CN206415468U - A kind of calender device processed for Mo wafer - Google Patents
A kind of calender device processed for Mo wafer Download PDFInfo
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- CN206415468U CN206415468U CN201720052636.XU CN201720052636U CN206415468U CN 206415468 U CN206415468 U CN 206415468U CN 201720052636 U CN201720052636 U CN 201720052636U CN 206415468 U CN206415468 U CN 206415468U
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- pressure rack
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Abstract
It is used for the calender device that Mo wafer is processed, including rolling stock, pressure rack, power distribution cabinet, heating platen, slip adapter, pressure chute, turn circle, the even frame of mill, back-up ring, calendering groove, buffer spring, base, turn axle, trip shaft, fixation plate, micromachine, turnery plate the utility model discloses a kind of.The beneficial effects of the utility model are：Group is connected to several buffer springs on the rolling stock of the device, can provide cushion effect to it when pressure rack carries out calendering work to Mo wafer, it is to avoid pressure rack impulsive force is excessive to be damaged to Mo wafer, improves the compression strength of Mo wafer；Rolling stock is provided with back-up ring, can avoid Mo wafer burn-off when carrying out calendering work, it is ensured that the security used；The even frame of mill on rolling stock can rotatably be ground even finishing after calendering to Mo wafer, make Mo wafer surface more smooth after rolling, it is ensured that it is high-quality that Mo wafer rolls；The device is easy to operate, and it is firm to consolidate, and each component connection is flexible.
Description
Technical field
The utility model is related to a kind of calender device, and specially a kind of calender device processed for Mo wafer belongs to food
Product sterilizing equipment decontaminating apparatus applied technical field.
Background technology
Molybdenum is human body and the necessary trace element of animals and plants.It is hard and tough and tensile for silvery white non-ferrous metal.The various tissues of human body all contain
Content highest in molybdenum, liver, kidney, and Mo wafer is a kind of alloy being mainly made by main material of molybdenum, is mainly used in semiconductor
On high-power thyristor, steel equipment and extensive electrical equipment, Mo wafer function admirable substantially increases electricity usage equipment
Energy saving.In the production and processing of Mo wafer, the calender device to Mo wafer is one of highly important equipment, and it justifies to molybdenum
The follow-up processing of piece and using there is very big importance.Indispensable equipment in being processed as Mo wafer, existing pressure
Prolong device and there is Mo wafer rough surface after calendering, Mo wafer easy burn-off during calendering, security is low, and no buffer unit causes molybdenum
The shortcoming of wafer presser delay easy fracture, therefore, proposes a kind of calender device processed for Mo wafer regarding to the issue above.
Utility model content
The purpose of this utility model, which is that, provides a kind of calendering processed for Mo wafer in order to solve the above problems
Device.
The utility model is achieved through the following technical solutions above-mentioned purpose, a kind of calendering dress processed for Mo wafer
Put, including rolling stock, the rolling stock side sets pressure rack, and the pressure rack side sets and set in power distribution cabinet, the pressure rack
Set above heating platen, and the heating platen and slide adapter, the adapter side of sliding is set on pressure chute, and the rolling stock
Set and mill even frame is set on turn circle, the turn circle, and back-up ring is set below the even frame of mill, the back-up ring side sets pressure
Prolong to set below groove, and the calendering groove and base is set below buffer spring, the buffer spring, and set on the even frame of mill
Trip shaft is set above turn axle, the turn axle, and the trip shaft side sets and installed above fixation plate, the fixation plate
Turnery plate is set below micromachine, and the micromachine.
It is preferred that, in order that the compression strength of Mo wafer is higher, and make device is overall more to consolidate firm, the rolling stock
Upper several buffer springs of setting.
It is preferred that, in order that turn circle can drive the even frame of mill normally to rotate, and make heating platen have sufficiently high temperature and
Pressure rolls to Mo wafer, and the turn circle, heating platen are electrically connected with the power distribution cabinet.
It is preferred that, in order that more smooth after the calendering of Mo wafer surface, it is to avoid its surface is thick after pressure rack is rolled to Mo wafer
It is rough to cause using effect not good, set several to grind even frame on the turn circle.
It is preferred that, in order that grinding even frame can flexibly overturn, the fixation plate is movably connected with the trip shaft.
