CN206725476U - Range-adjustable in-situ micro-nano impression/cut test device - Google Patents
Range-adjustable in-situ micro-nano impression/cut test device Download PDFInfo
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- CN206725476U CN206725476U CN201720608349.2U CN201720608349U CN206725476U CN 206725476 U CN206725476 U CN 206725476U CN 201720608349 U CN201720608349 U CN 201720608349U CN 206725476 U CN206725476 U CN 206725476U
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Abstract
A kind of range-adjustable in-situ micro-nano impression/cut test device is the utility model is related to, belongs to mechanical-electrical integration precision scientific instrument field.X, Y-axis precision scratching unit is arranged on impression balance pivot base by the grand dynamic adjustment mechanism of Z axis, the grand dynamic adjustment mechanism of Z axis is arranged on impression balance pivot base with impression range adjustment unit, precision press-in driver element is arranged on base with displacement signal detection unit, and load signal detection unit is on X, Y-axis precision scratching unit.Advantage is：Compact-sized, miniaturization, integrated, big stroke, while overcoming prior art can not adjust range and realize larger stroke, preferably ensure assembly precision, effectively lifting overall rigidity and dynamic characteristic, improve overall measuring accuracy；Device has good compatibility with SEM, may be implemented under dynamic in-situ impression/cut test effect, to microstructure and the correlation research of deformation damage mechanism.
Description
Technical field
Mechanical-electrical integration precision scientific instrument field is the utility model is related to, more particularly to a kind of range-adjustable original position is micro-
Nano impress/cut test device.To new material new process, Solid Mechanics, precision optics, carplane key components and parts system
Make, the high-tech industry collection such as Ferrous Metallurgy, non-ferrous metal, inorganic non-metallic, biomedical engineering, nanometer engineering and defence and military
The development of group has particularly important support impetus and wide industry application value.
Background technology
With the development of science and technology with the progress of electron micrology technology, micro nanometer mechanics measuring technology in situ application and
It is raw.Nano impress/cut measuring technology mainly never obtains load-deepness relation by continuously record load and compression distance
Curve, eventually through the hardness of analysis curve acquisition measured material, modulus of elasticity, load-deformation curve, fracture toughness, creep
The parameters such as characteristic, fatigue properties, adhesiveness.Impression/cut mistake is realized in being particularly advantageous in that for impression/cut measuring technology in situ
The real-time online observation of journey, and then study the deformation of the lower material surface of load effect, micromechanism of damage.Both at home and abroad to in-situ nano power
The research of test is learned also in the development and exploration stage, but because the starting of developed country is more early, research is relatively deep, leading
Research in the domestic field, the commercially produced product of in-situ mechanical test at present mainly have the production of the companies such as U.S. Hysitron,
Price is sufficiently expensive.In the original location in terms of mechanical test, more classical include microtrabeculae compression, micro-structural stretching, microbend etc. are surveyed
Examination, for the in-situ mechanical testing research of three-dimensional test specimen, there is Swiss Federal Institute of Technology Michler and R. Rabe, day at present
This Northeastern University W.Gao and this project team etc..Also all there is can not adjust range, can not realize larger stroke for existing instrument
The shortcomings that, and nano impress/scoring devices variable on range both at home and abroad are also rarely reported at present.So development has
Big stroke, in-situ micro-nano impression/cut test device that range is variable, high-precision, compact-sized, inexpensive still have wide
General demand.
The content of the invention
The purpose of this utility model is to provide a kind of range-adjustable in-situ micro-nano impression/cut test device, solved
Range existing for prior art of having determined is non-adjustable and the problems such as big stroke.The utility model has compact-sized, miniaturization, one
The characteristics of body, big stroke, it can not adjust range overcoming existing test device, the insufficient same of larger stroke can not be realized
When, preferably ensure assembly precision, effectively lifting overall rigidity and dynamic characteristic, improve overall measuring accuracy.This survey
The displacement resolution that trial assembly is put reaches nanoscale, and loading force resolution ratio reaches sub- micro-ox level, and range is adjustable and can realize larger row
Journey, test device can obtain the basic mechanical parameters such as the hardness of material, modulus of elasticity, fracture toughness, creep properties.Particularly survey
Trial assembly is put has good structural compatibility, vacuum compatibility and Electro Magnetic Compatibility with SEM, can be arranged on and sweep
Retouch in the vacuum chamber of electron microscope, realize the in-situ micro-nano impression to more than size grade three-dimensional test specimen/cut test,
By SEM dynamic monitoring pressing-in force（Or cut power）The microdeformation behavior of the lower test specimen material of effect and
Damage mechanisms.The utility model will be in material science, solid-state science, precision optics, biomedical engineering, Ferrous Metallurgy, coloured
The fields such as metal have vast potential for future development and application value.
Above-mentioned purpose of the present utility model is achieved through the following technical solutions：
Range-adjustable in-situ micro-nano impression/cut test device, including X, Y-axis precision scratching unit, the grand dynamic tune of Z axis
Complete machine structure, accurate press-in driver element, impression range adjustment unit, displacement signal detection unit and load signal detection unit；
Wherein, X, Y-axis precision scratching unit are arranged on impression balance pivot base 19 by the grand dynamic adjustment mechanism of Z axis, the grand dynamic tune of Z axis
Complete machine structure is arranged on impression balance pivot base 19 with impression range adjustment unit, precision press-in driver element and displacement signal
Detection unit is arranged on base 20, and load signal detection unit is on X, Y-axis precision scratching unit.
Described X, Y-axis precision scratching unit are：The inside grooves of X to flexible hinge 17, Y-direction flexible hinge 15 are pacified respectively
It is upper in X-axis, Y direction by objective table 13 and precision force transducer 14 equipped with X to piezoelectric stack 18, Y-direction piezoelectric stack 16
The precise jiggle adjustment put, is realized along X-axis, the accurate cut function of Y direction.
The grand dynamic adjustment mechanism of described Z axis is：The manual platform 3 of Z axis is connected by connecting plate I 4 and X, Y-axis precision scratching unit
Connect, the manual platform 3 of Z axis is fixedly mounted on impression balance pivot base 19, and the objective table 13 and Cont rol Method of Precise Force for realizing Z-direction pass
The grand dynamic adjustment of the position of sensor 14.
Described precision is pressed into driver element：Voice coil motor 21 drives slider I 23 to be moved along guide rail I 1 by connecting rod 22,
Sliding block II 9 is moved along guide rail II 7 by impression range adjustment unit, cunning is made by connecting plate III 5, roll shaft 6, constant force spring 8
The holding position of block II 9, the height that sliding block II 9 moves up and down can make the unnecessary part of constant force spring 8 be wrapped in roll shaft 6 all the time
On, the power on the wound upon themselves of constant force spring 8 to roll shaft 6 is constant, and pressure head connector 11 and diamond penetrator 12 pass through connecting plate II
10 are connected with sliding block II 9, realize the accurate press-in of diamond penetrator 12.
Described impression range adjustment unit is：Impression lever 24 is provided with recessed catching groove 27, and is covered on impression lever 24
Impression levers support sleeve pipe 2 is filled, lock screw 29 is provided with the tube wall of impression levers support sleeve pipe 2, in impression levers support
The inwall of sleeve pipe 2 is provided with the cam 28 being engaged with the recessed catching groove 27, and impression levers support sleeve pipe 2 is fixed on impression lever
On fulcrum base 19, the adjustable function of range is realized.
Described displacement signal detection unit is：Precise displacement sensor 25 is fixed on base 20 by mounting bracket 26,
The micro-displacement of diamond penetrator 12 in the Z-axis direction is detected by precise displacement sensor 25 and counted by lever principle
Calculate, the displacement signal that precise displacement sensor 25 detects controls the feedback signal of power supply as voice coil motor 21, real to impression
Test process and carry out closed-loop control.
Described load signal detection unit is：Objective table 13 is arranged on precision force transducer 14, precision force transducer
14 are arranged on X on flexible hinge 17, quantitatively detect impression pressure and cut normal force, tangential force, precision force transducer 14 are examined
The load signal measured as X to piezoelectric stack 18, the feedback signal of the driving power of Y-direction piezoelectric stack 16, to scratch experiment mistake
Cheng Jinhang closed-loop controls.
The range of described range-adjustable in-situ micro-nano impression/cut test device passes through impression range adjustment unit
It is adjusted, the elongation of voice coil motor 21 is more than piezoelectric stack, and large scale in-situ micro-nano impression/cut test can be achieved.
The beneficial effects of the utility model are：Compact-sized, miniaturization, integrated, big stroke, are overcoming existing survey
While trial assembly, which is put, can not adjust range, can not realize the deficiency of larger stroke, preferably ensure assembly precision, effectively lifted whole
The rigidity and dynamic characteristic of body, improve overall measuring accuracy.The displacement resolution of this test device reaches nanoscale, loading
Power resolution ratio reaches sub- micro-ox level, and range is adjustable and can realize larger stroke, and test device can obtain the hardness of material, springform
The basic mechanical parameter such as amount, fracture toughness, creep properties.Particularly test device has good knot with SEM
It structure compatibility, vacuum compatibility and Electro Magnetic Compatibility, can be arranged in the vacuum chamber of SEM, realize to size milli
The in-situ micro-nano impression of more than meter level three-dimensional test specimen/cut test, by SEM dynamic monitoring pressing-in force（Or
Cut power）The microdeformation behavior of the lower test specimen material of effect and damage mechanisms.The utility model will be in material science, solid
The fields such as science, precision optics, biomedical engineering, Ferrous Metallurgy, non-ferrous metal have vast potential for future development and using valencys
Value.
Brief description of the drawings
Accompanying drawing described herein is used for providing further understanding to of the present utility model, forms the part of the application,
Illustrative example of the present utility model and its illustrate be used for explain the utility model, do not form to improper limit of the present utility model
It is fixed.
Fig. 1 is overall structure diagram of the present utility model；
Fig. 2 is X of the present utility model, Y-axis precision scratching unit structural representation；
Fig. 3 is the grand dynamic adjustment mechanism schematic diagram of Z axis of the present utility model；
Fig. 4, Fig. 5 are accurate press-in structure of driving unit schematic diagram of the present utility model；
Fig. 6 is impression range adjustment unit structural representation of the present utility model.
In figure：1st, guide rail I；2nd, impression levers support sleeve pipe；3rd, the manual platform of Z axis；4th, connecting plate I；5th, connecting plate III；6、
Roll shaft；7th, guide rail II；8th, constant force spring；9th, sliding block II；10th, connecting plate II；11st, pressure head connector；12nd, diamond penetrator；13、
Objective table；14th, precision force transducer；15th, Y-direction flexible hinge；16th, Y-direction piezoelectric stack；17th, X is to flexible hinge；18th, X is to pressure
Electricity stacks；19th, impression balance pivot base；20th, base；21st, voice coil motor；22nd, connecting rod；23rd, slider I；24th, impression lever；
25th, precise displacement sensor；26th, mounting bracket；27th, recessed catching groove；28th, cam；29th, lock screw.
Embodiment
Detailed content and its embodiment of the present utility model are further illustrated below in conjunction with the accompanying drawings.
Referring to shown in Fig. 1 to Fig. 6, range-adjustable in-situ micro-nano impression/cut test device of the present utility model, wrap
Include X, Y-axis precision scratching unit, the grand dynamic adjustment mechanism of Z axis, accurate press-in driver element, impression range adjustment unit, displacement letter
Number detection unit and load signal detection unit；Wherein, X, Y-axis precision scratching unit are arranged on by the grand dynamic adjustment mechanism of Z axis
On impression balance pivot base 19, the grand dynamic adjustment mechanism of Z axis is arranged on impression balance pivot base with impression range adjustment unit
On 19, precision press-in driver element is arranged on base 20 with displacement signal detection unit, and load signal detection unit is arranged on
X, on Y-axis precision scratching unit.The variable in-situ micro-nano impression of larger stroke, range/cut test can be achieved, with scanning electricity
Sub- microscope has good compatibility, may be implemented under dynamic in-situ impression/cut test effect, to Fine Texture of Material knot
Structure and the correlation research of deformation damage mechanism.
Shown in Figure 2, described X, Y-axis precision scratching unit include X to flexible hinge 17, X to piezoelectric stack 18, Y
To flexible hinge 15, Y-direction piezoelectric stack 16, the inside grooves of the X to flexible hinge 17, Y-direction flexible hinge 15 are installed respectively
Have X to piezoelectric stack 18, Y-direction piezoelectric stack 16, by objective table 13 and precision force transducer 14 in X-axis, Y direction position
Precise jiggle adjustment, realize along X-axis, the accurate cut function of Y direction.
Shown in Figure 3, the grand dynamic adjustment mechanism of described Z axis includes the manual platform 3 of Z axis and connecting plate I 4, the Z axis hand
Moving platform 3 is connected by connecting plate I 4 with X, Y-axis precision scratching unit, and the manual platform 3 of Z axis is fixedly mounted on impression balance pivot
On base 19, the objective table 13 of Z-direction and the grand dynamic adjustment of the position of precision force transducer 14 are realized.
Referring to shown in Fig. 4 and Fig. 5, described accurate press-in driver element include guide rail I, II 1,7, slider I, II 23,9,
Connecting plate II, III 10,5, roll shaft 6, the pressure head connector 11 of constant force spring 8, diamond penetrator 12, voice coil motor 21 and connecting rod 22,
The voice coil motor 21 drives slider I 23 to be moved along guide rail I 1 by connecting rod 22, makes sliding block II 9 by impression range adjustment unit
Moved along guide rail II 7, the holding position of sliding block II 9 is made by connecting plate III 5, roll shaft 6, constant force spring 8, sliding block II 9 moves up and down
Height the unnecessary part of constant force spring 8 can be made to be wrapped in all the time on roll shaft 6, on the wound upon themselves of constant force spring 8 to roll shaft 6
Power is constant, and pressure head connector 11 and diamond penetrator 12 are connected by connecting plate II 10 with sliding block II 9, realize diamond penetrator 12
Accurate press-in.
Shown in Figure 6, described impression range adjustment unit includes impression lever 24, impression levers support sleeve pipe 2, recessed
Catching groove 27, cam 28 and lock screw 29, the impression lever 24 is provided with recessed catching groove 27, and pressure is set with impression lever 24
Trace levers support sleeve pipe 2, lock screw 29 is provided with the tube wall of impression levers support sleeve pipe 2, in impression levers support sleeve pipe 2
Inwall be provided with the cam 28 that is engaged with the recessed catching groove 27, impression levers support sleeve pipe 2 is fixed on impression balance pivot
On base 19, the adjustable function of range is realized.
Shown in Figure 1, described displacement signal detection unit includes precise displacement sensor 25 and mounting bracket 26, described
Precise displacement sensor 25 is fixed on base 20 by mounting bracket 26, the micro-displacement of diamond penetrator 12 in the Z-axis direction
Detected by precise displacement sensor 25 and calculated by lever principle, the displacement letter that precise displacement sensor 25 detects
Number as voice coil motor 21 control power supply feedback signal, to indentation test process carry out closed-loop control.
Shown in Figure 1, described load signal detection unit includes objective table 13, precision force transducer 14, the load
Thing platform 13 is arranged on precision force transducer 14, and precision force transducer 14 is arranged on X on flexible hinge 17, quantitatively detects impression
Pressure and cut normal force, tangential force, the load signal that precision force transducer 14 detects is as X to piezoelectric stack 18, Y-direction pressure
Electricity stacks the feedback signal of 16 driving powers, and closed-loop control is carried out to scratch experiment process.
The range of described range-adjustable in-situ micro-nano impression/cut test device passes through impression range adjustment unit
It is adjusted, the elongation of voice coil motor 21 is more than piezoelectric stack, and large-size in-situ micro-nano impression/cut test can be achieved.
Preferred embodiment of the present utility model is the foregoing is only, is not limited to the utility model, for ability
For the technical staff in domain, the utility model can have various modifications and variations.All any modifications made to the utility model,
Equivalent substitution, improvement etc., should be included within the scope of protection of the utility model.
Claims (8)
- A kind of 1. range-adjustable in-situ micro-nano impression/cut test device, it is characterised in that：Including X, Y-axis precision cut The grand dynamic adjustment mechanism of unit, Z axis, accurate press-in driver element, impression range adjustment unit, displacement signal detection unit and load Detecting signal unit；Wherein, X, Y-axis precision scratching unit are arranged on impression balance pivot base by the grand dynamic adjustment mechanism of Z axis （19）On, the grand dynamic adjustment mechanism of Z axis is arranged on impression balance pivot base with impression range adjustment unit（19）On, precision press-in Driver element is arranged on base with displacement signal detection unit（20）On, load signal detection unit is arranged on accurate stroke of X, Y-axis On trace unit.
- 2. range-adjustable in-situ micro-nano impression/cut test device according to claim 1, it is characterised in that：Institute X, the Y-axis precision scratching unit stated be：X is to flexible hinge（17）, Y-direction flexible hinge（15）Inside grooves be separately installed with X To piezoelectric stack（18）, Y-direction piezoelectric stack（16）, pass through objective table（13）And precision force transducer（14）In X-axis, Y direction The precise jiggle adjustment of upper position, is realized along X-axis, the accurate cut function of Y direction.
- 3. range-adjustable in-situ micro-nano impression/cut test device according to claim 1, it is characterised in that：Institute The grand dynamic adjustment mechanism of Z axis stated is：The manual platform of Z axis（3）Pass through connecting plate I（4）It is connected with X, Y-axis precision scratching unit, Z axis Manual platform（3）It is fixedly mounted on impression balance pivot base（19）On, realize the objective table of Z-direction（13）Passed with Cont rol Method of Precise Force Sensor（14）The grand dynamic adjustment of position.
- 4. range-adjustable in-situ micro-nano impression/cut test device according to claim 1, it is characterised in that：Institute The precision stated is pressed into driver element：Voice coil motor（21）Pass through connecting rod（22）Drive slider I（23）Along guide rail I（1）It is mobile, lead to Over-pressed trace journey adjustment unit makes sliding block II（9）Along guide rail II（7）It is mobile, pass through connecting plate III（5）, roll shaft（6）, constant force spring （8）Make sliding block II（9）Holding position, sliding block II（9）The height moved up and down can make constant force spring（8）Unnecessary part is all the time It is wrapped in roll shaft（6）On, constant force spring（8）Wound upon themselves are to roll shaft（6）On power it is constant, pressure head connector（11）And diamond Pressure head（12）Pass through connecting plate II（10）With sliding block II（9）Connection, realizes diamond penetrator（12）Accurate press-in.
- 5. range-adjustable in-situ micro-nano impression/cut test device according to claim 1, it is characterised in that：Institute The impression range adjustment unit stated is：Impression lever（24）It is provided with recessed catching groove（27）, and in impression lever（24）Upper suit pressure Trace levers support sleeve pipe（2）, in impression levers support sleeve pipe（2）Tube wall be provided with lock screw（29）, in impression lever branch Support set pipe（2）Inwall be provided with and the recessed catching groove（27）The cam being engaged（28）, impression levers support sleeve pipe（2）It is fixed In impression balance pivot base（19）On, realize the adjustable function of range.
- 6. range-adjustable in-situ micro-nano impression/cut test device according to claim 1, it is characterised in that：Institute The displacement signal detection unit stated is：Precise displacement sensor（25）Pass through mounting bracket（26）It is fixed on base（20）On, Buddha's warrior attendant Stone pressure head（12）Micro-displacement in the Z-axis direction passes through precise displacement sensor（25）Detect and counted by lever principle Calculate, precise displacement sensor（25）The displacement signal detected is as voice coil motor（21）The feedback signal of power supply is controlled, to pressure Trace experimentation carries out closed-loop control.
- 7. range-adjustable in-situ micro-nano impression/cut test device according to claim 1, it is characterised in that：Institute The load signal detection unit stated is：Objective table（13）Installed in precision force transducer（14）On, precision force transducer（14）Peace Mounted in X to flexible hinge（17）On, quantitatively detect impression pressure and cut normal force, tangential force, precision force transducer（14）Inspection The load signal measured is as X to piezoelectric stack（18）, Y-direction piezoelectric stack（16）The feedback signal of driving power, it is real to cut Test process and carry out closed-loop control.
- 8. range-adjustable in-situ micro-nano impression/cut test device according to claim 1 to 7 any one, its It is characterised by：The range of described range-adjustable in-situ micro-nano impression/cut test device is adjusted single by impression range Member is adjusted, voice coil motor（21）Elongation is more than piezoelectric stack, and large scale in-situ micro-nano impression/cut can be achieved and survey Examination.
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| CN201720608349.2U CN206725476U (en) | 2017-05-27 | 2017-05-27 | Range-adjustable in-situ micro-nano impression/cut test device |
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| CN201720608349.2U CN206725476U (en) | 2017-05-27 | 2017-05-27 | Range-adjustable in-situ micro-nano impression/cut test device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107064198A (en) * | 2017-05-27 | 2017-08-18 | 吉林大学 | Range-adjustable in-situ micro-nano impression/cut test device and method |
| CN110044749A (en) * | 2019-05-21 | 2019-07-23 | 吉林大学 | Range changing original position hardness test device under prestressing force |
| CN110208120A (en) * | 2019-05-27 | 2019-09-06 | 平湖莱顿光学仪器制造有限公司 | A kind of multi link loading device and microscope |
-
2017
- 2017-05-27 CN CN201720608349.2U patent/CN206725476U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107064198A (en) * | 2017-05-27 | 2017-08-18 | 吉林大学 | Range-adjustable in-situ micro-nano impression/cut test device and method |
| CN110044749A (en) * | 2019-05-21 | 2019-07-23 | 吉林大学 | Range changing original position hardness test device under prestressing force |
| CN110044749B (en) * | 2019-05-21 | 2024-02-02 | 吉林大学 | Device for testing Cheng Yuanwei hardness of prestressed lower variable |
| CN110208120A (en) * | 2019-05-27 | 2019-09-06 | 平湖莱顿光学仪器制造有限公司 | A kind of multi link loading device and microscope |
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