CN206584911U - A kind of degumming frame - Google Patents
A kind of degumming frame Download PDFInfo
- Publication number
- CN206584911U CN206584911U CN201720150897.5U CN201720150897U CN206584911U CN 206584911 U CN206584911 U CN 206584911U CN 201720150897 U CN201720150897 U CN 201720150897U CN 206584911 U CN206584911 U CN 206584911U
- Authority
- CN
- China
- Prior art keywords
- plate
- top plate
- framework
- degumming
- guide rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 30
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 30
- 239000010703 silicon Substances 0.000 claims abstract description 30
- 239000013078 crystal Substances 0.000 claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 5
- 238000010276 construction Methods 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000004026 adhesive bonding Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The utility model discloses a kind of degumming frame, it is related to silicon chip process technology field.The degumming frame includes framework, the framework includes the side plate of two frame ends of two relative frameworks and connection, the framework includes top plate and bottom plate and the connection top plate and the riser at the bottom plate two ends, the hooked hand for being used for fixing crystal holder is provided with close to the top plate top, the top plate is provided with multiple sliding blocks, the sliding block is provided with locking device, the clamping bar of the side plate is all connected to below the top plate provided with two ends, inserted slot and pressure pin, the hooked hand includes the supporting plate of two transverse slats of two relative transverse slats and connection, connecting plate is provided between the transverse slat, the transverse slat is provided with guide rod, the guide rod is positioned over the top plate top through two transverse slats, the guide rod two ends are provided with gear wheel.The utility model is simple in construction, strong applicability, time saving and energy saving, cost-effective, improves production efficiency.
Description
Technical field
The utility model is related to silicon chip process technology field, more particularly to a kind of degumming frame.
Background technology
Silicon is extremely important and conventional raw semiconductor, and the manufacture of silicon chip is to cut into silicon on silicon rod cutting on line machine
Piece, silicon rod be by glue bonding on glass bar, glass bar by glue bonding in crystal holder, after silicon rod is cut into slices, it is necessary to
It could be used after degumming and cleaning, silicon wafer stripping is as a procedure crucial in silicon chip production procedure, and it operates direct
The yield rate of silicon chip is influenceed, and then influences its production efficiency.Traditional manual degumming easily cause silicon chip chipping and production efficiency compared with
It is low, it can not meet requirement of the enterprise to large-scale production；And machine degumming is often because the clamping degree of silicon chip is inadequate before degumming
And cause after degumming silicon chip to be scattered damage, and a degumming lathe is equipped with a kind of degumming frame substantially, and a kind of degumming frame can only be fitted
With a class crystal holder, general more than one slicer of purchasing carries out production activity in enterprise, and the crystal holder of each slicer is all
Differ, it is necessary to which matching different degumming frame, this consumption for resulting in degumming frame is multiplied, it makes and maintenance cost
Production cost is caused to be multiplied again, and its storage and carrying add the labor intensity of staff, increase Enterprise Human indirectly
Power cost, reduces production efficiency.
Utility model content
The technical problems to be solved in the utility model be for above-mentioned the deficiencies in the prior art there is provided a kind of degumming frame, its
It is simple in construction, it is cost-effective by provided with the different types of applicable different types of crystal holder of hooked hand, improve production efficiency.
Technical solution adopted in the utility model is：A kind of degumming frame, including framework, the framework include two relatively
Two frame ends of rectangular frame and connection side plate, the framework includes top plate and bottom plate and connects the top plate
With the riser at the bottom plate two ends, the hooked hand for being used for fixing crystal holder is provided with close to the top plate top, the top plate is provided with more
Locking device is equipped with the individual sliding block that can be moved along the top plate length direction, each sliding block, under each top plate
Fang Jun is sequentially provided with the clamping bar, inserted slot and pressure pin for clamping silicon chip, the clamping bar, the inserted slot parallel to the top plate
Be all connected to the side plate with the two ends of the pressure pin, the hooked hand include two it is relative and parallel to the transverse slat of the top plate
Connecting plate, the connection are provided between the supporting plate being adapted with two transverse slats of connection and with crystal holder, two transverse slats
Screwed hole is provided with the middle of plate, the transverse slat is positioned over the top provided with two guide rods, the guide rod through two transverse slats
Plate top, the guide rod two ends are more than the gear wheel of the guide rod provided with diameter, and the sliding block is used to limit described with the gear wheel
The horizontal direction that hooks hand movement.
As preferred scheme, the supporting plate is parallel to the side plate and section is unclosed square shape.
As preferred scheme, the inserted slot both ends are for zigzag in the middle part of cylindrical, the inserted slot.
As preferred scheme, the strip through-hole of horizontal direction two is arranged with the side plate, the clamping bar and described insert
The two ends of film trap both pass through strip through-hole and are bolted to connection, and the clamping bar is located at the inner side of the inserted slot.
As preferred scheme, vertical two strip through-hole is arranged with the side plate, the two ends of the pressure pin are worn
Cross strip through-hole and be bolted to connection.
As preferred scheme, the framework both sides are provided with cylindrical handle.
As preferred scheme, the frame height is 345mm-355mm.
Compared with prior art, it is using the beneficial effect produced by above-mentioned technical proposal：The letter of the utility model structure
It is single, by provided with different types of hooked hand can fixing different types crystal holder, by can be by silicon provided with clamping bar, inserted slot and pressure pin
Piece is clamped, it is ensured that will not be scattered damage during silicon wafer stripping；When producing different model silicon chip, corresponding hooked hand need to be only changed i.e.
Can, it is not necessary to change whole degumming frame, it is simple to operate, it is time saving and energy saving, it is cost-effective, improve production efficiency.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model embodiment 1.
Fig. 2 is the structural representation of the utility model embodiment 2.
In figure：1st, framework；11st, framework；111st, top plate；112nd, bottom plate；113rd, riser；12nd, side plate；2nd, hook hand；21st, it is horizontal
Plate；22nd, supporting plate；23rd, connecting plate；24th, guide rod；25th, gear wheel；3rd, sliding block；4th, clamping bar；5th, inserted slot；6th, pressure pin；7th, handle；
8th, handle.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, is described in further detail to the utility model.It should be appreciated that specific embodiment described herein is only to explain
The utility model, is not used to limit the utility model.
Embodiment 1：In the present embodiment, referring to Fig. 1, the utility model includes framework 1, the framework 1 includes two phases
To rectangular frame 11 and connection two ends of framework 11 side plate 12, the framework 11 include top plate 111 and bottom plate 112
And the connection top plate 111 and the riser 113 at the two ends of bottom plate 112, it is used for close to the top of top plate 111 provided with two
The hooked hand 2 of fixed crystal holder, each top plate 111 is provided with four sliding blocks 3 that can be moved along the length direction of top plate 111,
Locking device is equipped with each sliding block 3, each lower section of top plate 111 is sequentially provided with parallel to the top plate 111
Clamping bar 4, inserted slot 5 and pressure pin 6 for clamping silicon chip, the two ends of the clamping bar 4, the inserted slot 5 and the pressure pin 6 connect
It is connected to the side plate 12, the hooked hand 2 includes two relative and the transverse slat 21 parallel to the top plate 111 and two connection institutes
Provided with a connecting plate 23, the connection between the supporting plate 22 stated transverse slat 21 and be adapted with crystal holder, two transverse slats 21
The screwed hole for being used for fixing crystal holder is provided with the middle of plate 23, the transverse slat 21 passes through two provided with two guide rods 24, the guide rod 24
The individual transverse slat 21 is positioned over the top of top plate 111, and with the end thereof contacts of the sliding block 3, for limiting the hooked hand's 2
Transverse shifting, the two ends of guide rod 24 are more than the gear wheel 25 of the guide rod 24, the inner side of gear wheel 25 and the cunning provided with diameter
The contact outside of block 3, for limiting vertically moving for the hooked hand 2.
