CN206495831U - A kind of vacuum oil diffusion pump - Google Patents
A kind of vacuum oil diffusion pump Download PDFInfo
- Publication number
- CN206495831U CN206495831U CN201720012892.6U CN201720012892U CN206495831U CN 206495831 U CN206495831 U CN 206495831U CN 201720012892 U CN201720012892 U CN 201720012892U CN 206495831 U CN206495831 U CN 206495831U
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- CN
- China
- Prior art keywords
- pump housing
- heater
- thermometric
- pump
- vacuum oil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The utility model discloses a kind of vacuum oil diffusion pump, including air inlet, the pump housing, oil pocket, gas outlet, condenser pipe on pump housing outer wall and the multiple nozzles being arranged in the pump housing, mozzle, pump housing bottom also includes heater, pump housing bottom plate is provided with above heater, pump housing bottom plate is provided with annular concentric groove, the pump housing also includes thermometric and its control system, thermometric and its control system include thermometric thermal resistance, silicon controlled module and temperature controller, thermometric thermal resistance is set with by ceramic pillar, temperature controller is electrically connected with thermometric thermal resistance, silicon controlled module is electrically connected with heater, heater is electrically connected with thermometric thermal resistance.The pump housing bottom plate of the utility model is provided with concentric groove, increases heating surface (area) (HS；Provided with temperature control system, the heating power of heater is adjusted by monitoring the temperature change of vacuum oil in oil pocket.
Description
Technical field
The utility model belongs to machinery equipment field, more particularly to a kind of vacuum oil diffusion pump, mainly by vacuum oil
The equipment that steam injection obtains vacuum.
Background technology
Diffusion pump is one of most extensive, topmost instrument of currently acquired vacuum.Diffusion pump is a kind of secondary pumps, and it is needed
Mechanical pump is wanted as fore pump.Vacuum oil diffusion pump is a kind of vapor stream pump, and its operation principle is with working media (diffusion pump
Oil) kinetic energy be uploaded to pumped gas in pumping direction based on.The pumping process of diffusion pump is that pumped gas is diffused into oily steaming
The process of pump discharge exclusion is carried in gas jet.Prior art is directly entered using electric hot plate to the steel plate of diffusion pump bottom
Row heating.The heat of heating tube is conducted to diffusion pump oil, diffusion pump oil boiling, so that shape specially in the steel plate of diffusion pump bottom
Into diffusion.It is this directly heating tube and bottom plate to be made to be deformed in long-term heating process the mode that steel plate is heated, ultimately result in
Diffusion pump is damaged in advance, and because heating surface (area) (HS is limited, firing rate is slow, influences evaporation efficiency；Although there is cooling
Device, but still there is part oil vapour to backflow to enter from gas access and taken out container, it have impact on the performance of diffusion pump；Expanding
When scattered pump is stopped, has gas and enter from gas vent back suction in the pump housing, deteriorate vacuum deterioration of oil；Due to environment temperature
And the change of cooling water temperature, it may appear that heater power is excessive or pumping speed too small and that influence diffusion pump.
In view of the above-mentioned problems, proposing the utility model.
Utility model content
The purpose of this utility model is to provide a kind of vacuum oil diffusion pump.
To realize above-mentioned utility model purpose, the technical solution of the utility model is：A kind of vacuum oil diffusion pump, including enter
Condenser pipe 5 on gas port 8, the pump housing 3, oil pocket 2, gas outlet 11, the outer wall of the pump housing 3 and the multiple nozzles 4 being arranged in the pump housing 3,
Mozzle 9, pump housing bottom also includes heater 1, and the top of heater 1 is provided with pump housing bottom plate 13, and pump housing bottom plate 13 is provided with a large amount of
Annular concentric groove, the design of concentric groove increases the heating surface area of vacuum oil in oil pocket, accelerates evaporation efficiency.The pump housing 3
Also include thermometric and its control system 14, thermometric and its control system 14 include thermometric thermal resistance, silicon controlled module and temperature controller,
Thermometric thermal resistance is set with by ceramic pillar, and temperature controller is electrically connected with thermometric thermal resistance, and silicon controlled module is electrically connected with heater 1,
Heater 1 is electrically connected with thermometric thermal resistance.The design of thermometric and its control system 14, can monitor the temperature of vacuum oil in oil pocket
Spend, and the power of heater is regulated and controled according to temperature change, so as to reach the stable purpose for saving electric energy of oil temperature.
Further, air inlet 8 also includes cold grid 7.
Further, gas outlet 11 is additionally provided with check valve 10.
Further, nozzle 4 is umbrella shaped spray nozzle.
The beneficial effects of the utility model are：
The utility model, which is mainly used to vacuumize, to be used, and provides certain vacuum as fore pump in mechanical pump, then
Diffusion pump is further vacuumized by the evaporated vapor of vacuum oil, is provided with concentric ditch here for direct-fired pump housing bottom plate
Groove, increases heating surface (area) (HS；And provided with temperature control system, the temperature change of vacuum oil in oil pocket can be monitored, is added so as to adjust
The heating power of hot device, the setting of cold grid is prevented in the container of gas backflow pumpback vacuum；The check valve when stopping vacuumizing
Setting prevents gas from entering pump body and influenceing the quality of vacuum oil.
Brief description of the drawings
When considered in conjunction with the accompanying drawings, by referring to following detailed description, it can more completely more fully understand that this practicality is new
Type and easily learn the adjoint advantage of many of which, but accompanying drawing described herein be used for providing to it is of the present utility model enter one
Step understands, constitutes a part of the present utility model, and schematic description and description of the present utility model is used to explain this practicality
It is new, do not constitute to improper restriction of the present utility model, wherein：
Fig. 1 is vacuum oil diffusion pump structural representation of the present utility model；
In Fig. 1：1- heaters, 2- oil pockets, the 3- pump housings, 4- nozzles, 5- condenser pipes, the cold grid of 7-, 8- air inlets, 9- water conservancy diversion
Pipe, 10- check valves, 11- gas outlets, 13- body bottom plates, 14- thermometrics and its control system.
Embodiment
Below in conjunction with accompanying drawing to the utility model, the technical scheme in the utility model embodiment is carried out clear, complete
Site preparation is described.
On such as Fig. 1, a kind of vacuum oil diffusion pump, including air inlet 8, the pump housing 3, oil pocket 2, gas outlet 11, the outer wall of the pump housing 3
Condenser pipe 5 and the multiple nozzles 4 being arranged in the pump housing 3, mozzle 9, pump housing bottom also include heater 1, the top of heater 1
Provided with pump housing bottom plate 13, heater 1 heats the vacuum oil in oil pocket 2, the pump housing by directly being heated to pump housing bottom plate 13
Bottom plate 13 is provided with a large amount of annular concentric grooves, and the design of concentric groove increases the heating surface area of vacuum oil in oil pocket, accelerates
Evaporation efficiency.
The pump housing 3 also includes thermometric and its control system 14, and thermometric and its control system 14 include thermometric thermal resistance, controllable silicon
Module and temperature controller, thermometric thermal resistance are set with by ceramic pillar, and temperature controller is electrically connected with thermometric thermal resistance, and silicon controlled module is with adding
Hot device 1 is electrically connected, and heater 1 is electrically connected with thermometric thermal resistance.The design of thermometric and its control system 14, can be monitored in oil pocket
The temperature of vacuum oil, and regulate and control according to temperature change the power of heater, so as to reach the stable purpose for saving electric energy of oil temperature.
Air inlet 8 is additionally provided with cold grid 7, further cooled down at cold grid, it is to avoid the reflux of oil vapour, improves effect
Rate.
Gas outlet 11 is additionally provided with check valve 10, and when stopping vacuumizing, check valve 10 is closed, and prevents ambient atmos by going out
Gas port enters pump body, influences the quality of vacuum oil.
Nozzle 4 is umbrella shaped spray nozzle, and nozzle multistage is arranged concentrically, reduced step by step from internal layer to outer layer height.
In summary, the pump housing bottom plate of the vacuum oil diffusion pump of the utility model is provided with concentric groove, increases heating surface
Product；And provided with temperature control system, the temperature change of vacuum oil in oil pocket can be monitored, so that the heating power of heater is adjusted,
The setting of cold grid is prevented in the container of gas backflow pumpback vacuum；When stopping vacuumizing, the setting of check valve prevents gas from entering
Pump body influences the quality of vacuum oil.
Claims (4)
1. a kind of vacuum oil diffusion pump, including air inlet (8), the pump housing (3), oil pocket (2), gas outlet (11), on the pump housing (3) outer wall
Condenser pipe (5) and the multiple nozzles (4), the mozzle (9) that are arranged in the pump housing (3), it is characterised in that the pump housing bottom
Also include being provided with pump housing bottom plate (13) above heater (1), the heater (1), the pump housing bottom plate (13) is provided with annular
Concentric groove, the pump housing (3) also includes thermometric and its control system (14), and the thermometric and its control system (14) include surveying
Resistance, silicon controlled module and temperature controller are warmed, the thermometric thermal resistance is set with by ceramic pillar, the temperature controller and thermometric thermoelectricity
Resistance electrical connection, the silicon controlled module is electrically connected with heater (1), and the heater (1) electrically connects with thermometric thermal resistance.
2. a kind of vacuum oil diffusion pump according to claim 1, it is characterised in that the air inlet (8) also includes cold grid
(7)。
3. a kind of vacuum oil diffusion pump according to claim 1, it is characterised in that the gas outlet (11) is additionally provided with unidirectionally
Valve (10).
4. a kind of vacuum oil diffusion pump according to claim 1, it is characterised in that the nozzle (4) is umbrella shaped spray nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720012892.6U CN206495831U (en) | 2017-01-06 | 2017-01-06 | A kind of vacuum oil diffusion pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720012892.6U CN206495831U (en) | 2017-01-06 | 2017-01-06 | A kind of vacuum oil diffusion pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206495831U true CN206495831U (en) | 2017-09-15 |
Family
ID=59803025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720012892.6U Expired - Fee Related CN206495831U (en) | 2017-01-06 | 2017-01-06 | A kind of vacuum oil diffusion pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206495831U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108815875A (en) * | 2018-07-24 | 2018-11-16 | 北京铂阳顶荣光伏科技有限公司 | Cold-trap and vacuum-pumping system |
-
2017
- 2017-01-06 CN CN201720012892.6U patent/CN206495831U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108815875A (en) * | 2018-07-24 | 2018-11-16 | 北京铂阳顶荣光伏科技有限公司 | Cold-trap and vacuum-pumping system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170915 Termination date: 20220106 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |