CN206486619U - 一种晶体生长过程高精度温度控制系统 - Google Patents
一种晶体生长过程高精度温度控制系统 Download PDFInfo
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- CN206486619U CN206486619U CN201720117600.5U CN201720117600U CN206486619U CN 206486619 U CN206486619 U CN 206486619U CN 201720117600 U CN201720117600 U CN 201720117600U CN 206486619 U CN206486619 U CN 206486619U
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- 239000013078 crystal Substances 0.000 title claims abstract description 37
- 238000000034 method Methods 0.000 title claims abstract description 11
- 239000007788 liquid Substances 0.000 claims abstract description 10
- 238000010438 heat treatment Methods 0.000 claims abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 81
- 239000000498 cooling water Substances 0.000 claims description 26
- 238000005259 measurement Methods 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 3
- 125000004122 cyclic group Chemical group 0.000 claims description 3
- 230000001351 cycling effect Effects 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims 1
- 239000000243 solution Substances 0.000 description 46
- 235000019796 monopotassium phosphate Nutrition 0.000 description 7
- 238000009529 body temperature measurement Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000010583 slow cooling Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
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- 239000012535 impurity Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910000402 monopotassium phosphate Inorganic materials 0.000 description 2
- 239000007836 KH2PO4 Substances 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- PJNZPQUBCPKICU-UHFFFAOYSA-N phosphoric acid;potassium Chemical compound [K].OP(O)(O)=O PJNZPQUBCPKICU-UHFFFAOYSA-N 0.000 description 1
- GNSKLFRGEWLPPA-UHFFFAOYSA-M potassium dihydrogen phosphate Chemical compound [K+].OP(O)([O-])=O GNSKLFRGEWLPPA-UHFFFAOYSA-M 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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CN201720117600.5U CN206486619U (zh) | 2017-02-08 | 2017-02-08 | 一种晶体生长过程高精度温度控制系统 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111855490A (zh) * | 2020-07-29 | 2020-10-30 | 江南大学 | 一种晶体生长过程中生长溶液浓度的在线检测方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111855490A (zh) * | 2020-07-29 | 2020-10-30 | 江南大学 | 一种晶体生长过程中生长溶液浓度的在线检测方法 |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Chen Xiaoping Inventor after: Zhu Zhenxin Inventor after: Pan Feng Inventor after: Shen Zhengyang Inventor after: Zou Jinpeng Inventor before: Pan Feng Inventor before: Shen Zhengyang Inventor before: Zou Jinpeng |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20181119 Address after: 215554 No. 50-1 Shanghu Avenue, Shanghu Town, Changshu City, Jiangsu Province Patentee after: CHANGSHU YUANQI CRYSTAL MATERIAL Co.,Ltd. Address before: 214122 1800 Lihu Avenue, Binhu District, Wuxi, Jiangsu Patentee before: Jiangnan University |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170912 |