CN208013139U - A kind of ceramic matrix CH4Sensor - Google Patents
A kind of ceramic matrix CH4Sensor Download PDFInfo
- Publication number
- CN208013139U CN208013139U CN201820147416.XU CN201820147416U CN208013139U CN 208013139 U CN208013139 U CN 208013139U CN 201820147416 U CN201820147416 U CN 201820147416U CN 208013139 U CN208013139 U CN 208013139U
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- China
- Prior art keywords
- sensitive
- layer
- supporting layer
- circuit supporting
- sensor
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000919 ceramic Substances 0.000 title claims abstract description 16
- 239000011159 matrix material Substances 0.000 title claims abstract description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 17
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 claims description 15
- 229910001195 gallium oxide Inorganic materials 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 9
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 9
- 239000002245 particle Substances 0.000 claims description 9
- 229910052574 oxide ceramic Inorganic materials 0.000 claims description 8
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 238000005245 sintering Methods 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 9
- 230000007797 corrosion Effects 0.000 abstract description 3
- 238000005260 corrosion Methods 0.000 abstract description 3
- 230000007613 environmental effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 5
- 239000007772 electrode material Substances 0.000 description 3
- YYAVXASAKUOZJJ-UHFFFAOYSA-N 4-(4-butylcyclohexyl)benzonitrile Chemical compound C1CC(CCCC)CCC1C1=CC=C(C#N)C=C1 YYAVXASAKUOZJJ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000005518 electrochemistry Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011224 oxide ceramic Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
The utility model provides a kind of ceramic matrix CH4Sensor, CH4Sensor includes a sensitive circuit supporting layer；The one interior heater circuit supporting layer being arranged below sensitive circuit supporting layer, interior heater circuit supporting layer internal heater；The one sensitive circuit layer being arranged above sensitive circuit supporting layer, sensitive circuit layer are made of sensitive electrode layer, sensitive electrode positive wire foot and sensitive electrode negative wire foot.The utility model is simple in structure, has many advantages, such as high temperature resistant and corrosion-resistant, and CH4The detection of concentration is not influenced by environmental factors such as other gas componants and flows.
Description
Technical field
The utility model is related to CH4Detection sensor, more particularly to a kind of ceramic matrix CH4Sensor.
Background technology
Existing CH4Detection sensor mainly has electrochemistry type sensor, infrared type sensor and catalytic combustion-type sensing
Device three types, wherein electrochemistry type CH4Sensor generally requires encapsulation electrolyte and is not suitable for and high temperature CH4Detection, be easy by
To the influence of the reducibility gas such as CO；Catalytic combustion type gas sensor sensitivity is good, the linearity is good, stability is strong, be not easy by
The influence of temperature and humidity；But when practice, disadvantage is also clearly：Detectable limit is bad, clever under low concentration
Sensitivity is less high；Infrared type CH4Sensor, accuracy of detection is high, and CH can also be realized by not needing the participation of oxygen4The inspection of gas, but not
It can be to the CH of high temperature4Gas carries out on-line checking, and expensive.
Utility model content
The technical problem to be solved by the present invention is to provide one kind using compact aluminum oxide ceramic as supporting layer and insulating layer,
Ceramic matrix CH of the gallium oxide as detecting layer is supported using Woelm Alumina4Sensor.
In order to achieve the above objectives, the technical solution of the utility model is as follows：
A kind of ceramic matrix CH4Sensor, the CH4Sensor includes：
One sensitive circuit supporting layer；
The one interior heater circuit supporting layer being arranged below sensitive circuit supporting layer, the built-in heating of interior heater circuit supporting layer
Device；
The one sensitive circuit layer being arranged above sensitive circuit supporting layer, sensitive circuit layer is by sensitive electrode layer, sensitive electrical
Pole positive wire foot and sensitive electrode negative wire foot composition.
In one embodiment of the utility model, the sensitive electrode layer is that Woelm Alumina supports Nanometer gallium oxide
Grain sensitive electrode layer, thickness are 1-500 μm.
In one embodiment of the utility model, the sensitive circuit supporting layer is by compact aluminum oxide ceramic material system
At thickness is 100-500 μm.
In one embodiment of the utility model, the interior heater circuit supporting layer is by compact aluminum oxide ceramic material system
At thickness is 10-500 μm.
In one embodiment of the utility model, the heater is Pt heater circuits, and at 5-50 μm, Pt adds thickness
Heater circuit is equipped with Pt heating cathodes terminal pin and Pt heats negative wire foot.
In one embodiment of the utility model, the sensitive circuit layer is Pt sensitive electrode lead wire circuit.
Through the above technical solutions, the utility model has the beneficial effects that：
The utility model sensor overall structure is molded using a co-sintering, compact-sized；Using alumina ceramic-base
And heater embedding structure, the sensor startup time is short, and sensitizing range temperature is uniform, and ceramic based sensor corrosion resistance is strong, the longevity
Life length；It is good to tested vapor sensitivity using Nanometer gallium oxide particle as sensitive electrode material, give full play to porous oxidation
The characteristic that aluminium ceramic structure is stablized maintains structural stability, the porosity of sensitive electrode, Nanometer gallium oxide specific grain surface product
Greatly, mostly tested atmosphere susceptibility is high, and Monitoring lower-cut is low.
Description of the drawings
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, other drawings may also be obtained based on these drawings.
Fig. 1 is the utility model explosive view；
Fig. 2 is the utility model section view；
Number and the corresponding component title represented by letter in figure：
10, sensitive circuit supporting layer 20, interior heater circuit supporting layer 21, heater 22, Pt heating cathode terminal pins
23, Pt heats negative wire foot 30, sensitive circuit layer 31, sensitive electrode layer 32, sensitive electrode positive wire foot 33, sensitivity
Electrode Negative terminal pin forms.
Specific implementation mode
In order to make the technical means, creative features, achievement of purpose, and effectiveness of the utility model be easy to understand, under
Face combines and is specifically illustrating, and the utility model is expanded on further.
Shown in referring to Fig. 1 and Fig. 2, the utility model discloses a kind of ceramic matrix CH4Sensor, CH4Sensor includes quick
Inductive circuit supporting layer 10, the interior heater circuit supporting layer 20 being arranged below sensitive circuit supporting layer and setting are in sensitive circuit
Sensitive circuit layer 30 above supporting layer.
Sensitive circuit layer 30 is by sensitive electrode layer 31, sensitive electrode positive wire foot 32 and sensitive electrode negative wire foot
33 compositions；Sensitive circuit supporting layer 10 is made of compact aluminum oxide ceramic material, and thickness is 100-500 μm；Sensitive circuit layer 30
For Pt sensitive electrode lead wire circuit；Sensitive circuit supporting layer 10 is located at the top of heater 21, uniform temperature fields, porous structure and
Nanometer gallium oxide particle can fully make tested gas and gallium oxide sensitive electrode material；Woelm Alumina supports nano oxidized
Gallium particle sensitive electrode layer can fully increase the contact area with tested atmosphere, improve the inspection sensitivity of sensor, sensitive electrical
By the mutual bridging of Nanometer gallium oxide particle sensitive electrode material between the positive electrode and negative electrode of pole, detection circuit is constituted.
Interior heater circuit supporting layer 20 is equipped with heater 21；Interior heater circuit supporting layer 20 is by compact aluminum oxide ceramic material
Material is made, and thickness is 10-500 μm, and heater 21 is Pt heater circuits, and for thickness at 5-50 μm, Pt heater circuits are equipped with Pt
Heating cathode terminal pin 22 and Pt heating negative wires foot 23；Heater circuit is located at two layers of compact aluminum oxide (interior heater circuit branch
Support layer and sensitive circuit supporting layer) between form interior heater 21；
Sensitive electrode layer 31 is that Woelm Alumina supports Nanometer gallium oxide particle sensitive electrode layer, and thickness is 1-500 μm.
Above-mentioned Woelm Alumina, dense oxide aluminium layer and all Pt metallic circuits use sintering one-pass molding, then porous
Nanometer gallium oxide particle is supported inside aluminium oxide ceramics so that sensor structure is stablized.
The utility model CH4The operation principle of sensor：Pt heating cathodes terminal pin and Pt when work in heater add
Antilogous pole terminal pin both ends apply the heating voltage of certain value, and the sensitive electrode layer of sensor is made to reach 740-780 DEG C of work temperature
Degree；CH4The sensitive circuit layer of sensor supports Nanometer gallium oxide particle sensitive electrode layer, sensitive electrode anode by Woelm Alumina
Terminal pin and sensitive electrode negative wire foot are constituted；In sensitive electrode positive wire foot and sensitive electrode cathode when working sensor
Apply the pump oxygen voltage of 0.1-2.0V, while measure loop electric current I between terminal pin；
I∝C·PCH4 1/3
C:Constant；PCH4：CH in tested atmosphere4Partial pressure.
