CN108237119A - Organic source evaporation apertures cleaning equipment, system and its method for cleaning - Google Patents
Organic source evaporation apertures cleaning equipment, system and its method for cleaning Download PDFInfo
- Publication number
- CN108237119A CN108237119A CN201810003132.8A CN201810003132A CN108237119A CN 108237119 A CN108237119 A CN 108237119A CN 201810003132 A CN201810003132 A CN 201810003132A CN 108237119 A CN108237119 A CN 108237119A
- Authority
- CN
- China
- Prior art keywords
- evaporation apertures
- component
- organic source
- cleaning
- cleaning equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
Abstract
The present invention relates to a kind of organic source evaporation apertures cleaning equipment, system and its method for cleaning, it is related to organic source cleaning technical field, mainly solving the technical problems that in a short time, artificially mechanically organic source evaporation apertures are cleared up, it is difficult to which the inner wall cleaning of evaporation apertures is clean.The technical solution mainly used for：The method for cleaning of organic source evaporation apertures cleaning equipment includes：Driving part driving withholds component to first position, makes to withhold the evaporation apertures that component is fastened on organic source, the evaporation apertures of evaporating state is made to boost；Driving part driving withholds component to the second position, make to withhold component from the separation of the position for the evaporation apertures for being fastened on organic source, under the action of evaporation apertures internal high pressure, the blocking substance of evaporation apertures inner wall attachment can be evacuated by high pressure draught, relative to mechanical manner of cleaning up in the prior art, the cleaning efficiency of evaporation apertures inner wall can be improved.
Description
Technical field
The present invention relates to organic source Removal Technology field, more particularly to a kind of organic source evaporation apertures cleaning equipment, system
And its method for cleaning.
Background technology
OLED (Organic Light-EmittingDiode, Organic Light Emitting Diode) display device needs to use more to be had
Machine source carries out evaporation process preparation, in evaporation process, multiple material can be used and carry out mixing vapor deposition, to improve the note of carrier
Enter, improve transmittability, its luminous efficiency, service life etc. can be increased.
The evaporation apertures aperture of organic source is usually smaller, and organic source is after evaporation process is carried out, on the inner wall of evaporation apertures
Accumulation subliming type material is easy to, evaporation apertures is caused to block.
The method for cleaning of the evaporation apertures used at present is mainly to be inserted into evaporation apertures in evaporation apertures by mechanical inserted link
Wall is cleared up, and in scale removal process, in a short time, is artificially difficult to using inserted link the inner wall cleaning of evaporation apertures is clean.
Invention content
In view of this, the present invention provides a kind of organic source evaporation apertures cleaning equipment, system and its method for cleaning, mainly solves
The technical issues of be in a short time, artificially mechanically to organic source evaporation apertures clear up, it is difficult to the inner wall cleaning of evaporation apertures is done
Only.
In order to achieve the above objectives, present invention generally provides following technical solutions：
On the one hand, the embodiment of the present invention provides a kind of organic source evaporation apertures cleaning equipment, including：
Component is withheld, for being fastened on the evaporation apertures of organic source；
Driving part, driving end are connect with the component of withholding, to withhold component described in driving in first position and the
Movement between two positions.
The object of the invention to solve the technical problems also can be used following technical measures and further realize.
Optionally, aforementioned organic source evaporation apertures cleaning equipment, wherein the sleeve that component includes the first end opening is withheld, institute
The internal diameter size for stating sleeve is more than the internal diameter size of organic source evaporation apertures.
Optionally, aforementioned organic source evaporation apertures cleaning equipment, wherein the sleeve includes prepared by heat preservation material first
Cylinder.
Optionally, aforementioned organic source evaporation apertures cleaning equipment, wherein the inner wall of the sleeve is provided with material collector.
Optionally, aforementioned organic source evaporation apertures cleaning equipment, wherein the material collector includes being arranged on sleeve
The needle thorn or lacing film of inner wall.
Optionally, aforementioned organic source evaporation apertures cleaning equipment, wherein the end of needle thorn or lacing film is towards sleeve
Second end tilts.
Optionally, aforementioned organic source evaporation apertures cleaning equipment, wherein further including：
Pressure sensor, pressure detecting end are located in the sleeve.
On the other hand, the embodiment of the present invention provides a kind of organic source system, including：
Organic source is provided with evaporation apertures；
Cleaning equipment, using above-mentioned organic source evaporation apertures cleaning equipment；
When withholding component in first position, the evaporation apertures that component is fastened on organic source are withheld；
When withholding component in the second position, withhold component snaps and detached with the evaporation apertures of organic source.
In another aspect, the embodiment of the present invention provides a kind of method for cleaning of organic source evaporation apertures cleaning equipment, including：
Driving part driving withholds component to first position, makes to withhold the evaporation apertures that component is fastened on organic source, makes evaporation
The evaporation apertures boosting of state；
Driving part driving withholds component to the second position, makes to withhold component from the position for the evaporation apertures for being fastened on organic source
Separation.
The object of the invention to solve the technical problems also can be used following technical measures and further realize.
Optionally, the driving of aforementioned method for cleaning, wherein driving part withholds component to the second position, further includes before：
Detect the pressure value in evaporation apertures；
Driving part driving withholds component to the second position, specially：
If the pressure value of detection is more than given threshold, driving part driving withholds component to the second position.
By above-mentioned technical proposal, organic source evaporation apertures cleaning equipment that technical solution of the present invention provides, system and its clear
Reason method at least has following advantages：
In technical solution provided in an embodiment of the present invention, after organic source evaporation apertures block, driving part can be passed through
Driving withholds component to first position, makes to withhold the evaporation apertures that component is fastened on organic source, the gas of the evaporation apertures of evaporating state
Can not shed in time causes to boost inside evaporation apertures.Later, component is withheld to the second position by driving part driving, makes to withhold
Component is detached from the position for the evaporation apertures for being fastened on organic source, under the action of evaporation apertures internal high pressure, the attachment of evaporation apertures inner wall
Blocking substance can be evacuated by high pressure draught, relative to mechanical manner of cleaning up in the prior art, evaporation apertures inner wall can be improved
Cleaning efficiency.
Above description is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be implemented in accordance with the contents of the specification, below with presently preferred embodiments of the present invention and after attached drawing is coordinated to be described in detail such as.
Description of the drawings
By reading the detailed description of hereafter preferred embodiment, it is various other the advantages of and benefit it is common for this field
Technical staff will become clear.Attached drawing is only used for showing the purpose of preferred embodiment, and is not considered as to the present invention
Limitation.And throughout the drawings, the same reference numbers will be used to refer to the same parts.In the accompanying drawings：
Fig. 1 is a kind of structure diagram for organic source evaporation apertures cleaning equipment that the embodiment of the present invention provides；
Fig. 2 is the structural representation of a kind of organic source evaporation apertures cleaning equipment that the embodiment of the present invention provides and evaporation source
Figure；
Fig. 3 is a kind of structure diagram for organic source evaporation apertures evaporating state that the embodiment of the present invention provides；
Fig. 4 is a kind of sleeve plan structure signal for organic source evaporation apertures cleaning equipment that the embodiment of the present invention provides
Figure；
Fig. 5 is a kind of sleeve plan structure for specific organic source evaporation apertures cleaning equipment that the embodiment of the present invention provides
Schematic diagram；
Fig. 6 is a kind of sleeve main view section view for specific organic source evaporation apertures cleaning equipment that the embodiment of the present invention provides
Structure diagram；
Fig. 7 is a kind of flow signal for organic source evaporation apertures cleaning equipment method for cleaning that the embodiment of the present invention provides
Figure；
Fig. 8 is a kind of flow for specific organic source evaporation apertures cleaning equipment method for cleaning that the embodiment of the present invention provides
Schematic diagram.
Specific embodiment
The technological means and effect taken further to illustrate the present invention to reach predetermined goal of the invention, below in conjunction with
Attached drawing and preferred embodiment, to its tool of the organic source evaporation apertures cleaning equipment, system and its method for cleaning that propose according to the present invention
Body embodiment, structure, feature and its effect are described in detail as after.In the following description, different " embodiment " or " real
Apply example " refer to be not necessarily the same embodiment.In addition, the special characteristic, structure or feature in one or more embodiments can be by appointing
What suitable form combination.
