CN206496198U - A kind of liquid source supply device - Google Patents
A kind of liquid source supply device Download PDFInfo
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- CN206496198U CN206496198U CN201621403191.7U CN201621403191U CN206496198U CN 206496198 U CN206496198 U CN 206496198U CN 201621403191 U CN201621403191 U CN 201621403191U CN 206496198 U CN206496198 U CN 206496198U
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Abstract
The utility model discloses a kind of liquid source supply device, including the bottleneck valve group located at liquid source container finish, bottleneck valve group includes gas phase interface valve and liquid phase interface valve, gas phase interface valve pushes away gas source of the gas by the connection of the first valve body, gas phase interface valve connects exhaust gas treating device by the second valve body, and vacuum generator device is provided between the second valve body and exhaust gas treating device；Liquid phase interface valve connects source purge gas by the 3rd valve body, and liquid phase interface valve passes through the 4th valve body Joining Technology liquid outlet；The nearly bottleneck valve group end of second valve body is connected to the remote bottleneck valve group end of the 3rd valve body.Purge gass can push back the liquid source in pipe in container, second valve body is connected at the gas phase interface valve of liquid source container finish, the air pressure of container internal upper part can carry out pressure release by gas phase interface valve, greatly reduce the live load of exhaust gas treating device, less tail gas is set to be disposed by fully effective, discharge value is lower, safer environmental protection, to avoid the formation of pollution.
Description
Technical field
The utility model is related to chemical industry manufacturing technology field, more specifically to a kind of liquid source supply device.
Background technology
The general manufacturings such as semiconductor/photovoltaic solar/optical fiber, can use poisonous and harmful chemical liquid source, generally handle
Liquid source container and bottleneck valve module, which are integrally connected to after supply face, carries out purging displacement and supply etc., constitutes complete liquid
Source supply device.Wherein, there is certain viscosity in this kind of chemical liquid source, and vigorous reaction or blast can be occurred by being contacted with air or water,
It is the basis of whole supply system to ensure the absolute safety when changing installation source bottle.
Supply face to be connected with liquid source container and bottleneck valve module by source bottle connecting tube (Pigtail), every time
During the bottle of replacing source, it is required for the poisonous and hazardous chemical liquid medium in the bottle connecting tube of source to purge displacement completely totally, makes dense
After degree is less than TLV (Threshold Limit Value, threshold limit value) value of the chemical liquid medium, this source bottle can be just pulled down even
Adapter ensures the health and safety to operating personnel and environment.
Current design is on the bottle connecting tube processing medium pipeline of source, to access purge gas all the way, pick out technique all the way
Exhaust, process gases pipeline is connected to vavuum pump.
Liquid source container it is close it is empty, when needing the full bottle more renewed, whole process liquid media are taken away using vavuum pump
To exhaust gas treating device, certain gas then is blown into source bottle connecting tube, reciprocating operation is multiple, to realize process liquid medium
Emptying.But the above method has the following disadvantages：
First, source bottle connecting pipe structure is complicated, and threeway dead angle is more, easily remains certain liquid source, this usual fluid-like state
Source viscosity is higher, and this operative liquid source in dead angle is difficult to be purged the liquid that displacement is clean, is remained when dismounting source bottle connecting tube
State source reacts with air, and generation is certain to endanger.
Second, vavuum pump directly extracts the liquid source in the bottle connecting tube of source out, largely by the liquid source steam wink of vacuum vaporization
When be discharged into exhaust gas treating device, may instantaneously exceed exhaust gas treating device specified treating capacity, cause exhaust emissions unqualified, to people
Member and air cause safety and pollution hidden trouble.
3rd, the liquid source in whole root bottle connecting tube is discharged into exhaust gas treating device processing, and generally this liquid source is situated between
Matter is all costly, causes to waste.
4th, because the combustibility and explosive risk of liquid source are, it is necessary to which from explosion-proof type dry vacuum pump, price is held high
It is expensive；And vavuum pump is machine operation dynamic component, safeguards and maintenance hands over complicated.
