CN206570392U - Linear evaporation source is blocked up dredger - Google Patents
Linear evaporation source is blocked up dredger Download PDFInfo
- Publication number
- CN206570392U CN206570392U CN201720099135.7U CN201720099135U CN206570392U CN 206570392 U CN206570392 U CN 206570392U CN 201720099135 U CN201720099135 U CN 201720099135U CN 206570392 U CN206570392 U CN 206570392U
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- CN
- China
- Prior art keywords
- evaporation
- nozzle
- evaporation source
- airflow manifold
- air supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000008020 evaporation Effects 0.000 title claims abstract description 44
- 238000001704 evaporation Methods 0.000 title claims abstract description 44
- 230000007704 transition Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 4
- 238000010025 steaming Methods 0.000 claims description 3
- 238000009718 spray deposition Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- 238000000034 method Methods 0.000 abstract description 3
- 230000008569 process Effects 0.000 abstract description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 239000010410 layer Substances 0.000 description 10
- 239000002346 layers by function Substances 0.000 description 9
- 230000000903 blocking effect Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 230000005525 hole transport Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model belongs to OLED display device preparing technical field, and in particular to a kind of linear evaporation source is blocked up dredger.It include it is some be arranged in evaporation chamber and corresponding with the nozzle of linear evaporation source setting airflow manifold, be respectively arranged with a point control valve in the every airflow manifold；Pressure inductor is respectively arranged with the nozzle of the linear evaporation source；The airflow manifold is connected with air supply header, and the air supply header extend out on the evaporation exterior thereto and connection high-pressure air source, the air supply header and is provided with master control valve.The utility model, which can in time be discovered and solve the nozzle in production process, blocks up problem, greatlys save the time of process problem, improves production efficiency.
Description
Technical field
The utility model belongs to OLED display device preparing technical field, and in particular to work is deposited in a kind of OLED display device
Linear evaporation source needed for skill is blocked up dredger.
Background technology
Organic light emitting diode display (Organic Light Emitting Diode, OLED) is a kind of great development
The flat panel display of prospect, it not only has very excellent display performance, also with self-luminous, simple in construction, ultra-thin,
Fast response time, wide viewing angle, low-power consumption and the characteristics such as Flexible Displays can be realized, be described as " dreamlike display ", along with its life
Produce equipment investment and be much smaller than liquid crystal display (Liquid Crystal Display, LCD), obtain major display producers
Favor, it has also become the main force of third generation display device in display technology field.
OLED display device includes：Substrate, the OLED being formed on substrate and the cap set with baseplate-laminating
Plate, the OLED is including the anode being formed on substrate, the organic function layer being formed on anode and is formed at organic
Negative electrode in functional layer, anode and cathode excitation organic function layer are to realize display.Wherein, the organic function layer one of OLED
As be made up of three functional layers, respectively hole transport functional layer (Hole Transport Layer, HTL), light emitting functional layer
(Emissive Layer, EML), electric transmission functional layer (Electron Transport Layer, ETL).Each functional layer
It can be more than one layer, or one layer such as hole transport functional layer, hole injection layer and hole transport can be subdivided into sometimes
Layer；Electric transmission functional layer, can be subdivided into electron transfer layer and electron injecting layer, but its function is close, therefore be referred to as hole
Transfer function layer and electric transmission functional layer.
At present, the mode for preparing OLED display device main flow is heating in vacuum plated film, i.e., made in evaporator by heating
OLED material is deposited onto substrate, and current line source evaporator has production efficiency high relative to point source evaporator, stock utilization
, into advantages such as film uniformity height, but there is the Clogging of nozzle and block up phenomenon, be unfavorable for into the raising of film uniformity in height.
Utility model content
In order to solve the above-mentioned technical problem, the purpose of this utility model is that providing one kind can in time discover and solve life
Nozzle during production block up problem, block up dredger beneficial to the linear evaporation source for improving production efficiency.
To realize above-mentioned technical purpose, the utility model uses following technical scheme：
Linear evaporation source is blocked up dredger, including it is some be arranged in evaporation chamber and with the nozzle phase of linear evaporation source
A point control valve is respectively arranged with the airflow manifold being correspondingly arranged, the every airflow manifold；The nozzle of the linear evaporation source
Place is respectively arranged with pressure inductor；
The airflow manifold is connected with air supply header, and the air supply header extend out to the evaporation exterior thereto and connection is high
Master control valve is provided with pressurized air source, the air supply header.
Preferably, the linear evaporation source includes the crucible being arranged in the evaporation chamber, the evaporation of the crucible
Evaporation transition conduit is provided with mouthful, the evaporation transition conduit is connected with the evaporation distribution of setting parallel with the airflow manifold
Body direction is provided with the nozzle that a row is used to spray deposition material in pipe, the evaporation distribution pipe.
Preferably, being provided with baffle plate above the nozzle, the airflow manifold is arranged on the baffle plate.
Due to using above-mentioned technical proposal, the utility model has at least following beneficial effect：When nozzle blocks up existing
As when, the generation blocked up is sensed by pressure inductor, and then carry out the action of baffle plate (Cell Shutter) closure, treats each
After airflow manifold is corresponding with nozzle, master control valve and point control valve of corresponding phenomenon nozzle of blocking up are opened, high pressure is poured
Contracting nitrogen, make it that the spray nozzle clogging blocked up is broken through using the impulsive force of high compression nitrogen, so can continue production and
Without being begun to speak, pouring after nitrogen can cause pressure to uprise, but be due to that pour is micro inert nitrogen gas, punch
Environment is deposited after the somewhat pumping of vavuum pump afterwards just can restore, and greatly save the time of process problem, improve
Production efficiency.
Brief description of the drawings
The following drawings is only intended to, in doing the utility model schematic illustration and explanation, not limit model of the present utility model
Enclose.Wherein：
Fig. 1 is the structural representation of the utility model embodiment.
In figure：Chamber is deposited in 1-；2- linear evaporation sources；21- nozzles；22- crucibles；23- evaporates transition conduit；24- evaporations point
Pipe arrangement；3- airflow manifolds；4- points of control valves；5- pressure inductors；6- air supply headers；7- high-pressure air sources；8- master control valves；9- is kept off
Plate；10- substrates.
Embodiment
With reference to the accompanying drawings and examples, the utility model is expanded on further.In the following detailed description, only by saying
Bright mode describes some one exemplary embodiments of the present utility model.Undoubtedly, one of ordinary skill in the art can be with
Recognize, can be with a variety of modes to described in the case of without departing from spirit and scope of the present utility model
Embodiment is modified.Therefore, accompanying drawing and description are inherently illustrative, rather than for limiting the protection of claim
Scope.
The dredger as shown in figure 1, linear evaporation source is blocked up, including some be arranged at are deposited in chamber 1 and steamed with linear
Rise 2 the corresponding setting of nozzle 21 airflow manifold 3, be respectively arranged with point control valve 4 in the every airflow manifold 3；Institute
State and pressure inductor 5 is respectively arranged with the nozzle 21 of linear evaporation source 2；The top of the nozzle 21 is provided with baffle plate 9, described
Airflow manifold 3 is arranged on the baffle plate 9, and the top arrangement of baffle plate 9 needs the substrate 10 being deposited.
The airflow manifold 3 is connected with air supply header 6, and the air supply header 6 extend out to the outside of evaporation chamber 1 and connected
High-pressure air source 7 is connect, high-pressure air source 7 is provided with master control valve 8 preferably with inert nitrogen gas on the air supply header 6.
Wherein, the linear evaporation source 2 includes the crucible 22 being arranged in the evaporation chamber 1, the steaming of the crucible 22
Evaporation transition conduit 23 is provided with hair mouth, the evaporation transition conduit 23 is connected with the steaming with the parallel setting of the airflow manifold 3
Send out and body direction is provided with nozzle 21 of the row for spraying deposition material in distribution pipe 24, the evaporation distribution pipe 24.
With reference to Fig. 1, phenomenon of being blocked up at the nozzle of some in production process 21 then installs the pressure sense at place of blocking up herein
Answer device 5 to experience inside and outside pressure difference of blocking up, and then send warning signal, production technology personnel are collected into signal, can be first temporary
Stop production, carry out the action of closing baffle plate (Cell Shutter) 9, then open the sub-control corresponding with blocking up of master control valve 8
Valve 4 processed, high compression nitrogen will be filled with by airflow manifold at corresponding nitrogen outlet of blocking up, and then the nozzle to blocking
21 are dredged, after pressure inductor 5 alarm signal to be installed at this nozzle 21 disappears, then the short time allows vavuum pump to enter
The pumping of an actor's rendering of an operatic tune body, it is to be restored to proceed production to after the working environment that be deposited, opening Cell Shutter, greatly
The big time for having saved process problem, improve production efficiency.
The schematical embodiment of the utility model is the foregoing is only, model of the present utility model is not limited to
Enclose.Any those skilled in the art, it is made on the premise of design of the present utility model and principle is not departed to be equal
Change and modification, all should belong to the scope of the utility model protection.
Claims (3)
- The dredger 1. linear evaporation source is blocked up, it is characterised in that：It is arranged at including some in evaporation chamber (1) and with linearly steaming Rise (2) nozzle (21) corresponding setting airflow manifold (3), be respectively arranged with sub-control on the every airflow manifold (3) Valve (4) processed；Nozzle (21) place of the linear evaporation source (2) is respectively arranged with pressure inductor (5)；The airflow manifold (3) is connected with air supply header (6), and it is outside that the air supply header (6) extend out to the evaporation chamber (1) And connection high-pressure air source (7), master control valve (8) is provided with the air supply header (6).
- The dredger 2. linear evaporation source as claimed in claim 1 is blocked up, it is characterised in that：Linear evaporation source (2) bag Include and be provided with evaporation transition conduit at the crucible (22) being arranged in the evaporation chamber (1), the evaporation mouthful of the crucible (22) (23), the evaporation transition conduit (23) is connected with the evaporation distribution pipe (24) of setting parallel with the airflow manifold (3), described Body direction is provided with the nozzle (21) that a row is used to spray deposition material in evaporation distribution pipe (24).
- The dredger 3. linear evaporation source as claimed in claim 1 or 2 is blocked up, it is characterised in that：The nozzle (21) it is upper Side is provided with baffle plate (9), and the airflow manifold (3) is arranged on the baffle plate (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720099135.7U CN206570392U (en) | 2017-01-23 | 2017-01-23 | Linear evaporation source is blocked up dredger |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720099135.7U CN206570392U (en) | 2017-01-23 | 2017-01-23 | Linear evaporation source is blocked up dredger |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206570392U true CN206570392U (en) | 2017-10-20 |
Family
ID=60061201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720099135.7U Expired - Fee Related CN206570392U (en) | 2017-01-23 | 2017-01-23 | Linear evaporation source is blocked up dredger |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206570392U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108237119A (en) * | 2018-01-02 | 2018-07-03 | 京东方科技集团股份有限公司 | Organic source evaporation apertures cleaning equipment, system and its method for cleaning |
-
2017
- 2017-01-23 CN CN201720099135.7U patent/CN206570392U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108237119A (en) * | 2018-01-02 | 2018-07-03 | 京东方科技集团股份有限公司 | Organic source evaporation apertures cleaning equipment, system and its method for cleaning |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PP01 | Preservation of patent right | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20190613 Granted publication date: 20171020 |
|
| PD01 | Discharge of preservation of patent | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20190816 Granted publication date: 20171020 |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171020 |