CN104897763B - A kind of method of NOx content in nitrogen oxide sensor and measurement tail gas - Google Patents
A kind of method of NOx content in nitrogen oxide sensor and measurement tail gas Download PDFInfo
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Abstract
The invention discloses a kind of method of NOx content in nitrogen oxide sensor and measurement tail gas, nitrogen oxide sensor includes first layer substrate, second layer substrate, third layer substrate, the 4th layer of substrate, layer 5 substrate, layer 6 substrate, layer 7 substrate, the 8th layer of substrate and the 9th layer of substrate；The upper surface of first layer substrate, which is provided with annular main electrode and first layer substrate, includes the first diffusion barrier layer, is provided with second layer substrate and determines oxygen chamber, determines to determine oxygen electrode provided with annular in oxygen chamber；Include the second diffusion barrier layer in third layer substrate；Include reduction chamber in 4th layer of substrate, be provided with reduction chamber and compare electrode and measuring electrode；Comprising chamber is referred in layer 5 substrate, reference electrode is provided with reference cavity room；Heating electrode is provided between layer 7 substrate and the 8th layer of substrate.The present invention accelerates gas diffusion to the time of measurement chamber, improves response time of nitrogen oxide sensor；Manufacture craft is simple, is readily produced, and production cost is low, service life length.
Description
Technical field
The invention belongs to sensor technical field, more particularly, to NOx in a kind of nitrogen oxide sensor and measurement tail gas
The method of content.
Background technology
The tail gas of motor vehicle emission has become the main source of air NOx pollutants, due to national exhaust emission standard
Improve, it is necessary to carry out detecting and handling in real time to the NOx discharge in tail gas, and nitrogen oxide sensor is the core in the detecting system
One of center portion part.
Traditional nitrogen oxide sensor is laminated structure, is formed by stacking using multilayer zirconia ceramics piece, by electrochemical layer with
Zone of heating combines, and electrochemical layer mainly completes a series of electrochemistry and cartalytic decomposition effect, to realize to NOx gases
Measurement；Zone of heating mainly gives nitrogen oxide sensor heating, makes up to electrochemical layer electrochemistry and the temperature needed for catalytic reaction.Pass
The electrode of the nitrogen oxide sensor of system uses the metal material Au to oxynitrides almost catalytically inactive.Nitrogen oxide sensor core
For piece in course of normal operation, the heating electrode temperature of zone of heating is up to 1000 DEG C, is sufficiently close to Au 1064 DEG C of fusing point, influences
The heating effect of nitrogen oxide sensor, thus it is unsatisfactory as electrode, effect using traditional Au.
Contain multiple chambers in its internal structure of traditional nitrogen oxide sensor, manufacturing process is complicated, and reduces chamber week
The contact area of the two zirconia ceramics pieces enclosed, reduce the structural strength on the nitrogen oxide sensor head where chamber.
The internal electrode of traditional nitrogen oxide sensor uses rectangle structure more, in process inside nitrogen oxide sensor
Easily there is the phenomenon of stress concentration in sharp corner near electrode, then nitrogen oxide sensor in the course of the work, its internal electrode
The problems such as neighbouring sharp corner is extremely easily cracking, greatly reduce the service life of nitrogen oxide sensor.
Decomposition of the measuring electrode of traditional nitrogen oxide sensor to NOx is slower, therefore the NOx inside and outside nitrogen oxide sensor is dense
Degree difference is not very big, and the speed that NOx diffuses into reduction chamber from outside is more slow, then NOx decompose caused by electric current compared with
Small, sensitivity is not high.
The content of the invention
The defects of for prior art, it is an object of the invention to provide a kind of nitrogen oxide sensor, it is intended to solves existing skill
In art due to traditional nitrogen oxide sensor internal chamber structure and measuring electrode and the material and shape of heating electrode, cause nitrogen oxygen
Sensor manufacturing process is complicated, and head strength is relatively low, and electrode nearby goes out easily existing cracking, heats heated by electrodes less effective, sensitive
The not high technical problem of degree.
The invention provides a kind of nitrogen oxide sensor, including first layer substrate, the second layer base laminated successively from top to bottom
Piece, third layer substrate, the 4th layer of substrate, layer 5 substrate, layer 6 substrate, layer 7 substrate, the 8th layer of substrate and the 9th layer
Substrate；The upper surface of the first layer substrate is provided with the main electrode of annular, and includes first in the first layer substrate
Barrier layer is spread, vehicle exhaust enters nitrogen oxide sensor by the described first diffusion barrier layer；Cylinder is provided with the second layer substrate
The bodily form determines oxygen chamber, described to determine to determine oxygen electrode provided with annular in oxygen chamber；Include the second expansion in the third layer substrate
Dissipate barrier layer；Include tubular reduction chamber in the 4th layer of substrate, be provided with the reduction chamber compare electrode and
Measuring electrode；Comprising referring to chamber in the layer 5 substrate, described is the reference gas channel being connected with air with reference to chamber,
Reference electrode is provided with the reference cavity room；Heating electrode is provided between the layer 7 substrate and the 8th layer of substrate.
Further, the material of the main electrode is to cermet of the NOx compounds without catalytic action.
Further, the cermet is made up of Pt, YSZ (yttria-stabilized zirconia).
Further, the described first material for spreading barrier layer is the mixing of aluminum oxide and graphite, the volume basis of graphite
Than for 5%~25%Vol, because graphite can be sintered in nitrogen oxide sensor manufacturing process, therefore diffusion barrier has certain hole
Gap, it is allowed to which gas passes through.
Further, the material of the heating electrode is platinum.
Further, the material of the measuring electrode is the composite being made up of NiO, CuO and YSZ, described compound
YSZ percent by volume is 5%~30%Vol in material, and CuO percent by volume is 7%~38%Vol.
Further, a coating is attached with the measuring electrode, the material of the coating is element containing Mn
0%~10%Vol brilliant sharp stone.
Present invention also offers a kind of method based on NOx content in above-mentioned nitrogen oxide sensor measurement tail gas, including under
State step：
(1) heated by the heating electrode pair nitrogen oxide sensor so that in each chamber of nitrogen oxide sensor
Oxygen is pumped out in the form of oxonium ion from each chamber interior；Determine oxygen chamber when under test gas is entered by the first diffusion barrier layer
When, by main electrode and determining to apply main pump voltage between oxygen electrode so that determine the oxygen in oxygen chamber in the form of oxonium ion
Pump out；Remaining gas enters reduction chamber by the second diffusion barrier layer, and by adjusting main pump voltage, oxygen in oxygen chamber is determined in control
Pump output so that reference voltage Vc is maintained at 450mv or so so that the oxygen concentration in reduction chamber be maintained at 1~
5ppm level；Pass through the voltage of application -2v~+2v between measuring electrode and main electrode so that decomposite the O2 come by not
It is disconnected to pump out, produce pump electric current Ip1；
(2) pump electric current Ip1 is gathered；
(3) content of NOx under test gas is obtained according to the pump electric current Ip1.
Wherein, main pump voltage is -2v~+2v.
Wherein, step S3 is specially：It is 1000ppm~3000ppm by measuring NOx that concentration is 0ppm and full journey respectively
NOx under the conditions of pump electric current Ip1, the proportionate relationship between different NOx content and pump electric current Ip1 can be drawn, so as to root
NOx content is obtained according to any current value Ip1 measured.
The present invention can realize following technique effect：(1) there was only 3 inside nitrogen oxide sensor of the invention in structure altogether
Individual chamber, compared to 5 chambers of more traditional nitrogen oxide sensor, reduce by 2 chambers.By the reduction that chamber is taken up space, this
Sample just increases the contact area between the zirconia ceramics substrate around chamber, improves the nitrogen oxide sensor head where chamber
The structural strength in portion.In addition the present invention also simplify the structure of nitrogen oxide sensor, so that the making of whole nitrogen oxide sensor
Technique becomes more simple, is readily produced, and reduces production cost.(2) in the present invention, nitrogen oxide sensor determines oxygen chamber and measurement
Chamber is cylinder, and main electrode, measuring electrode, to compare electrode be annular.Compared to the length of traditional nitrogen oxide sensor
Cube chamber and rectangular electrodes, the internal wedge angle of the present invention are all excessive using circular arc, hence it is evident that reduce answering for sensor internal
Power is concentrated, and the possibility of its internal cleavage is greatly reduced, so as to improve its service life.(3) in the present invention, heating electrode is
Metal platinum, the fusing point of platinum is 1772 DEG C, far above 1000 DEG C of heating-up temperature, is compared to using metallic gold as electrode, can't go out
The problems such as hardness declines, volatilized in present heating process, its heating effect is good.(4) present invention in, measuring electrode by NiO,
CuO and YSZ composite is made.YSZ percent by volume is 5%~30%Vol in composite, CuO volume basis
Than for 7%~38%Vol.There is a coating in measuring electrode, the material of coating is the 0%~10%Vol of element containing Mn crystalline substance
Sharp stone.Compared to traditional nitrogen oxide sensor measuring electrode material, this material can improve decomposition speed of the NOx in measuring electrode
Degree, so that the NOx of reduction chamber concentration is lower, the NOx for determining oxygen chamber is accelerated to diffuse into reduction chamber, and then accelerate nitrogen
NOx outside lambda sensor, which is diffused into, determines oxygen chamber.Because diffusion is accelerated, then electric current increases as caused by being decomposed NOx, Jin Erzeng
The sensitivity for adding NOx to measure.
Brief description of the drawings
Fig. 1 is the cross section view of nitrogen oxide sensor provided in an embodiment of the present invention.
Fig. 2 is the three-dimensional structure view of nitrogen oxide sensor provided in an embodiment of the present invention.
Fig. 3 is nitrogen oxide sensor schematic diagram provided in an embodiment of the present invention.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
Nitrogen oxide sensor provided by the invention can measure the content of NOx in tail gas, suitable for nitrogen oxide in automobile exhaust
The measurement of gas.Fig. 1 shows the cross section view of nitrogen oxide sensor provided in an embodiment of the present invention, for convenience of description, only shows
The part related to the embodiment of the present invention is gone out, details are as follows：Nitrogen oxide sensor provided by the invention is by zirconia ceramics substrate
Stacking is formed, including first layer substrate, second layer substrate, third layer substrate, the 4th layer of substrate, layer 5 substrate, layer 6 base
Piece, layer 7 substrate, the 8th layer of substrate and the 9th layer of substrate laminate successively from top to bottom.First layer substrate upper surface is provided with circle
Annular main electrode 1, includes the first diffusion barrier layer 2 in first layer substrate, and vehicle exhaust, which passes through this diffusion barrier layer 2 and enters nitrogen oxygen, to be passed
Sensor；Certain oxygen chamber 4 is provided with second layer substrate, determines to determine oxygen electrode 3 provided with annular in oxygen chamber 4；In third layer substrate
Include the second diffusion barrier layer 5；Include reduction chamber 7 in 4th layer of substrate, be provided with reduction chamber 7 and compare electrode 6 and survey
Measure electrode 8；It is the reference gas channel being connected with air with reference to chamber 10 comprising chamber 10 is referred in layer 5 substrate, reference
Reference electrode is provided with chamber 10；Include heating electrode between layer 7 and the 8th layer of substrate.
In embodiments of the present invention, main electrode 1 and compare electrode 6 material can be to NOx compounds without catalysis make
Cermet, mainly it is made up of Pt, YSZ (yttria-stabilized zirconia), the outer surface of main electrode 1 covers one layer of protection
Layer, the material of protective layer can be aluminum oxide.
In embodiments of the present invention, the material for spreading barrier layer (2,5) can be the aluminum oxide for having certain porosity.
In embodiments of the present invention, the material of measuring electrode can be platinum rhodium and YSZ (yttria-stabilized zirconia), to vapour
Oxynitrides in tail gas is sensitive.
As one embodiment of the present of invention, the upper and lower surface of zone of heating is all covered with insulating barrier.Heating electrode material can be with
It is platinum.
As one embodiment of the present of invention, the material of insulating barrier can be fine and close aluminum oxide.
Beneficial effects of the present invention are characterized in particular in：There was only 3 chambers inside nitrogen oxide sensor of the invention altogether in structure
Room, compared to 5 chambers of more traditional nitrogen oxide sensor, reduce by 2 chambers.Gas so in tail gas can pass through diffusion
Barrier is directly entered and determines oxygen chamber, accelerates gas diffusion to the time for measuring chamber, during so as to improve the response of nitrogen oxide sensor
Between.In addition the present invention also simplify the structure of nitrogen oxide sensor, so that the manufacture craft of whole nitrogen oxide sensor becomes more
To be simple, it is readily produced, reduces production cost.
In the present invention, determine the oxygen chamber and measurement chamber of nitrogen oxide sensor are cylinder, main electrode, measuring electrode, ratio
It is annular compared with electrode.Compared to the rectangular fluid chamber and rectangular electrodes of traditional nitrogen oxide sensor, inside the present invention
Wedge angle is all excessive using circular arc, hence it is evident that reduces the stress concentration of sensor internal, greatly reduces the possibility of its internal cleavage
Property, so as to improve its service life.
In the embodiment of the present invention, heating electrode can be metal platinum, and the fusing point of platinum is 1772 DEG C, far above heating-up temperature
1000 DEG C, it is compared to using metallic gold as electrode, does not appear in the problems such as hardness in heating process declines, volatilized, it adds
Thermal effect is good.
For further description nitrogen oxide sensor provided in an embodiment of the present invention, in conjunction with accompanying drawing, details are as follows：
Fig. 1 is the NOx sensor section of structure of the embodiment of the present invention.As shown in figure 1, the present invention nitrogen oxide sensor by
Nine layers of zirconia ceramics substrate stacking are formed.First layer substrate upper surface is provided with main electrode 1, and is included in first layer substrate
One diffusion barrier layer 2, vehicle exhaust enter nitrogen oxide sensor by this diffusion barrier layer；Certain oxygen chamber 4 is provided with second layer substrate,
Determine to be provided with oxygen chamber and determine oxygen electrode 3；Include the second diffusion barrier layer 5 in third layer substrate；Include in 4th layer of substrate also
Former chamber 7, interior be provided with of reduction chamber 7 compare electrode 6 and measuring electrode 8；Included in layer 5 substrate and refer to chamber 10, reference cavity
Room 10 is the reference gas channel being connected with air, with reference to being provided with reference electrode 9 in chamber 10；Layer 7 and the 8th layer of substrate it
Between include heating electrode 11.
In embodiments of the present invention, main electrode and to compare the material that electrode is all be without catalytic action to NOx compounds
Cermet, mainly it is made up of Pt, YSZ (yttria-stabilized zirconia), main electrode outer surface covers layer protective layer, material
Material is aluminum oxide.The material for spreading barrier layer is that have certain porosity alumina.The material of measuring electrode be by NiO, CuO and
YSZ composite is made.YSZ percent by volume is 5%~30%Vol in composite, and CuO percent by volume is
7%~38%Vol.There is a coating in measuring electrode, the material of coating is the 0%~10%Vol of element containing Mn brilliant sharp stone.
Zone of heating upper and lower surface is all covered with insulating barrier.The material of insulating barrier is fine and close aluminum oxide.Heating electrode material is platinum.Will standard
Really measuring NOx content in gas first must just discharge the oxygen of nitrogen oxide sensor internal chamber, and removing gas Central Plains has oxygen
Interference, then by measure NOx decomposite come O2 contents, calculate gas in NOx content, that is, complete nitrogen oxygen biography
Measurement of the sensor to NOx gases.During measurement, nitrogen oxide sensor is heated by heating electrode 11, using zirconia ceramics in height
The lower electrolyte characteristics presented of temperature, can cause oxygen to be pumped out in the form of oxonium ion from nitrogen oxide sensor chamber interior.
As shown in figure 3, the electrode inside nitrogen oxide sensor forms four loops.Wherein compare electrode 6 and the structure of reference electrode 9
Into the first loop, for measuring reduction chamber 7 and the oxygen concentration difference with reference to chamber 10；
Main electrode 1 forms second servo loop with oxygen electrode 3 is determined, and the pump oxygen amount of oxygen chamber is determined in control so that determines oxygen chamber 4 and goes back
The oxygen concentration of former chamber 7 is in 1~5ppm, so as to ensure to compare the voltage between electrode 6 and reference electrode 9 as 450mv or so.
Measuring electrode 8 and main electrode 1 form tertiary circuit, for measuring the NOx decomposed in measuring electrode 8 content,
The content of NOx i.e. in gas.
Heat electrode 11 and form the 4th loop, for being heated for nitrogen oxide sensor, exist so as to obtain zirconia ceramics
Electrolyte characteristics under high temperature so that oxygen is pumped out in the form of oxonium ion.
During measurement, nitrogen oxide sensor is heated electrode 11 and is heated between 600 DEG C to 800 DEG C, and gas passes through the first diffusion
Barrier layer 2, which enters, determine oxygen chamber 4, main electrode 1 and determines to apply a main pump voltage between oxygen electrode 3, can be by oxygen from nitrogen oxygen sensing
Pumped out inside device.The main pump voltage is determined by the reference voltage Vc compared between electrode 6 and reference electrode 9.
Remaining gas enters reduction chamber 7 by the second diffusion barrier layer 5.Reference electrode one end is placed in air, reference
Electrode and compare and reference voltage Vc (electric potential signals that the difference in oxygen concentration of an atmosphere where electrode determines between electrode be present
Meet Nernst equation).
