CN206780099U - Polishing machine and polissoir - Google Patents
Polishing machine and polissoir Download PDFInfo
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- CN206780099U CN206780099U CN201720647688.1U CN201720647688U CN206780099U CN 206780099 U CN206780099 U CN 206780099U CN 201720647688 U CN201720647688 U CN 201720647688U CN 206780099 U CN206780099 U CN 206780099U
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Abstract
The utility model discloses a kind of polishing machine and polissoir, is related to burnishing device technical field.The polishing machine includes link gear and polishing mechanism, and link gear is fixedly connected with polishing mechanism, and link gear is used for position and the state for controlling polishing mechanism.Polishing mechanism includes polishing wheel, mounting bracket and Power Component, and polishing wheel is respectively arranged at mounting bracket with Power Component, and Power Component is connected with polishing wheel and for driving polishing wheel to rotate.In the case of the polishing machine ensure that high removal efficiency under same rotational speed and polishing wheel and glass surface interfaces are less, stable removal function is obtained, the details modification capability of face shape error is stronger, while obtains higher face shape machining accuracy.
Description
Technical field
Burnishing device field is the utility model is related to, in particular to a kind of polishing machine and polissoir.
Background technology
To improve image quality in contemporary optics system, mitigate system complexity, reduce system cost, adopt more and more
Use aspherical optical element.
The conventionally employed mode repaiied of manually throwing processes aperture aspherical, but the face shape machining accuracy is limited, the convergence of face shape
Unstable, the process-cycle is grown, and processing efficiency is low, it is difficult to meets the needs of contemporary optics system.
In summary, the machining accuracy of existing face shape how is improved, obtains relatively stable removal function, is the skill of this area
Art personnel technical problem urgently to be resolved hurrily.
Utility model content
The purpose of this utility model is to provide a kind of polishing machine, reasonable in design, simple in construction, can better adapt to treat
The face type feature of machining optical element itself, stable removal function is obtained, improves existing face shape machining accuracy.
The purpose of this utility model, which also resides in, provides a kind of polissoir, and the polissoir can be by optics to be processed member
Part is fixed on the table, and the face to be processed that machining optical element is treated using polishing machine is processed, and obtains stable removal
Function, improve machining accuracy.
What embodiment of the present utility model was realized in:
Based on above-mentioned purpose, embodiment of the present utility model provides a kind of polishing machine, including link gear and polishing
Mechanism, the link gear are fixedly connected with the polishing mechanism, and the link gear is used for the position for controlling the polishing mechanism
Put and state;
The polishing mechanism includes polishing wheel, mounting bracket and Power Component, the polishing wheel and the Power Component
The mounting bracket is respectively arranged at, the Power Component is connected with the polishing wheel and for driving the polishing wheel to rotate.
In addition, the polishing machine provided according to embodiment of the present utility model, can also have technology additional as follows special
Sign:
In optional embodiment of the present utility model, the polishing wheel includes wheel body and positioned at the wheel body both sides
Rotary shaft, the wheel body includes wheel hub and flexible tire, and the material of the flexible tire is rubber or polyurethane, described turn
Moving axis is rotatably arranged at the mounting bracket by bearing.
In optional embodiment of the present utility model, the Power Component includes actuator and transmission component, the biography
Dynamic component is connected with the actuator and the polishing wheel respectively, and the actuator can be driven described by the transmission component
Polishing wheel rotates.
In optional embodiment of the present utility model, the transmission component includes the first sprocket wheel, the second sprocket wheel and set
Located at first sprocket wheel and the chain of second sprocket wheel, the chain respectively with first sprocket wheel and second sprocket wheel
Engaged transmission.
In optional embodiment of the present utility model, the Power Component also includes shaft coupling, and the actuator is electricity
Machine, the transmission component also include power transmission shaft;
The motor includes motor output shaft, and the power transmission shaft is fixedly connected with first sprocket wheel, the motor output
Axle is fixedly connected with the power transmission shaft by the shaft coupling.
In optional embodiment of the present utility model, the mounting bracket includes the first support and second being fixedly connected
Support, the Power Component are fixedly installed on the first support, and the polishing wheel is rotatably arranged at the second support,
The first support is fixedly connected with the second support by connector.
In optional embodiment of the present utility model, the first support includes first, pars intermedia and second,
The middle part in described first and it is described second between and the first support is formed U-shaped structure;
Described first offers first connecting hole and at least two first fixing holes, and described second offers one
Individual second connecting hole, the pars intermedia offer at least two second fixing holes;
First fixing hole is used to wear the first connector so as to which the actuator and the first support are fixed into company
Connect, first connecting hole is used for the output shaft for wearing the actuator, and second connecting hole is used to wear the transmission group
The power transmission shaft of part, second fixing hole are used to wear the second connector so as to which the first support and the second support be consolidated
Fixed connection.
In optional embodiment of the present utility model, the second support includes base, the first fixed part and second
Fixed part, first fixed part and second fixed part are juxtaposed on the one of the remote first support of the base
Side, first fixed part and second fixed part are provided with the 3rd connecting hole, and the base is provided with perforating;
The perforating is used to wear the transmission component, and the 3rd connecting hole is used to wear the fixed polishing wheel.
In optional embodiment of the present utility model, the polishing machine also includes shell, the shell be U-shaped structure and
The outside for being arranged at the first support is fastened, the link gear is fixedly connected with the shell.
It is of the present utility model that embodiment further provides a kind of polissoir, including workbench and polishing machine, the linkage
Mechanism includes the first mechanism and the second mechanism being slidably connected, and second mechanism is fixedly connected with the polishing mechanism, described
Workbench level is provided with the first track, and first mechanism is slidably arranged on first track and causes the polishing machine
Structure slides along Y-direction;
First mechanism include two rack bodies being set up in parallel and between two rack bodies the
Two tracks, second track are rotatably set with the rack body so that the polishing mechanism can rotate fortune along A directions
It is dynamic;
Second mechanism includes the first slide mass and the second slide mass, and first slide mass is L-shaped, and described first slides
Kinetoplast offers the first pilot hole and the second pilot hole, and first pilot hole is vertically arranged with second pilot hole, described
Second track is arranged in first pilot hole and second mechanism is slided in X direction;
Second slide mass, which slides, is embedded at second pilot hole so that the polishing mechanism slides along Z-direction, institute
Stating the second slide mass can cause the polishing mechanism along C azimuthal rotational motions in the second pilot hole internal rotation.
The beneficial effect of the utility model embodiment is:It is reasonable in design, simple in construction, using the polishing of wheeled construction
Wheel, can according to being actually needed the larger of the diameter of polishing wheel production, meanwhile, tire production on polishing wheel it is narrower;Protect
The contact surface of high removal efficiency of the card under same rotational speed, polishing wheel and glass surface is smaller, and removal function size is smaller, opposite
The details of shape error ability of practicing Buddhism or Taoism is stronger, it is hereby achieved that higher face shape machining accuracy.
Brief description of the drawings
, below will be to required in embodiment in order to illustrate more clearly of the technical scheme of the utility model embodiment
The accompanying drawing used is briefly described, it will be appreciated that the following drawings illustrate only some embodiments of the present utility model, therefore
The restriction to scope is not construed as, for those of ordinary skill in the art, is not paying the premise of creative work
Under, other related accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the schematic diagram at a visual angle of the polishing machine that the utility model embodiment 1 provides;
Fig. 2 is the schematic diagram at the first visual angle of polishing mechanism in Fig. 1;
Fig. 3 is the schematic diagram at a visual angle of polishing wheel in Fig. 2;
Fig. 4 is the schematic diagram at Fig. 2 the second visual angle;
Fig. 5 is the schematic diagram at Fig. 2 the 3rd visual angle;
Fig. 6 is the schematic diagram of mounting bracket in Fig. 2;
Fig. 7 is the schematic diagram of polishing mechanism in Fig. 1;
Fig. 8 is the schematic diagram for the polissoir that the utility model embodiment 3 provides.
Icon:100- polishing machines;10- link gears;The mechanisms of 13- first;134- rack bodies;The tracks of 136- second;15-
Second mechanism;18- workbench;The tracks of 185- first;20- polishing mechanisms;21- polishing wheels;212- takes turns body;2124- tires;
2126- wheel hubs;215- rotary shafts;24- mounting brackets;242- first supports;2422- first;2426- second;In 2428-
Between portion;246- second supports;2462- bases;2463- perforatings;The fixed parts of 2464- first;The fixed parts of 2468- second;28- is moved
Power component;282- actuators;2825- motor output shafts;284- transmission components;The sprocket wheels of 2842- first;The sprocket wheels of 2844- second;
2846- chains;288- shaft couplings;29- shells;30- optical elements to be processed.
Embodiment
To make the purpose, technical scheme and advantage of the utility model embodiment clearer, below in conjunction with this practicality
Accompanying drawing in new embodiment, the technical scheme in the utility model embodiment is clearly and completely described, shown
So, described embodiment is a part of embodiment of the utility model, rather than whole embodiments.
Therefore, below the detailed description of the embodiment of the present utility model to providing in the accompanying drawings be not intended to limit will
The scope of the utility model of protection is sought, but is merely representative of selected embodiment of the present utility model.Based on the utility model
In embodiment, the every other implementation that those of ordinary skill in the art are obtained under the premise of creative work is not made
Mode, belong to the scope of the utility model protection.
It should be noted that:Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined, then it further need not be defined and explained in subsequent accompanying drawing in individual accompanying drawing.
, it is necessary to which explanation, term " first ", " second ", " the 3rd " etc. are only used for area in description of the present utility model
Divide description, and it is not intended that instruction or hint relative importance.
In description of the present utility model, it is also necessary to which explanation, unless otherwise clearly defined and limited, term " are set
Put ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or be integrally connected;Can
To be mechanical connection or electrical connection;Can be joined directly together, can also be indirectly connected by intermediary, Ke Yishi
The connection of two element internals.For the ordinary skill in the art, with concrete condition above-mentioned term can be understood at this
Concrete meaning in utility model.
Embodiment of the present utility model is described in detail below in conjunction with accompanying drawing, but the utility model can be by weighing
Profit requires to limit and the multitude of different ways of covering is implemented.
Wherein Fig. 1-Fig. 7 corresponds to embodiment 1 of the present utility model, and Fig. 8 corresponds to embodiment 3 of the present utility model, under
Face the technical scheme of the utility model embodiment will be described in detail with reference to accompanying drawing.
Embodiment 1
As shown in figure 1, the polishing machine 100 that the utility model embodiment 1 provides, including link gear 10 and polishing mechanism
20, the link gear 10 is used to carry polishing mechanism 20 and the three-dimensional motion position of adjustment control polishing mechanism 20 and state, makes
The machining angle of setting can be kept with optical element 30 to be processed all the time by obtaining polishing mechanism 20.
The concrete structure to all parts of the polishing machine 100 and mutual corresponding relation are carried out specifically below
It is bright.
Refer to shown in Fig. 2, polishing mechanism 20 includes polishing wheel 21, mounting bracket 24 and Power Component 28, wherein, throw
Halo 21 and Power Component 28 are respectively arranged at mounting bracket 24, and Power Component 28 is connected with polishing wheel 21 and for driving polishing
Wheel 21 rotates.
It refer to shown in Fig. 3, optionally, polishing wheel 21 includes wheel body 212 and the rotary shaft positioned at wheel body 212 both sides
215, wherein, wheel body 212 includes tire 2124 and wheel hub 2126, and the wheel hub 2126 is used to support tire 2124 and can drive
The rotary motion of tire 2124, in the utility model embodiment 1, tire 2124 is made using flexible material, can be rubber
Or the material such as polyurethane, the i.e. tire 2124 have certain elasticity so that polishing wheel 21 is flexible polishing wheel, the rotary shaft
215 are rotatably arranged at mounting bracket 24 by bearing.
It refer to shown in Fig. 4, optionally, Power Component 28 includes actuator 282, transmission component 284 and shaft coupling
288, actuator 282 is that transmission component 284 provides power, and transmission component 284 is connected with actuator 282 and polishing wheel 21 respectively,
In the presence of actuator 282, transmission component 284 can drive the rotary motion of polishing wheel 21, so as to treat machining optical element
30 are processed.
Optionally, actuator 282 is motor, and the motor includes motor output shaft 2825, motor output shaft 2825 and transmission
Component 284 is fixedly connected, the rotation of motor driven transmission component 284, and then rotation is passed to polishing wheel by transmission component 284
21 so that polishing wheel 21 rotates with the rotation of motor output shaft 2825, while can be with the surface shape of optical element 30 to be processed
Into dynamic friction, so as to reach the purpose for removing unwanted material.
It refer to shown in Fig. 5, optionally, transmission component 284 includes the first sprocket wheel 2842, the second sprocket wheel 2844 and chain
2846, wherein, chain 2846 be sheathed on the first sprocket wheel 2842 and the second sprocket wheel 2844 and chain 2846 respectively with the first sprocket wheel
2842 and the engaged transmission of the second sprocket wheel 2844, it is head sprocket to define the first sprocket wheel 2842, and the second sprocket wheel 2844 is accessary sprocket wheel, then leads
Sprocket wheel is fixedly connected with motor output shaft 2825, and accessary sprocket wheel is fixedly connected with the rotary shaft 215 of polishing wheel 21, so as to by motor
Rotate the rotation for being delivered to polishing wheel 21.
Optionally, when Power Component 28 includes shaft coupling 288, transmission component 284 also includes power transmission shaft, wherein, transmission
One end of axle is fixedly connected with head sprocket by key, and the other end of power transmission shaft is solid by shaft coupling 288 and motor output shaft 2825
Fixed connection.
It refer to shown in Fig. 6, in embodiment 1 of the present utility model, mounting bracket 24 includes first support 242 and the
Two supports 246, wherein, first support 242 is fixedly connected with second support 246 by connector, certainly, the He of first support 242
Second support 246 can be integrated setting, not be limited herein, as long as meeting that Power Component 28 can be fixedly installed on first
Frame 242, polishing wheel 21 can rotatably be arranged at second support 246.
Specifically, first support 242 includes first 2422, pars intermedia 2428 and second 2426, pars intermedia 2428
Between first 2422 and second 2426 and first support 242 is set to form U-shaped structure, the first support 242 is in
Between portion 2428 be fixedly connected with second support 246.
Optionally, first connecting hole and at least two first fixing holes, the first connecting hole are offered for first 2422
For wearing the output shaft of actuator 282, in embodiment 1 of the present utility model, the first connecting hole is located at first 2422
Centre position, and the diameter of the first connecting hole and the diameter of motor output shaft 2825 match;First fixing hole
Quantity be four, be uniformly distributed in four corners of first 2422, wherein, the first fixing hole is used to wear the first connection
Part, it is corresponding, four motor fixing holes, and four motor fixing holes and the position of four the first fixing holes are also equipped with motor
Put and corresponded with diameter, so as to be fixedly connected with motor with first support 242 by the first connector.
Optionally, second connecting hole is offered for second 2426, second connecting hole is used to wear transmission component 284
Power transmission shaft, second connecting hole is located at the centre position of second 2426, the position of the second connecting hole and the first connecting hole
Position is corresponding so that motor output shaft 2825 is arranged in the first connecting hole, and the power transmission shaft of transmission component 284 is arranged in the second company
Hole is connect, and is fixedly connected by shaft coupling 288.
Optionally, pars intermedia 2428 offers at least two second fixing holes, and second fixing hole is used to wear the second company
Fitting is so that first support 242 be fixedly connected with second support 246.
Second support 246 includes base 2462, the first fixed part 2464 and the second fixed part 2468, wherein, first is solid
Determine the fixed part 2468 of portion 2464 and second and be juxtaposed on base 2462, and the first fixed part 2464 and the second fixed part 2468
In the side of the remote first support 242 of base 2462, optionally, the fixed part 2468 of the first fixed part 2464 and second is
Tabular, polishing wheel 21 between the first fixed part 2464 and the second fixed part 2468, wherein, the first fixed part 2464 and second
Be provided with the 3rd connecting hole on fixed part 2468, the 3rd connecting hole is used to fix polishing wheel 21, enable polishing wheel 21 around
The axis rotation of 3rd connecting hole.
Optionally, base 2462 is provided with perforating 2463, and the perforating 2463 is located at the outside of first support 242 and use
In wearing transmission component 284.In the utility model embodiment 1, the perforating 2463 is slotted hole, the size of the slotted hole
Chain 2846 should be enabled to be passed through out of slotted hole.
It refer to shown in Fig. 7, in the utility model embodiment 1, polishing machine 100 also includes shell 29, the shell 29
For being arranged on the outside of first support 242 and first support 242 and transmission component 284 being blocked, optionally, the shell
29 be U-shaped structure, and the projection of the shell 29 just overlaps with the base 2462 of second support 246, plays safety, protective effect.
Optionally, link gear 10 is fixedly connected with the shell 29 of polishing mechanism 20, so as to control the position of polishing mechanism 20
Put and state.
The polishing wheel 21 is soft with position set in advance and state and work piece progress in the presence of link gear 10
Property contact, while cooling processing is carried out under the auxiliary of polishing fluid, the polishing wheel 21 can be according to the residence time planned in advance
The removal of selectivity is carried out to the face shape error of optical element surface, so as to obtain accurate surface face shape.
The optical element to be processed 30 that the polishing machine 100 can be processed can be bent for plane, sphere, aspherical and freedom
Any one of face form, and the residence time in the process of polishing wheel 21 is planned to the routine side of certainty correction of the flank shape
Method, it will not be described here.
The polishing machine 100 that embodiment 1 of the present utility model provides has an advantageous effect in that:
First, it is reasonable in design, simple in construction, using the polishing wheel 21 of wheeled construction so that polishing wheel 21 can be according to reality
Need to make polishing wheel 21 diameter produce it is larger, meanwhile, the tire 2124 on polishing wheel 21 produces narrower.
2nd, the larger-diameter polishing wheel 21 can ensure the high removal efficiency under same rotational speed, narrower tire
2124 can ensure that the contact surface of polishing wheel 21 and glass surface is smaller, and removal function size is smaller, to the details of face shape error
Ability of practicing Buddhism or Taoism is stronger, it is hereby achieved that higher surface figure accuracy.
3rd, production, processing technology are simple, easy to operate, and the polishing wheel 21 that flexible material makes, and can preferably adapt to kiss
The face type feature of workpiece to be added itself is closed, it is insensitive to driving axial system error, more stable removal function can be obtained, and obtain more
High machining accuracy.
Embodiment 2
Researcher is by research, to polishing machine 100 provided by the utility model, on the basis of above-mentioned embodiment 1,
Following optional other structures schemes can be also made, difference is described as follows:
Link gear 10 be used for carry driving polishing mechanism 20, control polishing mechanism 20 in polishing wheel 21 three-dimensional position and
Particular state so that polishing wheel 21 keeps the machining angle of setting with the surface of optical element 30 to be processed all the time, in this practicality
In new embodiment 2, link gear 10 can be gantry machine tool or multi-shaft interlocked industrial robot, but be not limited to above-mentioned
Mechanism.
Optionally, transmission component 284 can also use belt wheel and band except the sprocket chain strip transmission in embodiment 1
Synchronous Transmission, or the mode of meshed transmission gear, the concrete structure not limited to this of the transmission component 284, as long as will can drive
The rotation of the power output shaft of moving part 282 is delivered to the rotation of the rotary shaft 215 of polishing wheel 21.
Embodiment 3
The utility model embodiment 3 provides a kind of polissoir, including workbench 18 and embodiment 1 or embodiment party
The polishing machine 100 that formula 2 provides, is described as follows:
It refer to shown in Fig. 8, the upper surface of workbench 18, which is horizontally disposed with, the first track 185, the linkage in polishing machine 100
Mechanism 10 includes the first mechanism 13 and the second mechanism 15 being slidably connected, wherein, the first mechanism 13 is slidably arranged on first
Track 185 and polishing mechanism 20 can be made to be fixedly connected along Y direction slidable adjustment, the second mechanism 15 with polishing mechanism 20.
Optionally, the first mechanism 13 includes the track 136 of two rack bodies 134 and second being set up in parallel, wherein, second
Track 136 is between two rack bodies 134, and the second track 136 can rotate relative to rack body 134, so that
Obtaining polishing mechanism 20 can be along A azimuthal rotational motion.
Optionally, the second mechanism 15 includes the first slide mass and the second slide mass, and first slide mass is L-shaped structure, the
Two slide masses offer the first pilot hole and the second pilot hole run through to be shaft-like on the first slide mass, and the first pilot hole with
Second pilot hole is vertically arranged, and the second track 136 is arranged in the first pilot hole and the second mechanism 15 is slided along X-direction
It is dynamic.
Optionally, the second slide mass is slided and is embedded in the second pilot hole of the first slide mass, and the second slide mass being capable of band
Dynamic polishing mechanism 20 slides along Z-direction, meanwhile, the second slide mass can also cause polishing mechanism in the second pilot hole internal rotation
20 can be along C azimuthal rotational motions.
Optionally, the second slide mass is cylindric that second pilot hole is and the second circular port for sliding mates, the reality
It is five-axle linkage mechanism to apply the link gear 10 in mode 3.
It should be noted that in the case where not conflicting, the feature in embodiment in the utility model can be mutual
With reference to.
Preferred embodiment of the present utility model is the foregoing is only, is not limited to the utility model, for
For those skilled in the art, the utility model can have various modifications and variations.It is all in spirit of the present utility model and former
Within then, any modification, equivalent substitution and improvements made etc., it should be included within the scope of protection of the utility model.
Claims (10)
- A kind of 1. polishing machine, it is characterised in that including link gear and polishing mechanism, the link gear and the polishing mechanism It is fixedly connected, the link gear is used for position and the state for controlling the polishing mechanism;The polishing mechanism includes polishing wheel, mounting bracket and Power Component, and the polishing wheel is distinguished with the Power Component The mounting bracket is arranged at, the Power Component is connected with the polishing wheel and for driving the polishing wheel to rotate.
- 2. polishing machine according to claim 1, it is characterised in that the polishing wheel includes wheel body and takes turns this positioned at described The rotary shaft of body both sides, the wheel body include wheel hub and flexible tire, and the material of the flexible tire is rubber or polyurethane, The rotary shaft is rotatably arranged at the mounting bracket by bearing.
- 3. polishing machine according to claim 1, it is characterised in that the Power Component includes actuator and transmission component, The transmission component is connected with the actuator and the polishing wheel respectively, and the actuator being capable of band by the transmission component The dynamic polishing wheel rotation.
- 4. polishing machine according to claim 3, it is characterised in that the transmission component includes the first sprocket wheel, the second sprocket wheel And be sheathed on the chain of first sprocket wheel and second sprocket wheel, the chain respectively with first sprocket wheel and described Two sprocket engagements are driven.
- 5. polishing machine according to claim 4, it is characterised in that the Power Component also includes shaft coupling, the driving Part is motor, and the transmission component also includes power transmission shaft;The motor includes motor output shaft, and the power transmission shaft is fixedly connected with first sprocket wheel, the motor output shaft with The power transmission shaft is fixedly connected by the shaft coupling.
- 6. polishing machine according to claim 3, it is characterised in that the mounting bracket includes the first support being fixedly connected And second support, the Power Component are fixedly installed on the first support, the polishing wheel is rotatably arranged at described Two supports, the first support are fixedly connected with the second support by connector.
- 7. polishing machine according to claim 6, it is characterised in that the first support include first, pars intermedia and Second, the middle part in described first and it is described second between and the first support is formed U-shaped structure;Described first offers first connecting hole and at least two first fixing holes, and described second offers one Two connecting holes, the pars intermedia offer at least two second fixing holes;First fixing hole is used to wear the first connector so as to which the actuator be fixedly connected with the first support, institute The output shaft that the first connecting hole is used to wear the actuator is stated, second connecting hole is used for the biography for wearing the transmission component Moving axis, second fixing hole are used to wear the second connector so as to which the first support and the second support are fixed into company Connect.
- 8. according to the polishing machine described in claim 6, it is characterised in that the second support include base, the first fixed part and Second fixed part, first fixed part and second fixed part are juxtaposed on the remote first support of the base Side, first fixed part and second fixed part be provided with the 3rd connecting hole, and the base is provided with perforating;The perforating is used to wear the transmission component, and the 3rd connecting hole is used to wear the fixed polishing wheel.
- 9. polishing machine according to claim 6, it is characterised in that the polishing machine also includes shell, and the shell is U-shaped Structure and fastening are arranged at the outside of the first support, and the link gear is fixedly connected with the shell.
- 10. a kind of polissoir, it is characterised in that including the polishing machine described in workbench and claim 1-9 any one, institute The first mechanism and the second mechanism that link gear includes being slidably connected are stated, second mechanism is fixed with the polishing mechanism to be connected Connect, the workbench level is provided with the first track, and first mechanism is slidably arranged on first track and causes institute Polishing mechanism is stated to slide along Y-direction;First mechanism includes two rack bodies being set up in parallel and the second rail between two rack bodies Road, second track are rotatably set with the rack body so that the polishing mechanism can be along A azimuthal rotational motions;Second mechanism includes the first slide mass and the second slide mass, and first slide mass is L-shaped, first slide mass The first pilot hole and the second pilot hole are offered, first pilot hole is vertically arranged with second pilot hole, and described second Track is arranged in first pilot hole and second mechanism is slided in X direction;Second slide mass, which slides, is embedded at second pilot hole so that the polishing mechanism slides along Z-direction, and described the Two slide masses can cause the polishing mechanism along C azimuthal rotational motions in the second pilot hole internal rotation.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201720647688.1U CN206780099U (en) | 2017-06-06 | 2017-06-06 | Polishing machine and polissoir |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201720647688.1U CN206780099U (en) | 2017-06-06 | 2017-06-06 | Polishing machine and polissoir |
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CN206780099U true CN206780099U (en) | 2017-12-22 |
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ID=60716408
Family Applications (1)
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CN201720647688.1U Active CN206780099U (en) | 2017-06-06 | 2017-06-06 | Polishing machine and polissoir |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107042446A (en) * | 2017-06-06 | 2017-08-15 | 成都睿坤科技有限公司 | Polishing machine and polissoir |
CN115106871A (en) * | 2022-08-29 | 2022-09-27 | 成都中科卓尔智能科技集团有限公司 | Flexible high-precision repairing device and process for surface defects of semiconductor material |
CN116638386A (en) * | 2023-07-25 | 2023-08-25 | 朗信(苏州)精密光学有限公司 | Magnetorheological polishing tool for in-situ measurement |
-
2017
- 2017-06-06 CN CN201720647688.1U patent/CN206780099U/en active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107042446A (en) * | 2017-06-06 | 2017-08-15 | 成都睿坤科技有限公司 | Polishing machine and polissoir |
CN115106871A (en) * | 2022-08-29 | 2022-09-27 | 成都中科卓尔智能科技集团有限公司 | Flexible high-precision repairing device and process for surface defects of semiconductor material |
CN116638386A (en) * | 2023-07-25 | 2023-08-25 | 朗信(苏州)精密光学有限公司 | Magnetorheological polishing tool for in-situ measurement |
CN116638386B (en) * | 2023-07-25 | 2023-10-10 | 朗信(苏州)精密光学有限公司 | Magnetorheological polishing tool for in-situ measurement |
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