CN206441756U - A kind of solar silicon wafers cleaning and texturing device - Google Patents
A kind of solar silicon wafers cleaning and texturing device Download PDFInfo
- Publication number
- CN206441756U CN206441756U CN201720141381.4U CN201720141381U CN206441756U CN 206441756 U CN206441756 U CN 206441756U CN 201720141381 U CN201720141381 U CN 201720141381U CN 206441756 U CN206441756 U CN 206441756U
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- China
- Prior art keywords
- fixed plate
- wool
- making herbs
- box body
- return duct
- Prior art date
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model is related to silicon chip production technical field, especially a kind of solar silicon wafers cleaning and texturing device, including box body and positioned at the cover plate of cassette upper end, grid is provided with the box body, the bottom of the liquid collecting cavity is provided with agitating device, multiple shower nozzles towards making herbs into wool chamber are equidistantly provided with the cover plate, the upper end of each shower nozzle is mounted on the isocon for feed flow, the bottom of the liquid collecting cavity is provided with return duct, and return duct is connected with multiple isocons, the return duct is flexible pipe close to the end of isocon, water pump is installed on the return duct, the making herbs into wool intracavitary is additionally provided with the gaily decorated basket for fixing silicon chip.The utility model changes traditional etching device and heating tube is arranged in texturing slot and causes the sodium metasilicate produced during making herbs into wool to intersperse among influence making herbs into wool effect in solution with the thermal convection current of solution, and it is unstable to effectively prevent making herbs into wool quality, the problem of being unfavorable for heat diffusion.
Description
Technical field
The utility model is related to silicon chip production technical field, more particularly to a kind of solar silicon wafers cleaning and texturing device.
Background technology
With the continuous lifting of manufacture of solar cells technology, quality and cost for solar battery product are proposed
New requirement.Process for etching is a mostly important ring in the whole production line of solar cell, and its purpose is to go
Except the surface damage layer of silicon chip after cutting, while carrying out texturing processing in silicon chip surface by the method for chemical attack, formed
Good sunken luminous effect, reduces silicon chip surface emissivity.Specific method is to utilize dilute NaOH solution, ethylenediamine and phosphorus benzene two
Phenol water, monoethanolamine be water-soluble etc., and chemical mordant carries out matte processing to silicon chip surface, and making herbs into wool reaction is carried out in texturing slot, anti-
Need to supplement chemicals into Woolen-making liquid in time during answering.The texturing slot used at present is mostly by cell body and heating tube group
Into heating tube is located at cell body bottom, and the sodium metasilicate produced during making herbs into wool is interspersed among with the thermal convection current of solution in solution, shadow
Making herbs into wool effect is rung.In addition, the local heating mode that texturing slot is used is difficult corrosive liquid is met the uniform temperature requirement of making herbs into wool,
Cause making herbs into wool quality unstable, be unfavorable for heat diffusion.
Utility model content
The purpose of this utility model is and a kind of solar silicon wafers proposed in order to solve shortcoming present in prior art
Cleaning and texturing device.
To achieve these goals, the utility model employs following technical scheme：
Design a kind of solar silicon wafers cleaning and texturing device, including box body and the cover plate positioned at cassette upper end, the box body
It is interior be provided with grid, and box body inner chamber be located at grid upper end be making herbs into wool chamber, positioned at the lower end of grid be liquid collecting cavity, the liquid collecting
The bottom of chamber, which is provided with agitating device, the cover plate, is equidistantly provided with multiple shower nozzles towards making herbs into wool chamber, and each the shower nozzle is upper
End is mounted on the isocon for feed flow, and the bottom of the liquid collecting cavity is provided with return duct, and return duct and multiple isocons
It is connected, the return duct is to be provided with water pump, the upper table of the cover plate on flexible pipe, the return duct close to the end of isocon
Face is provided with the oil cylinder for being lifted up, and the making herbs into wool intracavitary is additionally provided with the gaily decorated basket for fixing silicon chip.
