CN206756314U - System for detecting consistency and stability of optical axis of beam expanding linearly polarized light - Google Patents
System for detecting consistency and stability of optical axis of beam expanding linearly polarized light Download PDFInfo
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- CN206756314U CN206756314U CN201720515054.0U CN201720515054U CN206756314U CN 206756314 U CN206756314 U CN 206756314U CN 201720515054 U CN201720515054 U CN 201720515054U CN 206756314 U CN206756314 U CN 206756314U
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- 238000001514 detection method Methods 0.000 claims abstract description 75
- 230000007246 mechanism Effects 0.000 claims abstract description 42
- 238000012360 testing method Methods 0.000 claims abstract description 20
- 230000005693 optoelectronics Effects 0.000 claims description 10
- 238000000034 method Methods 0.000 abstract description 12
- 238000005259 measurement Methods 0.000 abstract description 11
- 230000010287 polarization Effects 0.000 abstract description 5
- 230000005540 biological transmission Effects 0.000 description 4
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Abstract
The utility model belongs to the technical field of the precision test measurement, concretely relates to beam expanding linear polarization light optical axis uniformity, stability detecting system. The detection system comprises a detection device, a theodolite and a reference plane mirror; the theodolite is used for collimating the detection device and the reference plane mirror; the detection device comprises a fixing mechanism, a rotating mechanism, a detection mechanism and a leveling mechanism; the detection mechanism is arranged on the fixing mechanism through the rotating mechanism, and the fixing mechanism is arranged on an indexing table through the leveling mechanism; the detection mechanism comprises a detection right-angle prism and a photoelectric receiving assembly; the detection right-angle prism is used for leading out the optical axis direction of the detected polarized light, and the photoelectric receiving assembly is used for detecting the direction of the polarized light and converting an optical signal into an electric signal. Adopt the utility model provides an expand linear polarization light optical axis uniformity, stability detecting system and method can carry out accurate measurement to the uniformity and the stability through expanding the beam back linear polarization light optical axis, have improved the measurement accuracy of linear polarization light technique.
Description
Technical field
The utility model belongs to precision measurement field of measuring techniques, and in particular to it is consistent that one kind expands linearly polarized light optical axis
Property, Detection of Stability system.
Background technology
In precision measurement field of measuring techniques, polarized-light technique application is very extensive, but in application process, for warp
Cross that the uniformity for expanding rear linearly polarized light optical axis, stability are indefinite, so as to have impact on final measurement accuracy and its application.
At present, it is to detect target phase using linearly polarized light as benchmark when carrying out accurate measurement using linearly polarized light technology
Target is measured for the minor shifts amount of the benchmark, or according to state change of the polarised light after target.So
It is very crucial for measuring to expand the performance of rear linearly polarized light, uniformity, the stability of its optical axis will directly influence measurement
Precision.
Utility model content
In order to solve the skill that existing linearly polarized light technology can not accurately be detected to its light axis consistency and stability
Art problem, the utility model provide one kind and expand linearly polarized light light axis consistency, Detection of Stability system.
Technical solution of the present utility model is：One kind expands linearly polarized light light axis consistency, Detection of Stability system,
It is characterized in that：Including detection means, theodolite and datum plane mirror；The theodolite is used to collimate detection means and base
Directrix plane mirror；
The detection means includes fixed mechanism, rotating mechanism, testing agency and levelling gear；The testing agency passes through
Rotating mechanism is installed on fixed mechanism, and the fixed mechanism is installed on a circular dividing table by levelling gear；
The testing agency includes detection right-angle prism and opto-electronic receiver component；The detection right-angle prism is used to draw quilt
Polarised light Axis Azimuth is detected, the opto-electronic receiver component is used to detect polarised light orientation and converts optical signals to electric signal.
Further, above-mentioned opto-electronic receiver component includes analyzer and the photoelectric switching circuit plate being connected with analyzer.
Further, above-mentioned rotating mechanism include being vertically arranged at dense ball bearing shafting between testing agency and fixed mechanism with
And the locking vernier knob being adapted with dense ball bearing shafting.
Further, above-mentioned levelling gear is included positioned at the levelling foot spiral shell of fixed mechanism bottom and in testing agency
Leveling indicates bubble.