5th, vavuum pump usually require that inlet pressure be less than 1bar, misoperation can make face pressure at expulsion considerably beyond
1bar, so as to cause the risk of damage to vavuum pump.
In summary, how to provide it is a kind of avoid leakage liquid source supply device, be current those skilled in the art urgently
To be solved the problem of.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of liquid source supply device, the liquid source supply device energy
Leakage is enough avoided, safety and stability is used.
To achieve these goals, the utility model provides following technical scheme：
A kind of liquid source supply device, including located at the bottleneck valve group of liquid source container finish, the bottleneck valve group includes
Gas phase interface valve and liquid phase interface valve, the gas phase interface valve push away gas source of the gas, the gas phase interface valve by the connection of the first valve body
Exhaust gas treating device is connected by the second valve body, filled between second valve body and the exhaust gas treating device provided with vacuum generator
Put；The liquid phase interface valve connects source purge gas by the 3rd valve body, and the liquid phase interface valve passes through the 4th valve body Joining Technology
Liquid outlet；The nearly bottleneck valve group end of second valve body is connected to the remote bottleneck valve group end of the 3rd valve body.
It is preferred that, in addition to：
It is connected to the 5th valve body between the 3rd valve body and the source purge gas；
6th valve body, one end is connected to the connecting line of the 5th valve body and the 3rd valve body, and the other end is connected to
The connecting line of 4th valve body and the technique liquid outlet；
8th valve body, one end is connected to the connecting line of first valve body and the bottleneck valve group, and the other end is connected to
The nearly bottleneck valve group end of second valve body；The connecting line of second valve body and the 8th valve body is provided with and described the
The connecting line of nearly 5th valve body end connection of six valve bodies.
It is preferred that, the bottleneck valve group is pipeline one with the pressure sensor set on the connecting line of all valve bodies
Body formula sensor.
It is preferred that, the pressure sensor includes being used to detect the first pipe between first valve body and the bottleneck valve group
The first pressure sensor of the pressure on road, the first pressure sensor is located at first pipeline；
The pressure sensor also includes being used to detect the second pipeline between the 4th valve body and the bottleneck valve group
The second pressure sensor of pressure, the second pressure sensor is located at second pipeline.
It is preferred that, in addition to for closing described when the first pressure sensor measures pressure subatmospheric power
The controller of two valve bodies and the 8th valve body, the first pressure sensor is connected with the controller.
It is preferred that, the controller is also connected with the second pressure sensor, for when the second pressure sensor
Measure after pressure rises to stabilization and close the 3rd valve body.
It is preferred that, the vacuum generator device is venturi-type vacuum generator device.
It is preferred that, the gas source interface connection noble gas source interface of the vacuum generator device.
It is preferred that, the connecting line of the 4th valve body and the technique liquid outlet is provided with the 7th valve body.
In liquid source supply device provided by the utility model, purge gass push back the liquid source in pipe in container, keep away
Exempt from the prior art, the waste situation that liquid source is all collected by exhaust gas treating device；In addition, the second valve body is connected to liquid source
At the gas phase interface valve of container finish, in order to be pressed into after the liquid of liquid source container finish, tank internal upper part air pressure can lead to
Cross gas phase interface valve to carry out in pressure release, pressure leak process, the gas of discharge can carry out vacuum vaporization by vacuum generator device
And be connected in exhaust gas treating device, the live load of exhaust gas treating device is greatly reduced, makes less tail gas by fully effective processing
Fall, discharge value is lower, safer environmental protection, to avoid the formation of pollution.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
Or the accompanying drawing used required in description of the prior art is briefly described, it should be apparent that, drawings in the following description are only
It is embodiment of the present utility model, for those of ordinary skill in the art, on the premise of not paying creative work, also
Other accompanying drawings can be obtained according to the accompanying drawing of offer.
Fig. 1 is a kind of attachment structure figure of liquid source supply device provided by the utility model.
