CN108237119B - Organic source evaporation hole cleaning equipment, system and cleaning method thereof - Google Patents

Organic source evaporation hole cleaning equipment, system and cleaning method thereof Download PDF

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Publication number
CN108237119B
CN108237119B CN201810003132.8A CN201810003132A CN108237119B CN 108237119 B CN108237119 B CN 108237119B CN 201810003132 A CN201810003132 A CN 201810003132A CN 108237119 B CN108237119 B CN 108237119B
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China
Prior art keywords
evaporation hole
organic source
buckling
evaporation
sleeve
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CN108237119A (en
Inventor
胡长奇
王梦帝
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BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/04Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool

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  • Cleaning By Liquid Or Steam (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The invention relates to organic source evaporation hole cleaning equipment, system and method, relates to the technical field of organic source cleaning, and mainly solves the technical problem that the inner wall of an evaporation hole is difficult to clean in a short time due to the fact that the organic source evaporation hole is manually and mechanically cleaned. The main technical scheme adopted is as follows: the cleaning method of the organic source evaporation hole cleaning equipment comprises the following steps: the driving component drives the buckling component to a first position, so that the buckling component is buckled with the evaporation hole of the organic source, and the evaporation hole in an evaporation state is boosted; the driving part drives the buckling part to the second position, so that the buckling part is separated from the position buckled on the evaporation hole of the organic source, and under the action of high pressure in the evaporation hole, blocking substances attached to the inner wall of the evaporation hole can be evacuated by high-pressure airflow.

