CN206399890U - A kind of chip type wide-area automobile oxygen sensor - Google Patents
A kind of chip type wide-area automobile oxygen sensor Download PDFInfo
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- CN206399890U CN206399890U CN201621478757.2U CN201621478757U CN206399890U CN 206399890 U CN206399890 U CN 206399890U CN 201621478757 U CN201621478757 U CN 201621478757U CN 206399890 U CN206399890 U CN 206399890U
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Abstract
The utility model is related to a kind of chip type wide-area automobile oxygen sensor, and the sensor, which includes sintering after protective layer, signals layer, air reference channel layer and zone of heating are from top to bottom overlapped successively, to be formed；The signals layer includes interior reaction electrode A and interior reaction electrode B, and interior reaction electrode A is connected with interior reaction electrode B head, the integral interior reaction electrode of shape, and is provided with the upper surface of layer 5 curtain coating substrate the diffusion barrier layer of the alveolate texture of stomata；The upper surface of electrode is heated in the zone of heating and lower surface sets electrode dielectric layer and twice heating electrode dielectric layers are heated on two respectively.The utility model has the advantage of：Lambda sensor of the present utility model is the adjustment of the interior reaction electrode of combination and Diffusion Barrier Rotating fields by increasing the number of plies of curtain coating substrate in each functional layer, changing reaction electrode in single, and then make it that the oxygen sensor performance of the structure is more stable, and conformity of production is more preferable.
Description
Technical field
The utility model belongs to automotive oxygen sensor technical field, more particularly to a kind of chip type wide-area automobile oxygen sensor.
Background technology
Lean Burning Technique, which can improve fuel efficiency, reduces the discharge of exhaust pollutant, but lean burn is easily caused and started
Machine stop working, and mix it is unreasonable can produce excessive NOx compounds, cause environmental pollution, broad domain oxygen sensor can be supervised accurately
The accurate oxygen content surveyed in gamut vehicle exhaust, to react engine running condition, then engine computer could be according to it
Real time status is adjusted, so as to improve efficiency of combustion, reduction discharge amount of pollution and detection three-element catalytic operation conditions.
The core component of wide area type lambda sensor is its sensitive chip, and it is usually by heating electrode, oxygen pump external electrode, oxygen
Inner pump electrode and reference electrode composition, are five layers of compact zirconias by multilayer printed circuit（ZrO2）Matter substrate overlapping and
Into the preparation method of the chip is：Zirconium oxide substrate is made by casting arrangement；Section punching is carried out to substrate；Cutting
Good substrate carries out multi-layer silk screen printing, makes each functional layer；Five layers of substrate overlapping is cut again, be finally sintered, on
The processing such as glaze.
Chip wide domain type lambda sensor is due to its particularity, thickness, the setting of each functional layer and each stream of each curtain coating substrate
Selection of epitaxial substrate and each functional layer material etc. suffers from important influence to the performance of oxidation sensors；Therefore in known chip
Structure, the curtain coating substrate thickness of oxidation sensors are optimized on the basis of wide area type sensor construction, to obtain more preferably
Performance parameter be current lambda sensor industry research topic.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of chip type wide-area automobile oxygen sensor, and the oxygen of the structure is passed
Sensor is the interior reaction electrode of combination and expansion by increasing the number of plies and thickness of curtain coating substrate in each functional layer, changing reaction electrode in single
The adjustment of obstacle Rotating fields is dissipated, and then make it that the oxygen sensor performance of the structure is more stable, conformity of production is more preferable.
In order to solve the above technical problems, the technical solution of the utility model is：A kind of chip type wide-area automobile oxygen sensor, its
Innovative point is：The sensor includes protective layer, signals layer, air reference channel layer and zone of heating and from top to bottom folded successively
Sintering is formed after conjunction；
The signals layer includes the first layer curtain coating substrate, second layer curtain coating substrate, third layer from top to bottom overlapped successively
It is cast substrate, the 4th laminar flow epitaxial substrate, layer 5 curtain coating substrate, layer 6 curtain coating substrate, layer 7 curtain coating substrate and the 8th
Laminar flow epitaxial substrate, in the upper surface of first layer curtain coating substrate, the lower surface and the 8th laminar flow epitaxial substrate of the 4th laminar flow epitaxial substrate
Lower surface one outer reaction electrode is set respectively, reaction electrode A and reference reaction electrode in one；The upper of substrate is cast in layer 5
Surface sets diffusion barrier layer, and diffusion barrier is with leachy alveolate texture；The upper surface of the diffusion barrier layer
Reaction electrode B also in overlapping one, interior reaction electrode A are connected with interior reaction electrode B head；
The upper surface of the outer reaction electrode sets outer reaction electrode insulating barrier and lower outer reaction on one respectively with lower surface
Electrode dielectric layer, the upper outer reaction electrode insulating barrier upper surface on outer reaction electrode also overlaps a protective layer；The interior reaction
The upper surface of electrode A sets reaction electrode insulating barrier and lower interior reaction electrode insulating barrier on one respectively with lower surface；The ginseng
Than the upper surface of reaction electrode and lower surface, reference reaction electrode dielectric layer and lower reference reaction electrode insulation on one are set respectively
Layer；And reference reaction contact conductor A one end is connected with reference reaction electrode, the other end sequentially passes through the 8th laminar flow from the bottom to top
Epitaxial substrate, layer 7 curtain coating substrate, layer 6 curtain coating substrate, layer 5 curtain coating substrate, the 4th laminar flow epitaxial substrate, third layer curtain coating
Reference reaction electrode leadout hole after substrate, second layer curtain coating substrate and first layer curtain coating substrate is connected with outer reaction electrode,
Form reference electrode extraction electrode pin；
The 9th laminar flow epitaxial substrate that air reference channel layer includes from top to bottom overlapping successively, the tenth laminar flow epitaxial substrate and
Eleventh floor is cast substrate, and the 9th laminar flow epitaxial substrate upper surface is provided with the air reference channel of one end closing, forms reference and leads to
Channel layer；
Floor 12 curtain coating substrate that the zone of heating includes from top to bottom overlapping successively, the 13rd laminar flow epitaxial substrate, the
14 laminar flow epitaxial substrates and the 15th laminar flow epitaxial substrate, are cast the upper surface of substrate in Floor 12 and the 15th laminar flow prolong base
The lower surface of piece is respectively arranged with a heating electrode and a heating electrode pin；The upper surface of the heating electrode and lower surface point
Electrode dielectric layer and twice heating electrode dielectric layers She Zhi not be heated on two, the heating electrode passes through one with heating electrode pin
Lead B is connected, and lead B one end is connected with heating electrode, the other end from top to bottom sequentially pass through Floor 12 be cast substrate,
Heating electrode leadout hole and heating on 13rd laminar flow epitaxial substrate, the 14th laminar flow epitaxial substrate and the 15th laminar flow epitaxial substrate
Electrode pin is connected, and heating electrode is additionally provided between the 15th laminar flow epitaxial substrate lower surface and heating electrode pin upper surface
Pin insulating barrier；
Wherein, first layer curtain coating substrate to the material of the 15th laminar flow epitaxial substrate is zirconium oxide, and thickness is
115um；Outer reaction electrode, interior reaction electrode, interior reaction electrode, reference reaction electrode are using the strong platinum electricity of porous catalytic capability
Pole；Air reference channel is filled from thickness for 115um carbon black casting films band, and volatilization forms cavity after sintering；Heating
The material selection of electrode and the material selection platinum slurry and corresponding each insulating barrier that heat electrode pin is matched from different platinum electrodes
Aluminum oxide.
The utility model has the advantage of：Chip type wide-area automobile oxygen sensor of the present utility model, changes traditional wide area oxygen
Sensor, from sensor head central aperture, enters reative cell, then situation about being tested by annular diffusion barrier layer, should
Design is limited by the width of sensor, and the width of sensor only has 4.2mm, it is necessary to do diffusion hole in this width range, expands
Barrier is dissipated, electrode reaction chamber, also zirconium oxide need certain overlapping area to seal, electrode area meeting very little, to the activity of electrode
Require very high, and require that the matching sex differernce of material is just very small, the required precision to equipment can also be greatly improved, this
It is the reason for domestic sensor is not researched and developed successfully slowly；The structure is changed to from side air inlet by this patent, if electrode active
Property not enough, electrode length can be extended, single interior reaction electrode is that two interior reaction electrodes are combined, i.e., interior reaction electrode A
It is connected with interior reaction electrode B heads, is built up an overall electrode, this combining structure can increases the reaction surface of electrode
Product, and then the pump oxygen ability of electrode can be increased；Upper and lower heating electrode dielectric layer is changed to bilayer by one layer, can be further ensured that
Heater circuit is completely encapsulated in heating electrode dielectric layer, with curtain coating substrate isolation；In addition, diffusion barrier is with leachy
Alveolate texture, thus it is more beneficial for the flowing of gas；Adjusted by these, the overall performance of lambda sensor can be made more steady
It is fixed, and conformity of production is more preferable.
Brief description of the drawings
The utility model is described in further detail with reference to the accompanying drawings and detailed description.
Fig. 1 is the structural representation of the utility model chip type wide-area automobile oxygen sensor.
Embodiment
The following examples can make professional and technical personnel that the utility model is more fully understood, but therefore will not
The utility model is limited among described scope of embodiments.
Embodiment
The present embodiment chip type wide-area automobile oxygen sensor, as shown in figure 1, the sensor includes protective layer, signals layer, air
Reference channel layer and zone of heating are sintered after from top to bottom overlapping successively and formed；
Signals layer includes the first layer curtain coating substrate 1, second layer curtain coating substrate 2, third layer stream from top to bottom overlapped successively
Epitaxial substrate 3, the 4th laminar flow epitaxial substrate 4, layer 5 curtain coating substrate 5, layer 6 curtain coating substrate 6, layer 7 curtain coating substrate 7 and the
Eight laminar flow epitaxial substrates 8, upper surface, the lower surface of the 4th laminar flow epitaxial substrate 4 and the 8th laminar flow for being cast substrate 1 in first layer prolongs
The lower surface of substrate 8 sets reaction electrode 21 and reference reaction electrode 26 in an outer reaction electrode 18, one respectively；In layer 5 stream
The upper surface of epitaxial substrate 5 sets diffusion barrier layer 24, and diffusion barrier 24 is with leachy alveolate texture；Diffusion Barrier
The upper surface of layer 24 also overlaps reaction electrode 23 in one, and interior reaction electrode 21 is connected with the head of interior reaction electrode 23.
The upper surface of outer reaction electrode 18 sets outer reaction electrode insulating barrier 17 and lower outer reaction on one respectively with lower surface
Electrode dielectric layer 19, the upper outer upper surface of reaction electrode insulating barrier 17 on outer reaction electrode also overlaps a protective layer 16；It is interior anti-
The upper surface and lower surface for answering electrode 21 set reaction electrode insulating barrier 20 and lower interior reaction electrode insulating barrier 22 on one respectively；
The upper surface of reference reaction electrode 26 sets reference reaction electrode dielectric layer 25 and lower reference reaction electricity on one respectively with lower surface
Pole insulating barrier 27；And reference reaction contact conductor A one end is connected with reference reaction electrode 26, the other end is passed through successively from the bottom to top
The 8th laminar flow epitaxial substrate 8, layer 7 curtain coating substrate 7, layer 6 curtain coating substrate 6, layer 5 curtain coating substrate 5, the 4th laminar flow is worn to prolong
Reference reaction electrode export after substrate 4, third layer curtain coating substrate 3, second layer curtain coating substrate 2 and first layer curtain coating substrate 1
Hole is connected with outer reaction electrode 18, forms reference electrode extraction electrode pin.
Air reference channel layer includes the 9th laminar flow epitaxial substrate 9, the tenth laminar flow epitaxial substrate 10 from top to bottom overlapped successively
And eleventh floor curtain coating substrate 11, the upper surface of the 9th laminar flow epitaxial substrate 9 is provided with the air reference channel 28 of one end closing, shape
Into reference channel layer.
Floor 12 curtain coating substrate 12 that zone of heating includes from top to bottom overlapping successively, the 13rd laminar flow epitaxial substrate 13, the
14 laminar flow epitaxial substrates 14 and the 15th laminar flow epitaxial substrate 15, the upper surface of Floor 12 curtain coating substrate 12 and the 15th layer
The lower surface of curtain coating substrate 15 is respectively arranged with a heating electrode 31 and a heating electrode pin 35；Heat the upper surface of electrode 31
Heating electrode dielectric layer 29 and upper heating electrode dielectric layer 30 are disposed with from top to bottom, heat the lower surface of electrode 31 certainly
Lower heating electrode dielectric layer 32 and lower heating electrode dielectric layer 33 are disposed with above, heating electrode 31 draws with heating electrode
Pin 35 is connected by a lead B, and lead B one end is connected with heating electrode 31, and the other end from top to bottom sequentially passes through the tenth
On two laminar flow epitaxial substrates 12, the 13rd laminar flow epitaxial substrate 13, the 14th laminar flow epitaxial substrate 14 and the 15th laminar flow epitaxial substrate 15
Heating electrode leadout hole with heating electrode pin 35 be connected, the lower surface of the 15th laminar flow epitaxial substrate 15 with heat electrode pin
Heating electrode pin insulating barrier 34 is additionally provided between 35 upper surfaces.
As embodiment, more specifically embodiment is equal for the material that first layer is cast substrate to the 15th laminar flow epitaxial substrate
For zirconium oxide, thickness is 115um；Outer reaction electrode 18, interior reaction electrode 21, interior reaction electrode 23, reference reaction electrode 26
Using the strong platinum electrode of porous catalytic capability；Air reference channel 28 is carried out from thickness for 115um carbon black casting films band
Volatilization forms cavity after filling, sintering；Heat the material selection platinum slurry of electrode 31 and heating electrode pin 35 and corresponding each
The aluminum oxide that the material selection of insulating barrier is matched from different platinum electrodes.
Each performance parameter detection of this lambda sensor is as follows：
A sensor flatness detections：Sensor is lain on the workbench of high-flatness, with Thickness measuring instrument, passed
The head of sensor, middle part, afterbody take three points to be tested respectively, and except protective layer region and track region, thickness difference is small
In 0.05mm；
B sensor leakages are tested：By leakage tester, the air reference channel to sensor applies 380KPa pressure
Power, leakage rate is less than 0.1ml/min；
C sensor strength tests：Extract several lambda sensors and carry out destructive strength test, lambda sensor bending strength
For more than 400MPa；
D sensors adding thermal resistance is tested：The normal temperature resistance value of electrode is heated by heating pin test with universal meter, is surveyed
Test result is as shown in the table：
| Numbering | 1# | 2# | 3# | 4# | 5# | 6# | 7# | 8# | 9# | 10# |
| Resistance value（Ω） | 3.4 | 2.9 | 2.8 | 3.2 | 3 | 3.3 | 3.6 | 3.5 | 3.0 | 3.3 |
| Numbering | 11# | 12# | 13# | 14# | 15# | 16# | 17# | 18# | 19# | 20# |
| Resistance value（Ω） | 2.8 | 2.9 | 3.3 | 3.5 | 3.2 | 3.1 | 3.6 | 3.9 | 3.4 | 2.9 |
As seen from the above table, lambda sensor distribution of resistance of the present utility model is uniform, and qualification rate is up to more than 95%, heating electricity
The Ω of positive and negative deviation 0.5 is hindered, domestic many producers can only accomplish ± 1.5 Ω even ± 2 Ω；
E sensors insulating properties are tested：The testing heater insulated electro extreme to signal dispatch from foreign news agency is distinguished by the instrument that insulate
Insulaion resistance, the extreme insulaion resistance to reference electrode end of signal dispatch from foreign news agency of resistance, heater to reference electrode end, test result is such as
Shown in following table：
| Detection project | Test voltage（V） | Examination criteria | Measured value（MΩ） |
| The heater insulaion resistance extreme to signal dispatch from foreign news agency | 800 | ﹥ 100M Ω | 583 |
| Insulaion resistance of the heater to pump electrode end in signal | 800 | ﹥ 100M Ω | 401 |
| Insulaion resistance of the heater to reference electrode end | 800 | ﹥ 100M Ω | 386 |
| The extreme insulaion resistance to electrode tip in signal of signal dispatch from foreign news agency | 800 | ﹥ 100M Ω | 372 |
| The extreme insulaion resistance to pump electrode end in signal of signal dispatch from foreign news agency | 800 | ﹥ 100M Ω | 365 |
| The extreme insulaion resistance to reference electrode end of signal dispatch from foreign news agency | 800 | ﹥ 100M Ω | 420 |
As seen from the above table, lambda sensor good insulation preformance of the present utility model；
F is assembled after broad domain oxygen sensor chip, carries out standard atmosphere demarcation：The sensor assembled is arranged on oxygen
On sensor distribution testboard, tested, first according to standard value, carry out the demarcation of build-out resistor, be then reconfigured at difference
The Standard Gases of atmosphere are compared, and show value is very accurate, and deviation is smaller, and it is as shown in the table that different λ values obtain measured data：
| Test event | Standard value | 1# | 2# | 3# | 4# | 4# | 5# | 6# |
| Light-off time | ≤25s | 12.2 | 11.5 | 10.9 | 10 | 12.6 | 11.7 | 11.2 |
| λ=0.8 | λ=0.8±0.01 | 0.802 | 0.805 | 0.803 | 0.799 | 0.804 | 0.797 | 0.809 |
| λ=1.0 | λ=1.1±0.05 | 1.101 | 1.102 | 1.099 | 1.098 | 1.1 | 1.103 | 1.102 |
| λ=1.7 | λ=1.7±0.05 | 1.72 | 1.71 | 1.69 | 1.68 | 1.74 | 1.73 | 1.71 |
As seen from the above table, various use that the lambda sensor that prepared by the utility model meets vehicle exhaust lambda sensor will
Ask, sensor flatness is good, intensity is high, air reference channel regular shape, and technical process control is very good, and product is qualified
Rate is high, and properties of product are more stablized, and conformity of production is more preferably.
General principle of the present utility model and principal character and advantage of the present utility model has been shown and described above.This
The technical staff of industry is retouched in above-described embodiment and specification it should be appreciated that the utility model is not restricted to the described embodiments
That states simply illustrates principle of the present utility model, on the premise of the utility model spirit and scope are not departed from, the utility model
Various changes and modifications are also had, these changes and improvements are both fallen within the range of claimed the utility model.This practicality is new
Scope is claimed by appended claims and its equivalent thereof in type.
Claims (1)
1. a kind of chip type wide-area automobile oxygen sensor, it is characterised in that：The sensor includes protective layer, signals layer, air ginseng
Sinter and form after from top to bottom being overlapped successively than channel layer and zone of heating；
The signals layer includes the first layer curtain coating substrate, second layer curtain coating substrate, third layer curtain coating from top to bottom overlapped successively
Substrate, the 4th laminar flow epitaxial substrate, layer 5 curtain coating substrate, layer 6 curtain coating substrate, layer 7 curtain coating substrate and the 8th laminar flow
Epitaxial substrate, is cast under upper surface, the lower surface of the 4th laminar flow epitaxial substrate and the 8th laminar flow epitaxial substrate of substrate in first layer
Surface sets an outer reaction electrode respectively, reaction electrode A and reference reaction electrode in one；The upper surface of substrate is cast in layer 5
Diffusion barrier layer is set, and diffusion barrier is with leachy alveolate texture；Also fold the upper surface of the diffusion barrier layer
Reaction electrode B in unification, interior reaction electrode A are connected with interior reaction electrode B head；
The upper surface of the outer reaction electrode sets outer reaction electrode insulating barrier and lower outer reaction electrode on one respectively with lower surface
Insulating barrier, the upper outer reaction electrode insulating barrier upper surface on outer reaction electrode also overlaps a protective layer；The interior reaction electrode A
Upper surface and lower surface reaction electrode insulating barrier and lower interior reaction electrode insulating barrier on one are set respectively；The reference reaction
The upper surface of electrode sets reference reaction electrode dielectric layer and lower reference reaction electrode dielectric layer on one respectively with lower surface；And ginseng
One end than reaction electrode lead A is connected with reference reaction electrode, the other end sequentially pass through from the bottom to top the 8th laminar flow epitaxial substrate,
Layer 7 curtain coating substrate, layer 6 curtain coating substrate, layer 5 curtain coating substrate, the 4th laminar flow epitaxial substrate, third layer curtain coating substrate, the
Reference reaction electrode leadout hole after two laminar flow epitaxial substrates and first layer curtain coating substrate is connected with outer reaction electrode, forms reference
Electrode extraction electrode pin；
Air reference channel layer includes the 9th laminar flow epitaxial substrate, the tenth laminar flow epitaxial substrate and the tenth from top to bottom overlapped successively
One laminar flow epitaxial substrate, the 9th laminar flow epitaxial substrate upper surface is provided with the air reference channel of one end closing, forms reference channel layer；
The Floor 12 that the zone of heating includes from top to bottom overlapping successively is cast substrate, the 13rd laminar flow epitaxial substrate, the 14th
Laminar flow epitaxial substrate and the 15th laminar flow epitaxial substrate, upper surface and the 15th laminar flow epitaxial substrate of substrate are cast in Floor 12
Lower surface is respectively arranged with a heating electrode and a heating electrode pin；The upper surface of the heating electrode is set respectively with lower surface
Put and electrode dielectric layer and twice heating electrode dielectric layers are heated on two, the heating electrode passes through a lead with heating electrode pin
B is connected, and lead B one end is connected with heating electrode, and the other end from top to bottom sequentially passes through Floor 12 curtain coating substrate, the tenth
Heating electrode leadout hole and heating electrode on three laminar flow epitaxial substrates, the 14th laminar flow epitaxial substrate and the 15th laminar flow epitaxial substrate
Pin is connected, and heating electrode pin is additionally provided between the 15th laminar flow epitaxial substrate lower surface and heating electrode pin upper surface
Insulating barrier；
Wherein, first layer curtain coating substrate to the material of the 15th laminar flow epitaxial substrate is zirconium oxide, and thickness is 115um；
Outer reaction electrode, interior reaction electrode, interior reaction electrode, reference reaction electrode are using the strong platinum electrode of porous catalytic capability；It is empty
Gas reference channel is filled from thickness for 115um carbon black casting films band, and volatilization forms cavity after sintering；Heat electrode and
The oxidation that the material selection of the material selection platinum slurry and corresponding each insulating barrier that heat electrode pin is matched from different platinum electrodes
Aluminium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621478757.2U CN206399890U (en) | 2016-12-30 | 2016-12-30 | A kind of chip type wide-area automobile oxygen sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621478757.2U CN206399890U (en) | 2016-12-30 | 2016-12-30 | A kind of chip type wide-area automobile oxygen sensor |
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| Publication Number | Publication Date |
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| CN206399890U true CN206399890U (en) | 2017-08-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621478757.2U Withdrawn - After Issue CN206399890U (en) | 2016-12-30 | 2016-12-30 | A kind of chip type wide-area automobile oxygen sensor |
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| Country | Link |
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| CN (1) | CN206399890U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106706727A (en) * | 2016-12-30 | 2017-05-24 | 莱鼎电子材料科技有限公司 | Chip-type wide-range automobile oxygen sensor and preparation method thereof |
| CN109507262A (en) * | 2018-11-21 | 2019-03-22 | 温州百岸汽车零部件有限公司 | A kind of NOx sensor chip pumping current adjustment |
-
2016
- 2016-12-30 CN CN201621478757.2U patent/CN206399890U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106706727A (en) * | 2016-12-30 | 2017-05-24 | 莱鼎电子材料科技有限公司 | Chip-type wide-range automobile oxygen sensor and preparation method thereof |
| CN106706727B (en) * | 2016-12-30 | 2023-03-14 | 莱鼎电子材料科技有限公司 | Chip type wide-area automobile oxygen sensor and preparation method thereof |
| CN109507262A (en) * | 2018-11-21 | 2019-03-22 | 温州百岸汽车零部件有限公司 | A kind of NOx sensor chip pumping current adjustment |
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