and 160 are arranged in a plurality of layers on one side of the deposition chamber 110 to supply the organic material A from the side toward the substrate W. The organic material supply chambers 130, 140, 150, and 160 according to the present invention are arranged in a plurality of adjacent to each other in the shape of a bamboo barrel to supply the organic materials toward the front surface of the substrate W, respectively.

The organic material supply chambers 130, 140, 150, and 160 according to the preferred embodiment of the present invention may include a first organic supply chamber 130, a second organic supply chamber 140, a third organic supply chamber 150, and a fourth organic supply chamber 160. A total of four are arranged up and down, the number of organic matter supply chamber can be added or subtracted as needed. Since all of these configurations are the same, only the configuration of the first organic supply chamber 130 will be described in detail.

The first organic supply chamber 130 is provided in a box shape and has a storage body 131 in which an organic material A is stored therein, and a heater embedded in the storage body 131 to heat the storage body 131 ( 133 and an outlet 135 through which the evaporated organic material A formed through the upper portion of the storage body 131 is discharged toward the substrate W; and an organic material provided in the outlet 135 to generate air flow. A supply fan 137 for supplying (A) to the substrate W is included.

The storage body 131 receives the organic material A supplied from the organic material source 190 through the organic material supply pipe 131a. The organic material (A) stored in the storage body 131 may be provided in a powder form, and may be variously provided from a low molecular material to a polymer material according to the type of the organic light emitting device.

The heater 133 is wound around the outside of the storage body 131 in the form of a hot wire and generates heat when power is applied from the heater power source 180 to heat the storage body 131. By the heat generated by the heater 133, the storage body 131 is instantaneously heated to evaporate the organic material (A).

The outlet 135 is formed to penetrate toward the substrate W of the storage body 131. Outlet 135 is formed over the entire area in front of the storage body (131). This is to ensure that the supply pans 137 disposed at the outlets 135 of the organic material supply chambers 130, 140, and 150 are disposed adjacent to each other without a spaced interval.

Here, in some cases, the outlet 135 may be provided in one common to four chambers. At this time, one common outlet may be provided with one integrated supply fan commonly used in four chambers.

When the spacing between the supply pans 137 occurs, since the organic material A is not uniformly distributed toward the entire area of the substrate W, the size of the outlet 135 is preferably as large as possible.

The supply fan 137 is coupled to the outlet 135 to generate an airflow to move the evaporated organic material A toward the substrate W.

Figure 2 is a schematic diagram showing the movement path of the organic material (A) by the air flow of the supply fan 137 according to the present invention. As shown in the drawing, the supply fan 137 is provided in the shape of an axial flow fan to prevent the organic material A moving up and moving from the storage body 131 to be scattered and scattered out of the outlet 135.

The supply fan 137 is formed by a rotation shaft 137a disposed along the axial direction of the storage body 131, a rotation blade 137b radially formed in a direction perpendicular to the rotation shaft 137a, and a rotation blade 137b. And a guide tube 137c which prevents external scattering of the organic material A by the formed airflow.

The rotary shaft 137a is disposed in the longitudinal direction of the storage body 131 of the organic material A, and rotates by receiving a driving force from the fan driver 139. The rotary blades 137b are disposed and rotated at regular angle intervals in a direction perpendicular to the rotation axis 137a. At this time, when the airflow is generated by the rotation, the organic material A discharged through the outlet 135 is shielded from being excessively supplied by the guide pipe 137C.

In addition, the organic material A evaporated upward moves in a linear direction along the rotation direction of the supply fan 137. Therefore, the organic material A discharged from each of the organic material supply chambers 130, 140, 150, and 160 is accurately moved to the deposition region located in front of the chamber, thereby allowing deposition. As a result, deposition may be uniformly performed on the entire substrate region by controlling the supply amount of the organic material A, and it is easy to control the deposition thickness.

On the other hand, the storage body 131 is coupled to the dilution gas supply pipe 131b receives a dilution gas from the dilution gas supply source 170 to facilitate the movement of the organic material (A). At this time, the dilution gas supply pipe 131b is provided with a switch 170a for controlling the dilution gas supply.

The second organic supply chamber 140, the third organic supply chamber 150, and the fourth organic supply chamber 160 have the same configuration as the first organic supply chamber 130, and each of them is disposed in a stack. Accordingly, the organic materials discharged from the organic material supply chambers 130, 140, 150, and 160 are deposited by moving to the substrate W positioned in the axial direction of the supply fan 137.

