CN106734491A - A kind of calender device for Mo wafer processing - Google Patents
A kind of calender device for Mo wafer processing Download PDFInfo
- Publication number
- CN106734491A CN106734491A CN201710032152.3A CN201710032152A CN106734491A CN 106734491 A CN106734491 A CN 106734491A CN 201710032152 A CN201710032152 A CN 201710032152A CN 106734491 A CN106734491 A CN 106734491A
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- CN
- China
- Prior art keywords
- wafer
- calendering
- rolling stock
- mill
- pressure rack
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D25/00—Working sheet metal of limited length by stretching, e.g. for straightening
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Abstract
The invention discloses a kind of calender device for Mo wafer processing, including rolling stock, pressure rack, power distribution cabinet, heating platen, slip adapter, pressure chute, turn circle, the even frame of mill, back-up ring, calendering groove, buffer spring, base, turn axle, trip shaft, fixation plate, micromachine, turnery plate.The beneficial effects of the invention are as follows:Group is connected to several buffer springs on the rolling stock of the device, can provide cushion effect to it when pressure rack carries out calendering work to Mo wafer, it is to avoid pressure rack impulsive force is excessive to be damaged to Mo wafer, improves the compression strength of Mo wafer;Rolling stock is provided with back-up ring, Mo wafer burn-off can be avoided when calendering work is carried out, it is ensured that the security for using;The even frame of mill on rolling stock can rotatably be ground even finishing after calendering to Mo wafer, Mo wafer surface is more smoothed after rolling, it is ensured that the high-quality of Mo wafer calendering;The device is easy to operate, and it is firm to consolidate, and each component connection is flexible.
Description
Technical field
The present invention relates to a kind of calender device, specially a kind of calender device for Mo wafer processing belongs to food and disappears
Malicious equipment application technical field.
Background technology
Molybdenum is human body and the necessary trace element of animals and plants.It is silvery white non-ferrous metal, it is hard and tough and tensile.The various tissues of human body all contain
Molybdenum, content highest in liver, kidney, and Mo wafer is a kind of alloy being mainly made as main material with molybdenum, is mainly used in semiconductor
On high-power thyristor, steel equipment and extensive electrical equipment, Mo wafer function admirable substantially increases electricity usage equipment
Energy saving.In the production and processing of Mo wafer, the calender device to Mo wafer is one highly important equipment, and it justifies to molybdenum
The follow-up processing of piece and using there is very big importance.Indispensable equipment, existing pressure in being processed as Mo wafer
Prolong device and there is Mo wafer rough surface after calendering, Mo wafer easy burn-off during calendering, security is low, and molybdenum is caused without buffer unit
The shortcoming of wafer presser time delay easy fracture, therefore, a kind of calender device for Mo wafer processing is proposed regarding to the issue above.
The content of the invention
The purpose of the present invention is that and a kind of calender device for Mo wafer processing is provided to solve the above problems.
The present invention is achieved through the following technical solutions above-mentioned purpose, a kind of calender device for Mo wafer processing, bag
Rolling stock is included, the rolling stock side sets pressure rack, and the pressure rack side sets power distribution cabinet, and hot pressing is set in the pressure rack
Plate, and heating platen top sets slip adapter, the slip adapter side sets to press and set on chute, and the rolling stock
Turn circle, sets the even frame of mill on the turn circle, and the even frame lower section of the mill sets back-up ring, and the back-up ring side sets calendering
Groove, and the calendering groove lower section sets buffer spring, the buffer spring lower section to set and set rotation on base, and the even frame of mill
Moving axis, the turn axle top sets trip shaft, and the trip shaft side sets fixation plate, and the fixation plate top installs micro-
Type motor, and micromachine lower section sets turnery plate.
Preferably, in order that the compression strength of Mo wafer is higher, and overall more firm firm, the rolling stock of device is made
Upper several buffer springs of setting.