A kind of organic source evaporation apertures cleaning equipment provided in this embodiment in clearing up evaporation apertures, is driven by driving part
It is dynamic to withhold the evaporation apertures that component is fastened on organic source, the evaporation apertures of evaporating state is made to boost, driving part driving is withheld again later
Component is detached with the evaporation apertures of organic source, and under evaporation apertures high pressure draught, the blocking substance inside evaporation apertures is detached.
Fig. 1 to Fig. 3 is one embodiment of organic source evaporation apertures cleaning equipment provided by the invention, is please referred to Fig.1 to Fig.3, this
The organic source evaporation apertures cleaning equipment that one embodiment of invention proposes, including：Withhold component 10, driving part 20.Attaching part
Part 10 is used to be fastened on the evaporation apertures of organic source；Driving part 20 drives end to be connect with the component 10 of withholding, with described in driving
Withhold the movement of component 10 between the first position and the second position.
After organic source evaporation apertures z10 is blocked, it can be driven by driving part 20 and withhold component 10 to first position,
Make to withhold the evaporation apertures z10 that component 10 is fastened on organic source, the gas of the evaporation apertures z10 of evaporating state can not shed and cause in time
It boosts inside evaporation apertures.Later, component 10 is withheld to the second position by the driving of driving part 20, makes to withhold component 10 from fastening
In the position separation of the evaporation apertures z10 of organic source, under the action of evaporation apertures z10 internal high pressures, the attachment of evaporation apertures z10 inner walls
Blocking substance can be evacuated by high pressure draught, relative to mechanical manner of cleaning up in the prior art, can improve evaporation apertures inner wall
Cleaning efficiency.
The number for withholding component can be identical with the number of organic source evaporation apertures, each withholds component and is evaporated with each organic source
Hole mutually corresponds.It is easily understood that withholding in the specific implementation of component, the concrete form for withholding component may be one
It is a to withhold structure of the component to multiple organic source evaporation apertures, to withhold component as sleeve, when it is each withhold component with it is each
Organic source evaporation apertures mutually correspond, and withhold the sleeve that component includes the first end opening, and the internal diameter size of the sleeve is more than
The internal diameter size of organic source evaporation apertures.Component is withheld in first position described in driving part driving, is each withheld component and is fastened on
Each evaporation apertures of organic source.Component and multiple a organic source evaporation apertures are withheld when each, driving part drives the attaching part
Part each withholds multiple evaporation apertures that component is fastened on organic source in first position.
Wherein, the depth of sleeve can be more than the height of organic source evaporation apertures, so that sleeve can completely be sleeved on evaporation apertures
Outside, it is easy to accomplish the supercharging of evaporation apertures.
Sleeve is in the evaporation apertures in evaporating state are withheld, in order to keep the temperature inside evaporation apertures, such as Fig. 4 as far as possible
Shown, sleeve may include first 11 that has heat preservation material to prepare, and to evaporation apertures scale removal process, can keep evaporation apertures as possible
Technological temperature is withheld after component snaps detach with the evaporation apertures of organic source, you can continue to produce.Specifically, sleeve has further included
Second 12 be sleeved on outside first 11, second 12 can be prepared by metal material, to play the protective effect to first 11.
As shown in figure 5, the inner wall in sleeve is also provided with material collector 13, the blocking substance of evaporation apertures inner wall attachment
In being evacuated by high pressure draught, blocking substance by least part of thin plug can be collected by material collector, so as to avoid evacuation
The extraneous pollution of tamper confrontation.Specifically, as shown in fig. 6, thorn-like can be used in material collector, material collector includes setting
In the needle thorn of the inner wall of sleeve, in order to which needle thorn more smoothly tangles the blocking substance of evacuation, the end direction set of needle thorn 131
The second end 10a of cylinder is tilted.In another embodiment provided by the invention, sheet, material collector can be used in material collector
Lacing film including the inner wall for being arranged on sleeve, in order to which lacing film more smoothly tangles the blocking substance of evacuation, the end of lacing film
It is tilted towards the second end of sleeve.It is easily understood that the structure type of material collector also can be used other bending hanging strips,
The structure types such as collecting tank.
Motor, hydraulic mechanism, pneumatic mechanism etc. can be used in the actuating unit of driving part, can realize power output i.e.
Can, the embodiment of the present invention is not specifically limited.
In specific implement, in cleaning equipment in the above-described embodiments, pressure sensor can also be included, pressed
Force snesor pressure detecting end is located in the sleeve, withholds after component is fastened on the evaporation apertures of organic source, pressure sensor can
The pressure inside the evaporation apertures of organic source is measured in real time, after the pressure value of pressure sensor detection reaches given threshold,
Driving part driving withholds component to the second position, makes to withhold component from the separation of the position for the evaporation apertures for being fastened on organic source.
Except the control of pressure sensor, in specific implement, another implementation provided by the invention
In example, in cleaning equipment, timer can also be included, withheld after component is fastened on the evaporation apertures of organic source, timer can be into
Row timing, after the timing of timer reaches given threshold, driving part driving withholds component to the second position, makes attaching part
Part is detached from the position for the evaporation apertures for being fastened on organic source.
Based on same inventive concept, organic source provided by the invention steams one embodiment of system, one embodiment of the present of invention
The organic source system of proposition, including：Organic source is provided with evaporation apertures.Organic source evaporation apertures cleaning equipment, including：It withholds
Component, driving part.Component is withheld for being fastened on the evaporation apertures of organic source；Driving part drives end to withhold component company with described
It connects, to withhold the movement of component between the first position and the second position described in driving.When withholding component in first position, withhold
Component snaps are in the evaporation apertures of organic source.When withholding component in the second position, the evaporation apertures for withholding component snaps and organic source are divided
From.
Organic source system provided in an embodiment of the present invention after evaporation apertures block, can be driven by driving part and be detained
Splenium part makes to withhold the evaporation apertures that component is fastened on organic source to first position, the gas of the evaporation apertures of evaporating state can not and
When shed and cause to boost inside evaporation apertures.Later, component is withheld to the second position by driving part driving, make to withhold component from
It is fastened on the position separation of the evaporation apertures of organic source, under the action of evaporation apertures internal high pressure, the blocking of evaporation apertures inner wall attachment
Substance can be evacuated by high pressure draught, relative to mechanical manner of cleaning up in the prior art, can improve the cleaning of evaporation apertures inner wall
Efficiency.
Organic source evaporation apertures cleaning equipment described in the present embodiment can directly have using described in above-described embodiment offer
Machine source evaporation apertures cleaning equipment, concrete implementation structure can be found in the related content described in above-described embodiment, no longer superfluous herein
It states.
Based on same inventive concept, as shown in fig. 7, the organic source evaporation apertures cleaning of above-described embodiment provided by the invention is set
Standby method for cleaning, including：
S10, driving part driving withhold component to first position, make to withhold the evaporation apertures that component is fastened on organic source, make
The evaporation apertures boosting of evaporating state；
S20, driving part driving withhold component to the second position, make to withhold component from the evaporation apertures for being fastened on organic source
Position detaches.
After organic source evaporation apertures block, it can be driven by driving part and withhold component to first position, make to withhold
In the evaporation apertures of organic source, the gas of the evaporation apertures of evaporating state can not shed in time to be caused to rise inside evaporation apertures component snaps
Pressure.Later, component is withheld to the second position by driving part driving, makes to withhold component from the evaporation apertures for being fastened on organic source
Position detaches, and under the action of evaporation apertures internal high pressure, the blocking substance of evaporation apertures inner wall attachment can be evacuated by high pressure draught, phase
For mechanical manner of cleaning up in the prior art, the cleaning efficiency of evaporation apertures inner wall can be improved.
As shown in figure 8, in specific implement, can judge whether to drive attaching part by detecting the pressure value of evaporation apertures
Part is raised up to the second position, before step s20, further includes：
Pressure value in S11, detection evaporation apertures；
Step s20, specially：If the pressure value of detection is more than given threshold, driving part driving withholds component to second
Position.
In specific implement, it can judge whether that driving is withheld component and is raised up to by detecting the fastening time of evaporation apertures
The second position before step s20, further includes：
Timing after component to first position is withheld to driving part driving；
Step s20, specially：If timing time is more than given threshold, driving part driving withholds component to the second position.
In the above-described embodiments, it all emphasizes particularly on different fields to the description of each embodiment, there is no the portion being described in detail in some embodiment
Point, it may refer to the associated description of other embodiment.
It is understood that the correlated characteristic in above device can be referred to mutually.In addition, in above-described embodiment " the
One ", " second " etc. is for distinguishing each embodiment, and does not represent the quality of each embodiment.
In the specification provided in this place, numerous specific details are set forth.It is to be appreciated, however, that the implementation of the present invention
Example can be put into practice without these specific details.In some instances, well known structure and skill is not been shown in detail
Art, so as not to obscure the understanding of this description.
Similarly, it should be understood that in order to simplify the disclosure and help to understand one or more of each inventive aspect,
Above in the description of exemplary embodiment of the present invention, each feature of the invention is grouped together into single implementation sometimes
In example, figure or descriptions thereof.However, the device of the disclosure should be construed to reflect following intention：I.e. required guarantor
Shield the present invention claims the more features of feature than being expressly recited in each claim.More precisely, as following
Claims reflect as, inventive aspect is all features less than single embodiment disclosed above.Therefore,
Thus the claims for following specific embodiment are expressly incorporated in the specific embodiment, wherein each claim is in itself
Separate embodiments all as the present invention.
Those skilled in the art, which are appreciated that, to carry out adaptively the component in the device in embodiment
Change and they are arranged in one or more devices different from the embodiment.It can be the component combination in embodiment
Into a component and it can be divided into multiple subassemblies in addition.In addition at least some of such feature is mutual
Except repulsion, any combinations may be used to the institute disclosed in this specification (including adjoint claim, abstract and attached drawing)
There are feature and all components of so disclosed any device to be combined.Unless expressly stated otherwise, this specification (including
Adjoint claim, abstract and attached drawing) disclosed in each feature can by provide identical, equivalent or similar purpose substitute it is special
It levies to replace.
In addition, it will be appreciated by those of skill in the art that although some embodiments described herein include other embodiments
In included certain features rather than other feature, but the combination of the feature of different embodiments means in of the invention
Within the scope of and form different embodiments.For example, in the following claims, embodiment claimed is appointed
One of meaning mode can use in any combination.The all parts embodiment of the present invention can with hardware realization or
It is realized with combination thereof.
It should be noted that the present invention will be described rather than limits the invention, and ability for above-described embodiment
Field technique personnel can design alternative embodiment without departing from the scope of the appended claims.In the claims,
Any reference mark between bracket should not be configured to limitations on claims.Word "comprising" does not exclude the presence of not
Component or component listed in the claims.Word "a" or "an" before component or component does not exclude the presence of multiple
Such component or component.The present invention can be realized by means of including the device of several different components.It is several listing
In the claim of component, several in these components can be embodied by same component item.Word first,
Second and the use of third etc. do not indicate that any sequence.These words can be construed to title.
The above described is only a preferred embodiment of the present invention, not make limitation in any form to the present invention, according to
According to any simple modification, equivalent change and modification that the technical spirit of the present invention makees above example, this hair is still fallen within
In the range of bright technical solution.
Claims (10)
1. a kind of organic source evaporation apertures cleaning equipment, which is characterized in that including：
Component is withheld, for being fastened on the evaporation apertures of organic source；
Driving part, driving end is connect with the component of withholding, to withhold component described in driving in first position and second
Movement between putting.
2. cleaning equipment according to claim 1, which is characterized in that
The sleeve that component includes the first end opening is withheld, the internal diameter size of the sleeve is more than the internal diameter ruler of organic source evaporation apertures
It is very little.
3. cleaning equipment according to claim 2, which is characterized in that
The sleeve includes prepared by heat preservation material first.
4. cleaning equipment according to claim 2, which is characterized in that
The inner wall of the sleeve is provided with material collector.
5. cleaning equipment according to claim 4, which is characterized in that
The material collector includes the needle thorn or lacing film for being arranged on the inner wall of sleeve.
6. cleaning equipment according to claim 5, which is characterized in that
The second end of end towards the sleeve of the needle thorn or lacing film tilts.
7. cleaning equipment according to claim 2, which is characterized in that further include：
Pressure sensor, pressure detecting end are located in the sleeve.
8. a kind of organic source system, which is characterized in that including：
Organic source is provided with evaporation apertures；
Cleaning equipment uses any organic source evaporation apertures cleaning equipment in the claims 1-7；
When withholding component in first position, the evaporation apertures that component is fastened on organic source are withheld；
When withholding component in the second position, withhold component snaps and detached with the evaporation apertures of organic source.
9. the method for cleaning of any organic source evaporation apertures cleaning equipment, feature exist in a kind of the claims 1-7
In, including：
Driving part driving withholds component to first position, makes to withhold the evaporation apertures that component is fastened on organic source, makes evaporating state
Evaporation apertures boosting；
Driving part driving withholds component to the second position, makes to withhold component from the position for the evaporation apertures for being fastened on organic source point
From.
10. method for cleaning according to claim 9, which is characterized in that
Driving part driving withholds component to the second position, further includes before：
Detect the pressure value in evaporation apertures；
Driving part driving withholds component to the second position, specially：
If the pressure value of detection is more than given threshold, driving part driving withholds component to the second position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810003132.8A CN108237119B (en) | 2018-01-02 | 2018-01-02 | Organic source evaporation hole cleaning equipment, system and cleaning method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810003132.8A CN108237119B (en) | 2018-01-02 | 2018-01-02 | Organic source evaporation hole cleaning equipment, system and cleaning method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108237119A true CN108237119A (en) | 2018-07-03 |
| CN108237119B CN108237119B (en) | 2020-12-04 |
Family
ID=62698467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810003132.8A Active CN108237119B (en) | 2018-01-02 | 2018-01-02 | Organic source evaporation hole cleaning equipment, system and cleaning method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108237119B (en) |
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| CN205133725U (en) * | 2015-11-26 | 2016-04-06 | 昆山国显光电有限公司 | Nozzle system of coating by vaporization machine |
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| CN206396317U (en) * | 2016-12-21 | 2017-08-11 | 安徽一路明光电科技有限公司 | A kind of evaporation source component of LED evaporators |
| CN206512268U (en) * | 2017-03-10 | 2017-09-22 | 合肥鑫晟光电科技有限公司 | A kind of vapor deposition source cover plate, vapor deposition source and evaporation coating device |
| CN206570392U (en) * | 2017-01-23 | 2017-10-20 | 南京高光半导体材料有限公司 | Linear evaporation source is blocked up dredger |
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2018
- 2018-01-02 CN CN201810003132.8A patent/CN108237119B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009134041A2 (en) * | 2008-04-29 | 2009-11-05 | Sunic System. Ltd. | Evaporator and vacuum deposition apparatus having the same |
| CN105177504A (en) * | 2015-07-29 | 2015-12-23 | 京东方科技集团股份有限公司 | Blockage hole treatment device and method |
| CN205133725U (en) * | 2015-11-26 | 2016-04-06 | 昆山国显光电有限公司 | Nozzle system of coating by vaporization machine |
| CN205329148U (en) * | 2016-02-18 | 2016-06-22 | 合肥鑫晟光电科技有限公司 | Vacuum evaporation source device and vacuum evaporation equipment |
| CN205999474U (en) * | 2016-09-19 | 2017-03-08 | 京东方科技集团股份有限公司 | Vacuum deposition apparatus |
| CN206396317U (en) * | 2016-12-21 | 2017-08-11 | 安徽一路明光电科技有限公司 | A kind of evaporation source component of LED evaporators |
| CN206570392U (en) * | 2017-01-23 | 2017-10-20 | 南京高光半导体材料有限公司 | Linear evaporation source is blocked up dredger |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN108237119B (en) | 2020-12-04 |
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