According to above-mentioned relation：The value of loop current I and the CH in tested atmosphere4Divide PCH4At certain proportionate relationship, i.e.,
One specific PCH4Corresponding certain loop current I values, CH can be calculated by loop current I values size4Concentration.
For the utility model using compact aluminum oxide ceramic as supporting layer and insulating layer, it is to visit to support gallium oxide with Woelm Alumina
Survey the CH of layer4Concentration detection sensor；Nanometer gallium oxide particle is injected into inside porous alumina ceramic and forms composite ceramics
Detection electrode gives full play to Nanometer gallium oxide material to CH4Sensitivity characteristic and aluminium oxide ceramics insulation characterisitic, using heating
Mode built in circuit, shortens the startup time of sensor, and Woelm Alumina supports the CH of Nanometer gallium oxide base4Sensitivity characteristic,
High temperature resistant and corrosion resistance characteristic are comprehensively utilized；And CH4The detection of concentration not by the environment such as other gas componants and flow because
The influence of element, alumina base sensor structure are stablized.
The advantages of basic principles and main features and the utility model of the utility model have been shown and described above.One's own profession
The technical staff of industry is it should be appreciated that the present utility model is not limited to the above embodiments, described in above embodiments and description
Only illustrate the principles of the present invention, on the premise of not departing from the spirit and scope of the utility model, the utility model is also
It will have various changes and improvements, these various changes and improvements fall within the scope of the claimed invention.The utility model
Claimed range is defined by the appending claims and its equivalent thereof.
Claims (4)
1. a kind of ceramic matrix CH4Sensor, which is characterized in that the CH4Sensor includes：
One sensitive circuit supporting layer；
The one interior heater circuit supporting layer being arranged below sensitive circuit supporting layer, interior heater circuit supporting layer internal heater；
The heater is Pt heater circuits, thickness at 5-50 μm, Pt heater circuits be equipped with Pt heating cathodes terminal pin and
Pt heats negative wire foot；
The one sensitive circuit layer being arranged above sensitive circuit supporting layer, sensitive circuit layer by sensitive electrode layer, sensitive electrode just
Pole terminal pin and sensitive electrode negative wire foot composition；
The sensitive electrode layer is that Woelm Alumina supports Nanometer gallium oxide particle sensitive electrode layer, and thickness is 1-500 μm；
Sensitive circuit supporting layer, interior heater circuit supporting layer, sensitive circuit layer are sintering one-pass molding structure.
2. a kind of ceramic matrix CH according to claim 14Sensor, which is characterized in that the sensitive circuit supporting layer by
Compact aluminum oxide ceramic material is made, and thickness is 100-500 μm.
3. a kind of ceramic matrix CH according to claim 14Sensor, which is characterized in that the interior heater circuit supporting layer
It is made of compact aluminum oxide ceramic material, thickness is 10-500 μm.
4. a kind of ceramic matrix CH according to claim 14Sensor, which is characterized in that the sensitive circuit layer is that Pt is quick
Sense electrode lead wire circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820147416.XU CN208013139U (en) | 2018-01-29 | 2018-01-29 | A kind of ceramic matrix CH4Sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820147416.XU CN208013139U (en) | 2018-01-29 | 2018-01-29 | A kind of ceramic matrix CH4Sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208013139U true CN208013139U (en) | 2018-10-26 |
Family
ID=63884785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820147416.XU Expired - Fee Related CN208013139U (en) | 2018-01-29 | 2018-01-29 | A kind of ceramic matrix CH4Sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208013139U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108318566A (en) * | 2018-01-29 | 2018-07-24 | 上海艾瓷传感科技有限公司 | A kind of ceramic matrix CH4Sensor |
| CN110865100A (en) * | 2019-12-18 | 2020-03-06 | 中国电子科技集团公司第四十九研究所 | Sheet-type structure integrated catalytic combustion type combustible gas sensor and preparation method thereof |
-
2018
- 2018-01-29 CN CN201820147416.XU patent/CN208013139U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108318566A (en) * | 2018-01-29 | 2018-07-24 | 上海艾瓷传感科技有限公司 | A kind of ceramic matrix CH4Sensor |
| CN110865100A (en) * | 2019-12-18 | 2020-03-06 | 中国电子科技集团公司第四十九研究所 | Sheet-type structure integrated catalytic combustion type combustible gas sensor and preparation method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181026 |