In Fig. 1：
1 be vacuum generator device, 2 for push away gas source of the gas, 3 be exhaust gas treating device, 4 be source purge gas, 5 be that technique goes out liquid
Mouthful, 6 be liquid phase interface valve, 7 be gas phase interface valve, 11 be the first valve body, 12 be the second valve body, 13 be the 3rd valve body, 14 be the
Four valve bodies, 15 the 5th valve bodies, 16 be the 6th valve body, 17 be the 7th valve body, 18 be the 8th valve body, 21 be first pressure sensor,
22 be second pressure sensor.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belongs to the scope of the utility model protection.
Core of the present utility model is to provide a kind of liquid source supply device, and the liquid source supply device can avoid letting out
Leakage, uses safety and stability.
Fig. 1 is refer to, Fig. 1 is a kind of attachment structure figure of liquid source supply device provided by the utility model.
A kind of liquid source supply device provided by the utility model, including located at the bottle-jack valve of liquid source container finish
Group, bottleneck valve group is the valve group of the gentle interfaces of liquid phase interface of control liquid source container bottle, including gas phase interface valve 7 and liquid phase
Interface valve 6.Gas phase interface valve 7 and the connection supply disk of liquid phase interface valve 6, supply disk, which is specifically included, pushes away gas source of the gas 2, exhaust gas treating device
3rd, source purge gas 4 and technique liquid outlet 5, and for above-mentioned five parts to be connected with gas phase interface valve 7, liquid phase interface valve 6
Source bottle connecting tube.Several valve bodies are provided with the bottle connecting tube of source, valve body is used for the break-make for controlling each connecting tube to flow to.
Specifically, gas phase interface valve 7 pushes away gas source of the gas 2 by the connection of the first valve body 11, and gas phase interface valve 7 passes through the second valve
Body 12 connects exhaust gas treating device 3, and vacuum generator device 1 is provided between the second valve body 12 and exhaust gas treating device 3；Liquid phase interface valve
6 connect source purge gas 4 by the 3rd valve body 13, and liquid phase interface valve 6 passes through the Joining Technology liquid outlet 5 of the 4th valve body 14；Second valve
The nearly bottleneck valve group end of body 12 is connected to the remote bottleneck valve group end of the 3rd valve body 13.
It should be noted that above-mentioned push away the device that gas source of the gas 2 pushes away gas gas for offer, exhaust gas treating device 3 is for blowing
Sweep the device that the last tail gas to discharge of replacement process is handled, source purge gas 4 is provides purge gass to source bottle connecting tube
Device, technique liquid outlet 5 exports for the use of liquid source container finish.
Above-mentioned liquid source supply device need progress change bottle operation when, the first step, first by valve body and valve all in device
Group is turned off, and opens vacuum generator device 1.Second step, opens the second valve body 12, the 8th valve body 18, liquid phase interface valve 6 gentle
Interfaces valve 7, extracts the source of liquid source container internal upper part and the first valve body 11 and the second valve body 12 out by vacuum generator device 1
The portion gas of bottle connecting tube, so that the source bottle connecting tube with the first valve body 11 and the second valve body 12 in liquid source container is formed
Subnormal ambient, the second valve body 12 and the 8th valve body 18 are closed after extracting certain time (decision condition is that PT2 is down to 0.5psig).
3rd step, opens the 5th valve body 15, the 6th valve body 16 and the 4th valve body 14, by source purge gas 4 by the nearly source bottle of the 4th valve body 14
Liquid in the source bottle connecting tube of side is pushed back in liquid source container, and the 5th valve body 15, the and of the 6th valve body 16 are closed after a period of time
4th valve body 14.4th step, repeats second step.5th step, opens the 5th valve body 15 and the 3rd valve body 13, passes through source purge gas 4
Liquid in the source bottle connecting tube of the nearly source bottle side of 3rd valve body 13 is pushed back in liquid source container, the 5th is closed after a period of time
The valve body 13 of valve body 15 and the 3rd.Second step is then back to, second step is repeated to the operation of the 5th step, in order to by the 3rd valve
Liquid source pushing back in container more than 99% in the source bottle connecting tube of the nearly source bottle side of 13 and the 4th valve body of body 14, while needing
In the case of wanting, certain container discharge gas is introduced into exhaust gas treating device 3 by vacuum generator device 1 and handled,
In order to avoid air inlet formation pollution.
In liquid source supply device provided by the utility model, purge gass push back the liquid source in pipe in container, keep away
Exempt from the prior art, the waste situation that liquid source is all collected by exhaust gas treating device 3；In addition, the second valve body 12 is connected to liquid
At the gas phase interface valve of state source container bottleneck, in order to be pressed into after the liquid of liquid source container finish, air pressure in bottle can be with
Carried out by gas phase interface valve in pressure release, pressure leak process, the gas of discharge can carry out vacuum vapour by vacuum generator device
Change and handle in exhaust gas treating device 3, greatly reduce the live load of exhaust gas treating device 3, less tail gas is had completely
Effect is disposed, and discharge value is lower, safer environmental protection, to avoid the formation of pollution.
On the basis of above-described embodiment, in addition to：
It is connected to the 5th valve body 15 between the 3rd valve body 13 and source purge gas 4；
6th valve body 16, one end is connected to the connecting line of the 5th valve body 15 and the 3rd valve body 13, and the other end is connected to
The connecting line of four valve bodies 14 and technique liquid outlet 5；
8th valve body 18, one end is connected to the first valve body 11 and the connecting line of bottleneck valve group, and the other end is connected to second
The nearly bottleneck valve group end of valve body 12；The connecting line of second valve body 12 and the 8th valve body 18 is provided with nearly the with the 6th valve body 16
The connecting line of the end of five valve body 15 connection.
Specifically, Fig. 1 is refer to, Fig. 1 is a kind of attachment structure of liquid source supply device provided by the utility model
Figure.
It should be noted that the nearly bottleneck valve group end of above-mentioned second valve body 12 refers to the second valve body 12 on connection line
Closer to one end of bottleneck valve group, nearly end of 5th valve body 15 of the 6th valve body 16 refers to the 6th valve body 16 on connection line
Closer to one end of the 5th valve body 15.
The occupation mode of above-mentioned liquid source supply device is specifically as follows following steps：
The first step, all valves closed on the bottle-jack valve on liquid source container and supply face；
Second step, first opens vacuum generator device, then opens the second valve body 12, the 8th valve body 18, while opening liquid
2 bottle-jack valves on source container, extract the portion gas with upper vessel portion in connecting line out, (judge after certain time is extracted
Condition is that PT2 is down to 0.5psig), close the second valve body 12, the 8th valve body 18；
3rd step, opens the 5th valve body 15, the 6th valve body 16, the 4th valve body 4, with suitable purge gass technique lateral line
Interior liquid source is pushed back in container, when operate a period of time after, i.e., inside its pipe liquid source reduction, and air pressure inside raise and
After stable, the 4th valve body 14, the 6th valve body 16, the 5th valve body 15 are closed；
4th step, then the second valve body 12, the 8th valve body 18 are opened, extract interior and upper vessel portion the firm introducing of connecting line out
Purge gas, after certain time is extracted or after pressure reduction (decision condition is that PT2 is down to 0.5psig), closes the second valve body
12nd, the 8th valve body 18；
5th step, opens the 5th valve body 15, the 3rd valve body 13, with suitable purge gass the liquid in the pipeline of technique side
Source is pushed back in container by negative pressure in tank, after pressure rises to stationary value, closes the 3rd valve body 13, the 5th valve body 15, this
Step be in order to connection the 3rd valve body 13 at three-limb tube in raffinate negative pressure inhale and malleation push away by way of push back
In container；
6th step, performs the process that above-mentioned 4th step takes out negative pressure；
7th step, repeats above-mentioned 3rd step to the 6th step, that is, takes out negative pressure and binder returns tank step 10 time, it is ensured that connection
More than 99% liquid source is pushed back container in pipeline；
8th step, all valves closed on the bottle-jack valve on liquid source container and supply face；
9th step, carries out purging to minimal residue liquid source in technique connecting line again by vacuum generator device and puts
Change.
Optionally, can also be a certain amount of gas of extraction when extracting certain time, or be control in above-mentioned second step
The pressure of connecting line drops to certain numerical value, and such as PT2 is down to 0.5psig, it is determined that closing the second valve body 12, the 8th valve
The source of body 18 can be provided in the pressure sensor 2 on connecting line.In above-mentioned 3rd step, air pressure inside rise and stably
Judgement source can be provided in the pressure sensor of pipeline.Similarly, for operating process in above-mentioned 4th step and the 5th step
Judgement can measure and judge by the pressure sensor being arranged on connecting line.
On the basis of above-described embodiment, in order to avoid occurring the obstruction of liquid source in connecting line, can not clear up dry
Net situation, the pressure sensor set on the connecting line of bottleneck valve group and all valve bodies is pipeline integral sensor.
Be different from the prior art, on pipeline set a threeway branch road, and in threeway branch set pressure sensor method,
In device provided by the utility model, pipeline integral sensor is used, pipeline integral sensor is directly installed on
On pipeline, it is to avoid the setting of threeway branch road, the problem of threeway branch internal liquid source can not clear up complete is also avoided.
On the basis of any one above-mentioned embodiment, pressure sensor includes first pressure sensor 21 and second
Pressure sensor 22.First pressure sensor 21 is used for the pressure for detecting the first pipeline between the first valve body 11 and bottleneck valve group,
First pressure sensor 21 is located at the first pipeline.Second pressure sensor 22 be used to detecting the 4th valve body 14 and bottleneck valve group it
Between the second pipeline pressure, second pressure sensor 22 be located at the second pipeline.Above-mentioned two pressure sensor is respectively used to upper
State in step 2,3,4,5, pressure test is carried out to place pipeline.
The letter of the liquid source supply device structure with pipeline integrated pressure sensor that above-mentioned two embodiment is provided
Single, the threeway dead angle that reasonably avoiding threeway branch road is set can minimize residual liquid source, it is ensured that minimal residue liquid
Source is clean by purging displacement.
On the basis of any one above-mentioned embodiment, in addition to for when second pressure sensor 21, to measure pressure low
The controller of the second valve body 12 and the 8th valve body 18 is closed when 0.5psig, first pressure sensor 21 is connected with controller.Need
It is noted that controller can realize automatically controlling for liquid source supply device, controller and the second valve body 12, the 8th valve body
18 connections, the break-make for controlling the second valve body 12 and the 8th valve body 18.
On the basis of any one above-mentioned embodiment, controller is also connected with second pressure sensor 22, for working as
Second pressure sensor 22 measures pressure and rises to the 3rd valve body 13 of closing after stabilization.It should be noted that controller noted above with
The controller of a upper embodiment can be same controller.
On the basis of any one above-mentioned embodiment, vacuum generator device 1 is venturi-type vacuum generator
Device., can be with it should be noted that the design feature of venturi vacuum generating apparatus makes it to inlet pressure without particular/special requirement
Suitable for large range of service condition, the scope of operation is expanded.In addition, venturi vacuum generating apparatus it is reliable,
It is non-maintaining, and long lifespan, using process energy conservation environmental protection, operating cost is relatively low for existing other vacuum plants.
In order to avoid liquid source occurs and the change and pollution after air contact, the gas source interface of vacuum generator device 1
Connect noble gas source interface.Due to having accessed inert gas, liquid source can be avoided flammable change or blast etc. occur
Phenomenon.
Optionally, the connecting line of the 4th valve body 14 and technique liquid outlet 5 is provided with the 7th valve body 17.
The primary structure of the liquid source supply device provided except above-described embodiment is with being connected occupation mode, the liquid source
The structure of other each several parts of feeding mechanism refer to prior art, repeat no more herein.