It is preferred that, the gaily decorated basket includes square the first fixed plate and the second fixed plate, and the first fixed plate and the
The size of two fixed plates is identical, and first fixed plate and the second fixed plate are symmetrical arranged, and first fixed plate and second is consolidated
The middle part of the opposite side of fixed board is rotatably installed in the both sides inwall of making herbs into wool chamber, first fixed plate and second by equal fixing axle
The relative side of fixed plate is connected to two head rods and two second connecting rods, two head rods it
Between symmetrically, between two second connecting rods symmetrically, between the head rod and the second connecting rod mutually
Symmetrically, symmetrically and equidistantly provided with many snap arm, two institutes between two head rods, two second connecting rods
State and the snap arm on the fixing groove for placing silicon chip, the head rod and the snap arm in the second connecting rod are formed between snap arm
It is parallel, it is equipped with stopper slot in the middle part of first fixed plate and the second fixed plate four edges, first fixed plate and the
It is equipped with fix bar between two fixed plates on every two symmetrical stopper slots, the two ends of the fix bar are bolted with respectively with
The lock nut being flexibly connected on the outside of one fixed plate and the second fixed plate, the outside of the box body is provided with and fixing axle drive connection
Motor.
It is preferred that, the drive shaft of the motor is provided with the fixture block of rectangle, and the outside of the box body is located at fixture block
Surface, which is provided with the collar, the collar, is plugged with lever arm, and the lower end of lever arm is provided with the neck matched with fixture block.
It is preferred that, it is provided with pressurized tank, the pressurized tank and is provided with for heating between the multiple isocons and flexible pipe
Heating tube, the outside of the pressurized tank is provided with the power line powered to heating tube, the pressurized tank and is additionally provided with pressure gauge.
It is preferred that, the mixer, which includes installing on the outside of the agitating shaft and blade being arranged in liquid collecting cavity, the box body, to be driven
The motor of dynamic agitating shaft rotation.
The utility model proposes a kind of solar silicon wafers cleaning and texturing device, beneficial effect is：Making herbs into wool chamber is used for silicon
The work of cleaning and the making herbs into wool of piece, is sprayed for the decoction to silicon wafer wool making, decoction is fallen by grid by shower nozzle to making herbs into wool chamber
Enter liquid collecting cavity, decoction is collected by liquid collecting cavity, liquid collecting luminal solution water conservancy diversion is returned to what shower nozzle was circulated by return duct
Making herbs into wool cleaning, silicon chip is positioned between multiple symmetrical necks, is fixed by fix bar, makes silicon chip is stable to consolidate
It is scheduled in the gaily decorated basket, by motor the gaily decorated basket can be driven to be rotated in making herbs into wool intracavitary, contact more abundant with the decoction of sprinkling, make making herbs into wool
More preferably, pressurized tank is used to pressurize to decoction effect, makes sprinkling evenly, and heating tube is heated to decoction, is changed
It is hot right that heating tube is arranged in texturing slot and causes the sodium metasilicate that is produced during making herbs into wool with solution by traditional etching device
Flow and intersperse among in solution influence making herbs into wool effect, and it is unstable to effectively prevent making herbs into wool quality, the problem of being unfavorable for heat diffusion.
Brief description of the drawings
Fig. 1 be the utility model proposes a kind of solar silicon wafers cleaning and texturing device structural representation；
Fig. 2 be the utility model proposes a kind of solar silicon wafers cleaning and texturing device gaily decorated basket overlooking the structure diagram；
Fig. 3 be the utility model proposes a kind of solar silicon wafers cleaning and texturing device gaily decorated basket end face structure schematic diagram；
Fig. 4 be the utility model proposes a kind of solar silicon wafers cleaning and texturing device the gaily decorated basket Structure of cross section signal
Figure.
In figure：Box body 1, grid 2, making herbs into wool chamber 3, return duct 4, water pump 5, mixer 6, cover plate 7, shower nozzle 8, the gaily decorated basket 9, oil cylinder
10th, flexible pipe 11, pressurized tank 12, heating tube 13, pressure gauge 14, liquid collecting cavity 15, isocon 16, the first fixed plate 17, second are fixed
Plate 18, head rod 19, snap arm 20, stopper slot 21, fix bar 22, the second connecting rod 23, fixture block 24, the collar 25, lever arm
26。
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.
Reference picture 1-4, a kind of solar silicon wafers cleaning and texturing device, including box body 1 and the cover plate 7 positioned at the upper end of box body 1,
Be provided with grid 2 in box body 1, and box body 1 inner chamber be located at grid 2 upper end be making herbs into wool chamber 3, positioned at the lower end of grid 2 be liquid collecting
Chamber 15, the bottom of liquid collecting cavity 15, which is provided with agitating device, cover plate 7, is equidistantly provided with multiple shower nozzles 8 towards making herbs into wool chamber 3, making herbs into wool chamber 3
For the work of cleaning and the making herbs into wool of silicon chip, sprayed by shower nozzle 8 to making herbs into wool chamber 3 for the decoction to silicon wafer wool making, decoction leads to
Cross grid 2 and fall into liquid collecting cavity 15, decoction is collected by liquid collecting cavity 15, the upper end of each shower nozzle 8 is mounted on being used to supply
The isocon 16 of liquid, the bottom of liquid collecting cavity 15 is provided with return duct 4, and return duct 4 is connected with multiple isocons 16, return duct
Solution water conservancy diversion in liquid collecting cavity 15 is returned to the making herbs into wool cleaning that shower nozzle 8 is circulated by 16, and return duct 4 is close to the end of isocon 16
Portion is to be provided with water pump 5 on flexible pipe 11, return duct 4, and the upper surface of cover plate 7 is provided with the oil cylinder 10 for being lifted up,
Oil cylinder 10 is used to lift feeding and feeding work that cover plate 7 carries out silicon chip.
The gaily decorated basket 9 for fixing silicon chip is additionally provided with making herbs into wool chamber 3, the gaily decorated basket 9 includes the square He of the first fixed plate 17
Second fixed plate 18, and the first fixed plate 17 is identical with the size of the second fixed plate 18, the first fixed plate 17 and the second fixed plate
18 are symmetrical arranged, and the middle part of the first fixed plate 17 and the opposite side of the second fixed plate 18 is rotatably installed in making herbs into wool by equal fixing axle
The both sides inwall of chamber 3, the first fixed plate 17 side relative with the second fixed plate 18 is connected to two head rods 19
With two second connecting rods 23, between two head rods 19 symmetrically, between two second connecting rods 23 symmetrically,
Between the connecting rod 23 of head rod 19 and second symmetrically, between two head rods 19, two second connecting rods 23
It is symmetrical and equidistantly provided with many snap arm 20, form the fixing groove for placing silicon chip, head rod between two snap arm 20
Snap arm 20 on 19 is parallel with the snap arm 20 in the second connecting rod 23, the first fixed plate 17 and the four edges of the second fixed plate 18
Middle part is equipped with stopper slot 21, is equipped between the first fixed plate 17 and the second fixed plate 18 on every two symmetrical stopper slots 21
Fix bar 22, the two ends of fix bar 22 are bolted with what is be flexibly connected respectively with the first fixed plate 17 and the outside of the second fixed plate 18
Lock nut, the outside of box body 1 is provided with the motor with fixing axle drive connection, and silicon chip is positioned over multiple symmetrical necks
Between, it is fixed by fix bar 18, silicon chip is stably fixed in the gaily decorated basket, the gaily decorated basket can be driven in system by motor
Suede intracavitary rotates, and contacts more abundant with the decoction of sprinkling, makes making herbs into wool effect more preferable.
The drive shaft of motor is provided with the fixture block 24 of rectangle, and the outside of box body 1 is provided with positioned at the surface of fixture block 24
Lever arm 26 is plugged with the collar 25, the collar 25, and the lower end of lever arm 26 is provided with the neck matched with fixture block 24, lever arm
Neck on 26 is used for the drive shaft of fixed drive motor, is more convenient the loading and unloading of the gaily decorated basket, the rotation of gaily decorated basket when preventing feeding.
The heating tube being provided with pressurized tank 12, pressurized tank 12 for heating is provided between multiple isocons 16 and flexible pipe 11
13, the outside of pressurized tank 12 is provided with the power line powered to heating tube 13, pressurized tank 12 and is additionally provided with pressure gauge 14, pressurized tank 12
For being pressurizeed to decoction, make sprinkling evenly, and heating tube 13 is heated to decoction, changing traditional etching device will
Heating tube is arranged in texturing slot and causes the sodium metasilicate produced during making herbs into wool to intersperse among solution with the thermal convection current of solution
Middle influence making herbs into wool effect, and it is unstable to effectively prevent making herbs into wool quality, the problem of being unfavorable for heat diffusion.
Mixer 6 includes the agitating shaft and blade being arranged in liquid collecting cavity 15, and driving agitating shaft rotation is installed in the outside of box body 1
Motor, for being sufficiently stirred for decoction, prevent the problem of decoction is layered, make making herbs into wool effect more preferable.
It is described above, only the utility model preferably embodiment, but protection domain of the present utility model is not
This is confined to, any one skilled in the art is in the technical scope that the utility model is disclosed, according to this practicality
New technical scheme and its utility model design are subject to equivalent substitution or change, should all cover in protection model of the present utility model
Within enclosing.
Claims (5)
1. a kind of solar silicon wafers cleaning and texturing device, including box body（1）With positioned at box body（1）The cover plate of upper end（7）, its feature
It is, the box body（1）It is interior to be provided with grid（2）, and box body（1）Inner chamber be located at grid（2）Upper end be making herbs into wool chamber（3）, position
In grid（2）Lower end be liquid collecting cavity（15）, the liquid collecting cavity（15）Bottom be provided with agitating device, the cover plate（7）It is first-class
Away from provided with multiple towards making herbs into wool chamber（3）Shower nozzle（8）, each shower nozzle（8）Upper end be mounted on shunting for feed flow
Pipe（16）, the liquid collecting cavity（15）Bottom return duct is installed（4）, and return duct（4）With multiple isocons（16）It is connected,
The return duct（4）Close to isocon（16）End be flexible pipe（11）, the return duct（4）On water pump is installed（5）, it is described
Cover plate（7）Upper surface oil cylinder for being lifted up is installed（10）, the making herbs into wool chamber（3）Inside it is additionally provided with for fixing
The gaily decorated basket of silicon chip（9）.
2. a kind of solar silicon wafers cleaning and texturing device according to claim 1, it is characterised in that the gaily decorated basket（9）Bag
Include the first square fixed plate（17）With the second fixed plate（18）, and the first fixed plate（17）With the second fixed plate（18）'s
Size is identical, first fixed plate（17）With the second fixed plate（18）It is symmetrical arranged, first fixed plate（17）With second
Fixed plate（18）The middle part of opposite side is rotatably installed in making herbs into wool chamber by equal fixing axle（3）Both sides inwall, described first consolidate
Fixed board（17）With the second fixed plate（18）Relative side is connected to two head rods（19）With two second connections
Bar（23）, two head rods（19）Between symmetrically, two second connecting rods（23）Between symmetrically,
The head rod（19）With the second connecting rod（23）Between symmetrically, two head rods（19）, two pieces institutes
State the second connecting rod（23）Between it is symmetrical and equidistantly provided with many snap arm（20）, two snap arm（20）Between formed and be used for
Place the fixing groove of silicon chip, the head rod（19）On snap arm（20）With the second connecting rod（23）On snap arm（20）Phase
It is parallel, first fixed plate（17）With the second fixed plate（18）Stopper slot is equipped with the middle part of four edges（21）, described first
Fixed plate（17）With the second fixed plate（18）Between every two symmetrical stopper slots（21）On be equipped with fix bar（22）, it is described solid
Fixed pole（22）Two ends be bolted with respectively with the first fixed plate（17）With the second fixed plate（18）The locking that outside is flexibly connected
Nut, the box body（1）Outside provided with motor with fixing axle drive connection.
3. a kind of solar silicon wafers cleaning and texturing device according to claim 2, it is characterised in that the motor
Drive shaft is provided with the fixture block of rectangle（24）, the box body（1）Outside be located at fixture block（24）Surface be provided with the collar（25）,
The collar（25）Inside it is plugged with lever arm（26）, and lever arm（26）Lower end be provided with and fixture block（24）The neck matched.
4. a kind of solar silicon wafers cleaning and texturing device according to claim 1, it is characterised in that multiple isocons
（16）With flexible pipe（11）Between be provided with pressurized tank（12）, the pressurized tank（12）The interior heating tube being provided with for heating（13）, institute
State pressurized tank（12）Outside be provided with to heating tube（13）The power line of power supply, the pressurized tank（12）On be additionally provided with pressure gauge
（14）.
5. a kind of solar silicon wafers cleaning and texturing device according to claim 1, it is characterised in that the mixer（6）
Including installed in liquid collecting cavity（15）Interior agitating shaft and blade, the box body（1）Outside is installed by the driving of driving agitating shaft rotation
Motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720141381.4U CN206441756U (en) | 2017-02-16 | 2017-02-16 | A kind of solar silicon wafers cleaning and texturing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720141381.4U CN206441756U (en) | 2017-02-16 | 2017-02-16 | A kind of solar silicon wafers cleaning and texturing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206441756U true CN206441756U (en) | 2017-08-25 |
Family
ID=59633511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720141381.4U Expired - Fee Related CN206441756U (en) | 2017-02-16 | 2017-02-16 | A kind of solar silicon wafers cleaning and texturing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206441756U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107498041A (en) * | 2017-09-11 | 2017-12-22 | 重庆市九瑞粉末冶金有限责任公司 | A kind of reaction unit of the Shao Jie Pi blocks with dust reduction capability |
| CN107968062A (en) * | 2017-11-27 | 2018-04-27 | 乐山新天源太阳能科技有限公司 | Silicon chip cleaning and texturing device |
| CN107968130A (en) * | 2017-11-27 | 2018-04-27 | 乐山新天源太阳能科技有限公司 | Silicon chip cleaning and texturing technique |
| CN108376663A (en) * | 2018-04-25 | 2018-08-07 | 通威太阳能（安徽）有限公司 | A kind of uniform pumping equipment of RENA etching devices multiple exit formula |
| CN109285784A (en) * | 2018-10-17 | 2019-01-29 | 江苏英锐半导体有限公司 | A kind of wafer production surface etch chemistry device |
-
2017
- 2017-02-16 CN CN201720141381.4U patent/CN206441756U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107498041A (en) * | 2017-09-11 | 2017-12-22 | 重庆市九瑞粉末冶金有限责任公司 | A kind of reaction unit of the Shao Jie Pi blocks with dust reduction capability |
| CN107498041B (en) * | 2017-09-11 | 2024-03-12 | 重庆市九瑞粉末冶金有限责任公司 | Reaction device with dustproof function for sintering front block |
| CN107968062A (en) * | 2017-11-27 | 2018-04-27 | 乐山新天源太阳能科技有限公司 | Silicon chip cleaning and texturing device |
| CN107968130A (en) * | 2017-11-27 | 2018-04-27 | 乐山新天源太阳能科技有限公司 | Silicon chip cleaning and texturing technique |
| CN107968062B (en) * | 2017-11-27 | 2019-09-13 | 乐山新天源太阳能科技有限公司 | Silicon chip cleaning and texturing device |
| CN108376663A (en) * | 2018-04-25 | 2018-08-07 | 通威太阳能（安徽）有限公司 | A kind of uniform pumping equipment of RENA etching devices multiple exit formula |
| CN108376663B (en) * | 2018-04-25 | 2023-07-25 | 通威太阳能（安徽）有限公司 | Multi-outlet type uniform liquid discharge device of RENA (red, green and blue) texturing equipment |
| CN109285784A (en) * | 2018-10-17 | 2019-01-29 | 江苏英锐半导体有限公司 | A kind of wafer production surface etch chemistry device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170825 Termination date: 20190216 |
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| CF01 | Termination of patent right due to non-payment of annual fee |