The utility model also provides one kind and expands linearly polarized light light axis consistency, Detection of Stability method, its special character
It is：Comprise the following steps：
1) detection means is placed on the circular dividing table after leveling, makes the alignment inspection of the tested linearly polarized light center after expanding
Survey the light hole of device and by detection means leveling, this position is designated as center I；Perform step 2) to step 4) obtain by
Examine optical axis stable degree δ of the linearly polarized light at the I of centerIAnd optical axis and base of the tested linearly polarized light at the I of center
The orientation angle α of directrix plane mirrorI；Then step 5) is performed；
2) rotating mechanism of rotation detecting device, the light transmission shaft of analyzer and tested linearly polarized light optical axis in detection means are made
Angle (i.e. the extinction position of the relatively detected linearly polarized light optical axis of analyzer optical axis) in 90 °, and lock the locking of rotating mechanism
Vernier knob；Alignment measurement is carried out to the datum plane mirror beside detection means using theodolite, records now longitude and latitude orientation values
For αBenchmark P, wherein P represents different positions；The orientation values that right-angle prism is detected in theodolite collimation detection means are β1；
3) keep detection means, datum plane mirror and theodolite position constant, after rotating mechanism is turned an angle again
Make the light transmission shaft of analyzer and tested linearly polarized light optical axis angle in 90 ° in detection means, locking knob is locked, theodolite is accurate
It is β to detect right-angle prism orientation values in straight detection means2；
4) repeat step 3) and obtain multiple detection right-angle prism orientation values β3、β4……βn；Calculated according to formula (1)
Obtain optical axis stable degree δ of the tested linearly polarized light at the P of positionP, tested linearly polarized light is calculated in position according to formula (2)
The orientation angle α of optical axis and benchmark prism at PP；
5) optical axis stable degree δ of the tested linearly polarized light at the I of center is obtainedIAnd tested linearly polarized light is in centre bit
Put the orientation angle α of the optical axis and datum plane mirror at II；
6) keep datum plane mirror position constant, then will inspection by detection means relative to center I translation distance d
Device leveling is surveyed, this position is designated as position II；Perform step 2) to step 4) and obtain tested linearly polarized light at the II of position
Optical axis stable degree δIIAnd the orientation angle α of optical axis of the tested linearly polarized light at the II of position and datum plane mirrorII；Tested line
Polarised light is α relative to center I optical axis consistent degree at the II of positionII-αI；
7) it is the integer more than or equal to 6 to set number of revolutions m, m；
8) keep the position of detection means and datum plane mirror constant, in the counterclockwise direction by circular dividing table rotational angle θ, so
Afterwards by detection means leveling；Wherein, θ=360 °/m；This position is designated as position III；Perform step 2) to step 4) obtain by
Examine optical axis stable degree δ of the linearly polarized light at the III of positionIIIAnd optical axis of the tested linearly polarized light at the III of position and benchmark rib
The orientation angle α of mirrorIII；Tested linearly polarized light is α relative to center I optical axis consistent degree at the III of positionIII-αI；
9) m-2 step 7) is repeated, respectively obtains optical axis stable degree δ of the tested linearly polarized light at the P of positionPAnd
The orientation angle α of tested optical axis of the linearly polarized light at the P of position and benchmark prismP；Tested linearly polarized light at the P of position relative to
Center I optical axis consistent degree is αP-αI；Wherein, P value IV, V, VI, VII ... successively.
It is preferred that distance d in step 6) is linearly polarized light expand after inspection positions spot diameter 1/2.
It is preferred that the number of revolutions m in step 7) is 6,8,9,10 or 12.
It is preferred that it is above-mentioned expand linearly polarized light light axis consistency, Detection of Stability method also expands linear polarization including detection
The step of hot spot uniformity of light：In each test position execution of step 2) after, pass through the signal exit in detection means
By the signal output after opto-electronic conversion to oscillograph, observe and record the signal amplitude of the position；Wherein, at the I of center
Signal amplitude is VI, the signal amplitude at the P of position is VP, P value II, III, IV, V ... successively；At the P of position, it is inclined to expand line
The hot spot uniformity of light of shaking is (VI-VP)/VI。
The beneficial effects of the utility model are：Using it is provided by the utility model expand linearly polarized light light axis consistency,
Detection of Stability system and method can carry out accurate measure to the uniformity of linearly polarized light optical axis after expanding and stability,
Improve the measurement accuracy of linearly polarized light technology.
Brief description of the drawings
Fig. 1 is that the utility model expands linearly polarized light light axis consistency, the working state schematic representation of Detection of Stability system.
Fig. 2 is the preferred embodiment structural representation of the utility model detection means.
Wherein, reference is as follows：1- detection right-angle prisms, 2- light holes, 3- opto-electronic receiver components, 4- testing agencies,
5- leveling instruction bubble, 6- locking fine motion knobs, 7- fixed mechanisms, 8- dense ball bearing shaftings, 9- levelling foot spiral shells, 10- detection means,
11- theodolites, 12- datum plane mirrors.
Embodiment
Referring to Fig. 1, the utility model provides one kind and expands linearly polarized light light axis consistency, Detection of Stability system, should
System mainly includes detection means 10, theodolite 11 and datum plane mirror 12.
Wherein, detection means mainly includes fixed mechanism, rotating mechanism, testing agency and levelling gear；Fixed mechanism leads to
Cross levelling gear to be installed on a circular dividing table, testing agency is installed on fixed mechanism by rotating mechanism.
Referring to Fig. 2, testing agency 4 includes detection right-angle prism 1, light hole 2, opto-electronic receiver component 3.Rotating mechanism includes
The dense ball bearing shafting 8 being vertically arranged between testing agency 4 and fixed mechanism 7 and the locking fine motion being adapted with dense ball bearing shafting 8
Mechanism 6.Levelling gear includes the leveling instruction bubble positioned at the levelling foot spiral shell 9 of the bottom of fixed mechanism 7 and in testing agency
5。
Detection means ensures that polarised light being capable of vertical incidence detection means in the detected light path for expanding linearly polarized light
Light hole；Theodolite is located at immediately ahead of detection means, ensures that it can be collimated in detection means and detects right-angle prism；Benchmark
Level crossing lateral a certain fixed position between detection means and theodolite, ensure that theodolite can be in same position with two
Different angles is collimated to detection means and datum plane mirror respectively.
Using detecting system provided by the utility model expand linearly polarized light light axis consistency, Detection of Stability side
Method mainly includes the following steps that：
1) detection means is placed on the circular dividing table after leveling, makes the alignment inspection of the tested linearly polarized light center after expanding
Survey the light hole of device and by detection means leveling, this position is designated as center I；
2) rotating mechanism of rotation detecting device, the light transmission shaft of analyzer and tested linearly polarized light optical axis in detection means are made
Angle in 90 °, and lock the locking knob of rotating mechanism；The datum plane mirror beside detection means is carried out using theodolite accurate
Straight measurement, now longitude and latitude orientation values are α to recordBenchmark P, wherein P represents different positions；Detected in theodolite collimation detection means
Right-angle prism orientation values are β1；
3) keep detection means, datum plane mirror and theodolite position constant, after rotating mechanism is turned an angle again
Make the light transmission shaft of analyzer and tested linearly polarized light optical axis angle in 90 ° in detection means, locking knob is locked, theodolite is accurate
It is β to detect right-angle prism orientation values in straight detection means2；
4) repeat step 3) and obtain multiple detection right-angle prism orientation values β3、β4……βn；Calculated according to formula (1)
Obtain optical axis stable degree δ of the tested linearly polarized light at the P of positionP, tested linearly polarized light is calculated in position according to formula (2)
The orientation angle α of optical axis and benchmark prism at PP；
5) optical axis stable degree δ of the tested linearly polarized light at the I of center is obtainedIAnd tested linearly polarized light is in centre bit
Put the orientation angle α of the optical axis and datum plane mirror at II；
6) keep datum plane mirror position constant, detection means is translated into 60mm relative to center I, then will detection
Device leveling, this position is designated as position II；Perform step 2) to step 4) and obtain tested light of the linearly polarized light at the II of position
Axle stability δIIAnd the orientation angle α of optical axis of the tested linearly polarized light at the II of position and datum plane mirrorII；Tested line is inclined
The light that shakes is α relative to center I optical axis consistent degree at the II of positionII-αI；
7) it is the integer more than or equal to 6 to set number of revolutions m, m；If number of revolutions setting is too low, it is difficult to ensure that
The accuracy of testing result；If number of revolutions setting is too high, detection efficiency can be reduced.For the ease of calculate rotational angle and
Be easy to control circular dividing table carry out rotation process, should reasonable set number of revolutions, especially with rotating operation according to circumference equal dividing
Point is preferred, such as 6,8,9,10 or 12 etc..It is more preferable, number of revolutions is set as 6 times in the present embodiment.
8) keep the position of detection means and datum plane mirror constant, in the counterclockwise direction by 60 ° of circular dividing table rotational angle,
Then by detection means leveling；This position is designated as position III；It is in place that execution step 2) to step 4) obtains tested linearly polarized light
Put the optical axis stable degree δ at IIIIIIAnd the orientation angle of optical axis of the tested linearly polarized light at the III of position and benchmark prism
αIII；Tested linearly polarized light is α relative to center I optical axis consistent degree at the III of positionIII-αI；
9) 4 step 7) are repeated, respectively obtain optical axis stable degree δ of the tested linearly polarized light at the P of positionPAnd by
Examine the orientation angle α of optical axis of the linearly polarized light at the P of position and benchmark prismP；Tested linearly polarized light is at the P of position in
Heart position I optical axis consistent degree is αP-αI；Wherein, P value IV, V, VI, VII successively.
By detection means provided by the utility model, can also be detected to expanding the linearly polarized light hot spot uniformity.
Specific method is：In each test position execution of step 2) after, by the signal exit in detection means by opto-electronic conversion
Signal output afterwards is observed to oscillograph and records the signal amplitude of the position；Wherein, the signal amplitude at the I of center is
VI, the signal amplitude at the P of position is VP, P value II, III, IV, V ... successively；At the P of position, the hot spot of linearly polarized light is expanded
The uniformity is (VI-VP)/VI。
Claims (4)
1. one kind expands linearly polarized light light axis consistency, Detection of Stability system, it is characterised in that：Including detection means, longitude and latitude
Instrument and datum plane mirror；The theodolite is used to collimate detection means and datum plane mirror；
The detection means includes fixed mechanism, rotating mechanism, testing agency and levelling gear；The testing agency passes through rotation
Mechanism is installed on fixed mechanism, and the fixed mechanism is installed on a circular dividing table by levelling gear；
The testing agency includes detection right-angle prism and opto-electronic receiver component；The detection right-angle prism is detected for drawing
Polarised light Axis Azimuth, the opto-electronic receiver component are used to detect polarised light orientation and convert optical signals to electric signal.
2. according to claim 1 expand linearly polarized light light axis consistency, Detection of Stability system, it is characterised in that：Institute
Stating opto-electronic receiver component includes analyzer and the photoelectric switching circuit plate being connected with analyzer.
3. according to claim 1 or 2 expand linearly polarized light light axis consistency, Detection of Stability system, it is characterised in that：
The rotating mechanism includes being vertically arranged at the dense ball bearing shafting between testing agency and fixed mechanism and mutually fitting with dense ball bearing shafting
The locking vernier knob matched somebody with somebody.
4. according to claim 3 expand linearly polarized light light axis consistency, Detection of Stability system, it is characterised in that：Institute
The leveling that stating levelling gear is included positioned at the levelling foot spiral shell of fixed mechanism bottom and in testing agency indicates bubble.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720515054.0U CN206756314U (en) | 2017-05-10 | 2017-05-10 | System for detecting consistency and stability of optical axis of beam expanding linearly polarized light |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720515054.0U CN206756314U (en) | 2017-05-10 | 2017-05-10 | System for detecting consistency and stability of optical axis of beam expanding linearly polarized light |
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| Publication Number | Publication Date |
|---|---|
| CN206756314U true CN206756314U (en) | 2017-12-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720515054.0U Withdrawn - After Issue CN206756314U (en) | 2017-05-10 | 2017-05-10 | System for detecting consistency and stability of optical axis of beam expanding linearly polarized light |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107328477A (en) * | 2017-05-10 | 2017-11-07 | 中国科学院西安光学精密机械研究所 | System and method for detecting consistency and stability of optical axis of beam expanding linearly polarized light |
-
2017
- 2017-05-10 CN CN201720515054.0U patent/CN206756314U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107328477A (en) * | 2017-05-10 | 2017-11-07 | 中国科学院西安光学精密机械研究所 | System and method for detecting consistency and stability of optical axis of beam expanding linearly polarized light |
| CN107328477B (en) * | 2017-05-10 | 2019-01-11 | 中国科学院西安光学精密机械研究所 | System and method for detecting consistency and stability of optical axis of beam expanding linearly polarized light |
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| GR01 | Patent grant | ||
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| AV01 | Patent right actively abandoned |
Granted publication date: 20171215 Effective date of abandoning: 20190111 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20171215 Effective date of abandoning: 20190111 |
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| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |