CN203443871U - Free-surface-orientated ultra-precision nanoindentation and nanoscratch processing system - Google Patents

Free-surface-orientated ultra-precision nanoindentation and nanoscratch processing system Download PDF

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Publication number
CN203443871U
CN203443871U CN201320527179.7U CN201320527179U CN203443871U CN 203443871 U CN203443871 U CN 203443871U CN 201320527179 U CN201320527179 U CN 201320527179U CN 203443871 U CN203443871 U CN 203443871U
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China
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fixed
cut
pressure head
flexible hinge
ultraprecise
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CN201320527179.7U
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Chinese (zh)
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赵宏伟
高景
韩磊
董晓龙
鲁帅
佟达
邵明坤
程虹丙
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吉林大学
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Abstract

The utility model relates to a free-surface-orientated ultra-precision nanoindentation and nanoscratch processing system, and belongs to the field of precision scientific instruments of photo-electro-mechanical integration. An objective table which has six degrees of freedom and can adjust orientation in a self-adaptive manner and perform positioning accurately is fixed on an environment bin through an under frame; both a piezoelectric ceramic precision feed unit in a Z axis direction and a ball screw coarse feed drive mechanism in the Z axis direction are connected with a nut seat; a load signal detection unit is fixed between a flexible hinge and a diamond indenter clamping unit; displacement signal detection units are uniformly distributed on the flexible hinge; a pressure head clamping unit is fixed on the flexible hinge; and the Z axis direction feed mechanism is fixed on the environment bin. The free-surface-orientated ultra-precision nanoindentation and nanoscratch processing system has the advantages as follows: the stability and the accuracy of material processing are guaranteed, and the system has a promotion action on the fields of material science, microelectronic technique, biomedicine, national defense military industry and the like.

Description

Ultraprecise nano impress cut system of processing towards free face
Technical field
The utility model relates to the exact science instrument field of optical, mechanical and electronic integration, particularly a kind of ultraprecise nano impress cut system of processing towards free face, and the nanometer pressures/cut during the Micro Mechanical Properties that can be used for all kinds of test specimens or material detects is processed.
Background technology
Along with industrial modernization, scale, industrialization, and the development of new and high technology and defense technology, more and more higher to the requirement of various material surface performances.The eighties in 20th century, Modern Surface Technology is described as one of ten large technology of tool development prospect by International Technology circle.Late 1980s is the high-and-new science and technology that country rises in prosperities such as the U.S., Japan, due to its huge application prospect, therefore since coming out, nanometer technique has been subject to national governments and scholar's generally attention, be one of popular research field of current scientific and technological circle, it mainly comprises nano impress (Nanoindentation), nanometer cut (Nanoscratch), atomic force microscope (AFM), MEMS (micro electro mechanical system) (MEMS) special test technology (as micro-stretching etc.) and Related Supporting Technologies etc.Nano impress wherein, scratch test method is a kind of new mechanical test method growing up on traditional Bu Shi and Vickers hardness test basis, it is by the seaming chuck loading of stepless control sample and uninstall process and record load and displacement data, by thereby these data analysis being drawn to the mechanical performance index of material, this method of testing advantage is from load-displacement curve, directly to measure the mechanical property of material and the area that do not need to measure impression, therefore even if the degree of depth is in nanometer range, as long as the measuring accuracy of load and depth displacement is enough high, also can obtain the mechanical property of material.
6-dof motion platform is by six pressurized struts, upper and lower each six universal couplings and upper and lower two platforms form, lower platform is fixed on basis, stretching motion by six pressurized struts, complete upper mounting plate in the motion of space six-freedom degree, thereby can simulate various spatial movement attitudes.Can be widely applied to various training simulators as fields such as flight simulator, ship simulator, naval's helicopter landing analog platform, tank simulator, automobile driving simulator, train driving simulator, earthquake simulator and simulation film, amusement equipment, even can use the docking of space spaceship, in the oiling docking of tanker aircraft.In processing industry, can be made into six-axis linkage lathe, handyman etc.Development due to 6-dof motion platform, relate to machinery, hydraulic pressure, electric, control, computing machine, sensor, spatial movement mathematical model, real-Time Signal Transfer are processed, figure shows, a series of high-tech areas of dynamic simulation etc., thereby the development of 6-dof motion platform has become institution of higher learning, institute in the significant symbol of hydraulic pressure and control field level.6-dof motion platform is the imperial crown level product in transmission and control technology field, has grasped it, in transmission and control field, substantially just there is no a difficult problem.
At present, increasingly mature with developed country's nano impress such as the U.S., Britain, Switzerland, cut technology, and realized in the commercialization of the test of nano impress/cut, processing unit (plant), and China lacks core technology only in the starting stage to this field, and few for the development research of ultraprecise nano impress, cut processing unit (plant), hindered the development of China in association area.Therefore, be necessary that research and development catch up with and surpass developed country towards ultraprecise free face nano impress cut system of processing ,Zhe Nengwei China in the detection of material Micromechanics, processing and research field solid guarantee is provided.
Summary of the invention
The purpose of this utility model is to provide a kind of ultraprecise nano impress cut system of processing towards free face, has solved the problems referred to above that prior art exists.It is a kind of super-precision trans-scale nano impress cut system of processing that collects driving, loading, detection, the adjusting of six degree of freedom self-adapting type orientation, ultraprecise impression, cut.The utility model not only can be realized the Precision Machining to the impression of flat work pieces and cut, more can realize the impression of curve surface work pieces and the Precision Machining of cut and detection, and the impression to curved-surface materials in reality, cut process requirements does not occupy the minority, sclerotin pressure/the cut in biomedicine for example, ultraprecise Machining of Curved Surface etc., these all propose higher requirement to the precision in nano impress and cut process, and the utility model can be realized the accurate location to the location of workpiece, guarantee measuring accuracy, this is to new material new process, precision optics, microelectric technique and semiconductor technology, carplane key components and parts is manufactured, Ferrous Metallurgy, biomedical engineering, MEMS (micro electro mechanical system) (MEMS) technology, the development of the High-tech Industry Cluster such as nanometer engineering and defence and military has very important support impetus and wide industry using value.Detecting unit, pressure head grip unit, the environment storehouse of objective table, the ball-screw coarse feed gear train of Z-direction and piezoelectric ceramics precision feeding unit, load signal and the displacement signal of Z-direction that the utility model is mainly located by six degree of freedom self-adapting type orientation adjustment precision form.The objective table of adjustment precision location, six degree of freedom self-adapting type orientation can guarantee the exact position of workpiece, the coarse feed gear train of Z-direction can rapid adjustment diamond penetrator and workpiece between position, piezoelectric ceramics precision feeding unit guarantees that diamond penetrator is pressed into material internal, and environment storehouse guarantees special material requirement to physical field in process of press in.
Above-mentioned purpose of the present utility model is achieved through the following technical solutions:
Ultraprecise nano impress cut system of processing towards free face, the objective table that comprises adjustment precision location, six degree of freedom self-adapting type orientation, the ball-screw coarse feed gear train of Z-direction, the piezoelectric ceramics precision feeding unit of Z-direction, load signal detecting unit, the detecting unit of displacement signal, pressure head grip unit and environment storehouse, the objective table of adjustment precision location, described six degree of freedom self-adapting type orientation is fixed on environment storehouse 6, the piezoelectric ceramics precision feeding unit of Z-direction and the ball-screw coarse feed gear train of Z-direction are all connected with nut seat 22, load signal detecting unit 8 is fixed between flexible hinge 20 and diamond penetrator grip unit, displacement signal detecting unit 27 is distributed on flexible hinge 20, and pressure head grip unit is fixed on flexible hinge 20.
The objective table of described adjustment precision location, six degree of freedom self-adapting type orientation is by base plate 13, piezoelectricity master cylinder 14, article carrying platform 16 forms, described base plate 13 is connected with fixed block 11, three fixed blocks 11 are distributed on base plate 13, described piezoelectricity master cylinder 14 is connected with contiguous block 15 with fixed block 11, three contiguous blocks 15 are distributed on article carrying platform 16, and form complementary angle with fixed block, the vertical view of three contiguous blocks and three fixed block formations is regular hexagon, described article carrying platform is connected with contiguous block, the objective table integral body of described adjustment precision location, six degree of freedom self-adapting type orientation utilizes trip bolt I 12 to be fixed on environment storehouse 6 by base plate 13.
The ball-screw coarse feed gear train of described Z-direction is by pacifying river AC servo motor 1, feed rod 3, ball-screw 25 forms, described peace river AC servo motor 1 output shaft is connected with shaft coupling 26, motor provides the coarse feed of Z-direction, motor has self-locking and carries scrambler, can realize the detection to rotating speed, form half-closed loop control, peace river AC servo motor 1 integral body is fixed on environment storehouse 6 by trip bolt V 30, described feed rod 3 is fixed on environment storehouse 6 by feed rod nut 2, and be connected with flexible hinge 20, spring 5 is placed on feed rod 3, play pretension effect, described ball-screw 25 is connected by shaft coupling pin 4 with shaft coupling 26, ball-screw 25 is connected with feed screw nut 23 simultaneously, to rotatablely move and change into rectilinear motion, the displacement of transmission motor, feed screw nut 23 is fixed on nut seat 22 by trip bolt III 24.
The piezoelectric ceramics precision feeding unit of described Z-direction is mainly comprised of flexible hinge 20, piezoelectric ceramics 19, described piezoelectric ceramics 19 is installed in flexible hinge 20, and fixing by trip bolt IV 29 by block 28, four flexible hinges 20 are connected and are fixed by trip bolt II 21 with nut seat 22, can realize and guarantee the displacement of Z axis single direction.
Described load signal detecting unit is comprised of high-resolution power sensor 8, can realize the pressure head stressing conditions detecting in impression and cut process, and described power sensor 8 is fixed between flexible hinge 20 and diamond penetrator grip unit.
Described displacement signal detecting unit is comprised of 16 tearing strain sheets 27, and described 16 tearing strain sheets are distributed on flexible hinge 20.
Described pressure head grip unit is comprised of pressure head 10, laser focusing instrument 17, cramping body 9, described pressure head grip unit integral body is connected by connecting link 18 with power sensor 8, described cramping body 9 can be realized the fixing and replacing to pressure head 10, adopt counterweight mode that laser focusing instrument 17 is fixed on cramping body, guarantee that pressure head is not because laser focusing instrument is offset, laser focusing instrument 17 can be realized and guarantee that pressure head is vertically pressed into workpiece, by detecting, the objective table of six degree of freedom self-adapting type orientation adjustment precision location is carried out to position adjustment, form closed-loop control.
Isolating exterior environment can be realized in described environment storehouse 6, by bottom pore, internal environment can be evacuated, hatchcover 7 is from belt switch, be convenient to fetch and deliver workpiece, proving installation can be goed deep in environment storehouse 6, mechanical behavior and damage status that observation workpiece occurs in impression, cut process, thereby the crudy of strong guarantee to free face impression cut.
The beneficial effects of the utility model are: for planar materials, curved-surface materials provide the job operation of impression and cut more accurately, its load deflection resolution of the process technology the utility model proposes and method reaches nanoscale, loading force resolution reaches micro-ox level.By adjustable hatchcover, observation high-resolution digital micro imaging system can be deep in environment storehouse to observation workpiece deformation damage situation in impression cut process.By the displacement in process, acting force, accurately control, to processing test specimen surface imperfection, damage etc., can reach real-time monitored, guaranteed stability and the accuracy of materials processing.The utility model patent will play promotion facilitation to fields such as material science, microelectric technique, biomedicine and defence and militaries.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide further understanding of the present utility model, forms the application's a part, and illustrative example of the present utility model and explanation thereof are used for explaining the utility model, do not form improper restriction of the present utility model.
Fig. 1 is that master of the present utility model looks half section schematic diagram;
Fig. 2 is that environment of the present utility model storehouse cuts open four/normal axomometric drawing for the moment;
Fig. 3 is the objective table axonometric drawing of adjustment precision location, six degree of freedom self-adapting type of the present utility model orientation;
Fig. 4 is piezoelectric ceramics precision feeding unit shaft mapping of the present utility model;
Fig. 5 is grip unit axonometric drawing of the present utility model.
In figure: 1. pacify river AC servo motor; 2. feed rod nut; 3. feed rod; 4. shaft coupling pin; 5. spring; 6. environment storehouse; 7, hatchcover; 8. power sensor; 9. pressure head clamper; 10. diamond penetrator; 11. fixed blocks; 12. trip bolt I; 13. base plates; 14. piezoelectricity master cylinders; 15. contiguous blocks; 16. objective tables; 17. laser focusing instruments; 18. connecting links; 19. piezoelectric ceramics; 20. flexible hinges; 21. trip bolt II; 22. nut seats; 23. feed screw nuts; 24. trip bolt III; 25. ball-screws; 26. shaft couplings; 27. foil gauges; 28. blocks; 29. trip bolt IV; 30. trip bolt V.
Embodiment
Below in conjunction with accompanying drawing, further illustrate detailed content of the present utility model and embodiment thereof.
Referring to shown in Fig. 1 to Fig. 5, ultraprecise nano impress cut system of processing towards free face of the present utility model, the objective table that comprises adjustment precision location, six degree of freedom self-adapting type orientation, the ball-screw coarse feed gear train of Z-direction, the piezoelectric ceramics precision feeding unit of Z-direction, load signal detecting unit, the detecting unit of displacement signal, pressure head grip unit and environment storehouse, the objective table of adjustment precision location, described six degree of freedom self-adapting type orientation is fixed on environment storehouse 6, the piezoelectric ceramics precision feeding unit of Z-direction and the ball-screw coarse feed gear train of Z-direction are all connected with nut seat 22, load signal detecting unit 8 is fixed between flexible hinge 20 and diamond penetrator grip unit, displacement signal detecting unit 27 is distributed on flexible hinge 20, and pressure head grip unit is fixed on flexible hinge 20.
The objective table of described adjustment precision location, six degree of freedom self-adapting type orientation is by base plate 13, piezoelectricity master cylinder 14, article carrying platform 16 forms, described base plate 13 is connected with fixed block 11, three fixed blocks 11 are distributed on base plate 13, described piezoelectricity master cylinder 14 is connected with contiguous block 15 with fixed block 11, three contiguous blocks 15 are distributed on article carrying platform 16, and form complementary angle with fixed block, the vertical view of three contiguous blocks and three fixed block formations is regular hexagon, described article carrying platform is connected with contiguous block, the objective table integral body of described adjustment precision location, six degree of freedom self-adapting type orientation is fixed on environment storehouse 6 and by trip bolt I and is fixed by base plate.
The ball-screw coarse feed gear train of described Z-direction is by pacifying river AC servo motor 1, feed rod 3, ball-screw 25 forms, described peace river AC servo motor 1 is connected with shaft coupling 26, motor provides the coarse feed of Z-direction, motor has self-locking and carries scrambler, can realize the detection to rotating speed, form half-closed loop control, peace river AC servo motor 1 integral body is fixed on environment storehouse 6 by trip bolt V 30, described feed rod 3 is fixed on environment storehouse 6 by feed rod nut 2, and be connected with flexible hinge 20, spring 5 is placed on feed rod 3, play pretension effect, described ball-screw 25 is connected by shaft coupling pin 4 with shaft coupling 26, ball-screw 25 is connected with feed screw nut 23 simultaneously, the displacement of transmission motor, feed screw nut 23 is fixed on nut seat 22 by trip bolt III 24, the displacement of transmission motor.
The piezoelectric ceramics precision feeding unit of described Z-direction is comprised of flexible hinge 20, piezoelectric ceramics 19, described piezoelectric ceramics 19 is installed in flexible hinge 20, and fixing by trip bolt IV 29 by block 28, four flexible hinges 20 are connected and are fixed by trip bolt II 21 with nut seat 22, can realize and guarantee the displacement of Z axis single direction.
Described load signal detecting unit is comprised of high-resolution power sensor 8, can realize the pressure head stressing conditions detecting in impression and cut process, and described power sensor 8 is fixed between flexible hinge 20 and diamond penetrator grip unit.
Described displacement signal detecting unit is comprised of 16 tearing strain sheets 27, and described 16 tearing strain sheets are distributed on flexible hinge 20, can realize the displacement of Accurate Measurement in the micro-feeding process of piezoelectric ceramics 19.
Described pressure head grip unit is comprised of pressure head 10, laser focusing instrument 17, cramping body 9, described pressure head grip unit integral body is connected by connecting link 18 with power sensor 8, described cramping body 9 can be realized the fixing and replacing to pressure head 10, adopt counterweight mode that laser focusing instrument 17 is fixed on cramping body, guarantee that pressure head is not because laser focusing instrument is offset, laser focusing instrument 17 can be realized and guarantee that pressure head is vertically pressed into workpiece, by detecting, the objective table of six degree of freedom self-adapting type orientation adjustment precision location is carried out to position adjustment, form closed-loop control.
Isolating exterior environment can be realized in described environment storehouse 6, by bottom pore, internal environment can be evacuated, hatchcover 7 is from belt switch, be convenient to fetch and deliver workpiece, proving installation can be goed deep in environment storehouse 6, mechanical behavior and damage status that observation workpiece occurs in impression, cut process, thereby the crudy of strong guarantee to free face impression cut.
Ultraprecise nano impress cut system of processing towards free face of the present utility model, there is Z-direction precision feeding unit, coarse feed gear train, described coarse feed mechanism power provides by pacifying river AC servo motor 1, can realize self-locking, and carry scrambler, can realize the half-closed loop control to motor speed.Peace river AC servo motor 1 is connected with shaft coupling 26, realizes the coarse feed of Z-direction by ball-screw 25.Coarse feed gear train is connected by nut seat 22 with piezoelectric ceramics essence feed unit, and the Z-direction of nut seat is moved by four feed rods 3, and carries out pretension by spring 5.Described piezoelectric ceramics precision feeding unit 19 is mounted in four flexible hinges 20, and be fixed by block 28, uniform four flexible hinges guarantee Z-directions progress greatly to, on four flexible hinges, post 16 tearing strain sheets 27, the displacement of pressure head process of press in is carried out to precision measurement simultaneously.Described load signal is provided by power sensor 8, and power sensor 8 is connected with pressure head clamper 9 with flexible hinge 20, by power sensor 8, can be realized the stressing conditions of pressure head process of press in is accurately measured.The replaceable different types of pressure head of described pressure head clamper 9, is directly connected with power sensor 8.The objective table of described adjustment precision location, six degree of freedom self-adapting type orientation, can realize the accurate location to the location of workpiece, objective table 16 forms closed-loop control with the laser focusing instrument 17 being fixed in grip unit, by laser focusing instrument 17, the precise angle of pressure head and surface of the work can be measured, for guaranteeing that pressure head can be realized along the normal of free face, be pressed into and provide safeguard, also can meet different experiments demand simultaneously.Except peace river AC servo motor 1 and feed rod nut 2, entire system is arranged in environment storehouse 6, the objective table of described adjustment precision location, six degree of freedom self-adapting type orientation is fixed on environment storehouse by base plate 13, the piezoelectric ceramics precision feeding unit of the ball-screw coarse feed gear train of described Z-direction and Z-direction, the detecting unit of load signal and displacement signal, pressure head grip unit is fixed on 6 upper ends, environment storehouse, in experimentation, can observation high-resolution digital micro imaging system can be deep in environment storehouse 6 according to demand, observation workpiece deformation damage situation in impression cut process, if any special material, need to control adjustable hatchcover 7 to workpiece environment, make environment storehouse 6 integrally closeds, circular hole by bottom regulates and controls whole experimental situation.
In nano-indenter test, because the contact force between diamond penetrator and test specimen is generally, ox level is even lower in the least, and each link deflection of mechanical system is very small, and the degree of depth of pressure head Specimen can record by 16 tearing strain sheets 27; And the contact load that in Indentation Process, diamond penetrator 10 imposes on test specimen surface can pick up by micro-force sensor 8, by the displacement in process, acting force, accurately control, to processing test specimen surface imperfection, damage etc., can reach real-time monitored, guarantee stability and the accuracy of materials processing.
The foregoing is only preferred embodiment of the present utility model, be not limited to the utility model, for a person skilled in the art, the utility model can have various modifications and variations.All any modifications that the utility model is done, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.

Claims (8)

1. the ultraprecise nano impress cut system of processing towards free face, it is characterized in that: the objective table that comprises adjustment precision location, six degree of freedom self-adapting type orientation, the ball-screw coarse feed gear train of Z-direction, the piezoelectric ceramics precision feeding unit of Z-direction, load signal detecting unit, the detecting unit of displacement signal, pressure head grip unit and environment storehouse, the objective table of adjustment precision location, described six degree of freedom self-adapting type orientation is fixed on environment storehouse (6), the piezoelectric ceramics precision feeding unit of Z-direction and the ball-screw coarse feed gear train of Z-direction are all connected with nut seat (22), load signal detecting unit (8) is fixed between flexible hinge (20) and diamond penetrator grip unit, it is upper that displacement signal detecting unit (27) is distributed in flexible hinge (20), and pressure head grip unit is fixed on flexible hinge (20).
2. the ultraprecise nano impress cut system of processing towards free face according to claim 1, it is characterized in that: the objective table of described adjustment precision location, six degree of freedom self-adapting type orientation is by base plate (13), piezoelectricity master cylinder (14), article carrying platform (16) forms, described base plate (13) is connected with fixed block (11), three fixed blocks (11) are distributed on base plate (13), described piezoelectricity master cylinder (14) is connected with contiguous block (15) with fixed block (11), three contiguous blocks (15) are distributed on article carrying platform (16), and form complementary angle with fixed block, the vertical view of three contiguous blocks and three fixed block formations is regular hexagon, described article carrying platform is connected with contiguous block, the objective table integral body of described adjustment precision location, six degree of freedom self-adapting type orientation is fixed on environment storehouse (6) by base plate.
3. the ultraprecise nano impress cut system of processing towards free face according to claim 1, it is characterized in that: the ball-screw coarse feed gear train of described Z-direction is by pacifying river AC servo motor (1), feed rod (3), ball-screw (25) forms, described peace river AC servo motor (1) is connected with shaft coupling (26), motor provides the coarse feed of Z-direction, motor has self-locking and carries scrambler, can realize the detection to rotating speed, form half-closed loop control, described feed rod (3) is fixed on environment storehouse (6) by feed rod nut (2), and be connected with flexible hinge (20), spring (5) is placed on feed rod (3), play pretension effect, described ball-screw (25) is connected with shaft coupling (26), the displacement of transmission motor.
4. the ultraprecise nano impress cut system of processing towards free face according to claim 1, it is characterized in that: the piezoelectric ceramics precision feeding unit of described Z-direction is comprised of flexible hinge (20), piezoelectric ceramics (19), described piezoelectric ceramics (19) is installed in flexible hinge (20), and fixing by block (28), four flexible hinges (20) are connected with nut seat (22), can realize and guarantee the displacement of Z axis single direction.
5. the ultraprecise nano impress cut system of processing towards free face according to claim 1, it is characterized in that: described load signal detecting unit is comprised of high-resolution power sensor (8), can realize the pressure head stressing conditions detecting in impression and cut process, described power sensor (8) is fixed between flexible hinge (20) and pressure head grip unit.
6. the ultraprecise nano impress cut system of processing towards free face according to claim 1, it is characterized in that: described displacement signal detecting unit is comprised of 16 tearing strain sheets (27), and described 16 tearing strain sheets are distributed on flexible hinge (20).
7. according to claim 1 or 5 towards the ultraprecise nano impress cut system of processing of free face, it is characterized in that: described pressure head grip unit is by pressure head (10), laser focusing instrument (17), cramping body (9) forms, described pressure head grip unit is whole to be connected with power sensor (8), described cramping body (9) can be realized the fixing and replacing to pressure head (10), adopt counterweight mode that laser focusing instrument (17) is fixed on cramping body, guarantee that pressure head is not because laser focusing instrument is offset, laser focusing instrument (17) can be realized and guarantee that pressure head is vertically pressed into workpiece, by detecting, the objective table of six degree of freedom self-adapting type orientation adjustment precision location is carried out to position adjustment, form closed-loop control.
8. the ultraprecise nano impress cut system of processing towards free face according to claim 1, it is characterized in that: isolating exterior environment can be realized in described environment storehouse (6), by bottom pore, internal environment can be evacuated, hatchcover (7) is from belt switch, be convenient to fetch and deliver workpiece, proving installation can be goed deep in environment storehouse (6) to mechanical behavior and damage status that observation workpiece occurs in impression, cut process, thereby the crudy of strong guarantee to free face impression cut.
CN201320527179.7U 2013-08-28 2013-08-28 Free-surface-orientated ultra-precision nanoindentation and nanoscratch processing system CN203443871U (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104007032A (en) * 2014-06-17 2014-08-27 沈阳天星试验仪器有限公司 Standard hardness machine with two high-precision force sensors
CN104476153A (en) * 2014-11-05 2015-04-01 上海大学 High-precision displacement servo thin part assembly guide groove
CN105223213A (en) * 2015-09-28 2016-01-06 北京工业大学 The two in-situ nano impression platform that inclines of a kind of transmission electron microscope
CN105388060A (en) * 2015-11-24 2016-03-09 中国人民解放军装甲兵工程学院 Millinewton-order instrumentation press-in instrument
CN105527184A (en) * 2016-01-18 2016-04-27 南京航空航天大学 Nanometer press mark measuring system
CN107543752A (en) * 2017-08-14 2018-01-05 上海理工大学 Nano-hardness tester special fixture
CN107589104A (en) * 2017-08-08 2018-01-16 哈尔滨工业大学 The experimental provision and method of array micro nano structure in Raman enhancing substrate are prepared based on power modulation miniature carving stroke/micro-indentations process
CN109951100A (en) * 2019-03-25 2019-06-28 中国科学院长春光学精密机械与物理研究所 A kind of big travel displacement driving device and its control method
CN110736670A (en) * 2019-11-13 2020-01-31 吉林大学 Micro-nano indentation test method suitable for complex curved surface

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104007032A (en) * 2014-06-17 2014-08-27 沈阳天星试验仪器有限公司 Standard hardness machine with two high-precision force sensors
CN104476153A (en) * 2014-11-05 2015-04-01 上海大学 High-precision displacement servo thin part assembly guide groove
CN104476153B (en) * 2014-11-05 2017-05-10 上海大学 High-precision displacement servo thin part assembly guide groove
CN105223213B (en) * 2015-09-28 2017-12-15 北京工业大学 A kind of double in-situ nano impression platforms that incline of transmission electron microscope
US10410822B2 (en) 2015-09-28 2019-09-10 Beijing University Of Technology Double-tilt in-situ nanoindentation platform for transmission electron microscope
CN105223213A (en) * 2015-09-28 2016-01-06 北京工业大学 The two in-situ nano impression platform that inclines of a kind of transmission electron microscope
CN105388060A (en) * 2015-11-24 2016-03-09 中国人民解放军装甲兵工程学院 Millinewton-order instrumentation press-in instrument
CN105388060B (en) * 2015-11-24 2018-02-16 中国人民解放军装甲兵工程学院 A kind of milli ox magnitude instrumentation press fit instrument
CN105527184A (en) * 2016-01-18 2016-04-27 南京航空航天大学 Nanometer press mark measuring system
CN107589104A (en) * 2017-08-08 2018-01-16 哈尔滨工业大学 The experimental provision and method of array micro nano structure in Raman enhancing substrate are prepared based on power modulation miniature carving stroke/micro-indentations process
CN107589104B (en) * 2017-08-08 2020-12-18 哈尔滨工业大学 Experimental device and method for preparing array micro-nano structure on Raman-enhanced substrate based on force modulation micro-scribing/micro-indentation process
CN107543752A (en) * 2017-08-14 2018-01-05 上海理工大学 Nano-hardness tester special fixture
CN107543752B (en) * 2017-08-14 2020-07-17 上海理工大学 Special fixture for nano-indentation instrument
CN109951100A (en) * 2019-03-25 2019-06-28 中国科学院长春光学精密机械与物理研究所 A kind of big travel displacement driving device and its control method
CN109951100B (en) * 2019-03-25 2020-09-08 中国科学院长春光学精密机械与物理研究所 Large-stroke displacement driving device and control method thereof
CN110736670A (en) * 2019-11-13 2020-01-31 吉林大学 Micro-nano indentation test method suitable for complex curved surface

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