CN206810722U - Cleaning assemblies, cleaning equipment and cleaning device - Google Patents
Cleaning assemblies, cleaning equipment and cleaning device Download PDFInfo
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- CN206810722U CN206810722U CN201720508964.6U CN201720508964U CN206810722U CN 206810722 U CN206810722 U CN 206810722U CN 201720508964 U CN201720508964 U CN 201720508964U CN 206810722 U CN206810722 U CN 206810722U
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- cleaning
- assemblies
- lifting assembly
- support bar
- connecting shaft
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Abstract
It the utility model is related to a kind of cleaning assemblies.The cleaning assemblies includes cleaning sleeve, the cleaning sleeve includes side wall and the first bottom, the side wall and first bottom are vertical and connect, the material of the side wall and first bottom is the elastomeric material of water suction, the side wall and first bottom surround host cavity, the host cavity accommodates the support bar, and the side wall and first bottom contact with support bar extruding.The utility model further relates to a kind of cleaning equipment and cleaning device.The cleaning equipment includes support component, lifting assembly and above-mentioned cleaning assemblies.Lifting assembly drives cleaning assemblies to carry out cleaning to support bar, it is not necessary to which staff cleans to support bar manually, and easy to clean, and effect is good.Above-mentioned cleaning device, including support frame and above-mentioned cleaning equipment, cleaning effect are good.
Description
Technical field
Cleaning technique field is the utility model is related to, more particularly to a kind of cleaning assemblies, cleaning equipment and cleaning device.
Background technology
In the manufacturing process of display panel, it usually needs substrate is stored in substrate temporary storage device.Substrate caching dress
Caching chamber is provided with putting, substrate temporary storage device also includes storage rack, and storage rack is arranged on the inside of caching chamber.Set on storage rack
There are multiple support bars, multiple support bars may be contained within the same side of storage rack, and multiple support bars are used for supporting substrate together.But
Substrate requires very high, it is necessary to often be cleaned to support bar to the cleannes of support bar.
But the cleaning for support bar at present, generally require and support frame disassembled into cleaning, cause cleaning inconvenience and
It is not thorough.
Utility model content
Based on this, it is necessary to clean inconvenient and halfway problem for the support bar of traditional buffer storage, there is provided one
Kind cleaning assemblies, cleaning equipment and cleaning device.
A kind of cleaning assemblies, for cleaning the support bar of substrate temporary storage device.The cleaning assemblies includes cleaning sleeve, described
Cleaning sleeve includes side wall and the first bottom, and the side wall connects with first bottom, the side wall and first bottom
Material is the elastomeric material of water suction, and the side wall and first bottom surround host cavity, the host cavity receiving support
Bar, and the side wall and first bottom contact with support bar extruding.
Above-mentioned cleaning assemblies, when cleaning support bar, the cleaning sleeve for speckling with cleaning solution can be enclosed on to the periphery of support bar,
And the short transverse of cleaning sleeve support bar is set to move reciprocatingly, you can to realize cleaning of the cleaning sleeve to support bar.So clean
Support bar is convenient and cleaning effect is good.
In one of the embodiments, cleaning assemblies also includes housing, and the housing is sheathed on the outside of the cleaning sleeve.
In one of the embodiments, the housing includes the second bottom, second bottom open up it is fluted, it is described recessed
The opening of groove is directed at first bottom；First bottom props up second bottom, first bottom and the groove
Closing chamber is formed, the closing chamber is used to accommodate cleaning fluid.
A kind of cleaning equipment, including support component, lifting assembly and above-mentioned cleaning assemblies.The lifting assembly is by the branch
Support component supports, and the lifting assembly is between the support component and the cleaning assemblies.The cleaning assemblies with it is described
Lifting assembly connects, and the opening of the cleaning sleeve of the cleaning assemblies deviates from the lifting assembly, and the cleaning assemblies is by the liter
Part drives edge of coming down to a lower group moves back and forth perpendicular to the direction of the support component.
Above-mentioned cleaning equipment, when cleaning support bar so that the opening alignment support bar of cleaning sleeve, at this moment support bar is vertical
In support component.Because cleaning assemblies can be moved back and forth by lifting assembly drives edge perpendicular to the direction of support component, so
Lifting assembly can drive short transverse of the cleaning assemblies along support bar to move back and forth, so that cleaning assemblies can be enclosed on branch
Support bar is left in the periphery of strut.So, lifting assembly driving cleaning assemblies carries out cleaning to support bar, it is not necessary to
Staff cleans to support bar manually, and easy to clean, and effect is good.