Description

Organic source evaporation hole cleaning equipment, system and cleaning method thereof
Technical Field
The invention relates to the technical field of organic source cleaning, in particular to organic source evaporation hole cleaning equipment, system and method.
Background
An Organic Light-emitting diode (OLED) display device is generally prepared by an evaporation process using an Organic source, and in the evaporation process, various materials may be used for mixed evaporation to improve injection of carriers, improve transmission capability, increase Light emitting efficiency, and prolong service life.
The aperture of the evaporation hole of the organic source is usually small, and after the evaporation process is carried out on the organic source, sublimation type materials are easily accumulated on the inner wall of the evaporation hole, so that the evaporation hole is blocked.
The cleaning method of the evaporation hole that adopts at present mainly is, insert the evaporation hole through mechanical type inserted bar and clear up the evaporation hole inner wall, and in the clearance process, in the short time, the inner wall clean up in artificial use inserted bar is difficult to the evaporation hole.
Disclosure of Invention
In view of this, the invention provides an organic source evaporation hole cleaning device, system and method, and mainly solves the technical problem that in a short time, the inner wall of an evaporation hole is difficult to clean because the organic source evaporation hole is manually and mechanically cleaned.
In order to achieve the purpose, the invention mainly provides the following technical scheme:
in one aspect, an embodiment of the present invention provides an organic source evaporation hole cleaning apparatus, including:
the buckling component is used for buckling the evaporation hole of the organic source;
and the driving end of the driving part is connected with the buckling part so as to drive the buckling part to move between the first position and the second position.
The object of the present invention and the technical problems solved thereby can be further achieved by the following technical measures.
Optionally, in the organic source evaporation hole cleaning device, the pressing part includes a sleeve with an opening at a first end, and an inner diameter of the sleeve is greater than an inner diameter of the organic source evaporation hole.
Optionally, in the organic source evaporation hole cleaning device, the sleeve includes a first cylinder made of a heat insulating material.
Optionally, the organic source evaporation hole cleaning device is provided, wherein the inner wall of the sleeve is provided with a material collector.
Optionally, the organic source evaporation hole cleaning device comprises a needle or a hanging piece arranged on the inner wall of the sleeve.
Optionally, the organic source evaporation hole cleaning apparatus described above, wherein the end of the needle or the hanging piece is inclined toward the second end of the sleeve.
Optionally, the organic source evaporation hole cleaning device further includes:
and the pressure detection end of the pressure sensor is positioned in the sleeve.
In another aspect, an embodiment of the present invention provides an organic source system, including:
an organic source having an evaporation hole formed thereon;
the cleaning equipment adopts the organic source evaporation hole cleaning equipment;
when the buckling component is at the first position, the buckling component is buckled with the evaporation hole of the organic source;
when the buckling and pressing part is at the second position, the buckling and pressing part is buckled and separated from the evaporation hole of the organic source.
In another aspect, an embodiment of the present invention provides a method for cleaning an organic source evaporation hole cleaning device, including:
the driving component drives the buckling component to a first position, so that the buckling component is buckled with the evaporation hole of the organic source, and the evaporation hole in an evaporation state is boosted;
the driving component drives the buckling component to the second position, so that the buckling component is separated from the position buckled with the evaporation hole of the organic source.
The object of the present invention and the technical problems solved thereby can be further achieved by the following technical measures.
Optionally, in the cleaning method, the driving part drives the buckling part to the second position, and before the driving part drives the buckling part to the second position, the method further includes:
detecting the pressure value in the evaporation hole;
the drive part drive withholds the part to the second position, specifically is:
and if the detected pressure value is greater than the set threshold value, the driving part drives the buckling and pressing part to the second position.
By means of the technical scheme, the organic source evaporation hole cleaning equipment, the organic source evaporation hole cleaning system and the organic source evaporation hole cleaning method provided by the technical scheme of the invention at least have the following advantages:
according to the technical scheme provided by the embodiment of the invention, after the organic source evaporation hole is blocked, the buckling and pressing part can be driven to the first position through the driving part, so that the buckling and pressing part is buckled with the evaporation hole of the organic source, and the gas in the evaporation hole in an evaporation state cannot be timely diffused to cause the pressure inside the evaporation hole to be boosted. And then, the buckling component is driven to the second position by the driving component, so that the buckling component is separated from the position buckled with the evaporation hole of the organic source, and blocking substances attached to the inner wall of the evaporation hole can be evacuated by high-pressure airflow under the action of high pressure in the evaporation hole.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to implement them in accordance with the contents of the description, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
FIG. 1 is a schematic structural diagram of an organic source evaporation hole cleaning apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an organic source evaporation hole cleaning apparatus and an evaporation source according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of an evaporation state of an organic source evaporation hole provided by an embodiment of the present invention;
FIG. 4 is a schematic top view of a sleeve of an organic source evaporation hole cleaning apparatus according to an embodiment of the present invention;
FIG. 5 is a schematic top view of a sleeve of an exemplary organic source hole cleaning apparatus according to an embodiment of the present invention;
FIG. 6 is a schematic cross-sectional front view of a sleeve of a specific organic source evaporation hole cleaning device according to an embodiment of the present invention;
FIG. 7 is a schematic flow chart of a cleaning method for an organic source evaporation hole cleaning device according to an embodiment of the present invention;
fig. 8 is a schematic flow chart of a specific cleaning method for an organic source evaporation hole cleaning device according to an embodiment of the present invention.
Detailed Description
To further illustrate the technical means and effects of the present invention adopted to achieve the predetermined objects, the following detailed description will be made on the embodiments, structures, features and effects of the apparatus and system for cleaning evaporation holes of organic sources and the cleaning method thereof according to the present invention with reference to the accompanying drawings and preferred embodiments. In the following description, different "one embodiment" or "an embodiment" refers to not necessarily the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
In the organic source evaporation hole cleaning equipment provided by the embodiment, in the process of cleaning the evaporation hole, the driving component drives the buckling component to be buckled with the evaporation hole of the organic source, so that the evaporation hole in an evaporation state is boosted, then the driving component drives the buckling component to be separated from the evaporation hole of the organic source, and blocking substances in the evaporation hole are separated under high-pressure air flow of the evaporation hole.
Referring to fig. 1 to 3, an embodiment of an organic source evaporation hole cleaning apparatus according to the present invention is shown, and referring to fig. 1 to 3, an embodiment of the present invention provides an organic source evaporation hole cleaning apparatus, including: a buckling component 10 and a driving component 20. The buckling component 10 is used for buckling the evaporation hole of the organic source; the driving end of the driving part 20 is connected to the fastening part 10 to drive the fastening part 10 to move between the first position and the second position.
After the organic source evaporation hole z10 is blocked, the fastening component 10 can be driven to the first position by the driving component 20, so that the fastening component 10 is fastened with the organic source evaporation hole z10, and the gas in the evaporation state evaporation hole z10 cannot be emitted in time, so that the pressure inside the evaporation hole is raised. Then, the buckling component 10 is driven to the second position by the driving component 20, so that the buckling component 10 is separated from the position of the evaporation hole z10 buckled on the organic source, and under the action of high pressure inside the evaporation hole z10, blocking substances adhered to the inner wall of the evaporation hole z10 can be dispersed by high-pressure airflow, and compared with a mechanical cleaning mode in the prior art, the cleaning efficiency of the inner wall of the evaporation hole can be improved.
The number of the buckling parts can be the same as that of the organic source evaporation holes, and each buckling part corresponds to each organic source evaporation hole one to one. It is easy to understand that in the specific implementation of the buckling component, the specific form of the buckling component may also be a structure of one buckling component to multiple organic source evaporation holes, taking the buckling component as a sleeve as an example, when each buckling component and each organic source evaporation hole correspond to each other one by one, the buckling component includes a sleeve with an opening at a first end, and the inner diameter of the sleeve is greater than the inner diameter of the organic source evaporation hole. The driving component drives the buckling and pressing component to be at the first position, and each buckling and pressing component is buckled with each evaporation hole of the organic source. When each buckling part and the plurality of organic source evaporation holes are formed, the driving part drives the buckling parts to be at the first position, and each buckling part is buckled with the plurality of organic source evaporation holes.
The depth of the sleeve can be larger than the height of the organic source evaporation hole, so that the sleeve can be completely sleeved outside the evaporation hole, and pressurization of the evaporation hole is easy to realize.
In order to keep the temperature inside the evaporation hole as much as possible when the sleeve is buckled and pressed in the evaporation hole in an evaporation state, as shown in fig. 4, the sleeve can comprise a first cylinder 11 made of a heat-insulating material, the process temperature of the evaporation hole can be kept as much as possible in the process of cleaning the evaporation hole, and the buckling and pressing part can be continuously produced after being buckled and separated from the evaporation hole of the organic source. Specifically, the sleeve further comprises a second cylinder 12 sleeved outside the first cylinder 11, and the second cylinder 12 can be made of metal materials to protect the first cylinder 11.
As shown in fig. 5, a material collector 13 may be further provided on the inner wall of the sleeve, the clogging substance adhered to the inner wall of the evaporation hole may be evacuated by the high pressure air flow, and at least a portion of the clogged clogging substance may be collected by the material collector, thereby preventing the outside from being contaminated by the evacuated clogging substance. Specifically, as shown in fig. 6, the material collector may take a stab shape, and the material collector includes a pin arranged on an inner wall of the sleeve, and an end of the pin 131 is inclined toward the second end 10a of the sleeve in order to more smoothly catch the scattered clogging substances. In another embodiment of the present invention, the material collector may be in a sheet form, and the material collector includes a hanging piece provided on an inner wall of the sleeve, and an end of the hanging piece is inclined toward the second end of the sleeve in order for the hanging piece to more smoothly hang the dispersed clogging substances. It will be readily appreciated that the material collector may take the form of other curved strips, troughs, etc.
The power mechanism of the driving part may be a motor, a hydraulic mechanism, a pneumatic mechanism, or the like, and may be configured to output power.
In a specific implementation, the cleaning apparatus in the above embodiment may further include a pressure sensor, the pressure detection end of the pressure sensor is located in the sleeve, the pressing component is fastened to the evaporation hole of the organic source, the pressure sensor may measure the pressure inside the evaporation hole of the organic source in real time, and after the pressure value detected by the pressure sensor reaches a set threshold, the driving component drives the pressing component to the second position, so that the pressing component is separated from the position fastened to the evaporation hole of the organic source.
In addition to the control by the pressure sensor, in another embodiment of the present invention, the cleaning apparatus may further include a timer, the timer may count time after the pressing member is fastened to the evaporation hole of the organic source, and after the count time of the timer reaches a set threshold, the driving member drives the pressing member to the second position, so that the pressing member is separated from the position of the evaporation hole fastened to the organic source.
Based on the same inventive concept, an embodiment of the organic source evaporation system provided by the present invention provides an organic source system, which includes: an organic source having an evaporation hole provided thereon. Organic source evaporation hole cleaning equipment includes: a buckling component and a driving component. The buckling component is used for buckling the evaporation hole of the organic source; the driving end of the driving part is connected with the buckling part so as to drive the buckling part to move between a first position and a second position. When the buckling and pressing part is at the first position, the buckling and pressing part is buckled with the evaporation hole of the organic source. When the buckling and pressing part is at the second position, the buckling and pressing part is buckled and separated from the evaporation hole of the organic source.
According to the organic source system provided by the embodiment of the invention, after the evaporation hole is blocked, the buckling and pressing part can be driven to the first position through the driving part, so that the buckling and pressing part is buckled with the evaporation hole of the organic source, and the gas in the evaporation hole in an evaporation state cannot be timely diffused to cause the internal pressure of the evaporation hole to be increased. And then, the buckling component is driven to the second position by the driving component, so that the buckling component is separated from the position buckled with the evaporation hole of the organic source, and blocking substances attached to the inner wall of the evaporation hole can be evacuated by high-pressure airflow under the action of high pressure in the evaporation hole.
The organic source evaporation hole cleaning device provided in the above embodiment may be directly adopted in the organic source evaporation hole cleaning device described in this embodiment, and specific implementation structures may refer to relevant contents described in the above embodiment, and details are not described here.
Based on the same inventive concept, as shown in fig. 7, the cleaning method of the organic source evaporation hole cleaning device according to the above embodiment of the present invention includes:
s10, the driving component drives the buckling component to a first position, so that the buckling component is buckled with the evaporation hole of the organic source, and the evaporation hole in an evaporation state is boosted;
s20, the driving component drives the buckling component to the second position, so that the buckling component is separated from the position buckled with the evaporation hole of the organic source.
After the organic source evaporation hole is blocked, the buckling part can be driven to the first position through the driving part, so that the buckling part is buckled with the evaporation hole of the organic source, and the gas in the evaporation hole in an evaporation state cannot be timely diffused to cause the pressure inside the evaporation hole to be boosted. And then, the buckling component is driven to the second position by the driving component, so that the buckling component is separated from the position buckled with the evaporation hole of the organic source, and blocking substances attached to the inner wall of the evaporation hole can be evacuated by high-pressure airflow under the action of high pressure in the evaporation hole.
As shown in fig. 8, in a specific implementation, whether to drive the buckling member to be lifted to the second position may be determined by detecting a pressure value of the evaporation hole, and before step s20, the method further includes:
s11, detecting the pressure value in the evaporation hole;
step s20, specifically, it includes: and if the detected pressure value is greater than the set threshold value, the driving part drives the buckling and pressing part to the second position.
In a specific implementation, the determining whether to drive the fastening member to be lifted to the second position by detecting the fastening time of the evaporation hole further includes, before step s 20:
timing after the driving part drives the buckling and pressing part to the first position;
step s20, specifically, it includes: if the timing time is larger than the set threshold value, the driving part drives the buckling and pressing part to the second position.
In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
It will be appreciated that the relevant features of the devices described above may be referred to one another. In addition, "first", "second", and the like in the above embodiments are for distinguishing the embodiments, and do not represent merits of the embodiments.
In the description provided herein, numerous specific details are set forth. It is understood, however, that embodiments of the invention may be practiced without these specific details. In some instances, well-known structures and techniques have not been shown in detail in order not to obscure an understanding of this description.
Similarly, it should be appreciated that in the foregoing description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various inventive aspects. However, the disclosed apparatus should not be construed to reflect the intent as follows: that the invention as claimed requires more features than are expressly recited in each claim. Rather, as the following claims reflect, inventive aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this invention.
Those skilled in the art will appreciate that the components of the apparatus of the embodiments may be adapted and arranged in one or more arrangements different from the embodiments. The components of the embodiments may be combined into one component and, in addition, they may be divided into a plurality of sub-components. All of the features disclosed in this specification (including any accompanying claims, abstract and drawings), and all of the components of any apparatus so disclosed, may be combined in any combination, except combinations where at least some of such features are mutually exclusive. Each feature disclosed in this specification (including any accompanying claims, abstract and drawings) may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise.
Furthermore, those skilled in the art will appreciate that while some embodiments described herein include some features included in other embodiments, rather than other features, combinations of features of different embodiments are meant to be within the scope of the invention and form different embodiments. For example, in the following claims, any of the claimed embodiments may be used in any combination. The various component embodiments of the present invention may be implemented in hardware, or in a combination thereof.
It should be noted that the above-mentioned embodiments illustrate rather than limit the invention, and that those skilled in the art will be able to design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" does not exclude the presence of elements or components not listed in a claim. The word "a" or "an" preceding a component or element does not exclude the presence of a plurality of such components or elements. The invention may be implemented by means of an apparatus comprising several distinct elements. In the claims enumerating several means, several of these means may be embodied by one and the same item. The usage of the words first, second and third, etcetera do not indicate any ordering. These words may be interpreted as names.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and any simple modification, equivalent change and modification made to the above embodiment according to the technical spirit of the present invention are still within the scope of the technical solution of the present invention.

Claims (9)

1. An organic source evaporation hole cleaning apparatus, comprising:
the buckling component is buckled with the evaporation hole of the organic source, so that the gas in the evaporation hole in an evaporation state cannot be timely diffused to cause the pressure inside the evaporation hole to be boosted, and blocking substances attached to the inner wall of the evaporation hole are evacuated by high-pressure airflow under the action of high pressure inside the evaporation hole;
the driving end of the driving part is connected with the buckling part so as to drive the buckling part to move between a first position and a second position;
the buckling and pressing part comprises a sleeve with an opening at the first end, and the inner diameter of the sleeve is larger than that of the organic source evaporation hole.
2. The cleaning apparatus of claim 1,
the sleeve comprises a first cylinder made of heat-insulating materials.
3. The cleaning apparatus of claim 1,
the inner wall of the sleeve is provided with a material collector.
4. The cleaning apparatus of claim 3,
the material collector includes a needle or tab disposed on an inner wall of the sleeve.
5. The cleaning apparatus of claim 4,
the end of the needle or tab is angled toward the second end of the sleeve.
6. The cleaning apparatus as claimed in claim 1, further comprising:
and the pressure detection end of the pressure sensor is positioned in the sleeve.
7. An organic source system, comprising:
an organic source having an evaporation hole formed thereon;
a cleaning apparatus using the organic source evaporation hole cleaning apparatus according to any one of claims 1 to 6;
when the buckling component is at the first position, the buckling component is buckled with the evaporation hole of the organic source;
when the buckling part is at the second position, the buckling part is separated from the evaporation hole of the organic source.
8. A method for cleaning an organic source evaporation hole cleaning device according to any one of claims 1 to 6, comprising:
the driving part drives the buckling and pressing part to a first position, so that the sleeve of the buckling and pressing part is buckled with the evaporation hole of the organic source, and the evaporation hole in an evaporation state is boosted;
the driving component drives the buckling component to the second position, so that the buckling component is separated from the position buckled with the evaporation hole of the organic source.
9. The cleaning method according to claim 8,
the driving part drives the buckling and pressing part to the second position, and the driving part also comprises the following components in advance:
detecting the pressure value in the evaporation hole;
the drive part drive withholds the part to the second position, specifically is:
and if the detected pressure value is greater than the set threshold value, the driving part drives the buckling and pressing part to the second position.
CN201810003132.8A 2018-01-02 2018-01-02 Organic source evaporation hole cleaning equipment, system and cleaning method thereof Active CN108237119B (en)

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Application Number Priority Date Filing Date Title
CN201810003132.8A CN108237119B (en) 2018-01-02 2018-01-02 Organic source evaporation hole cleaning equipment, system and cleaning method thereof

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Application Number Priority Date Filing Date Title
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CN108237119B true CN108237119B (en) 2020-12-04

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Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009134041A2 (en) * 2008-04-29 2009-11-05 Sunic System. Ltd. Evaporator and vacuum deposition apparatus having the same
CN105177504A (en) * 2015-07-29 2015-12-23 京东方科技集团股份有限公司 Blockage hole treatment device and method
CN205133725U (en) * 2015-11-26 2016-04-06 昆山国显光电有限公司 Nozzle system of coating by vaporization machine
CN205329148U (en) * 2016-02-18 2016-06-22 合肥鑫晟光电科技有限公司 Vacuum evaporation source device and vacuum evaporation equipment
CN205999474U (en) * 2016-09-19 2017-03-08 京东方科技集团股份有限公司 Vacuum deposition apparatus
CN206396317U (en) * 2016-12-21 2017-08-11 安徽一路明光电科技有限公司 A kind of evaporation source component of LED evaporators
CN206570392U (en) * 2017-01-23 2017-10-20 南京高光半导体材料有限公司 Linear evaporation source is blocked up dredger
CN206512268U (en) * 2017-03-10 2017-09-22 合肥鑫晟光电科技有限公司 A kind of vapor deposition source cover plate, vapor deposition source and evaporation coating device

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