CN206602097U - Silicon chip detection means - Google Patents
Silicon chip detection means Download PDFInfo
- Publication number
- CN206602097U CN206602097U CN201720397304.5U CN201720397304U CN206602097U CN 206602097 U CN206602097 U CN 206602097U CN 201720397304 U CN201720397304 U CN 201720397304U CN 206602097 U CN206602097 U CN 206602097U
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- silicon chip
- fixed plate
- air bag
- platform
- detection means
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Abstract
The utility model is related to solar battery sheet technical field, especially a kind of silicon chip detection means, including support, workbench is provided with support, the upper surface of workbench is provided with platform by axis of rotation, the lower surface of workbench is provided with the motor for driving platform to rotate, the upper surface of platform is provided with left fixed plate and right fixed plate, the medial surface of left fixed plate and right fixed plate is provided with air bag, the lower surface of platform is provided with air pump, air pump is connected with air bag, silicon chip detection means of the present utility model clamps the leptoprosopy of silicon chip by air bag, so that silicon chip will not be damaged because of clamping, the observation to front side of silicon wafer and the back side is not influenceed, by way of motor belt motor moving platform is rotated, realize without manually overturning silicon chip, the observation to front side of silicon wafer and the back side can be completed, greatly improve detection efficiency, improve the accuracy rate of detection, reduce False Rate.
Description
Technical field
The utility model is related to solar battery sheet technical field, especially a kind of silicon chip detection means.
Background technology
Silicon chip is the carrier of solar battery sheet, and the quality of Si wafer quality directly determines solar battery sheet conversion efficiency
Height, it is therefore desirable to supplied materials silicon chip is detected, detect silicon chip surface whether have defect when, one of which include people
The situation of work silicon chip surface observation, current silicon chip, it is necessary to manually keep flat silicon chip on the table, first observes silicon chip in detection
Front it is whether defective, then again by silicon wafer turnover, make its back side upward, then observe silicon chip the back side it is whether defective, on
Stating the problem of way is present is, silicon chip needs artificial upset, causes detection efficiency low, and silicon chip directly tiles on the table,
It is easily caused the surface that silicon chip contacts with workbench and there is cut, influences the quality of silicon chip.
Utility model content
The technical problems to be solved in the utility model is：It is artificial in order to solve to need when detecting silicon chip in the prior art
Upset, causes detection efficiency low, and silicon chip directly tiles on the table, is easily caused the surface that silicon chip contacts with workbench and deposits
The problem of cut, influence Si wafer quality, a kind of silicon chip detection means is now provided.
The utility model solves the technical scheme that its technical problem used：A kind of silicon chip detection means, including support,
Workbench is provided with the support, the upper surface of the workbench is provided with platform by axis of rotation, the workbench
Lower surface is provided with the motor for driving platform to rotate, and the upper surface of the platform is provided with left fixed plate and right fixed plate,
The medial surface of the left fixed plate and right fixed plate is provided with air bag, and the lower surface of the platform is provided with air pump, the gas
Pump is connected with air bag.
By the way that silicon chip is placed between left fixed plate and right fixed plate in this programme, booster air pump is to airbag aeration so that
Two air bags in left fixed plate and right fixed plate are pushed against on two leptoprosopy of silicon chip both sides respectively, so as to realize wafer chuck
Hold, now the front and the back side of silicon chip are respectively in perpendicular, silicon chip just facing to observer, first observing silicon chip just
Face, then rotates 180 ° of back sides for causing silicon chip towards observer, then observing the back side of silicon chip is by motor belt motor moving platform
It is no to there is macroscopic defect, wherein, the leptoprosopy of silicon chip is clamped by air bag so that silicon chip will not be damaged because of clamping
It is bad, the observation to front side of silicon wafer and the back side is not influenceed, by way of motor belt motor moving platform is rotated, is realized without manually overturning silicon
Piece, you can complete the observation to front side of silicon wafer and the back side.
Further, the cross bar for placing silicon chip is provided with the platform, the upper surface of the cross bar is plane, institute
State cross bar to be located between left fixed plate and right fixed plate, the both sides of the cross bar are respectively arranged with the first jet pipe and the second jet pipe,
Air bag in the left fixed plate is connected by the first pipeline with the first jet pipe, and the air bag in the right fixed plate passes through the second pipe
Road is connected with the second jet pipe, limited valve of being connected on first pipeline and second pipe, and the setting of pressure limiting valve can anti-air bag
By silicon chip crimp, when the pressure in air bag reaches the operating pressure of pressure limiting valve, air bag, and will not just by silicon chip clamping
By silicon chip crimp, then air pump is worked on a period of time, now the gas in air bag is through piping upper limit pressure valve
It is vented to up in jet pipe, and the cleaning of silicon chip jet is clamped from jet pipe to by air bag.
In order to improve effect of the gas in jet pipe to the cleaning of silicon chip, further, first jet pipe and the second spray
Some stomatas are offered on the tube wall of pipe, the axis of the stomata is tilted to cross bar direction from the bottom to top.
For the ease of exhaust, further, Solenoid ball valve is communicated with the air bag, control Solenoid ball valve is opened gas
Gas discharge in capsule, so that the silicon chip detected be taken away.
In order to preferably clamp silicon chip, further, the inner side of the air bag is fitted with rubber slab.
In order to improve the accuracy of silicon chip detection, further, column, the top of the column are provided with the workbench
End, which is fixed with top plate, the top plate, is fixed with illuminating lamp.
The beneficial effects of the utility model are：Silicon chip detection means of the present utility model clamps the narrow of silicon chip by air bag
Face so that silicon chip will not be damaged because of clamping, the observation to front side of silicon wafer and the back side is not influenceed, is driven by motor flat
The mode that platform is rotated, is realized without manually overturning silicon chip, you can complete the observation to front side of silicon wafer and the back side, greatly improve detection
Efficiency, improves the accuracy rate of detection, reduces False Rate.
Brief description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is the schematic diagram of the utility model silicon chip detection means；
Fig. 2 is the close-up schematic view of A in Fig. 1；
Fig. 3 is the schematic diagram that the utility model silicon chip detection means clamps silicon chip；
Fig. 4 is the front and the back side of the first jet pipe and the second jet pipe simultaneously to silicon chip in the utility model silicon chip detection means
The schematic diagram of cleaning.
In figure：1st, support, 2, workbench, 3, rotating shaft, 4, platform, 5, motor, 6, left fixed plate, 7, right fixed plate, 8, gas
Capsule, 9, air pump, 10, cross bar, the 11, first jet pipe, the 12, second jet pipe, the 13, first pipeline, 14, second pipe, 15, pressure limiting valve,
16th, Solenoid ball valve, 17, rubber slab, 18, column, 19, top plate, 20, illuminating lamp, 21, stomata, 22, silicon chip.
Embodiment
The utility model is described in further detail presently in connection with accompanying drawing.These accompanying drawings are simplified schematic diagram,
Only illustrate basic structure of the present utility model in a schematic way, therefore it only shows the composition relevant with the utility model, direction
With can be only used for helping the description to the feature in accompanying drawing with reference to (for example, upper and lower, left and right, etc.).Therefore, not in limit
Detailed description below is used in property meaning processed, and only by appended claims and its equivalents are asked to limit
The scope of the theme of protection.
Embodiment 1
As Figure 1-4, workbench 2 is provided with a kind of silicon chip detection means, including support 1, support 1, workbench 2
Upper surface is rotated by rotating shaft 3 and is provided with platform 4, and the lower surface of workbench 2 is provided with the motor 5 for driving platform 4 to rotate,
The output end of motor 5 is connected with rotating shaft 3, and the upper surface of platform 4 is provided with left fixed plate 6 and right fixed plate 7, left fixed plate
6 and the medial surface of right fixed plate 7 be provided with air bag 8, the lower surface of platform 4 is provided with air pump 9, and air pump 9 is connected with air bag 8,
Check valve is in series with the pipeline that air pump 9 is connected with air bag 8.
The cross bar 10 for placing silicon chip 22 is provided with platform 4, the upper surface of cross bar 10 is plane, and cross bar 10 is located at a left side
Between fixed plate 6 and right fixed plate 7, the both sides of cross bar 10 are respectively arranged with the first jet pipe 11 and the second jet pipe 12, left fixed plate 6
On air bag 8 connected by the first pipeline 13 with the first jet pipe 11, the air bag 8 in right fixed plate 7 passes through second pipe 14 and
Two jet pipes 12 are connected, limited valve 15 of being connected on the first pipeline 13 and second pipe 14, and the setting of pressure limiting valve 15 can anti-air bag
8 by the crimp of silicon chip 22, and when the pressure in air bag 8 reaches the operating pressure of pressure limiting valve 15, air bag 8 just presss from both sides silicon chip 22
Hold, and then the crimp of silicon chip 22 will not be worked on air pump 9 a period of time, now the gas in air bag 8 is by pipe
Pressure limiting valve 15 is vented to up in jet pipe on road, and clamps the cleaning of silicon chip 22 jet from jet pipe to by air bag 8.
Some stomatas 21 are offered on the tube wall of first jet pipe 11 and the second jet pipe 12, the axis of stomata 21 is from the bottom to top
Tilted to the direction of cross bar 10.
Solenoid ball valve 16 is communicated with air bag 8, control Solenoid ball valve 16 is opened, the gas in air bag 8 is discharged, so that
The silicon chip 22 detected is taken away.
The inner side of air bag 8 is fitted with rubber slab 17.
Column 18 is provided with workbench 2, the top of column 18, which is fixed with top plate 19, top plate 19, is fixed with illuminating lamp
20。
The operation principle of above-mentioned silicon chip detection means is as follows：
1), by the way that silicon chip 22 is placed between left fixed plate 6 and right fixed plate 7, booster air pump 9 is inflated to air bag 8 so that
Two air bags 8 in left fixed plate 6 and right fixed plate 7 are pushed against on two leptoprosopy of the both sides of silicon chip 22 respectively, when in air bag 8
When pressure reaches the operating pressure of pressure limiting valve 15, air bag 8 just clamps silicon chip 22, and will not be by the crimp of silicon chip 22, so
Air pump 9 is worked on a period of time afterwards, now the gas in left fixed plate 6 in air bag 8 is by pressure limiting valve on the first pipeline 13
15 are vented to up in the first jet pipe 11, and are sprayed from the stomata 21 of first jet pipe 11 to the front of silicon chip 22 clamped by air bag 8
Gas is cleaned；Gas in right fixed plate 7 in air bag 8 is vented to up to the second jet pipe 12 by pressure limiting valve 15 on second pipe 14
In, and cleaned from the stomata 21 of the second jet pipe 12 to the back side jet of silicon chip 22 clamped by air bag 8, so as to realize silicon chip 22
Clamping, now silicon chip 22 front and the back side be respectively in perpendicular, silicon chip 22 just facing to observer；
2), then the front that staff first observes silicon chip 22 is rotated with the presence or absence of defect by motor 5 with moving platform 4
180 ° cause the back side of silicon chip 22 towards observer, and the back side for then observing silicon chip 22 whether there is macroscopic defect, its
In, the leptoprosopy of silicon chip 22 is clamped by air bag 8 so that silicon chip 22 will not be damaged because of clamping, not influence to silicon chip 22
Front and the observation at the back side, by way of motor 5 is rotated with moving platform 4, are realized without manually overturning silicon chip 22, you can complete
Observation to the front of silicon chip 22 and the back side.
Above-mentioned is enlightenment according to desirable embodiment of the present utility model, passes through above-mentioned description, relevant staff
Various changes and amendments can be carried out in the range of without departing from this utility model technological thought completely.This practicality
New technical scope is not limited to the content on specification, it is necessary to determine that its is technical according to right
Scope.
Claims (6)
1. a kind of silicon chip detection means, it is characterised in that：Including support (1), workbench (2), institute are provided with the support (1)
The upper surface for stating workbench (2) is provided with platform (4) by rotating shaft (3) rotation, and the lower surface of the workbench (2) is provided with use
The motor (5) rotated in driving platform (4), the upper surface of the platform (4) is provided with left fixed plate (6) and right fixed plate (7),
The medial surface of the left fixed plate (6) and right fixed plate (7) is provided with air bag (8), and the lower surface of the platform (4) is provided with
Air pump (9), the air pump (9) connects with air bag (8).
