CN206756314U - System for detecting consistency and stability of optical axis of beam expanding linearly polarized light - Google Patents
System for detecting consistency and stability of optical axis of beam expanding linearly polarized light Download PDFInfo
- Publication number
- CN206756314U CN206756314U CN201720515054.0U CN201720515054U CN206756314U CN 206756314 U CN206756314 U CN 206756314U CN 201720515054 U CN201720515054 U CN 201720515054U CN 206756314 U CN206756314 U CN 206756314U
- Authority
- CN
- China
- Prior art keywords
- polarized light
- detection
- optical axis
- linearly polarized
- stability
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 61
- 238000001514 detection method Methods 0.000 claims abstract description 88
- 239000011324 bead Substances 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 13
- 238000000034 method Methods 0.000 abstract description 8
- 238000005516 engineering process Methods 0.000 abstract description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
本实用新型属于精密测试计量技术领域，具体涉及一种扩束线偏振光光轴一致性、稳定性检测系统。该检测系统包括检测装置、经纬仪和基准平面镜；经纬仪用于准直检测装置和基准平面镜；检测装置包括固定机构、旋转机构、检测机构和调平机构；检测机构通过旋转机构安装于固定机构上，固定机构通过调平机构安装于一个分度台上；检测机构包括检测直角棱镜和光电接收组件；检测直角棱镜用于引出被检测偏振光光轴方位，光电接收组件用于检测偏振光方位并将光信号转换为电信号。采用本实用新型提供的扩束线偏振光光轴一致性、稳定性检测系统及方法可以对经过扩束后线偏振光光轴的一致性和稳定性进行准确量度，提高了线偏振光技术的测量精度。
The utility model belongs to the technical field of precision measurement and measurement, and in particular relates to a detection system for optical axis consistency and stability of beam expanding linearly polarized light. The detection system includes a detection device, a theodolite and a reference plane mirror; the theodolite is used for collimating the detection device and the reference plane mirror; the detection device includes a fixing mechanism, a rotating mechanism, a detecting mechanism and a leveling mechanism; the detecting mechanism is installed on the fixing mechanism through the rotating mechanism, The fixing mechanism is installed on an indexing platform through a leveling mechanism; the detection mechanism includes a detection rectangular prism and a photoelectric receiving assembly; the detection rectangular prism is used to extract the orientation of the optical axis of the detected polarized light, and the photoelectric receiving assembly is used to detect the orientation of the polarized light and Optical signals are converted into electrical signals. The consistency and stability detection system and method of the optical axis of the expanded linearly polarized light provided by the utility model can accurately measure the consistency and stability of the optical axis of the linearly polarized light after beam expansion, which improves the accuracy of the linearly polarized light technology. measurement accuracy.
Description
技术领域technical field
本实用新型属于精密测试计量技术领域，具体涉及一种扩束线偏振光光轴一致性、稳定性检测系统。The utility model belongs to the technical field of precision measurement and measurement, and in particular relates to a detection system for optical axis consistency and stability of beam expanding linearly polarized light.
背景技术Background technique
在精密测试计量技术领域，偏振光技术应用非常广泛，然而在应用过程中，对于经过扩束后线偏振光光轴的一致性、稳定性不明确，从而影响了最终的测量精度及其应用。In the field of precision measurement and measurement technology, polarized light technology is widely used. However, in the application process, the consistency and stability of the optical axis of linearly polarized light after beam expansion are not clear, which affects the final measurement accuracy and its application.
目前，应用线偏振光技术进行精密测量时，是将线偏振光作为基准来检测目标相对于该基准的微小偏移量，或是根据偏振光经过目标后的状态变化对目标进行测量。所以，扩束后线偏振光的性能对于测量非常关键，其光轴的一致性、稳定性将直接影响到测量的精度。At present, when linearly polarized light technology is used for precision measurement, the linearly polarized light is used as a reference to detect the slight offset of the target relative to the reference, or the target is measured according to the state change of the polarized light after it passes through the target. Therefore, the performance of linearly polarized light after beam expansion is very critical for measurement, and the consistency and stability of its optical axis will directly affect the accuracy of measurement.
实用新型内容Utility model content
为了解决现有的线偏振光技术无法对其光轴一致性和稳定性进行精确检测的技术问题，本实用新型提供一种扩束线偏振光光轴一致性、稳定性检测系统。In order to solve the technical problem that the existing linearly polarized light technology cannot accurately detect the consistency and stability of the optical axis, the utility model provides a detection system for the consistency and stability of the optical axis of the beam expanding linearly polarized light.
本实用新型的技术解决方案是：一种扩束线偏振光光轴一致性、稳定性检测系统，其特殊之处在于：包括检测装置、经纬仪和基准平面镜；所述经纬仪用于准直检测装置和基准平面镜；The technical solution of the utility model is: an optical axis consistency and stability detection system of linearly polarized beam expansion, which is special in that it includes a detection device, a theodolite and a reference plane mirror; the theodolite is used for an alignment detection device and a reference plane mirror;
所述检测装置包括固定机构、旋转机构、检测机构和调平机构；所述检测机构通过旋转机构安装于固定机构上，所述固定机构通过调平机构安装于一个分度台上；The detection device includes a fixing mechanism, a rotation mechanism, a detection mechanism and a leveling mechanism; the detection mechanism is installed on the fixing mechanism through the rotation mechanism, and the fixing mechanism is installed on an indexing platform through the leveling mechanism;
所述检测机构包括检测直角棱镜和光电接收组件；所述检测直角棱镜用于引出被检测偏振光光轴方位，所述光电接收组件用于检测偏振光方位并将光信号转换为电信号。The detection mechanism includes a detection right-angle prism and a photoelectric receiving assembly; the detection right-angle prism is used to extract the orientation of the optical axis of the detected polarized light, and the photoelectric receiving assembly is used to detect the orientation of the polarized light and convert the optical signal into an electrical signal.
进一步地，上述光电接收组件包括检偏镜和与检偏镜相连的光电转换电路板。Further, the above-mentioned photoelectric receiving component includes an analyzer and a photoelectric conversion circuit board connected with the analyzer.
进一步地，上述旋转机构包括竖直设置于检测机构和固定机构之间的密珠轴系以及与密珠轴系相适配的锁紧微调旋钮。Further, the above-mentioned rotating mechanism includes a dense bead shaft system vertically arranged between the detection mechanism and the fixing mechanism, and a locking fine-tuning knob adapted to the dense bead shaft system.
进一步地，上述调平机构包括位于固定机构底部的调平脚螺和位于检测机构上的调平指示水泡。Further, the above-mentioned leveling mechanism includes a leveling foot screw at the bottom of the fixing mechanism and a leveling indicating blister on the detection mechanism.
本实用新型还提供一种扩束线偏振光光轴一致性、稳定性检测方法，其特殊之处在于：包括以下步骤：The utility model also provides a method for detecting the consistency and stability of the optical axis of the beam-expanding linearly polarized light, which is special in that it includes the following steps:
1)将检测装置置于调平后的分度台上，使经过扩束后的被检线偏振光中心对准检测装置的通光孔并将检测装置调平，将此位置记为中心位置I；执行步骤2)至步骤4)得到被检线偏振光在中心位置I处的光轴稳定度δI以及被检线偏振光在中心位置I处的光轴与基准平面镜的方位夹角αI；然后执行步骤5)；1) Place the detection device on the leveled indexing table, align the center of the inspected linearly polarized light after beam expansion with the light hole of the detection device and level the detection device, and record this position as the center position 1; perform steps 2) to step 4) to obtain the optical axis stability δ1 of the linearly polarized light at the central position I and the azimuth angle α between the optical axis of the linearly polarized light at the central position I and the reference plane mirror I ; then perform step 5);
2)转动检测装置的旋转机构，使检测装置上检偏镜的透光轴与被检线偏振光光轴成90°夹角(即检偏镜光轴相对被检测线偏振光光轴的消光位置)，并锁紧旋转机构的锁紧微调旋钮；使用经纬仪对检测装置旁边的基准平面镜进行准直测量，记录此时经纬方位值为α基准P，其中P代表不同的位置；经纬仪准直检测装置上检测直角棱镜的方位值为β1；2) Rotate the rotating mechanism of the detection device so that the transmission axis of the analyzer on the detection device forms an angle of 90° with the optical axis of the linearly polarized light to be detected (that is, the extinction of the optical axis of the analyzer relative to the optical axis of the linearly polarized light to be detected position), and lock the locking fine-tuning knob of the rotating mechanism; use the theodolite to measure the alignment of the reference plane mirror next to the detection device, and record the latitude and longitude azimuth at this time as the α reference P , where P represents a different position; theodolite alignment detection The azimuth value of the detection rectangular prism on the device is β 1 ;
3)保持检测装置、基准平面镜及经纬仪位置不变，将旋转机构转动一定角度后再使检测装置上检偏镜的透光轴与被检线偏振光光轴成90°夹角，将锁紧旋钮锁紧，经纬仪准直检测装置上检测直角棱镜方位值为β2；3) Keep the positions of the detection device, reference plane mirror and theodolite unchanged, rotate the rotating mechanism at a certain angle, and then make the light transmission axis of the analyzer on the detection device form an angle of 90° with the optical axis of the linearly polarized light to be inspected, and lock the The knob is locked, and the azimuth value of the rectangular prism detected on the theodolite collimation detection device is β 2 ;
4)重复执行步骤3)得到多个检测直角棱镜方位值β3、β4……βn；按照公式(1)计算得到被检线偏振光在位置P处的光轴稳定度δP，按照公式(2)计算得到被检线偏振光在位置P处的光轴与基准棱镜的方位夹角αP；4) Repeat step 3) to obtain a plurality of detection rectangular prism azimuth values β 3 , β 4 ... β n ; calculate the optical axis stability δ P of the detected linearly polarized light at position P according to the formula (1), and calculate according to The formula (2) calculates the azimuth angle α P between the optical axis of the linearly polarized light at the position P and the reference prism;
5)得到被检线偏振光在中心位置I处的光轴稳定度δI以及被检线偏振光在中心位置I处的光轴与基准平面镜的方位夹角αI；5) Obtain the optical axis stability δ1 of the linearly polarized light at the central position I and the azimuth angle α1 between the optical axis of the linearly polarized light at the central position I and the reference plane mirror;
6)保持基准平面镜位置不变，将检测装置相对于中心位置I平移距离d，然后将检测装置调平，将此位置记为位置II；执行步骤2)至步骤4)得到被检线偏振光在位置II处的光轴稳定度δII以及被检线偏振光在位置II处的光轴与基准平面镜的方位夹角αII；被检线偏振光在位置II处相对于中心位置I的光轴一致度为αII-αI；6) Keep the position of the reference plane mirror unchanged, translate the detection device relative to the center position I by a distance d, then level the detection device, and record this position as position II; perform steps 2) to 4) to obtain the linearly polarized light to be inspected The optical axis stability δ II at position II and the azimuth angle α II between the optical axis of the linearly polarized light at position II and the reference plane mirror; Axis coincidence degree is α II -α I ;
7)设定转动次数m，m为大于或等于6的整数；7) Set the number of rotations m, where m is an integer greater than or equal to 6;
8)保持检测装置和基准平面镜的位置不变，沿逆时针方向将分度台转动角度θ，然后将检测装置调平；其中，θ＝360°/m；将此位置记为位置III；执行步骤2)至步骤4)得到被检线偏振光在位置III处的光轴稳定度δIII以及被检线偏振光在位置III处的光轴与基准棱镜的方位夹角αIII；被检线偏振光在位置III处相对于中心位置I的光轴一致度为αIII-αI；8) Keep the positions of the detection device and the reference plane mirror unchanged, rotate the indexing table by an angle θ counterclockwise, and then level the detection device; where, θ=360°/m; record this position as position III; execute Step 2) to step 4) obtain the optical axis stability δ III of the inspected linearly polarized light at position III and the azimuth angle α III between the optical axis of the inspected linearly polarized light at position III and the reference prism; The degree of consistency of the optical axis of the polarized light at position III relative to center position I is α III - α I ;
9)重复执行m-2次步骤7)，分别得到被检线偏振光在位置P处的光轴稳定度δP以及被检线偏振光在位置P处的光轴与基准棱镜的方位夹角αP；被检线偏振光在位置P处相对于中心位置I的光轴一致度为αP-αI；其中，P依次取值IV、V、VI、VII……。9) Repeat step 7) for m-2 times to obtain the optical axis stability δ P of the linearly polarized light at position P and the azimuth angle between the optical axis of the linearly polarized light at position P and the reference prism α P ; the coincidence degree of the optical axis of the detected linearly polarized light at the position P relative to the central position I is α P -α I ; where, P takes the values IV, V, VI, VII... in turn.
较佳地，步骤6)中的距离d为线偏振光扩束后在检测位置处的光斑直径的1/2。Preferably, the distance d in step 6) is 1/2 of the spot diameter at the detection position after the linearly polarized light is expanded.
较佳地，步骤7)中的转动次数m为6、8、9、10或者12。Preferably, the number of rotations m in step 7) is 6, 8, 9, 10 or 12.
较佳地，上述扩束线偏振光光轴一致性、稳定性检测方法还包括检测扩束线偏振光的光斑均匀度的步骤：在每个检测位置执行完步骤2)后，通过检测装置上的信号引出端将光电转换后的信号输出至示波器，观察并记录该位置的信号幅值；其中，中心位置I处的信号幅值为VI，位置P处的信号幅值为VP，P依次取值II、III、IV、V……；在位置P处，扩束线偏振光的光斑均匀度为(VI-VP)/VI。Preferably, the method for detecting the consistency and stability of the optical axis of the expanded linearly polarized light also includes a step of detecting the spot uniformity of the expanded linearly polarized light: after step 2) is performed at each detection position, the The signal lead-out end of the signal output the photoelectrically converted signal to the oscilloscope, observe and record the signal amplitude at this position; among them, the signal amplitude at the center position I is V I , and the signal amplitude at position P is V P , P Values II, III, IV, V... are taken in sequence; at position P, the spot uniformity of beam expander linearly polarized light is (V I -V P )/V I .
本实用新型的有益效果在于：采用本实用新型提供的扩束线偏振光光轴一致性、稳定性检测系统及方法可以对经过扩束后线偏振光光轴的一致性和稳定性进行准确量度，提高了线偏振光技术的测量精度。The beneficial effect of the utility model is that the consistency and stability of the optical axis of the expanded linearly polarized light provided by the utility model can be accurately measured by the consistency and stability of the optical axis of the linearly polarized light after beam expansion. , improving the measurement accuracy of the linearly polarized light technique.
附图说明Description of drawings
图1为本实用新型扩束线偏振光光轴一致性、稳定性检测系统的工作状态示意图。Fig. 1 is a schematic diagram of the working state of the optical axis consistency and stability detection system of beam expanding linearly polarized light of the present invention.
图2为本实用新型检测装置的较佳实施例结构示意图。Fig. 2 is a schematic structural diagram of a preferred embodiment of the detection device of the present invention.
其中，附图标记如下：1-检测直角棱镜，2-通光孔，3-光电接收组件，4-检测机构，5-调平指示水泡，6-锁紧微动旋钮，7-固定机构，8-密珠轴系，9-调平脚螺，10-检测装置，11-经纬仪，12-基准平面镜。Among them, the reference signs are as follows: 1-detection rectangular prism, 2-optical hole, 3-photoelectric receiving component, 4-detection mechanism, 5-leveling indicator blister, 6-locking micro-knob, 7-fixing mechanism, 8- dense bead shafting, 9- leveling screw, 10- detection device, 11- theodolite, 12- datum plane mirror.
具体实施方式detailed description
参见图1，本实用新型提供了一种扩束线偏振光光轴一致性、稳定性检测系统，该系统主要包括检测装置10、经纬仪11和基准平面镜12。Referring to FIG. 1 , the utility model provides an optical axis consistency and stability detection system of beam expanding linearly polarized light. The system mainly includes a detection device 10 , a theodolite 11 and a reference plane mirror 12 .
其中，检测装置主要包括固定机构、旋转机构、检测机构和调平机构；固定机构通过调平机构安装于一个分度台上，检测机构通过旋转机构安装于固定机构上。Wherein, the detecting device mainly includes a fixing mechanism, a rotating mechanism, a detecting mechanism and a leveling mechanism; the fixing mechanism is installed on an indexing platform through the leveling mechanism, and the detecting mechanism is installed on the fixing mechanism through the rotating mechanism.
参见图2，检测机构4包括检测直角棱镜1、通光孔2、光电接收组件3。旋转机构包括竖直设置于检测机构4和固定机构7之间的密珠轴系8以及与密珠轴系8相适配的锁紧微动机构6。调平机构包括位于固定机构7底部的调平脚螺9和位于检测机构上的调平指示水泡5。Referring to FIG. 2 , the detection mechanism 4 includes a detection rectangular prism 1 , a light aperture 2 , and a photoelectric receiving component 3 . The rotating mechanism includes a dense bead shafting 8 vertically arranged between the detection mechanism 4 and the fixing mechanism 7 and a locking micro-motion mechanism 6 adapted to the dense bead shafting 8 . The leveling mechanism includes a leveling foot screw 9 at the bottom of the fixing mechanism 7 and a leveling indicating blister 5 on the detection mechanism.
检测装置位于被检测扩束线偏振光的光路中，保证偏振光能够垂直入射检测装置的通光孔；经纬仪位于检测装置正前方，保证其能够准直到检测装置上检测直角棱镜；基准平面镜位于检测装置与经纬仪之间侧向某一固定位置，保证经纬仪能够在同一位置以两个不同的角度分别准直到检测装置和基准平面镜。The detection device is located in the optical path of the detected beam-expanded linearly polarized light, ensuring that the polarized light can be vertically incident on the light hole of the detection device; A certain fixed position laterally between the device and the theodolite ensures that the theodolite can be aligned to the detection device and the reference plane mirror at the same position at two different angles.
使用本实用新型提供的检测系统进行扩束线偏振光光轴一致性、稳定性检测的方法主要包括以下步骤：The method of using the detection system provided by the utility model to detect the consistency and stability of the optical axis of the beam expanding linearly polarized light mainly includes the following steps:
1)将检测装置置于调平后的分度台上，使经过扩束后的被检线偏振光中心对准检测装置的通光孔并将检测装置调平，将此位置记为中心位置I；1) Place the detection device on the leveled indexing table, align the center of the inspected linearly polarized light after beam expansion with the light hole of the detection device and level the detection device, and record this position as the center position I;
2)转动检测装置的旋转机构，使检测装置上检偏镜的透光轴与被检线偏振光光轴成90°夹角，并锁紧旋转机构的锁紧旋钮；使用经纬仪对检测装置旁边的基准平面镜进行准直测量，记录此时经纬方位值为α基准P，其中P代表不同的位置；经纬仪准直检测装置上检测直角棱镜方位值为β1；2) Rotate the rotating mechanism of the detection device so that the light transmission axis of the analyzer on the detection device forms an angle of 90° with the optical axis of the linearly polarized light to be inspected, and lock the locking knob of the rotating mechanism; The reference plane mirror of the theodolite is used for collimation measurement, and the longitude and latitude azimuth value at this time is recorded as α reference P , where P represents different positions; the azimuth value of the rectangular prism detected on the theodolite collimation detection device is β 1 ;
3)保持检测装置、基准平面镜及经纬仪位置不变，将旋转机构转动一定角度后再使检测装置上检偏镜的透光轴与被检线偏振光光轴成90°夹角，将锁紧旋钮锁紧，经纬仪准直检测装置上检测直角棱镜方位值为β2；3) Keep the positions of the detection device, reference plane mirror and theodolite unchanged, rotate the rotating mechanism at a certain angle, and then make the light transmission axis of the analyzer on the detection device form an angle of 90° with the optical axis of the linearly polarized light to be inspected, and lock the The knob is locked, and the azimuth value of the rectangular prism detected on the theodolite collimation detection device is β 2 ;
4)重复执行步骤3)得到多个检测直角棱镜方位值β3、β4……βn；按照公式(1)计算得到被检线偏振光在位置P处的光轴稳定度δP，按照公式(2)计算得到被检线偏振光在位置P处的光轴与基准棱镜的方位夹角αP；4) Repeat step 3) to obtain a plurality of detection rectangular prism azimuth values β 3 , β 4 ... β n ; calculate the optical axis stability δ P of the detected linearly polarized light at position P according to the formula (1), and calculate according to The formula (2) calculates the azimuth angle α P between the optical axis of the linearly polarized light at the position P and the reference prism;
5)得到被检线偏振光在中心位置I处的光轴稳定度δI以及被检线偏振光在中心位置I处的光轴与基准平面镜的方位夹角αI；5) Obtain the optical axis stability δ1 of the linearly polarized light at the central position I and the azimuth angle α1 between the optical axis of the linearly polarized light at the central position I and the reference plane mirror;
6)保持基准平面镜位置不变，将检测装置相对于中心位置I平移60mm，然后将检测装置调平，将此位置记为位置II；执行步骤2)至步骤4)得到被检线偏振光在位置II处的光轴稳定度δII以及被检线偏振光在位置II处的光轴与基准平面镜的方位夹角αII；被检线偏振光在位置II处相对于中心位置I的光轴一致度为αII-αI；6) Keep the position of the reference plane mirror unchanged, translate the detection device by 60 mm relative to the center position I, then level the detection device, and record this position as position II; perform steps 2) to 4) to obtain the detected linearly polarized light at The optical axis stability δ II at position II and the azimuth angle α II between the optical axis of the linearly polarized light at position II and the reference plane mirror; the optical axis of the linearly polarized light at position II relative to the center position I The degree of consistency is α II - α I ;
7)设定转动次数m，m为大于或等于6的整数；如果转动次数设定过低，则难以保证检测结果的准确性；如果转动次数设定过高，则会降低检测效率。为了便于计算转动角度和便于控制分度台进行旋转操作，应当合理设定转动次数，尤其是以转动操作依照圆周等分点为佳，例如6、8、9、10或者12等。较为优选的，本实施例中将转动次数设定为6次。7) Set the number of rotations m, where m is an integer greater than or equal to 6; if the number of rotations is set too low, it will be difficult to ensure the accuracy of the detection results; if the number of rotations is set too high, the detection efficiency will be reduced. In order to facilitate the calculation of the rotation angle and the convenience of controlling the rotation operation of the indexing table, the number of rotations should be set reasonably, especially if the rotation operation is based on the circle equal points, such as 6, 8, 9, 10 or 12, etc. More preferably, in this embodiment, the number of rotations is set to 6 times.
8)保持检测装置和基准平面镜的位置不变，沿逆时针方向将分度台转动角度60°，然后将检测装置调平；将此位置记为位置III；执行步骤2)至步骤4)得到被检线偏振光在位置III处的光轴稳定度δIII以及被检线偏振光在位置III处的光轴与基准棱镜的方位夹角αIII；被检线偏振光在位置III处相对于中心位置I的光轴一致度为αIII-αI；8) Keep the positions of the detection device and the reference plane mirror unchanged, rotate the indexing table 60° counterclockwise, and then level the detection device; record this position as position III; perform steps 2) to 4) to get The optical axis stability δ III of the linearly polarized light at position III and the azimuth angle α III between the optical axis of the linearly polarized light at position III and the reference prism; the linearly polarized light at position III is relative to The coincidence degree of the optical axis at the center position I is α III - α I ;
9)重复执行4次步骤7)，分别得到被检线偏振光在位置P处的光轴稳定度δP以及被检线偏振光在位置P处的光轴与基准棱镜的方位夹角αP；被检线偏振光在位置P处相对于中心位置I的光轴一致度为αP-αI；其中，P依次取值IV、V、VI、VII。9) Repeat step 7) four times to obtain the optical axis stability δ P of the linearly polarized light under inspection at position P and the azimuth angle α P between the optical axis of the linearly polarized light under inspection at position P and the reference prism ; The coincidence degree of the optical axis of the detected linearly polarized light at the position P with respect to the center position I is α P -α I ; where, P takes the values IV, V, VI, and VII in sequence.
通过本实用新型提供的检测装置，还可以对扩束线偏振光光斑均匀度进行检测。具体方法是：在每个检测位置执行完步骤2)后，通过检测装置上的信号引出端将光电转换后的信号输出至示波器，观察并记录该位置的信号幅值；其中，中心位置I处的信号幅值为VI，位置P处的信号幅值为VP，P依次取值II、III、IV、V……；在位置P处，扩束线偏振光的光斑均匀度为(VI-VP)/VI。The detection device provided by the utility model can also detect the spot uniformity of the beam expanding linearly polarized light. The specific method is: after step 2) is performed at each detection position, the signal after the photoelectric conversion is output to the oscilloscope through the signal lead-out terminal on the detection device, and the signal amplitude at this position is observed and recorded; wherein, the center position I The signal amplitude at position P is V I , the signal amplitude at position P is V P , and P takes the values II, III, IV, V... in turn; at position P, the spot uniformity of the expanded beam linearly polarized light is (V I -V P )/V I .
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720515054.0U CN206756314U (en) | 2017-05-10 | 2017-05-10 | System for detecting consistency and stability of optical axis of beam expanding linearly polarized light |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720515054.0U CN206756314U (en) | 2017-05-10 | 2017-05-10 | System for detecting consistency and stability of optical axis of beam expanding linearly polarized light |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206756314U true CN206756314U (en) | 2017-12-15 |
Family
ID=60617616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720515054.0U Withdrawn - After Issue CN206756314U (en) | 2017-05-10 | 2017-05-10 | System for detecting consistency and stability of optical axis of beam expanding linearly polarized light |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206756314U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107328477A (en) * | 2017-05-10 | 2017-11-07 | 中国科学院西安光学精密机械研究所 | System and method for detecting consistency and stability of optical axis of beam expanding linearly polarized light |
-
2017
- 2017-05-10 CN CN201720515054.0U patent/CN206756314U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107328477A (en) * | 2017-05-10 | 2017-11-07 | 中国科学院西安光学精密机械研究所 | System and method for detecting consistency and stability of optical axis of beam expanding linearly polarized light |
| CN107328477B (en) * | 2017-05-10 | 2019-01-11 | 中国科学院西安光学精密机械研究所 | System and method for detecting consistency and stability of optical axis of beam expanding linearly polarized light |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106705991B (en) | A strapdown inertial group sighting prism installation error test equipment | |
| CN102175207B (en) | High-accuracy roundness detection method based on combination of reverse and multi-sensor methods | |
| CN108827190B (en) | High-precision angle measurement error detection device based on double autocollimators and detection method thereof | |
| CN105066910A (en) | Electro-optic crystal Z axis deviation angle measurement device and measurement method | |
| CN106705894A (en) | Error calibration and compensation method for double-circular grating angle displacement detection system | |
| CN106247989B (en) | A kind of on-site calibration and measurement device and method for rolling angle of guide rail | |
| CN102506902B (en) | Device and method for evaluating accuracy of prism-free distance measurement of total station | |
| CN206756314U (en) | System for detecting consistency and stability of optical axis of beam expanding linearly polarized light | |
| CN106289085A (en) | Device and method for testing axis intersection degree | |
| CN108168536A (en) | The accurate measurement method of optical fibre gyro zero bias | |
| CN206056524U (en) | Axial intersection testing device | |
| CN106767926B (en) | Calibration method of digital calibration system of demarcation device | |
| CN1200247C (en) | Transverse double-frequency zeeman laser linearity/coaxality measuring mechanism | |
| CN102322840B (en) | Detector of optical radiation angle sensor | |
| CN107328477B (en) | System and method for detecting consistency and stability of optical axis of beam expanding linearly polarized light | |
| CN102384729A (en) | Method and device for detecting perpendicularity of screw thread | |
| CN112068165A (en) | High-precision time performance indirect detection method | |
| CN108663066A (en) | A kind of theodolite calibrating installation | |
| CN203479292U (en) | Autocollimator indication error calibrating device | |
| CN202195804U (en) | Device for detecting screw thread verticality of sample | |
| CN106546413A (en) | Optical transmission equipment instrument constant calibration system and calibration method thereof | |
| CN107664510B (en) | Device for detecting angle measurement precision of satellite-borne two-dimensional pointing mechanism and implementation method | |
| CN110631523A (en) | A device and method for measuring the position error between axes of a precision two-dimensional turntable | |
| CN102359865B (en) | Linear polarized light magneto-optical effect detection method and device | |
| CN204514568U (en) | Two arm angle error measurement system of sagnac interferometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20171215 Effective date of abandoning: 20190111 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20171215 Effective date of abandoning: 20190111 |