As preferred scheme, the framework 1 and the hooked hand 2 are welded, the locking on each sliding block 3
Device is two fastening bolts, and the supporting plate 22 is parallel to the side plate 12 and section is unclosed square shape；It is described
Clamping bar 4 and the pressure pin 6 are equipped with elastic pipe sleeve, and the both ends of inserted slot 5 are cylindrical, and the middle part of inserted slot 5 is
Zigzag；The strip through-hole of horizontal direction two is arranged with the side plate 12, the two ends of the clamping bar 4 and the inserted slot 5 are equal
Through strip through-hole and it is bolted to connection, the clamping bar 4 is located at the inner side of the inserted slot 5；It is right on the side plate 12
Claim to be provided with vertical two strip through-hole, the two ends of the pressure pin 6 pass through strip through-hole and are bolted to connection；The structure
The both sides of frame 11 are provided with cylindrical handle 7, and the handle 7 is welded on the framework 11, and the height of framework 1 is 345mm-
355mm。
In the present embodiment, referring to Fig. 1, the utility model carries out silicon wafer stripping work on NTC442 slicers
When, the hooked hand 2 being adapted with the type crystal holder is selected, the length of the hooked hand 2 is 320mm-330mm, by two hooked hands 2
The correct position on the framework 1 is positioned over, eight sliding blocks 3 are then moved until being connect respectively with four guide rods 24
Touch, tighten fastening bolt；By the inner side of the gear wheel 25 and the contact outside of sliding block 3, prevent the hooked hand 2 from level to shifting
It is dynamic；Two formation of supporting plate 22, one unclosed square shape horizontal concrete chute is adapted with crystal holder, and crystal holder is positioned over into institute
State in 2 chutes formed below of hooked hand, the hooked hand 2 is then passed through by bolt with crystal holder by the screwed hole in the middle of connecting plate 23
It is fixedly connected；The level of the clamping bar 4 and the inserted slot 5 is adjusted to position, the vertical to position of the pressure pin 6 is adjusted, twists
Tight bolt, makes the clamping bar 4 and the pressure pin 6 clamp front and rear side and the upper and lower sides of silicon chip respectively；Inserted sheet is passed through from inserted slot 5
Silicon chip both sides end face and compared with big gap and being fixed on the clamping bar 4, clamps the both ends of the surface of silicon chip, it is ensured that silicon wafer stripping process
In will not be scattered damage；Then it is positioned in warm water together and carries out degumming, required fluid temperature is according to used glue
Water is determined, and its principle is that glue can soften within the scope of certain temperature, silicon chip comes off from crystal holder automatically, while in the hot water
The time that glue can be softened by adding lactic acid or citric acid shortens, and improves operating efficiency.
Embodiment 2：Referring to Fig. 2, the structure of the degumming frame in the present embodiment is substantially the same manner as Example 1, difference
It is the progress silicon wafer stripping work on PV600 slicers to be the utility model, and the hooked hand 2 is one, the hooked hand 2
Length be 670mm-680mm, the hooked hand 2 include four supporting plates 22 and three connecting plates 23, described in four
The one unclosed square shape horizontal concrete chute of formation of supporting plate 22 is adapted with crystal holder, and the hooked hand 2, which also includes two, to be used to carry
The handle 8 of the hooked hand 2 is risen or transfers, two handles 8 are respectively arranged on the outside of the supporting plate 22 at 2 two ends of the hooked hand,
It is preferred that, the handle 8 is that cross section is round U-shaped handle.
The utility model is simple in construction, by provided with different types of hooked hand can fixing different types crystal holder, by setting
There are clamping bar, inserted slot and pressure pin can be by silicon wafer clamping, it is ensured that will not be scattered damage during silicon wafer stripping；When production different model
During silicon chip, corresponding hooked hand need to be only changed, it is not necessary to change whole degumming frame, it is simple to operate, it is time saving and energy saving, it is cost-effective, carry
High efficiency.