The embodiment of each in this specification is described by the way of progressive, and what each embodiment was stressed is and other
Between the difference of embodiment, each embodiment identical similar portion mutually referring to.
Liquid source supply device provided by the utility model is described in detail above.It is used herein specifically
Individual example is set forth to principle of the present utility model and embodiment, and the explanation of above example is only intended to help and understands this
The method and its core concept of utility model.It should be pointed out that for those skilled in the art, not departing from
On the premise of the utility model principle, some improvement and modification can also be carried out to the utility model, these improve and modified
Fall into the utility model scope of the claims.
Claims (9)
1. a kind of liquid source supply device, including located at the bottleneck valve group of liquid source container finish, it is characterised in that the bottleneck
Valve group includes gas phase interface valve and liquid phase interface valve, and the gas phase interface valve pushes away gas source of the gas, the gas by the connection of the first valve body
Interfaces valve connects exhaust gas treating device by the second valve body, is sent out between second valve body and the exhaust gas treating device provided with vacuum
Raw device device；The liquid phase interface valve connects source purge gas by the 3rd valve body, and the liquid phase interface valve is connected by the 4th valve body
Connect technique liquid outlet；The nearly bottleneck valve group end of second valve body is connected to the remote bottleneck valve group end of the 3rd valve body.
2. liquid source supply device according to claim 1, it is characterised in that also include：
It is connected to the 5th valve body between the 3rd valve body and the source purge gas；
6th valve body, one end is connected to the connecting line of the 5th valve body and the 3rd valve body, and the other end is connected to described
The connecting line of 4th valve body and the technique liquid outlet；
8th valve body, one end is connected to the connecting line of first valve body and the bottleneck valve group, and the other end is connected to described
The nearly bottleneck valve group end of second valve body；The connecting line of second valve body and the 8th valve body is provided with and the 6th valve
The connecting line of nearly 5th valve body end connection of body.
3. liquid source supply device according to claim 2, it is characterised in that the bottleneck valve group and all valve bodies
Connecting line on the pressure sensor that sets be pipeline integral sensor.
4. liquid source supply device according to claim 3, it is characterised in that the pressure sensor includes being used to detect
The first pressure sensor of the pressure of first pipeline between first valve body and the bottleneck valve group, the first pressure sensing
Device is located at first pipeline；
The pressure sensor also includes the pressure for being used to detect the second pipeline between the 4th valve body and the bottleneck valve group
Second pressure sensor, the second pressure sensor be located at second pipeline.
5. liquid source supply device according to claim 4, it is characterised in that also including for being passed when the first pressure
Sensor closes the controller of second valve body and the 8th valve body, the first pressure when measuring pressure subatmospheric power
Sensor is connected with the controller.
6. liquid source supply device according to claim 5, it is characterised in that the controller also with the second pressure
Sensor is connected, for closing the 3rd valve body when the second pressure sensor is measured after pressure rises to stabilization.
7. the liquid source supply device according to claim 1 to 6 any one, it is characterised in that the vacuum generator
Device is venturi-type vacuum generator device.
8. liquid source supply device according to claim 7, it is characterised in that the source of the gas of the vacuum generator device connects
Mouth connection noble gas source interface.
9. liquid source supply device according to claim 7, it is characterised in that the 4th valve body goes out liquid with the technique
The connecting line of mouth is provided with the 7th valve body.
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| CN201621403191.7U CN206496198U (en) | 2016-12-20 | 2016-12-20 | A kind of liquid source supply device |
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| CN201621403191.7U CN206496198U (en) | 2016-12-20 | 2016-12-20 | A kind of liquid source supply device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106545749A (en) * | 2016-12-20 | 2017-03-29 | 上海至纯洁净系统科技股份有限公司 | A kind of liquid source supply device |
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2016
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106545749A (en) * | 2016-12-20 | 2017-03-29 | 上海至纯洁净系统科技股份有限公司 | A kind of liquid source supply device |
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