In one of the embodiments, the lifting assembly also includes locating part, the first connecting shaft and the first actuator, institute
Bottom of the locating part parallel to the cleaning sleeve is stated, through hole is offered on the locating part；First connecting shaft is described in
Through hole, and perpendicular to the locating part；First actuator is connected to first connecting shaft with the cleaning assemblies
Both ends, it is past that first actuator drives first connecting shaft to be done in the through hole along the axial direction of the through hole
Multiple motion.
In one of the embodiments, the through hole is screwed hole, and first connecting shaft is screw rod, the screw rod and institute
State screwed hole to be adapted, first actuator can also drive first connecting shaft to lift in the screwed hole internal rotation.
In one of the embodiments, the support component also includes fixed plate, connecting plate and supporting plate, the fixed plate
Perpendicular to the support bar, the connecting plate and the supporting plate are mutually perpendicular to, and the supporting plate is located at the fixed plate and institute
Between stating lifting assembly, the supporting plate is parallel with the fixed plate, by described between the supporting plate and the fixed plate
Connecting plate connects；The cleaning equipment also includes track and traveling component, and the track is arranged at the supporting plate described in
The side of fixed plate, the bearing of trend of the track are consistent with the orientation of multiple support bars；The traveling component with
The lifting assembly connection, between the fixed plate and the lifting assembly, the traveling component is set the traveling component
Put on the track, the traveling component is adapted with the track, and the traveling component is along the track travel.
In one of the embodiments, the traveling component includes traveling block, the second connecting shaft and the second actuator, described
Traveling block is adapted with the track, and the traveling block is located on the track, and the both ends of second connecting shaft connect respectively
The traveling block and second actuator, second actuator by second connecting shaft drive the traveling block along
The track travel；The cleaning equipment also includes connector, and the connector is with second connecting shaft perpendicular to the limit
Position part, the both ends of the connector connect second connecting shaft and the locating part respectively, by the traveling component and institute
Lifting assembly is stated to link together.
In one of the embodiments, the traveling block is gear, and the track is rack, and second actuator passes through
Second connecting shaft drives the traveling block along the track travel；Second connecting shaft connects with connector activity
Connect, second connecting shaft rotates relative to the connector.
A kind of cleaning device, including support frame and above-mentioned cleaning equipment, the quantity of the cleaning equipment be it is multiple, it is multiple
The cleaning equipment is set in parallel on support frame as described above respectively.
Above-mentioned cleaning device, using above-mentioned cleaning equipment, parallel support bar is cleaned respectively, it is not necessary to work
Personnel clean to support bar manually, and easy to clean, and effect is good.
Brief description of the drawings
Fig. 1 is the schematic diagram of the storage rack of substrate temporary storage device；
Fig. 2 is the profile of the cleaning assemblies of an embodiment；
Fig. 3 is the schematic diagram of the cleaning equipment of an embodiment；
Fig. 4 is the schematic diagram that the cleaning device of an embodiment is engaged with the storage rack shown in Fig. 1.
Embodiment
To enable above-mentioned purpose of the present utility model, feature and advantage more obvious understandable, below in conjunction with the accompanying drawings to this
The embodiment of utility model is described in detail.
As shown in figure 1, Fig. 1 is the schematic diagram of the storage rack 100 of the substrate temporary storage device of the present embodiment.As background technology
Described, substrate temporary storage device includes storage rack 100, and the side of storage rack 100 is provided with multiple support bars 110, all support bars
110 top is in the same plane, and multiple support bars 110 are in matrix distribution, and multiple support bars 110 are used for branch support group together
Plate.
As shown in Fig. 2 Fig. 2 is the profile of the cleaning assemblies 200 of the present embodiment.A kind of cleaning assemblies 200, for cleaning
The support bar 110 of storage rack as shown in Figure 1.Cleaning assemblies 200 includes cleaning sleeve 210, and cleaning sleeve includes side wall 211 and first
Bottom 212, the bottom 212 of side wall 211 and first is vertical and connects, the material of the bottom 212 of side wall 211 and first for water suction elasticity
Material, the bottom 212 of side wall 211 and first surround host cavity 213, and host cavity 213 accommodates support bar 110, and side wall 211 and first
Bottom 212 contacts with the extruding of support bar 110.Specifically, in the present embodiment, cleaning sleeve 210 is shaped as inverted cup-shaped, cleaning
210 elastomeric material by that can absorb water of set is made, for example cleaning sleeve 210 can be made up of sponge.
Above-mentioned cleaning assemblies 200, when cleaning support bar 110, the cleaning sleeve 210 for speckling with cleaning solution can be enclosed on support
The periphery of bar 110, and the short transverse of the relative support bar 110 of cleaning sleeve 210 is moved reciprocatingly, you can realize cleaning sleeve
The cleaning of 210 pairs of support bars 110.The short transverse of the support bar 110 refers to the support bar 110 from the storage rack 100
The direction that one end extends to the direction away from the storage rack 100.So clean support bar 110 conveniently and cleaning effect is good.
In the present embodiment, cleaning assemblies 200 also includes housing 220, and the housing 220 is sheathed on the cleaning sleeve 210
Outside, to protect cleaning sleeve 210.Housing 220 includes the second bottom 222, and the second bottom opens up fluted 221, and groove 221 is opened
The first bottom 212 of mouth alignment；First bottom 212 props up the second bottom 222, and the first bottom 212 forms closing chamber with groove 221,
Closing chamber is used to accommodate cleaning fluid.When cleaning assemblies 200 works, cleaning fluid can be added in closing chamber, by first
Cleaning fluid is drawn in bottom 212 (bottom of cleaning sleeve), and because the material of cleaning sleeve 210 is elastomeric material, cleaning fluid can be by the
One bottom 212 penetrates into side wall 211.So, cleaning assemblies 200 can be more thorough cleanly by support bar 110.
Specifically, in the present embodiment, the shape of housing 220 is also inverted cup-shaped, and cleaning sleeve 210 is arranged at housing 220
Interior, the opening direction of cleaning sleeve 210 is consistent with the opening direction of housing 220.On the one hand, cleaning sleeve 210 is located in housing 220
Portion, housing 220 can ensure the cleannes of of cleaning sleeve 210 itself.On the other hand, housing 220 can support cleaning sleeve 210, protect
Demonstrate,prove steadiness when cleaning sleeve 210 works.
As shown in figure 3, Fig. 3 is the schematic diagram of the cleaning equipment 300 of the present embodiment.A kind of cleaning equipment 300, including support
The cleaning assemblies 200 of component 310, lifting assembly 320 and embodiment illustrated in fig. 2.Lifting assembly 320 is supported by support component 310,
Lifting assembly 320 is between support component 310 and cleaning assemblies 200.Cleaning assemblies 200 is connected with lifting assembly 320, cleaning
The opening of the cleaning sleeve of component 200 deviates from lifting assembly 320, and cleaning assemblies 200 is by the drives edge of lifting assembly 320 perpendicular to support
The direction of component 310 moves back and forth.
Above-mentioned cleaning equipment 300, when cleaning support bar 110 so that the opening alignment support bar 110 of cleaning sleeve, at this moment
Support bar 110 is perpendicular to support component 310.Because cleaning assemblies 200 can be by the drives edge of lifting assembly 320 perpendicular to support group
The direction of part 310 moves back and forth, so lifting assembly 320 drives short transverse of the cleaning assemblies 200 along support bar 110 reciprocal
Motion, so that cleaning assemblies 200 is enclosed on the periphery of support bar 110 or leaves support bar 110.So, lifting assembly 320 drives
Dynamic cleaning assemblies 200 carries out cleaning to support bar 110, it is not necessary to which staff cleans to support bar 110 manually, and cleans
Convenient, effect is good.
Lifting assembly 320 also includes locating part 321, the first connecting shaft 322 and the first actuator 323.Locating part 321 is parallel
In the bottom of cleaning sleeve, through hole (not shown) is offered on locating part 321.First connecting shaft 322 passes through through hole, and perpendicular to limit
Position part 321.First actuator 323 is connected to the both ends of the first connecting shaft 322, the first actuator 323 with cleaning assemblies 200
The first connecting shaft 322 is driven to be moved reciprocatingly in through hole along the axial direction of through hole.So, the first actuator 323 passes through
First connecting shaft 322 driving cleaning assemblies 200 moves reciprocatingly in through hole along the axial direction of through hole, the first actuator
When the direction of 323 driving cleaning assemblies 200 to remote locating part 321 is moved, cleaning assemblies 200 moves closer to support bar 110, most
Whole cleaning sleeve 210 is set in the periphery of support bar 110.First actuator 323 drives cleaning assemblies 200 to close to locating part 321
Direction motion when, cleaning assemblies 200 is gradually distance from support bar 110, eventually disengages from support bar 110.So cleaning assemblies 200 can
To be cleaned according to demand to support bar 110, the supporting substrate of support bar 110 is not interfered with.
Further, through hole is screwed hole, and the first connecting shaft 322 is screw rod, and screw rod is adapted with screwed hole, the first driving
Part 323 drives the first connecting shaft 322 to be lifted in screwed hole internal rotation.While the opposite thread hole of first connecting shaft 322 rotates, phase
Screwed hole is lifted, be i.e. the first actuator 323 driving rotation and lifting of the first connecting shaft 322, further drives cleaning assemblies 200 to revolve
Turn lifting.During the rotation and lifting of cleaning assemblies 200, the cleaning to support bar 110 is completed, cleaning is thorough.
In the present embodiment, support component 310 also includes fixed plate 311, connecting plate 312 and supporting plate 313, fixed plate 311
Perpendicular to the first connecting shaft 322, supporting plate 313 is between fixed plate 311 and lifting assembly 320, supporting plate 313 and fixed plate
311 is parallel, is connected between supporting plate 313 and fixed plate 311 by connecting plate 312.Cleaning equipment 300 (is not shown also including track
Go out) and traveling component 340, track be arranged at supporting plate 313 towards the side of fixed plate 311.Traveling component 340 is located at fixed plate
Between 311 and supporting plate 313, traveling component 340 is connected with lifting assembly 320, and traveling component 340 is along track travel.And
Traveling component 340 drives lifting assembly 320 and cleaning assemblies 200 together along track travel.So, cleaning assemblies 200 can be with
Clean the multiple support bars 110 arranged on support frame along orbital direction.
Specifically, traveling component 340 includes traveling block 341, the second connecting shaft 342 and the second actuator 343, traveling block
341 are adapted with track, and traveling block 341 is located on track, and the both ends of the second connecting shaft 342 connect traveling block 341 and respectively
Two actuators 343.Second actuator 343 drives traveling block 341 convenient along track travel, walking by the second connecting shaft 342.
In the present embodiment, traveling block 341 is gear, and track is rack, and traveling block 341 is walked in orbit.Second connecting shaft 342 is with connecting
Fitting 350 is flexibly connected, and the opposite joints 350 of the second connecting shaft 342 rotate.Because wheel and rack is meshed, traveling block 341
It is stable along track travel, so as to which the walking of cleaning assemblies 200 and lifting assembly 320 along track is stable.
In the present embodiment, cleaning equipment 300 also includes connector 350, and the both ends of connector 350 connect the second connection respectively
Axle 342 and locating part 321, traveling component 340 and lifting assembly 320 are linked together.
As shown in figure 4, the signal that the cleaning device 400 that Fig. 4 is the present embodiment is engaged with the storage rack 100 shown in Fig. 1
Figure.A kind of cleaning device 400, including support frame 410 and above-mentioned cleaning equipment 420, the quantity of the cleaning equipment 420 is more
Individual, multiple cleaning equipments 420 are vertically installed on support frame as described above 410.Specifically, cleaning device 400 and storage rack
100 is parallel, and cleaning equipment 420 is oppositely arranged with support bar 110；When equipment does not work, cleaning equipment 420 and support bar
The enough storing substrates in gap between 110 place planes.
When support bar 110 need not clean, the cleaning assemblies in cleaning equipment 420 rests on one end of track, cleaning
Component leaves unused.When support bar 110 needs cleaning, the cleaning assemblies of cleaning equipment 420 corresponding with support bar 110 is in orbit
The top of support bar 110 is moved to, and lifting assembly driving cleaning assemblies moves towards support bar 110, and cleaning assemblies is completed
Cleaning to support bar 110.So, cleaning device 400 is to the easy to clean of the support bar 110 on storage rack 100, and cleans thorough
Bottom.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope that this specification is recorded all is considered to be.
Embodiment described above only expresses several embodiments of the present utility model, and its description is more specific and detailed,
But therefore it can not be interpreted as the limitation to utility model patent scope.It should be pointed out that the common skill for this area
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (10)
1. a kind of cleaning assemblies, for cleaning the support bar of substrate temporary storage device, it is characterised in that the cleaning assemblies includes clear
Clean set, the cleaning sleeve include side wall and the first bottom, and the side wall connects with first bottom, the side wall and described
The material of one bottom is the elastomeric material of water suction, and the side wall and first bottom surround host cavity, the host cavity receiving
The support bar, and the side wall and first bottom contact with support bar extruding.
2. cleaning assemblies according to claim 1, it is characterised in that also including housing, the housing is sheathed on described clear
The outside of clean set.
3. cleaning assemblies according to claim 2, it is characterised in that the housing includes the second bottom, second bottom
Portion opens up fluted, opening alignment first bottom of the groove；
First bottom props up second bottom, and first bottom forms closing chamber, the closing chamber with the groove
For accommodating cleaning fluid.
4. a kind of cleaning equipment, it is characterised in that including described in support component, lifting assembly and claims 1 to 3 any one
Cleaning assemblies；The lifting assembly is supported by the support component, the lifting assembly be located at the support component with it is described
Between cleaning assemblies；The cleaning assemblies is connected with the lifting assembly, and the opening of the cleaning sleeve of the cleaning assemblies deviates from institute
Lifting assembly is stated, the cleaning assemblies is moved back and forth by the lifting assembly drives edge perpendicular to the direction of the support component.
5. cleaning equipment according to claim 4, it is characterised in that the lifting assembly also includes locating part, the first company
Spindle and the first actuator, the locating part offer through hole on the locating part parallel to the bottom of the cleaning sleeve；It is described
First connecting shaft passes through the through hole, and perpendicular to the locating part；First actuator connects respectively with the cleaning assemblies
The both ends of first connecting shaft are connected to, first actuator drives first connecting shaft in the through hole along described
The axial direction of through hole moves reciprocatingly.
6. cleaning equipment according to claim 5, it is characterised in that the through hole is screwed hole, first connecting shaft
For screw rod, the screw rod is adapted with the screwed hole, and first actuator drives first connecting shaft in the screw thread
Hole internal rotation lifting.
7. cleaning equipment according to claim 5, it is characterised in that the support component also includes fixed plate, connecting plate
And supporting plate, the fixed plate are located at the fixed plate and the lifting group perpendicular to first connecting shaft, the supporting plate
Between part, the supporting plate is parallel with the fixed plate, is connected between the supporting plate and the fixed plate by the connecting plate
Connect；The cleaning equipment also includes track and traveling component, and the track is arranged at the supporting plate towards the fixed plate
Side；Between the fixed plate and the supporting plate, the traveling component connects the traveling component with the lifting assembly
Connect, the traveling component is along the track travel.
8. cleaning equipment according to claim 7, it is characterised in that the traveling component includes traveling block, the second connection
Axle and the second actuator, the traveling block are adapted with the track, and the traveling block is located on the track, and described second connects
The both ends of spindle connect the traveling block and second actuator respectively.
9. cleaning equipment according to claim 8, it is characterised in that the traveling block is gear, and the track is rack,
The traveling block is walked on the track；Second connecting shaft is flexibly connected with the connector, second connecting shaft
Rotated relative to the connector.
10. a kind of cleaning device, it is characterised in that set including the cleaning described in support frame and claim 4 to 9 any one
Standby, the quantity of the cleaning equipment is multiple, and multiple cleaning equipments are set in parallel on support frame as described above respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720508964.6U CN206810722U (en) | 2017-05-09 | 2017-05-09 | Cleaning assemblies, cleaning equipment and cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720508964.6U CN206810722U (en) | 2017-05-09 | 2017-05-09 | Cleaning assemblies, cleaning equipment and cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206810722U true CN206810722U (en) | 2017-12-29 |
Family
ID=60754097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720508964.6U Active CN206810722U (en) | 2017-05-09 | 2017-05-09 | Cleaning assemblies, cleaning equipment and cleaning device |
Country Status (1)
| Country | Link |
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| CN (1) | CN206810722U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113289936A (en) * | 2020-02-24 | 2021-08-24 | 长鑫存储技术有限公司 | Cleaning device and cleaning method |
-
2017
- 2017-05-09 CN CN201720508964.6U patent/CN206810722U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113289936A (en) * | 2020-02-24 | 2021-08-24 | 长鑫存储技术有限公司 | Cleaning device and cleaning method |
| WO2021169795A1 (en) * | 2020-02-24 | 2021-09-02 | 长鑫存储技术有限公司 | Cleaning apparatus and cleaning method |
| CN113289936B (en) * | 2020-02-24 | 2022-06-24 | 长鑫存储技术有限公司 | Cleaning device and cleaning method |
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