Preferably, in order that turn circle can drive the even frame of mill normally to rotate, and make heating platen have sufficiently high temperature and
Pressure rolls to Mo wafer, and the turn circle, heating platen are electrically connected with the power distribution cabinet.
Preferably, in order that more being smoothed after the calendering of Mo wafer surface, it is to avoid its surface is thick after pressure rack is rolled to Mo wafer
It is rough to cause using effect not good, several mill even framves are set on the turn circle.
Preferably, can flexibly be overturn in order that grinding even frame, the fixation plate is movably connected with the trip shaft.
The beneficial effects of the invention are as follows:Group is connected to several buffer springs on the rolling stock of the device, can be in pressure rack to molybdenum
Disk carries out providing cushion effect to it during calendering work, it is to avoid pressure rack impulsive force is excessive to be damaged to Mo wafer, improves molybdenum
The compression strength of disk;Rolling stock is provided with back-up ring, Mo wafer burn-off can be avoided when calendering work is carried out, it is ensured that use
Security;Rolling stock is provided with turn circle, and the even frame of mill of turn circle both sides can rotatably be ground even after calendering to Mo wafer
Finishing, makes Mo wafer surface more be smoothed after rolling, it is to avoid its rough surface causes using effect after pressure rack is rolled to Mo wafer
It is not good, it is ensured that the high-quality of Mo wafer calendering;The device is easy to operate, and it is firm to consolidate, and each component connection is flexible.
Brief description of the drawings
Fig. 1 is overall structure diagram of the present invention.
Fig. 2 is pressure rack structural representation of the present invention.
Fig. 3 is rolling stock structural representation of the present invention.
Fig. 4 is the present invention even frame structural representation of mill.
In figure:1st, rolling stock;2nd, pressure rack;3rd, power distribution cabinet;4th, heating platen;5th, adapter is slided;6th, chute is pressed;7th, turn circle;
8th, even frame is ground;9th, back-up ring;10th, groove is rolled;11st, buffer spring;12nd, base;13rd, turn axle;14th, trip shaft;15th, fixation plate;
16th, micromachine;17th, turnery plate.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
Refer to shown in Fig. 1-4, a kind of calender device for Mo wafer processing, including rolling stock 1, the side of rolling stock 1
Pressure rack 2 is set, and the side of pressure rack 2 sets power distribution cabinet 3, and heating platen 4 is set in pressure rack 2, and the top of heating platen 4 sets and slides adapter
5, slide the side of adapter 5 and setting turn circle 7 on pressure chute 6, and rolling stock 1 is set, mill even frame 8 is set on turn circle 7, and grinds even
The lower section of frame 8 sets back-up ring 9, and the side of back-up ring 9 sets calendering groove 10, and the lower section of calendering groove 10 sets buffer spring 11, buffer spring
11 lower sections set base 12, and grind setting turn axle 13 on even frame 8, and the top of turn axle 13 sets trip shaft 14, and trip shaft 14
Side sets fixation plate 15, and micromachine 16 is installed in the top of fixation plate 15, and the lower section of micromachine 16 sets turnery plate 17.
Several buffer springs 11 are set on rolling stock 1.Mo wafer is carried out in pressure rack by several buffer springs 11
Cushion effect is provided to it, it is to avoid pressure rack impulsive force is excessive to be damaged to Mo wafer, improve the anti-of Mo wafer during calendering work
Compressive Strength, and make device overall more firm firm;Turn circle 7, heating platen 5 are electrically connected with power distribution cabinet 3.By distribution
Cabinet 3 is powered for turn circle 7 with heating platen 5, enables turn circle 7 to drive the even frame 8 of mill rotatably carried out to Mo wafer mill even,
And make heating platen 5 there is sufficiently high temperature and pressure to roll Mo wafer;Several mill even framves 8 are set on turn circle 7.It is logical
Cross several even framves 8 of mill and rotatably ground even finishing to Mo wafer after calendering, Mo wafer surface is more smoothed after rolling,
Its rough surface causes using effect not good after avoiding pressure rack from rolling Mo wafer, it is ensured that the high-quality of Mo wafer after calendering;
Fixation plate 15 is movably connected with trip shaft 14.Flexibly overturn around trip shaft 14 by fixation plate 15, made in pressing plate pressure
When prolonging Mo wafer, grind even frame 8 and open, its work is not influenceed, that rotation mill is carried out to Mo wafer is even turning after calendering, it is ensured that
The flexibility that uses.
The present invention when in use, first, whole calender device position is fixed, secondly, by logical when using the device
Cross several buffer springs 11 and provide cushion effect to it when pressure rack carries out calendering work to Mo wafer, it is to avoid pressure rack impulsive force mistake
Mo wafer is damaged greatly, improves the compression strength of Mo wafer, and make device overall more firm firm;By rolling stock
Back-up ring 9 can avoid Mo wafer burn-off when calendering work is carried out on 1, it is ensured that the security for using;Even frame 8 is ground by several
Even finishing is rotatably ground to Mo wafer after calendering, Mo wafer surface is more smoothed after rolling, it is to avoid pressure rack is justified to molybdenum
Its rough surface causes using effect not good after piece calendering, it is ensured that the high-quality of Mo wafer after calendering;Enclosed by fixation plate 15
Flexibly overturn around trip shaft 14, make, when pressing plate rolls Mo wafer, to grind even frame 8 and open, its work is not influenceed, after calendering
Turn that Mo wafer rotate and grind even, it is ensured that the flexibility for using.
It is obvious to a person skilled in the art that the invention is not restricted to the details of above-mentioned one exemplary embodiment, Er Qie
In the case of without departing substantially from spirit or essential attributes of the invention, the present invention can be in other specific forms realized.Therefore, no matter
From the point of view of which point, embodiment all should be regarded as exemplary, and be nonrestrictive, the scope of the present invention is by appended power
Profit requires to be limited rather than described above, it is intended that all in the implication and scope of the equivalency of claim by falling
Change is included in the present invention.Any reference in claim should not be considered as the claim involved by limitation.
Moreover, it will be appreciated that although the present specification is described in terms of embodiments, not each implementation method is only wrapped
Containing an independent technical scheme, this narrating mode of specification is only that for clarity, those skilled in the art should
Specification an as entirety, the technical scheme in each embodiment can also be formed into those skilled in the art through appropriately combined
May be appreciated other embodiment.
Claims (5)
1. a kind of calender device for Mo wafer processing, including rolling stock(1), it is characterised in that:The rolling stock(1)Side
Pressure rack is set(2), and the pressure rack(2)Side sets power distribution cabinet(3), the pressure rack(2)Upper setting heating platen(4), and it is described
Heating platen(4)Top is set slides adapter(5), it is described to slide adapter(5)Side sets pressure chute(6), and the rolling stock(1)
Upper setting turn circle(7), the turn circle(7)It is upper that the even frame of mill is set(8), and the even frame of mill(8)Lower section sets back-up ring(9),
The back-up ring(9)Side sets calendering groove(10), and the calendering groove(10)Lower section sets buffer spring(11), the buffering elastic
Spring(11)Lower section sets base(12), and the even frame of mill(8)Upper setting turn axle(13), the turn axle(13)Top is set
Trip shaft(14), and the trip shaft(14)Side sets fixation plate(15), the fixation plate(15)Top is installed by micromachine
(16), and the micromachine(16)Lower section sets turnery plate(17).
2. it is according to claim 1 it is a kind of for Mo wafer processing calender device, it is characterised in that:The rolling stock
(1)Upper several buffer springs of setting(11).
3. it is according to claim 1 it is a kind of for Mo wafer processing calender device, it is characterised in that:The turn circle
(7), heating platen(5)With the power distribution cabinet(3)Electrically connect.
4. it is according to claim 1 it is a kind of for Mo wafer processing calender device, it is characterised in that:The turn circle
(7)It is upper that several even framves of mill are set(8).
5. it is according to claim 1 it is a kind of for Mo wafer processing calender device, it is characterised in that:The fixation plate
(15)With the trip shaft(14)It is movably connected.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710032152.3A CN106734491A (en) | 2017-01-17 | 2017-01-17 | A kind of calender device for Mo wafer processing |
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CN201710032152.3A CN106734491A (en) | 2017-01-17 | 2017-01-17 | A kind of calender device for Mo wafer processing |
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CN106734491A true CN106734491A (en) | 2017-05-31 |
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CN201710032152.3A Pending CN106734491A (en) | 2017-01-17 | 2017-01-17 | A kind of calender device for Mo wafer processing |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107443219A (en) * | 2017-06-27 | 2017-12-08 | 无锡贺邦汽车配件有限公司 | A kind of sanding apparatus for the processing of automobile shock bracket stamping parts |
Citations (8)
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JPS63291994A (en) * | 1987-05-23 | 1988-11-29 | Kawabata Seisakusho:Kk | Lubrication oil |
EP1223150B1 (en) * | 2001-01-12 | 2007-03-07 | Kabushiki Kaisha Toshiba | Silicon nitride wear resistant member and method of manufacturing the member |
JP4390587B2 (en) * | 2004-02-23 | 2009-12-24 | 東急車輛製造株式会社 | Railway vehicle |
CN101865235A (en) * | 2010-07-07 | 2010-10-20 | 南京捷诺环境技术有限公司 | Vibration isolation buffer for resisting strong impact |
CN201881228U (en) * | 2010-10-19 | 2011-06-29 | 北京通美晶体技术有限公司 | Polygonal wafer grinder |
CN102489577A (en) * | 2011-12-04 | 2012-06-13 | 新兴县先丰不锈钢制品有限公司 | Automatic deep-draw device for metal sheets |
CN103692307A (en) * | 2013-12-16 | 2014-04-02 | 广东凌丰集团股份有限公司 | Metal disc automatic feeding edging cleaning stacking device |
CN206415468U (en) * | 2017-01-17 | 2017-08-18 | 宜兴市科兴合金材料有限公司 | A kind of calender device processed for Mo wafer |
-
2017
- 2017-01-17 CN CN201710032152.3A patent/CN106734491A/en active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63291994A (en) * | 1987-05-23 | 1988-11-29 | Kawabata Seisakusho:Kk | Lubrication oil |
EP1223150B1 (en) * | 2001-01-12 | 2007-03-07 | Kabushiki Kaisha Toshiba | Silicon nitride wear resistant member and method of manufacturing the member |
JP4390587B2 (en) * | 2004-02-23 | 2009-12-24 | 東急車輛製造株式会社 | Railway vehicle |
CN101865235A (en) * | 2010-07-07 | 2010-10-20 | 南京捷诺环境技术有限公司 | Vibration isolation buffer for resisting strong impact |
CN201881228U (en) * | 2010-10-19 | 2011-06-29 | 北京通美晶体技术有限公司 | Polygonal wafer grinder |
CN102489577A (en) * | 2011-12-04 | 2012-06-13 | 新兴县先丰不锈钢制品有限公司 | Automatic deep-draw device for metal sheets |
CN103692307A (en) * | 2013-12-16 | 2014-04-02 | 广东凌丰集团股份有限公司 | Metal disc automatic feeding edging cleaning stacking device |
CN206415468U (en) * | 2017-01-17 | 2017-08-18 | 宜兴市科兴合金材料有限公司 | A kind of calender device processed for Mo wafer |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107443219A (en) * | 2017-06-27 | 2017-12-08 | 无锡贺邦汽车配件有限公司 | A kind of sanding apparatus for the processing of automobile shock bracket stamping parts |
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Application publication date: 20170531 |