It is described above, only the utility model preferably embodiment, but protection domain of the present utility model is not
This is confined to, any one skilled in the art is in the technical scope that the utility model is disclosed, according to this practicality
New technical scheme and its design is subject to equivalent substitution or change, should all cover within protection domain of the present utility model.
Claims (7)
1. a kind of degumming frame, it is characterised in that：Including framework（1）, the framework（1）Including two relative rectangular frames（11）
With two frameworks of connection（11）The side plate of end（12）, the framework（11）Including top plate（111）And bottom plate（112）And
Connect the top plate（111）With the bottom plate（112）The riser at two ends（113）, close to the top plate（111）Top, which is provided with, to be used for
The hooked hand of fixed crystal holder（2）, the top plate（111）Provided with it is multiple can be along the top plate（111）The sliding block of length direction movement
（3）, each sliding block（3）On be equipped with locking device, each top plate（111）Lower section is sequentially provided with parallel to described
Top plate（111）Clamping bar for clamping silicon chip（4）, inserted slot（5）And pressure pin（6）, the clamping bar（4）, the inserted slot（5）With
The pressure pin（6）Two ends be all connected to the side plate（12）, the hooked hand（2）It is relative and parallel to the top including two
Plate（111）Transverse slat（21）With two transverse slats of connection（21）And the supporting plate being adapted with crystal holder（22）, two horizontal strokes
Plate（21）Between be provided with connecting plate（23）, the connecting plate（23）Centre is provided with screwed hole, the transverse slat（21）It is provided with two
Guide rod（24）, the guide rod（24）Through two transverse slats（21）It is positioned over the top plate（111）Top, the guide rod（24）
Two ends are more than the guide rod provided with diameter（24）Gear wheel（25）, the sliding block（3）With the gear wheel（25）It is described for limiting
Hooked hand（2）Horizontal direction is moved.
2. a kind of degumming frame according to claim 1, it is characterised in that：The supporting plate（22）Parallel to the side plate
（12）And section is unclosed square shape.
3. a kind of degumming frame according to claim 1, it is characterised in that：The inserted slot（5）Both ends are cylindrical,
The inserted slot（5）Middle part is zigzag.
4. a kind of degumming frame according to claim 1, it is characterised in that：The side plate（12）On be arranged with horizontal direction
Two strip through-holes, the clamping bar（4）With the inserted slot（5）Two ends both pass through strip through-hole and be bolted to connection,
The clamping bar（4）Located at the inserted slot（5）Inner side.
5. a kind of degumming frame according to claim 1, it is characterised in that：The side plate（12）On be arranged with it is vertical
Two strip through-holes, the pressure pin（6）Two ends through strip through-hole and being bolted to connection.
6. a kind of degumming frame according to claim 1, it is characterised in that：The framework（11）Both sides are carried provided with cylindrical
Hand（7）.
7. a kind of degumming frame according to claim 1, it is characterised in that：The framework（1）Highly it is 345mm-355mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720150897.5U CN206584911U (en) | 2017-02-20 | 2017-02-20 | A kind of degumming frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720150897.5U CN206584911U (en) | 2017-02-20 | 2017-02-20 | A kind of degumming frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206584911U true CN206584911U (en) | 2017-10-24 |
Family
ID=60091265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720150897.5U Expired - Fee Related CN206584911U (en) | 2017-02-20 | 2017-02-20 | A kind of degumming frame |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206584911U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108993985A (en) * | 2018-06-05 | 2018-12-14 | 江苏润生光伏科技有限公司 | A kind of degumming device |
| CN110767594A (en) * | 2019-10-22 | 2020-02-07 | 麦斯克电子材料有限公司 | Manual device that comes unstuck of silicon chip |
| CN111002496A (en) * | 2019-12-18 | 2020-04-14 | 福建北电新材料科技有限公司 | Wafer lower basket |
| CN113488425A (en) * | 2021-07-01 | 2021-10-08 | 杭州中为光电技术有限公司 | Degumming insert machine and silicon wafer processing method |
| CN114559571A (en) * | 2022-04-14 | 2022-05-31 | 乐山高测新能源科技有限公司 | Silicon wafer production system |
-
2017
- 2017-02-20 CN CN201720150897.5U patent/CN206584911U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108993985A (en) * | 2018-06-05 | 2018-12-14 | 江苏润生光伏科技有限公司 | A kind of degumming device |
| CN108993985B (en) * | 2018-06-05 | 2023-09-05 | 江苏润生光伏科技有限公司 | Degumming device |
| CN110767594A (en) * | 2019-10-22 | 2020-02-07 | 麦斯克电子材料有限公司 | Manual device that comes unstuck of silicon chip |
| CN111002496A (en) * | 2019-12-18 | 2020-04-14 | 福建北电新材料科技有限公司 | Wafer lower basket |
| CN113488425A (en) * | 2021-07-01 | 2021-10-08 | 杭州中为光电技术有限公司 | Degumming insert machine and silicon wafer processing method |
| CN113488425B (en) * | 2021-07-01 | 2022-06-17 | 杭州中为光电技术有限公司 | Degumming insert machine and silicon wafer processing method |
| US11749538B2 (en) | 2021-07-01 | 2023-09-05 | Hangzhou Zhongwei Photoelectric Technology Co., Ltd. | Device for degumming and inserting silicon wafers and method for processing silicon wafers |
| CN114559571A (en) * | 2022-04-14 | 2022-05-31 | 乐山高测新能源科技有限公司 | Silicon wafer production system |
| CN114559571B (en) * | 2022-04-14 | 2022-09-23 | 乐山高测新能源科技有限公司 | Silicon wafer production system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206584911U (en) | A kind of degumming frame | |
| CN102275234B (en) | Automatic degumming method and device for multi-wire cutting of monocrystal/ polycrystalline silicon wafer | |
| CN203426317U (en) | Reinforced steel bar or steel beam arc shape machining device | |
| CN203004093U (en) | Silicon chip cutting device | |
| CN204035244U (en) | Efficient just pipe machine | |
| CN208195517U (en) | A kind of construction bar cutter | |
| CN205270433U (en) | Metal plate plastic anchor clamps | |
| CN209532523U (en) | A kind of auxiliary device making steel mesh | |
| CN203140349U (en) | Silicon wafer pre-cleaning auxiliary device | |
| CN206999203U (en) | Raw bamboo Three-dimension process platform | |
| CN204490099U (en) | Automatic stacked pay-off | |
| CN206873937U (en) | A kind of large form assembly attachment means having enough to meet the need | |
| CN206200516U (en) | Mechanism's swing arm crimping jig | |
| CN204996869U (en) | U type pipe strap preparation ware | |
| CN203881164U (en) | Demountable sinuous coil condenser | |
| CN202514512U (en) | Cleaning and packaging bed table for seafood | |
| CN203817900U (en) | Pipe polishing machine for pipe outside diameter end surface | |
| CN205914562U (en) | Distortion alignment fork handle of photovoltaic support purlin | |
| CN212004565U (en) | Water heating pipeline erection bracing frame for building | |
| CN104162822B (en) | A kind of automatic edging machine workbench | |
| CN214582665U (en) | Double-effect energy-saving heat exchanger | |
| CN107867008A (en) | A kind of model trough fixation device for being easy to flange plate to produce | |
| CN213446837U (en) | Tempered glass cutting device capable of avoiding generation of cracks | |
| CN201366425Y (en) | Placement structure for silicon rod clamp | |
| CN211160878U (en) | Novel cleaning tool container for diamond wire cutting silicon wafer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171024 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |