CN206743197U - Two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit - Google Patents

Two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit Download PDF

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Publication number
CN206743197U
CN206743197U CN201720610872.9U CN201720610872U CN206743197U CN 206743197 U CN206743197 U CN 206743197U CN 201720610872 U CN201720610872 U CN 201720610872U CN 206743197 U CN206743197 U CN 206743197U
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China
Prior art keywords
fin line
quartzy
circuit
positive
schottky diode
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CN201720610872.9U
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Chinese (zh)
Inventor
王俊龙
冯志红
房玉龙
杨大宝
梁士雄
张立森
赵向阳
徐鹏
邢东
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CETC 13 Research Institute
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CETC 13 Research Institute
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Abstract

The utility model discloses a kind of two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit, it is related to multiple frequency multiplication translation circuit technical field.The circuit includes quartz base plate fin line circuit, two Schottky diodes, radio frequency input waveguide and radio frequency output waveguide, and the quartz base plate fin line circuit includes quartzy circuit substrate and front side fin line and rear side fin line positioned at quartzy circuit substrate positive and negative;Electrically connected positioned at one end of the positive Schottky diode with positive front side fin line, the other end positioned at the positive Schottky diode electrically connects with positive rear side fin line, and the Schottky diode is located at front side fin line and keeps constant opening position with rear side fin wire spacing.The circuit allows radio frequency input and output waveguide on the same line, facilitates circuit personnel to design, while processes more simple;And quartzy circuit uses double-sided circuit, the Schottky diode of differential concatenation is placed in tow sides, shg efficiency can be improved, improves power output.

Description

Two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit
Technical field
It the utility model is related to multiple frequency multiplication translation circuit technical field, more particularly to a kind of two-sided quartzy fin line Terahertz Balanced type secondary frequency multiplication circuit.
Background technology
Terahertz(THz)Ripple in a larger sense, refers to electromagnetic wave of the frequency in the range of 0.1-10THz, wherein 1THz=1000GHz, also it is believed that Terahertz frequency refers to the electromagnetic wave in the range of 0.3THz-3THz.THz ripples are in electromagnetic wave Occupy very special position in frequency spectrum, THz technologies are a generally acknowledged very important intersection Disciplinary Frontiers of International Technology circle.
It is a kind of effective manner to carry out expansion to Terahertz frequency source based on solid-state electronic technology.Currently used for Terahertz The circuit form of frequency multiplication mainly has two kinds of balanced type and unbalanced.In the evolution of circuit engineering, secondary frequency multiplication technology Because its shg efficiency is high, extensive development has been obtained.For in the circuit of secondary frequency multiplication, the circuit based on balanced type, efficiency 40% to 50% can be up to.In typical balanced type frequency multiplier circuit, Terahertz Schottky diode by quartzy circuit across In input radio frequency waveguide, general radio frequency input waveguide and output waveguide are vertical in 90 degree, not point-blank.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of two-sided quartzy secondary times of fin line Terahertz balanced type Frequency circuit, for the circuit compared with conventional balanced formula frequency multiplier circuit, input and output waveguide transition uses fin-line transition so that penetrates Frequency input and output waveguide can facilitate circuit personnel to design on the same line, while process more simple and quartzy circuit and adopt With double-sided circuit, the Schottky diode of differential concatenation is placed in tow sides, shg efficiency can be improved, improves output work Rate.
In order to solve the above technical problems, technical solution adopted in the utility model is:A kind of two-sided quartzy fin line terahertz Hereby balanced type secondary frequency multiplication circuit, it is characterised in that:GaAs base terahertzs including quartz base plate fin line circuit, two differential concatenations Hereby Schottky diode, radio frequency input waveguide and radio frequency output waveguide, the quartz base plate fin line circuit include quartzy circuit base Plate and the fin line positioned at quartzy circuit substrate positive and negative, positioned at positive fin line include the first to the second input fin line and first to Second output fin line, one end of the first input fin line form front side fin line after being connected with one end of the first output fin line, It is described second input fin line one end with second output fin line one end be connected be connected after composition on rear side of fin line, the front side fin Certain interval is kept between line and rear side fin line, and distance between the two from left to right first tapers into, then kept for one section Apart from constant, after become larger;Electrically connected positioned at one end of the positive Schottky diode with positive front side fin line, position Electrically connected in the other end of the positive Schottky diode with positive rear side fin line, and the Schottky diode is located at Front side fin line keeps constant opening position with rear side fin wire spacing;The reverse side of the quartzy circuit substrate has identical with its front Fin line and Schottky diode structure, and the fin line and Schottky of positive fin line and Schottky diode and reverse side The position of diode is corresponding;One end of the quartzy circuit substrate is located in the waveguide slot of the radio frequency input waveguide, described The other end of quartzy circuit substrate is located in the waveguide slot of the radio frequency output waveguide.
Further technical scheme is:The frequency multiplier circuit also includes two quartz matching regulation medium blocks, positioned at just One end of the medium block in face is electrically connected by conducting resinl with the positive front side fin line, positioned at the positive medium block The other end electrically connected by conducting resinl with the positive rear side fin line, positioned at reverse side the medium block position with being located at The position of the positive medium block is corresponding.
Further technical scheme is:The quartzy circuit substrate includes inputting quartzy circuit substrate and output quartz electricity Base board, the input fin line is in the quartzy circuit substrate of input, and the output fin line is positioned at the output quartz electricity On base board.
Further technical scheme is:The width of the quartzy circuit substrate of input is more than the quartzy circuit base of output The width of plate.
Further technical scheme is:The both ends of the Schottky diode electricity is realized by conducting resinl and the fin line Connection.
Further technical scheme is:Each Schottky diode includes two groups of poles of Schottky two being serially connected Pipe knot string, each diode, which connects string, includes the Schottky diode junction that two or more is serially connected, two diodes Tie identical electrodes of the displacement in inner side to connect as one by central pad, electrode of two diode junction displacements in outside is institute State two electrodes of the GaAs base Terahertz Schottky diodes of differential concatenation.
Further technical scheme is:A diameter of the 2 of single Schottky diode junction is micro- in the Schottky diode Rice, 5 ohm, junction capacity 7fF, parasitic capacitance 3fF of series resistance.
Further technical scheme is:The fin line is made using Au, and thickness is 2 microns to 4 microns.
Further technical scheme is:The thickness of the quartzy circuit substrate is 30 microns to 75 microns.
Further technical scheme is:The quartz base plate fin line circuit is placed at the b directions center of waveguide.
It is using beneficial effect caused by above-mentioned technical proposal:The utility model is used as circuit substrate using quartz, The positive and negative of quartzy circuit substrate makes fin line circuit, the GaAs base terahertzs of face-down bonding differential concatenation on positive and negative fin line Hereby Schottky diode is as frequency doubling non-linear's device, and the Schottky diode is residing for quartzy circuit substrate tow sides Position is identical.Fin line is made by the tow sides in quartzy circuit substrate, the TE10 moulds in waveguide are transformed on fin line, it is real Existing waveguide mode also realizes that waveguide converts to the impedance of planar microstrip circuit to the conversion of fin line micro-strip pattern.
Compared with conventional balanced formula frequency multiplier circuit, herein described circuit radio frequency input and output waveguide on the same line, Facilitate circuit personnel to design, while process more simple;Input and output waveguide transition uses fin-line transition;Quartz can be added Impedance regulation is carried out with regulation medium block, improves shg efficiency;Diode uses zero bias circuits, is not easy to burn, and reliability is high; Quartzy circuit uses double-sided circuit, places the Schottky diode of differential concatenation in tow sides, can improve shg efficiency, carry High-output power;Two diodes directly complete power combing to cooperate in piece.
Brief description of the drawings
Fig. 1 is the overlooking the structure diagram of circuit described in the utility model one embodiment;
Fig. 2 is the overlooking the structure diagram of circuit described in second embodiment of the utility model;
Fig. 3 is the overlooking the structure diagram of the circuit of quartz base plate fin line described in the utility model embodiment;
Fig. 4 is the vertical view knot of the GaAs base Terahertz Schottky diodes of differential concatenation described in the utility model embodiment Structure schematic diagram;
Fig. 5 is the frequency multiplier circuit schematic diagram that circuit described in the utility model one embodiment provides from waveguide b directions;
Fig. 6 be second embodiment of the utility model described in the frequency multiplier circuit schematic diagram that is provided from waveguide b directions of circuit;
Wherein:1st, quartz base plate fin line circuit 11, quartzy circuit substrate 111, the quartzy circuit substrate 112 of input, output stone English circuit substrate 12, first input fin line 13, second input fin line 14, first export fin line 15, second export fin line 2, reversely The GaAs base Terahertzs Schottky diode 21 of series connection, Schottky diode junction 22, central pad 3, radio frequency input waveguide 4, penetrate Frequency output waveguide 5, quartz matching regulation medium block.
Embodiment
With reference to the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out clear Chu, it is fully described by, it is clear that described embodiment is only part of the embodiment of the present utility model, rather than whole Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made The every other embodiment obtained, belong to the scope of the utility model protection.
Many details are elaborated in the following description in order to fully understand the utility model, but this practicality is new Type can also be different from other manner described here using other to be implemented, and those skilled in the art can be without prejudice to this reality With doing similar popularization in the case of new intension, therefore the utility model is not limited by following public specific embodiment.
Embodiment one
As shown in figure 1, the utility model embodiment discloses a kind of two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication Circuit, include the GaAs base Terahertzs Schottky diode 2, radio frequency incoming wave of 1, two differential concatenation of quartz base plate fin line circuit Lead 3 and radio frequency output waveguide 4.As shown in figure 3, the quartz base plate fin line circuit 1 includes quartzy circuit substrate 11 and positioned at stone The fin line of the positive and negative of English circuit substrate 11, include the first to the second input fin line 12,13 and the first to the positioned at positive fin line Two output fin lines 14,15.Before one end of the first input fin line 12 is formed after being connected with one end of the first output fin line 14 Lateral fin line, it is described second input fin line 13 one end with second output fin line 15 one end be connected be connected after composition on rear side of fin Line.Certain interval is kept between the front side fin line and rear side fin line, and distance between the two from left to right first gradually becomes It is small, then keep a segment distance constant, after become larger.
As shown in figure 1, being electrically connected positioned at one end of the positive Schottky diode with positive front side fin line, it is located at Before the other end of the positive Schottky diode electrically connects with positive rear side fin line, and the Schottky diode is located at Lateral fin line keeps constant opening position with rear side fin wire spacing;The reverse side of the quartzy circuit substrate has and its positive identical Fin line and Schottky diode structure, and the fin line and Schottky two of positive fin line and Schottky diode and reverse side The position of pole pipe is corresponding, as shown in Figure 5;One end of the quartzy circuit substrate 11 is located at the ripple of the radio frequency input waveguide 3 In guide groove, the other end of the quartzy circuit substrate 11 is located in the waveguide slot of the radio frequency output waveguide 4.
As shown in figure 4, each Schottky diode includes two groups of Schottky diode junction strings being serially connected, each The diode, which connects string, includes the Schottky diode junction 21 that two or more is serially connected, and two diode junction displacements are in interior The identical electrodes of side are connected as one by central pad 22, and electrode of two diode junction displacements in outside is the reversely string Two electrodes of the GaAs base Terahertz Schottky diodes of connection.
Compared with conventional balanced formula frequency multiplier circuit, herein described circuit radio frequency input and output waveguide on the same line, Facilitate circuit personnel to design, while process more simple;Input and output waveguide transition uses fin-line transition;Diode uses zero Biasing circuit, it is not easy to burn, reliability is high;Quartzy circuit uses double-sided circuit, and Xiao of differential concatenation is placed in tow sides Special based diode, shg efficiency can be improved, improve power output;Two diodes directly complete power to cooperate in piece Synthesis.
Embodiment two
As shown in Fig. 2 the utility model embodiment discloses a kind of two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication Circuit, include the GaAs base Terahertzs Schottky diode 2, radio frequency incoming wave of 1, two differential concatenation of quartz base plate fin line circuit Lead 3, radio frequency output waveguide 4 and two quartz matching regulation medium blocks 5.As shown in figure 3, the quartz base plate fin line circuit 1 wraps Quartzy circuit substrate 11 and the fin line positioned at the quartzy positive and negative of circuit substrate 11 are included, includes the first to the second positioned at positive fin line Fin line 12 is inputted, 13 and the first to the second export fin line 14,15.One end of the first input fin line 12 and the first output fin line 14 one end forms front side fin line, one end of the second input fin line 13 and one end phase of the second output fin line 15 after being connected Rear side fin line is formed after connection connection.Keep certain interval between the front side fin line and rear side fin line, and between the two Distance from left to right first tapers into, then keeps a segment distance constant, after become larger.
As shown in Fig. 2 being electrically connected positioned at one end of the positive Schottky diode with positive front side fin line, it is located at Before the other end of the positive Schottky diode electrically connects with positive rear side fin line, and the Schottky diode is located at Lateral fin line keeps constant opening position with rear side fin wire spacing;The reverse side of the quartzy circuit substrate has and its positive identical Fin line and Schottky diode structure, and the fin line and Schottky two of positive fin line and Schottky diode and reverse side The position of pole pipe is corresponding, as shown in Figure 6;One end of the quartzy circuit substrate 11 is located at the ripple of the radio frequency input waveguide 3 In guide groove, the other end of the quartzy circuit substrate 11 is located in the waveguide slot of the radio frequency output waveguide 4.As shown in Fig. 2 position Electrically connected with the positive front side fin line by conducting resinl in one end of the positive medium block, given an account of positioned at positive The other end of mass is electrically connected by conducting resinl with the positive rear side fin line, positioned at reverse side the medium block position with It is corresponding positioned at the position of the positive medium block, as shown in Figure 6.
As shown in figure 4, each Schottky diode includes two groups of Schottky diode junction strings being serially connected, each The diode, which connects string, includes the Schottky diode junction 21 that two or more is serially connected, and two diode junction displacements are in interior The identical electrodes of side are connected as one by central pad 22, and electrode of two diode junction displacements in outside is the reversely string Two electrodes of the GaAs base Terahertz Schottky diodes of connection.
Compared with conventional balanced formula frequency multiplier circuit, herein described circuit radio frequency input and output waveguide on the same line, Facilitate circuit personnel to design, while process more simple;Input and output waveguide transition uses fin-line transition;Quartz can be added Impedance regulation is carried out with regulation medium block, improves shg efficiency;Diode uses zero bias circuits, is not easy to burn, and reliability is high; Quartzy circuit uses double-sided circuit, places the Schottky diode of differential concatenation in tow sides, can improve shg efficiency, carry High-output power;Two diodes directly complete power combing to cooperate in piece.
Embodiment three
As shown in Fig. 2 the utility model embodiment discloses a kind of two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication Circuit, include the GaAs base Terahertzs Schottky diode 2, radio frequency incoming wave of 1, two differential concatenation of quartz base plate fin line circuit Lead 3, radio frequency output waveguide 4 and two quartz matching regulation medium blocks 5.As shown in figure 3, the quartz base plate fin line circuit 1 wraps Quartzy circuit substrate 11 and the fin line positioned at the quartzy positive and negative of circuit substrate 11 are included, includes the first to the second positioned at positive fin line Fin line 12 is inputted, 13 and the first to the second export fin line 14,15.One end of the first input fin line 12 and the first output fin line 14 one end forms front side fin line, one end of the second input fin line 13 and one end phase of the second output fin line 15 after being connected Rear side fin line is formed after connection connection.Keep certain interval between the front side fin line and rear side fin line, and between the two Distance from left to right first tapers into, then keeps a segment distance constant, after become larger.
As shown in Fig. 2 being electrically connected positioned at one end of the positive Schottky diode with positive front side fin line, it is located at Before the other end of the positive Schottky diode electrically connects with positive rear side fin line, and the Schottky diode is located at Lateral fin line keeps constant opening position with rear side fin wire spacing;The reverse side of the quartzy circuit substrate has and its positive identical Fin line and Schottky diode structure, and the fin line and Schottky two of positive fin line and Schottky diode and reverse side The position of pole pipe is corresponding, as shown in Figure 6;One end of the quartzy circuit substrate 11 is located at the ripple of the radio frequency input waveguide 3 In guide groove, the other end of the quartzy circuit substrate 11 is located in the waveguide slot of the radio frequency output waveguide 4.As shown in Fig. 2 position Electrically connected with the positive front side fin line by conducting resinl in one end of the positive medium block, given an account of positioned at positive The other end of mass is electrically connected by conducting resinl with the positive rear side fin line, positioned at reverse side the medium block position with It is corresponding positioned at the position of the positive medium block, as shown in Figure 6.
As shown in figure 4, the Schottky diode includes two groups of Schottky diode junction strings being serially connected, it is each described Diode, which connects string, includes the Schottky diode junction 21 that two or more is serially connected, and two diode junction displacements are in inner side Identical electrodes are connected as one by central pad 22, and electrode of two diode junction displacements in outside is the differential concatenation Two electrodes of GaAs base Terahertz Schottky diodes.
Inputted with 110GHz, 220GHz is illustrated as exemplified by output frequency to the present embodiment.
Radio frequency input waveguide(For WM-2032 rectangular waveguides, a and b are respectively 2032 microns and 1016 microns)Introduce 110GHz radiofrequency signals, quartz base plate fin line circuit introduce radiofrequency signal in quartzy circuit substrate from input waveguide and carried out Transmission, and the TE10 moulds in input waveguide are transformed on quartzy fin line, conversion of the waveguide mode to fin line micro-strip pattern is realized, Also realize that waveguide converts to the impedance of planar microstrip circuit, the energy in waveguide is concentrated on fin line both sides by fin line.Radio frequency inputs Signal matches regulation medium block through quartz and is coupled in the Schottky diode, and diode radio-frequency input signals is reversely string Connection, it is in parallel in the same direction to RF output end, meets balanced type frequency multiplier circuit feature.The Schottky diode both ends pass through conduction Glue is connected with fin line, using the technique of face-down bonding.Due to the nonlinear interaction of Schottky diode, Schottky two will be produced Each secondary non-linear harmonic wave of pole pipe, because balanced type works, there is inhibitory action to odd harmonic, thus only even-order harmonic is defeated Go out, i.e., 2 times, 4 times, 6 inferior harmonic waves.By the fin-line transition of output waveguide port, caused even-order harmonic is coupled to In output waveguide, exported, output waveguide is WR4 standard waveguides in this example.
Design mainly will be optimized to 2 subharmonic during the output end design of quartz base plate fin line circuit, by 2 subharmonic Energy coupling is to maximum.In practical operation, to be obtained by adjusting the size and location of quartz matching regulation medium block Highest secondary frequency multiplication efficiency.
Standard rectangular waveguide is realized to the transition of quartzy circuit by fin line.Fin line uses the shape of cosine square gradient ramp Formula, transition model use following groove width gradual change form formula.
L is fin line Transition length in formula, and w is groove width.Fin line groove width w diminishes, and impedance step-down, is penetrated beneficial to diode pair The matching of frequency signal.W in conventional substrate transmission line can only achieve 0.1mm, when using quartz substrate, can carry out accurately adding Work reaches 1um, and the fin line w of design takes 20um.It by origin, the longitudinal coordinate of fin line transmission line, b of waveguide E face center is to subtract that t, which is, High duct height.
Quartzy circuit substrate is placed in radio frequency input waveguide and the waveguide slot of radio frequency output waveguide, and quartzy circuit base Plate is grounded with actual cavity by conducting resinl and is connected.Quartzy circuits as practical is placed at the center of duct width direction(Waveguide B directions center at).The thickness of quartzy circuit substrate is generally 30 to 75 microns.
Furthermore it is preferred that, a diameter of 2 microns of single Schottky diode junction, the Europe of series resistance 5 in Schottky diode Nurse, junction capacity 7fF, parasitic capacitance 3fF.
Compared with conventional balanced formula frequency multiplier circuit, herein described circuit radio frequency input and output waveguide on the same line, Facilitate circuit personnel to design, while process more simple;Input and output waveguide transition uses fin-line transition;Quartz can be added Impedance regulation is carried out with regulation medium block, improves shg efficiency;Diode uses zero bias circuits, is not easy to burn, and reliability is high; Quartzy circuit uses double-sided circuit, places the Schottky diode of differential concatenation in tow sides, can improve shg efficiency, carry High-output power;Two diodes directly complete power combing to cooperate in piece.

Claims (10)

  1. A kind of 1. two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit, it is characterised in that:Including quartz base plate fin line electricity Road(1), two differential concatenations GaAs base Terahertz Schottky diodes(2), radio frequency input waveguide(3)With radio frequency output waveguide (4), the quartz base plate fin line circuit(1)Including quartzy circuit substrate(11)With positioned at quartzy circuit substrate(11)Positive and negative Fin line, include the first to the second input fin line positioned at positive fin line(12,13)With the first to the second output fin line(14,15), The first input fin line(12)One end with first output fin line(14)One end be connected after form front side fin line, described the Two input fin lines(13)One end with second output fin line(15)One end be connected connection after form rear side fin line, the front side Certain interval is kept between fin line and rear side fin line, and distance between the two from left to right first tapers into, then keep one Segment distance is constant, after become larger;Electrically connected positioned at one end of the positive Schottky diode with positive front side fin line, The other end positioned at the positive Schottky diode electrically connects with positive rear side fin line, and the Schottky diode position Constant opening position is kept in front side fin line and rear side fin wire spacing;The reverse side of the quartzy circuit substrate has and its positive phase Same fin line and Schottky diode structure, and the fin line and Xiao Te of positive fin line and Schottky diode and reverse side The position of based diode is corresponding;The quartzy circuit substrate(11)One end be located at the radio frequency input waveguide(3)Waveguide In groove, the quartzy circuit substrate(11)The other end be located at the radio frequency output waveguide(4)Waveguide slot in.
  2. 2. two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit as claimed in claim 1, it is characterised in that:Described times Frequency circuit also includes two quartz matching regulation medium blocks(5), positioned at one end of the positive medium block by conducting resinl with Positive front side fin line electrical connection, positioned at the positive medium block the other end by conducting resinl with it is positive it is described after Lateral fin line electrically connects, corresponding with the position positioned at the positive medium block positioned at the position of the medium block of reverse side.
  3. 3. two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit as claimed in claim 1, it is characterised in that:The stone English circuit substrate(11)Including inputting quartzy circuit substrate(111)With the quartzy circuit substrate of output(112), the input fin line position In the quartzy circuit substrate of input(111)On, the output fin line is positioned at the quartzy circuit substrate of output(112)On.
  4. 4. two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit as claimed in claim 3, it is characterised in that:It is described defeated Enter quartzy circuit substrate(111)Width be more than the quartzy circuit substrate of the output(112)Width.
  5. 5. two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit as claimed in claim 1, it is characterised in that:Xiao Realized and electrically connected with the fin line by conducting resinl in the both ends of special based diode.
  6. 6. two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit as claimed in claim 1, it is characterised in that:Each institute Stating Schottky diode includes two groups of Schottky diode junction strings being serially connected, each diode connect string include two with On the Schottky diode junction that is serially connected(21), two diode junction displacements in inner side identical electrodes pass through center weldering Disk(22)Connect as one, electrode of two diode junction displacements in outside is the GaAs base Terahertzs Xiao Te of the differential concatenation Two electrodes of based diode.
  7. 7. two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit as claimed in claim 6, it is characterised in that:Xiao Single Schottky diode junction in special based diode(21)A diameter of 2 microns, 5 ohm, junction capacity 7fF of series resistance is parasitic Electric capacity 3fF.
  8. 8. two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit as claimed in claim 1, it is characterised in that:The fin Line is made using Au, and thickness is 2 microns to 4 microns.
  9. 9. two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit as claimed in claim 1, it is characterised in that:The stone English circuit substrate(11)Thickness be 30 microns to 75 microns.
  10. 10. two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit as claimed in claim 1, it is characterised in that:It is described Quartz base plate fin line circuit is placed at the b directions center of waveguide.
CN201720610872.9U 2017-05-27 2017-05-27 Two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit Withdrawn - After Issue CN206743197U (en)

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CN201720610872.9U CN206743197U (en) 2017-05-27 2017-05-27 Two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107040213A (en) * 2017-05-27 2017-08-11 中国电子科技集团公司第十三研究所 Two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107040213A (en) * 2017-05-27 2017-08-11 中国电子科技集团公司第十三研究所 Two-sided quartzy fin line Terahertz balanced type secondary frequency multiplication circuit
CN107040213B (en) * 2017-05-27 2023-06-23 中国电子科技集团公司第十三研究所 Terahertz balanced type double-sided quartz fin line frequency doubling circuit

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Granted publication date: 20171212

Effective date of abandoning: 20230623

AV01 Patent right actively abandoned
AV01 Patent right actively abandoned