The beneficial effects of the utility model are：Group is connected to several buffer springs on the rolling stock of the device, can be in pressure rack
Cushion effect is provided to it, it is to avoid pressure rack impulsive force is excessive to be damaged to Mo wafer, improve when carrying out calendering work to Mo wafer
The compression strength of Mo wafer；Rolling stock is provided with back-up ring, can avoid Mo wafer burn-off when carrying out calendering work, it is ensured that make
Security；Rolling stock is provided with turn circle, and the even frame of mill of turn circle both sides can be carried out rotatably after calendering to Mo wafer
The even finishing of mill, makes Mo wafer surface more smooth after rolling, it is to avoid its rough surface causes to use after pressure rack is rolled to Mo wafer
Effect is not good, it is ensured that it is high-quality that Mo wafer rolls；The device is easy to operate, and it is firm to consolidate, and each component connection is flexible.
Brief description of the drawings
Fig. 1 is the utility model overall structure diagram.
Fig. 2 is the utility model pressure rack structural representation.
Fig. 3 is the utility model rolling stock structural representation.
Fig. 4 is that the utility model grinds even frame structural representation.
In figure：1st, rolling stock；2nd, pressure rack；3rd, power distribution cabinet；4th, heating platen；5th, adapter is slided；6th, chute is pressed；7th, turn circle；
8th, even frame is ground；9th, back-up ring；10th, groove is rolled；11st, buffer spring；12nd, base；13rd, turn axle；14th, trip shaft；15th, fixation plate；
16th, micromachine；17th, turnery plate.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belongs to the scope of the utility model protection.
Refer to shown in Fig. 1-4, a kind of calender device processed for Mo wafer, including rolling stock 1, the side of rolling stock 1
Pressure rack 2 is set, and the side of pressure rack 2 sets and heating platen 4 is set in power distribution cabinet 3, pressure rack 2, and the top of heating platen 4 sets and slides adapter
5, slide and the even frame 8 of setting mill on turn circle 7, turn circle 7 is set on the setting of the side of adapter 5 pressure chute 6, and rolling stock 1, and mill is even
The lower section of frame 8 sets back-up ring 9, and the side of back-up ring 9 sets calendering groove 10, and the lower section of calendering groove 10 sets buffer spring 11, buffer spring
11 lower sections set base 12, and grind setting turn axle 13 on even frame 8, and the top of turn axle 13 sets trip shaft 14, and trip shaft 14
Side sets fixation plate 15, and micromachine 16 is installed in the top of fixation plate 15, and the lower section of micromachine 16 sets turnery plate 17.
Several buffer springs 11 are set on rolling stock 1.Mo wafer is carried out in pressure rack by several buffer springs 11
Cushion effect is provided to it, it is to avoid pressure rack impulsive force is excessive to be damaged to Mo wafer, improve the anti-of Mo wafer during calendering work
Compressive Strength, and make device overall more firm firm；Turn circle 7, heating platen 5 are electrically connected with power distribution cabinet 3.Pass through distribution
Cabinet 3 is that turn circle 7 is powered with heating platen 5, enables turn circle 7 to drive the even frame 8 of mill to carry out rotary even to Mo wafer progress mill,
And make heating platen 5 there is sufficiently high temperature and pressure to roll Mo wafer；Several are set to grind even frame 8 on turn circle 7.It is logical
Cross several even framves 8 of mill and rotatably ground even finishing to Mo wafer after calendering, make Mo wafer surface more smooth after rolling,
Pressure rack is avoided to cause using effect not good its rough surface after Mo wafer calendering, it is ensured that Mo wafer is high-quality after calendering；
Fixation plate 15 is movably connected with trip shaft 14.Flexibly overturn, made in pressing plate pressure around trip shaft 14 by fixation plate 15
When prolonging Mo wafer, grind even frame 8 and open, its work is not influenceed, that rotation mill is carried out to Mo wafer is even turning after calendering, it is ensured that
The flexibility that uses.
When in use, first, whole calender device position is fixed for the utility model, secondly, logical when using the device
Cross and provide cushion effect to it when pressure rack carries out calendering work to Mo wafer by several buffer springs 11, it is to avoid pressure rack is impacted
Power is excessive to be damaged to Mo wafer, improves the compression strength of Mo wafer, and makes device overall more firm firm；Pass through pressure
Mo wafer burn-off can be avoided when carrying out calendering work by prolonging back-up ring 9 on platform 1, it is ensured that the security used；Ground by several
Even frame 8 is rotatably ground even finishing after calendering to Mo wafer, makes Mo wafer surface more smooth after rolling, it is to avoid pressure rack pair
Its rough surface causes using effect not good after Mo wafer calendering, it is ensured that Mo wafer is high-quality after calendering；Pass through fixation plate
15 are flexibly overturn around trip shaft 14, make, when pressing plate rolls Mo wafer, to grind even frame 8 and open, its work is not influenceed, roll
Afterwards turn to Mo wafer carry out rotation mill it is even, it is ensured that the flexibility used.
It is obvious to a person skilled in the art that the utility model is not limited to the details of above-mentioned one exemplary embodiment, and
And in the case of without departing substantially from spirit or essential attributes of the present utility model, can realize that this practicality is new in other specific forms
Type.Therefore, no matter from the point of view of which point, embodiment all should be regarded as exemplary, and is nonrestrictive, this practicality is new
The scope of type limits by appended claims rather than described above, it is intended that the equivalency fallen in claim is contained
All changes in justice and scope are included in the utility model.Any reference in claim should not be considered as limitation
Involved claim.
Moreover, it will be appreciated that although the present specification is described in terms of embodiments, not each embodiment is only wrapped
Containing an independent technical scheme, this narrating mode of specification is only that for clarity, those skilled in the art should
Using specification as an entirety, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
It may be appreciated other embodiment.
Claims (5)
1. a kind of calender device processed for Mo wafer, including rolling stock（1）, it is characterised in that：The rolling stock（1）Side
Pressure rack is set（2）, and the pressure rack（2）Side sets power distribution cabinet（3）, the pressure rack（2）Upper setting heating platen（4）, and it is described
Heating platen（4）Top, which is set, slides adapter（5）, it is described to slide adapter（5）Side sets pressure chute（6）, and the rolling stock（1）
Upper setting turn circle（7）, the turn circle（7）It is upper that the even frame of mill is set（8）, and the even frame of mill（8）Lower section sets back-up ring（9）,
The back-up ring（9）Side sets calendering groove（10）, and the calendering groove（10）Lower section sets buffer spring（11）, the buffering elastic
Spring（11）Lower section sets base（12）, and the even frame of mill（8）Upper setting turn axle（13）, the turn axle（13）Top is set
Trip shaft（14）, and the trip shaft（14）Side sets fixation plate（15）, the fixation plate（15）Top is installed by micromachine
（16）, and the micromachine（16）Lower section sets turnery plate（17）.
2. a kind of calender device processed for Mo wafer according to claim 1, it is characterised in that：The rolling stock
（1）Upper several buffer springs of setting（11）.
3. a kind of calender device processed for Mo wafer according to claim 1, it is characterised in that：The turn circle
（7）, heating platen（4）With the power distribution cabinet（3）Electrically connect.
4. a kind of calender device processed for Mo wafer according to claim 1, it is characterised in that：The turn circle
（7）It is upper to set several to grind even frame（8）.
5. a kind of calender device processed for Mo wafer according to claim 1, it is characterised in that：The fixation plate
（15）With the trip shaft（14）It is movably connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720052636.XU CN206415468U (en) | 2017-01-17 | 2017-01-17 | A kind of calender device processed for Mo wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720052636.XU CN206415468U (en) | 2017-01-17 | 2017-01-17 | A kind of calender device processed for Mo wafer |
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| Publication Number | Publication Date |
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| CN206415468U true CN206415468U (en) | 2017-08-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201720052636.XU Active CN206415468U (en) | 2017-01-17 | 2017-01-17 | A kind of calender device processed for Mo wafer |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106734491A (en) * | 2017-01-17 | 2017-05-31 | 宜兴市科兴合金材料有限公司 | A kind of calender device for Mo wafer processing |
| CN108649003A (en) * | 2018-05-21 | 2018-10-12 | 王青 | A kind of wafer manufacturing device of solar cell |
| WO2022116529A1 (en) * | 2020-12-03 | 2022-06-09 | 长鑫存储技术有限公司 | Pressure measuring system |
-
2017
- 2017-01-17 CN CN201720052636.XU patent/CN206415468U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106734491A (en) * | 2017-01-17 | 2017-05-31 | 宜兴市科兴合金材料有限公司 | A kind of calender device for Mo wafer processing |
| CN108649003A (en) * | 2018-05-21 | 2018-10-12 | 王青 | A kind of wafer manufacturing device of solar cell |
| CN108649003B (en) * | 2018-05-21 | 2020-09-11 | 厦门市信邦威科技有限公司 | Wafer manufacturing device of solar cell |
| WO2022116529A1 (en) * | 2020-12-03 | 2022-06-09 | 长鑫存储技术有限公司 | Pressure measuring system |
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