CN206570394U - double-row type efficient linear evaporation source - Google Patents
double-row type efficient linear evaporation source Download PDFInfo
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- CN206570394U CN206570394U CN201720099147.XU CN201720099147U CN206570394U CN 206570394 U CN206570394 U CN 206570394U CN 201720099147 U CN201720099147 U CN 201720099147U CN 206570394 U CN206570394 U CN 206570394U
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- evaporation
- crucible
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- transition conduit
- double
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- 238000001704 evaporation Methods 0.000 title claims abstract description 50
- 230000008020 evaporation Effects 0.000 title claims abstract description 49
- 230000007704 transition Effects 0.000 claims abstract description 17
- 230000008676 import Effects 0.000 claims abstract description 4
- 239000000758 substrate Substances 0.000 abstract description 12
- 239000000463 material Substances 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000010410 layer Substances 0.000 description 10
- 239000002346 layers by function Substances 0.000 description 9
- 230000005525 hole transport Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The utility model belongs to OLED display device preparing technical field, and in particular to a kind of double-row type efficient linear evaporation source.It includes crucible, evaporation transition conduit is provided with the evaporation mouthful of the crucible, the import of the evaporation transition conduit is connected conducting with the crucible, the evaporation transition conduit is provided with two outlets and two export respectively extension laterally and are connected with evaporation distribution pipe, and two described evaporate are provided with row's nozzle along body direction respectively in distribution pipes.The utility model can realize a crucible while carrying out the evaporation operation of two batch substrates during evaporation, by two row's nozzles, substantially increase the production capacity of equipment and the utilization rate of material.
Description
Technical field
The utility model belongs to OLED display device preparing technical field, and in particular to work is deposited in a kind of OLED display device
Double-row type efficient linear evaporation source needed for skill.
Background technology
Organic light emitting diode display (Organic Light Emitting Diode, OLED) is a kind of great development
The flat panel display of prospect, it not only has very excellent display performance, also with self-luminous, simple in construction, ultra-thin,
Fast response time, wide viewing angle, low-power consumption and the characteristics such as Flexible Displays can be realized, be described as " dreamlike display ", along with its life
Produce equipment investment and be much smaller than liquid crystal display (Liquid Crystal Display, LCD), obtain major display producers
Favor, it has also become the main force of third generation display device in display technology field.
OLED display device includes：Substrate, the OLED being formed on substrate and the cap set with baseplate-laminating
Plate, the OLED is including the anode being formed on substrate, the organic function layer being formed on anode and is formed at organic
Negative electrode in functional layer, anode and cathode excitation organic function layer are to realize display.Wherein, the organic function layer one of OLED
As be made up of three functional layers, respectively hole transport functional layer (Hole Transport Layer, HTL), light emitting functional layer
(Emissive Layer, EML), electric transmission functional layer (Electron Transport Layer, ETL).Each functional layer
It can be more than one layer, or one layer such as hole transport functional layer, hole injection layer and hole transport can be subdivided into sometimes
Layer；Electric transmission functional layer, can be subdivided into electron transfer layer and electron injecting layer, but its function is close, therefore be referred to as hole
Transfer function layer and electric transmission functional layer.
At present, the mode for preparing OLED display device main flow is heating in vacuum plated film, i.e., made in evaporator by heating
OLED material evaporation on substrate, evaporation crucible used in current line source evaporator disposably can only by a batch of substrate,
During large-scale raw factory's line production, it is unfavorable for the lifting of production capacity and the utilization of material.
Utility model content
In order to solve the above-mentioned technical problem, the purpose of this utility model is that multiple batches of steaming simultaneously can be realized by providing one kind
Plating, the double-row type efficient linear evaporation source beneficial to lifting production capacity and stock utilization.
To realize above-mentioned technical purpose, the utility model uses following technical scheme：
Evaporation transition conduit is provided with double-row type efficient linear evaporation source, including crucible, the evaporation mouthful of the crucible, it is described
The import of evaporation transition conduit is connected conducting with the crucible, and the evaporation transition conduit is provided with two outlets and two outlet difference
Extension laterally is connected with evaporation distribution pipe, two evaporation distribution pipes and body direction is provided with row's nozzle respectively.
Preferably, two evaporation distribution pipes are symmetricly set in the both sides of the crucible.
Preferably, the distance between two neighboring nozzle is equal in nozzle described in same row.
Due to using above-mentioned technical proposal, the utility model has at least following beneficial effect：Deposition material passes through transition
After reallocate, so during evaporation, the gas molecule become by crucible heated material imported into both sides by transition conduit
Distribution pipe, can realize a crucible by two row's nozzles while carrying out the evaporation operation of two batch substrates, substantially increase equipment
Production capacity and material utilization rate.
Brief description of the drawings
The following drawings is only intended to, in doing the utility model schematic illustration and explanation, not limit model of the present utility model
Enclose.Wherein：
Fig. 1 is the main structure diagram of the utility model embodiment；
Fig. 2 is the main structure diagram for evaporating distribution pipe and nozzle；
Fig. 3 is to evaporate distribution pipe and the side structure schematic view of nozzle.
In figure：1- crucibles；2- evaporates transition conduit；3- evaporates distribution pipe；4- nozzles；5- gas molecules；Substrate is deposited in 6-.
Embodiment
With reference to the accompanying drawings and examples, the utility model is expanded on further.In the following detailed description, only by saying
Bright mode describes some one exemplary embodiments of the present utility model.Undoubtedly, one of ordinary skill in the art can be with
Recognize, can be with a variety of modes to described in the case of without departing from spirit and scope of the present utility model
Embodiment is modified.Therefore, accompanying drawing and description are inherently illustrative, rather than for limiting the protection of claim
Scope.
As shown in Figure 1 to Figure 3, set at double-row type efficient linear evaporation source, including crucible 1, the evaporation mouthful of the crucible 1
There is evaporation transition conduit 2, evaporation transition conduit 2 uses three-port structure, and the import of the evaporation transition conduit 2 is connected with the crucible 1 and led
Logical, the evaporation transition conduit 2 is provided with two outlets and two export respectively extension laterally and are connected with evaporation distribution pipe 3, two
Body direction is provided with row's nozzle 4 respectively in the individual evaporation distribution pipe 3.
To ensure that both sides substrate is uniform by plating during evaporation, two evaporation distribution pipes 3 are preferably symmetricly set in institute
State the distance between two neighboring nozzle in the both sides of crucible 1, and nozzle 4 described in same row equal.
With reference to Fig. 1, evaporation process is as follows：Deposition material is placed in crucible 1, after heating, and crucible 1 is heated, and material is deposited
Material is heated to become gas molecule 5, and evaporation distribution pipe 3 (T-Tube) is transferred to by evaporation transition conduit 2 (D-Tube), then by evaporation point
Pipe arrangement 3 continues on to nozzle 4 (Nozzle) place, is sprayed onto by nozzle 4 on the evaporation substrate 6 passed through and is deposited into film, this
The nozzle design of the row of crucible two, can make once become substrate once by two batches by a batch substrate originally,
Substantially increase production capacity and the utilization rate of material.
The schematical embodiment of the utility model is the foregoing is only, model of the present utility model is not limited to
Enclose.Any those skilled in the art, it is made on the premise of design of the present utility model and principle is not departed to be equal
Change and modification, all should belong to the scope of the utility model protection.
Claims (3)
1. double-row type efficient linear evaporation source, including crucible (1), it is characterised in that：
Evaporation transition conduit (2) is provided with the evaporation mouthful of the crucible (1)；
The import of the evaporation transition conduit (2) is connected conducting with the crucible (1), and the evaporation transition conduit (2) is provided with two
Outlet and two outlet respectively laterally extension be connected with evaporation distribution pipe (3)；
Body direction is provided with row's nozzle (4) respectively on two evaporation distribution pipes (3).
2. double-row type efficient linear evaporation source as claimed in claim 1, it is characterised in that：Two evaporation distribution pipes (3)
It is symmetricly set in the both sides of the crucible (1).
3. double-row type efficient linear evaporation source as claimed in claim 1 or 2, it is characterised in that：In nozzle (4) described in same row
The distance between two neighboring nozzle is equal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720099147.XU CN206570394U (en) | 2017-01-23 | 2017-01-23 | double-row type efficient linear evaporation source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720099147.XU CN206570394U (en) | 2017-01-23 | 2017-01-23 | double-row type efficient linear evaporation source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206570394U true CN206570394U (en) | 2017-10-20 |
Family
ID=60060637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720099147.XU Active CN206570394U (en) | 2017-01-23 | 2017-01-23 | double-row type efficient linear evaporation source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206570394U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111663104A (en) * | 2020-06-24 | 2020-09-15 | 武汉华星光电半导体显示技术有限公司 | Vapor deposition system and vapor deposition method |
-
2017
- 2017-01-23 CN CN201720099147.XU patent/CN206570394U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111663104A (en) * | 2020-06-24 | 2020-09-15 | 武汉华星光电半导体显示技术有限公司 | Vapor deposition system and vapor deposition method |
| WO2021258473A1 (en) * | 2020-06-24 | 2021-12-30 | 武汉华星光电半导体显示技术有限公司 | Evaporation system and evaporation method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PP01 | Preservation of patent right | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20190613 Granted publication date: 20171020 |
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| PD01 | Discharge of preservation of patent | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20190816 Granted publication date: 20171020 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: High -efficient linear evaporation source of double formula Effective date of registration: 20190906 Granted publication date: 20171020 Pledgee: Nanjing Bank Co.,Ltd. Nanjing Financial City Branch Pledgor: NANJING TOPTO MATERIALS Co.,Ltd. Registration number: Y2019980000122 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20200927 Granted publication date: 20171020 Pledgee: Nanjing Bank Co.,Ltd. Nanjing Financial City Branch Pledgor: NANJING TOPTO MATERIALS Co.,Ltd. Registration number: Y2019980000122 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Double row high efficiency linear evaporation source Effective date of registration: 20200928 Granted publication date: 20171020 Pledgee: Nanjing Bank Co.,Ltd. Nanjing Financial City Branch Pledgor: NANJING TOPTO MATERIALS Co.,Ltd. Registration number: Y2020980006544 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20220222 Granted publication date: 20171020 Pledgee: Nanjing Bank Co.,Ltd. Nanjing Financial City Branch Pledgor: NANJING TOPTO MATERIALS Co.,Ltd. Registration number: Y2020980006544 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Double row high efficiency linear evaporation source Effective date of registration: 20220322 Granted publication date: 20171020 Pledgee: Nanjing Bank Co.,Ltd. Nanjing Financial City Branch Pledgor: NANJING TOPTO MATERIALS Co.,Ltd. Registration number: Y2022320000126 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20231228 Granted publication date: 20171020 Pledgee: Nanjing Bank Co.,Ltd. Nanjing Financial City Branch Pledgor: NANJING TOPTO MATERIALS Co.,Ltd. Registration number: Y2022320000126 |