2. silicon chip detection means according to claim 1, it is characterised in that：It is provided with the platform (4) for placing
The cross bar (10) of silicon chip (22), the upper surface of the cross bar (10) is plane, and the cross bar (10) is located at left fixed plate (6) and the right side
Between fixed plate (7), the both sides of the cross bar (10) are respectively arranged with the first jet pipe (11) and the second jet pipe (12), described left solid
Air bag (8) in fixed board (6) is connected by the first pipeline (13) with the first jet pipe (11), the air bag on the right fixed plate (7)
(8) connected, connected on first pipeline (13) and second pipe (14) with the second jet pipe (12) by second pipe (14)
Limited valve (15).
3. silicon chip detection means according to claim 2, it is characterised in that：First jet pipe (11) and the second jet pipe
(12) some stomatas (21) are offered on tube wall, the axis of the stomata (21) inclines to cross bar (10) direction from the bottom to top
Tiltedly.
4. silicon chip detection means according to claim 2, it is characterised in that：Electromagnetic ball is communicated with the air bag (8)
Valve (16).
5. silicon chip detection means according to claim 1, it is characterised in that：The inner side of the air bag (8) is fitted with rubber
Offset plate (17).
6. silicon chip detection means according to claim 1, it is characterised in that：Column is provided with the workbench (2)
(18), the top of the column (18) is fixed with top plate (19), the top plate (19) and is fixed with illuminating lamp (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720397304.5U CN206602097U (en) | 2017-04-14 | 2017-04-14 | Silicon chip detection means |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720397304.5U CN206602097U (en) | 2017-04-14 | 2017-04-14 | Silicon chip detection means |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206602097U true CN206602097U (en) | 2017-10-31 |
Family
ID=60143845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720397304.5U Withdrawn - After Issue CN206602097U (en) | 2017-04-14 | 2017-04-14 | Silicon chip detection means |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206602097U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106887395A (en) * | 2017-04-14 | 2017-06-23 | 常州亿晶光电科技有限公司 | Silicon chip detection means |
| CN108032022A (en) * | 2017-12-06 | 2018-05-15 | 叶松 | A kind of clamp device and fastening method |
| CN109607197A (en) * | 2018-12-21 | 2019-04-12 | 武汉安比克科技有限公司 | A kind of high-precision intelligent feeding tooling |
| CN111003530A (en) * | 2019-11-29 | 2020-04-14 | 红云红河烟草(集团)有限责任公司 | Novel clamping mechanism device based on COMAS box turnover machine |
| CN113146465A (en) * | 2021-04-06 | 2021-07-23 | 安徽禾臣新材料有限公司 | Adsorption pad for double-sided grinding of thin wafer and production method |
| CN114620487A (en) * | 2022-03-03 | 2022-06-14 | 安徽高瑞鑫光电科技有限公司 | Intelligent detection equipment for finished cover plate |
-
2017
- 2017-04-14 CN CN201720397304.5U patent/CN206602097U/en not_active Withdrawn - After Issue
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106887395A (en) * | 2017-04-14 | 2017-06-23 | 常州亿晶光电科技有限公司 | Silicon chip detection means |
| CN108032022A (en) * | 2017-12-06 | 2018-05-15 | 叶松 | A kind of clamp device and fastening method |
| CN109607197A (en) * | 2018-12-21 | 2019-04-12 | 武汉安比克科技有限公司 | A kind of high-precision intelligent feeding tooling |
| CN111003530A (en) * | 2019-11-29 | 2020-04-14 | 红云红河烟草(集团)有限责任公司 | Novel clamping mechanism device based on COMAS box turnover machine |
| CN111003530B (en) * | 2019-11-29 | 2021-08-10 | 红云红河烟草(集团)有限责任公司 | Novel clamping mechanism device based on COMAS box turnover machine |
| CN113146465A (en) * | 2021-04-06 | 2021-07-23 | 安徽禾臣新材料有限公司 | Adsorption pad for double-sided grinding of thin wafer and production method |
| CN114620487A (en) * | 2022-03-03 | 2022-06-14 | 安徽高瑞鑫光电科技有限公司 | Intelligent detection equipment for finished cover plate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20171031 Effective date of abandoning: 20230620 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20171031 Effective date of abandoning: 20230620 |