Here, the supply fan 137 according to the preferred embodiment of the present invention shown in FIG. 1 is driven by the fan driver 139. The rotary shaft 137a of the supply fan 137 is directly connected to the drive shaft of the fan driving unit 139 provided as a motor and rotated by receiving a driving force.

On the other hand, the supply fan 137 according to another embodiment of the present invention shown in FIG. 3 receives the driving force by the magnetic driving unit 139a. The magnetic drive unit 139a is coupled to the drive shaft and the drive magnet 139b rotated together with the drive shaft, and the driven magnet 139c coupled to the rotation shaft of the supply fan 137 of the organic material supply chambers 130, 140, 150, and 160 is driven by magnetic force. .

The driving magnet 139b and the driven magnet 139c are arranged as magnets having opposite polarities, and when the driving magnet 139b is rotated, the driven magnet 139c is also rotated by the attraction force. As a result, the driving force of the magnetic driving unit 139a is transmitted to the supply fan 137.

The driving method by the magnetic driving unit 139a may prevent foreign substances from entering the magnetic driving unit 139a since the magnetic driving unit 139a is rotated outside the organic material supply chambers 130, 140, 150, and 160. In addition, it is possible to reduce the generation of noise than the direct drive method by the motor because of the magnetic drive method.

On the other hand, Figure 4 is a schematic diagram showing another embodiment of the supply fan 137 of the present invention.

The pair of supply fans 237 are a rotary shaft 237a disposed along the axial direction of the storage body 231, a rotary blade 237b radially formed in a direction perpendicular to the rotary shaft 237a, and a rotary blade 237b. And a guide tube 237c that prevents external scattering of the organic material A by the airflow formed by the air flow. The pair of supply fans 237 are driven by a fan driver (not shown). The rotary shaft 237a of the supply fan 237 is directly connected to the drive shaft of the fan driver (not shown) provided as a motor and rotated by receiving a driving force.

While only one supply fan 137 according to the preferred embodiment of the present invention is formed at the outlet 235 of the organic material supply chambers 130, 140, 150, and 160, the organic material A is discharged to one side, and is illustrated in FIG. 4. According to another embodiment of the present invention, the pair of supply fans 237 are uniformly discharged in the center and left and right directions by the pair of supply fans 237 formed to be spaced left and right, and positioned at the front of the chamber. It is precisely moved to the deposition area so that deposition is even. As a result, deposition may be uniformly performed on the entire substrate region by controlling the supply amount of the organic material A, and it is easy to control the deposition thickness.

On the other hand, Figures 5 to 8 is a schematic diagram showing the cross-sectional configuration of the organic material evaporation deposition apparatus according to another embodiment of the present invention.

In the organic material evaporation deposition apparatus 100 according to the preferred embodiment of the present invention described above, a plurality of organic material supply chambers 130, 140, 150, and 160 may be provided on the front surface of the substrate to deposit only one substrate (W). The organic material evaporation deposition apparatus 100a or 100a 'according to the second embodiment of the present invention shown in FIG. 6 may simultaneously process two sheets W1 and W2.

To this end, the tray 120 supports the pair of substrates W1 and W2 on the left and right sides, and supplies the first organic supply chamber assembly 210, 220, 230, 340 and the second organic matter in a direction opposite to each of the substrates W1, W2. Chamber assemblies 210a, 220a, 230a and 240a are disposed.

Here, the organic material evaporation deposition apparatus 100a according to the second embodiment drives the supply fan by a direct drive method by a motor, and the organic material evaporation deposition apparatus 100a 'according to the modification of the second embodiment is self-driving. Understand how to drive the supply fan.

Meanwhile, in the organic material evaporation deposition apparatus 100b according to the third embodiment of the present invention, as shown in FIG. 7, each of the plurality of organic material supply chambers 210b, 220b, and 230b accommodates organic materials having different colors. Multiple colors can be deposited.

That is, the first organic supply chamber 210b receives the R-colored organic material and supplies it to the substrate W, and the second organic supply chamber 220b receives the G-colored organic material and supplies it to the substrate W. The third organic supply chamber 230b receives the organic material of B color and supplies it to the substrate W.

At this time, whenever the substrate W is reciprocated from one side to the other side, only one supply fan of the first organic supply chamber 210b, the second organic supply chamber 220b, and the third organic supply chamber 230b is operated. Therefore, only one organic material of any one color of RGB is deposited on the substrate (W).

Here, in the organic material evaporation deposition apparatus 100b according to the third embodiment, the organic material supply chambers accommodate organic materials having different colors in a vertical direction, but in some cases, as shown in FIG. It is also possible to accommodate and supply organic materials of different colors.

That is, FIG. 8 is a rear view of the organic material supply chamber viewed from the substrate W side, and the first organic supply chamber assembly 250 accommodates the organic material of R color, and is disposed on the right side of the second organic supply chamber assembly. Reference numeral 260 receives the organic material of the G color, and the third organic supply chamber assembly 270 disposed on the right side receives the organic material of the B color.

At this time, only one supply fan of each supply chamber assembly 250, 260, 270 operates in sequence, and the tray 120 sequentially receives the organic material A from each supply chamber assembly 250, 260, 270. Move left and right inside.

On the other hand, Figure 9 is a schematic diagram showing the configuration of an organic material supply chamber 300 according to a fourth embodiment of the present invention. A plurality of organic material supply chambers 130, 140, 150, and 160 according to the preferred embodiment of the present invention described above are provided in a bamboo shape, but the organic material supply chamber 300 according to the fourth embodiment is provided in a single shape.

The organic material supply chamber 300 is formed through the chamber body 310 in which the organic material A is accommodated, the heater 320 coupled to the outer wall of the chamber body 310, and one side wall of the chamber body 310. A plurality of outlets 330 for discharging (A) to the substrate side, and the supply screw 340 is provided in the chamber body 310 to rotate.

The organic material supply chamber 300 forms an upward air flow inside the chamber body 310 while the supply blades 343 helically coupled to the rotation shaft 341 rotate. Accordingly, the organic material A heated and evaporated by the heater 320 moves upward and moves through the outlet 330.

At this time, since the amount of the organic material (A) that is relatively evaporated and moved is smaller in the upper region than the lower region of the chamber body 310, the size of the plurality of outlets 330 formed in the vertical direction to compensate for this increases. It is largely formed. In other words, the size of the first outlet 331 at the top is the largest. At this time, since the density of the organic material A in the lower region is the highest, the flow rate through the fourth outlet 337 becomes almost similar to the flow rate moving through the first outlet 331. Therefore, the deposition may proceed evenly over the entire area of the substrate during deposition.

On the other hand, Figure 10 is a schematic diagram showing the configuration of an organic material supply chamber 400 according to a fifth embodiment of the present invention.

While the organic material supply chamber 300 according to the fourth embodiment described above is lifted and discharged through the outlet 330, the organic material supply chamber 400 according to the fifth embodiment is discharged while the organic material A is lowered. .

To this end, the organic material supply chamber 400 is provided with a predetermined length of the partition wall 440 in a direction perpendicular to the inside of the chamber body 410. As a result, a circulation path is formed in the chamber body 410 by the partition wall 440 so that the organic material A evaporates and rises along the inner wall, descends along the outer wall, and is discharged through the outlet 430.

At this time, the outlet 430 is formed smaller than the size of the upper region. This is to compensate for the higher density of the organic material (A) in the upper region because it is discharged while falling. As a result, deposition can be uniformly performed over the entire region of the substrate.

On the other hand, Figure 11 is an exemplary view showing an embodiment of the mask (M) used in the organic material supply chamber of the present invention. As shown in the drawing, a pattern hole m corresponding to the deposition pattern is formed in the mask M, and an organic material flows into the pattern hole m and is deposited on the substrate.

The pattern hole m of the mask M may have various shapes.

Meanwhile, in addition to the above-described cases, the size and arrangement position of the organic material supply chamber may be variously changed according to the size of the substrate, the type of deposition, and the deposition material.

As described above, in the organic material evaporation deposition apparatus according to the present invention, a plurality of organic material supply chambers for supplying organic materials are provided in a direction perpendicular to the front side of the substrate to supply organic materials to the front surface of the substrate. Therefore, it is easy to control the deposition amount of the organic material and the deposition can be evenly distributed over the entire area of the substrate.

In addition, the supply fan is provided in the shape of the axial flow fan to minimize the organic material is scattered to the outside can be efficiently deposited organic material on the substrate.

In addition, as the substrate is enlarged, the organic material supply chamber may be vertically disposed to increase the organic material supply area, thereby actively responding to the size of the substrate.

Embodiments of the organic material evaporation deposition apparatus described above are merely exemplary, and those skilled in the art to which the present invention pertains can make various modifications and other equivalent embodiments therefrom. You can see well. Therefore, it is to be understood that the present invention is not limited to the above-described embodiments. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims. It is also to be understood that the invention includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.

100: organic vapor deposition apparatus 110: deposition chamber
111: entrance 113: exit
115: gas outlet 117: exhaust pump
120 tray 130 first organic supply chamber
131: storage body 131a: organic material supply pipe
131b: dilution gas supply pipe 133: heater
135: outlet 137: supply fan
140: second organic supply chamber 150: third organic supply chamber
160: fourth organic supply chamber 170: dilution gas supply source
180: heater power 190: organic material supply source

Claims (11)

A plurality of organic materials including a tray for supporting a substrate, a deposition chamber in which organic material is deposited, and a plurality of stacked layers are disposed in the deposition chamber to face the substrate, and an outlet through which organic materials stored therein flow out. An organic material evaporation evaporation apparatus of an organic light emitting device, comprising: a supply chamber and a supply fan disposed at an outlet of each of the organic material supply chambers to form an air flow to transfer organic materials within the organic material supply chambers to the substrate;
The supply fan is driven by the fan drive unit,
The fan drive unit
A driving source provided outside the organic material supply chamber;
A drive magnet coupled to the drive shaft of the drive source and rotating;
The organic material evaporation deposition apparatus of the organic light emitting device, characterized in that coupled to the rotating shaft of the supply fan and provided with a polarity opposite to the drive magnet, and rotates by a magnetic force in accordance with the rotation of the drive magnet.
The method of claim 1,
The organic material supply chamber,
An organic material storage body through which an outlet formed through the entire front area is formed toward the substrate, and the organic material is accommodated in the lower area;
Evaporation and deposition apparatus of the organic material of the organic light emitting device comprising a heater coupled to the outer region of the organic material storage body for heating the organic material storage body.
delete The method of claim 1,
The plurality of organic material supply chamber is an organic material evaporation deposition apparatus of an organic light emitting device, characterized in that for receiving organic materials of different colors.
The method of claim 4, wherein
The tray supports a pair of substrates on both sides,
The organic material evaporation evaporation deposition apparatus of the organic light emitting device, characterized in that a plurality of organic material supply chamber arranged in a vertical stack is arranged on the left and right around the tray.
The method of claim 1,
The supply fan is an organic material evaporation deposition apparatus of the organic light emitting device, characterized in that the axial flow fan is provided to supply the organic material in the axial direction of the supply fan.
A plurality of organic materials including a tray for supporting a substrate, a deposition chamber in which organic material is deposited, and a plurality of stacked layers are disposed in the deposition chamber to face the substrate, and an outlet through which organic materials stored therein flow out. An organic material evaporation evaporation apparatus of an organic light emitting device, comprising: a supply chamber and a supply fan disposed at an outlet of each of the organic material supply chambers to form an air flow to transfer organic materials within the organic material supply chambers to the substrate;
The supply fan is an organic material evaporation deposition apparatus of the organic light emitting device, characterized in that the two supply fans are formed in the organic material supply chamber spaced apart from the left and right.
The method of claim 1, further comprising:
The organic material supply chamber is
The organic material evaporation deposition apparatus of the organic light emitting device, characterized in that disposed in the deposition chamber, a plurality of outlets through which the organic material stored therein flows along a vertical direction.
9. The method of claim 8,
The organic material supply chamber is evaporation evaporation device of the organic material of the organic light emitting device, characterized in that the plurality of outlets are provided to increase in size toward the upward direction.
The method of claim 1, further comprising:
Inside the organic material supply chamber
The organic material evaporation deposition apparatus of the organic light emitting device, characterized in that the partition is disposed in a vertical direction and the organic material rises in the upward direction and descends to form a circulation path to be discharged through the outlet.
The method of claim 10,
A plurality of outlets of the organic material evaporation evaporation apparatus of the organic light emitting device, characterized in that the size is gradually provided in the upward direction.

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