In the solid electrolyte of zirconium oxide composition, this special (Nernst) equation of energy is used for calculating electrolyte both ends due to oxygen
Concentration looks into potential caused by difference.
Wherein, R is ideal gas constant；T is temperature；N is the electron transfer number of reaction equation；F is Faraday constant；Po is
Oxygen concentration in air, p are reduction chamber oxygen concentrations；(600~800 DEG C) at a certain temperature, air is with reducing chamber not
Same oxygen concentration difference will have potential corresponding to one to export.
By adjusting main pump voltage, the pump output of oxygen in oxygen chamber 4 is determined in control so that reference voltage Vc is maintained at 450mv
Left and right, you can the difference in oxygen concentration of atmosphere where ensureing reference electrode and comparing electrode, it is dense so as to ensure to reduce the oxygen in chamber 7
Degree is maintained at very small level (in 1~5PPM ranks).
Material is the material sensitive to NOx used by measuring electrode 8 in reduction chamber 7.In measuring electrode 8 high temperature and
Catalyst can allow NOx to resolve into N2 and O2, and an appropriate voltage is added between measuring electrode 8 and main electrode 1, decomposite the O2 come
Constantly pumped out, produce pump electric current Ip1, the content of the NOx in gas can be calculated by measuring pump current value Ip1, that is, is completed
Measurement of the nitrogen oxide sensor to NOx gases.NOx content and caused pump electric current Ip1 are linearly proportional in gas, lead to
Cross and measure concentration respectively to demarcate pump electric current Ip1 values under conditions of 0ppm NOx and 2000ppm NOx, containing for NOx can be drawn
Proportionate relationship between amount and caused pump electric current Ip1, so as to calculate NOx according to any current value Ip1 values measured
Content.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles of the invention etc., all should be included
Within protection scope of the present invention.
Claims (6)
- A kind of 1. nitrogen oxide sensor, it is characterised in that including laminate successively from top to bottom first layer substrate, second layer substrate, Third layer substrate, the 4th layer of substrate, layer 5 substrate, layer 6 substrate, layer 7 substrate, the 8th layer of substrate and the 9th layer of base Piece；The upper surface of the first layer substrate is provided with the main electrode (1) of annular, and includes in the first layer substrate One diffusion barrier layer (2), vehicle exhaust enter nitrogen oxide sensor by the described first diffusion barrier layer (2)；Be provided with the second layer substrate it is tubular determine oxygen chamber (4), it is described to determine that oxygen chamber (4) is interior to determine oxygen provided with annular Electrode (3)；Include the second diffusion barrier layer (5) in the third layer substrate；Include tubular reduction chamber (7) in the 4th layer of substrate, be provided with the reduction chamber (7) and compare electrode And measuring electrode (8) (6)；Comprising chamber (10) is referred in the layer 5 substrate, the reference chamber (10) is that the reference gas being connected with air leads to Road, the reference chamber (10) is interior to be provided with reference electrode；Heating electrode is provided between the layer 7 substrate and the 8th layer of substrate；The material of the measuring electrode (8) is The composite being made up of NiO, CuO and YSZ, YSZ percent by volume is 5%~30%Vol, CuO in the composite Percent by volume be 7%~38%Vol；The material of the main electrode (1) is to cermet of the NOx compounds without catalytic action；The material of first diffusion barrier layer (2) is aluminum oxide and the mixture of graphite, and the percent by volume of graphite is 5%~25% Vol, because graphite can be sintered in nitrogen oxide sensor manufacturing process, therefore diffusion barrier has certain hole, it is allowed to which gas leads to Cross；The material of the heating electrode is platinum；During work, heated by heating electrode pair nitrogen oxide sensor so that the oxygen in each chamber of nitrogen oxide sensor Pumped out in the form of oxonium ion from each chamber interior；Determine oxygen chamber (4) when under test gas is entered by the first diffusion barrier layer (2) When, by main electrode (1) and determining to apply main pump voltage between oxygen electrode (3) so that determine the oxygen in oxygen chamber (4) with oxygen The form of ion pumps out；Remaining gas enters reduction chamber (7) by the second diffusion barrier layer (5), by adjusting main pump voltage, The pump output of oxygen in oxygen chamber (4) is determined in control so that reference voltage Vc is maintained at 450mv or so, so that reduction chamber (7) Interior oxygen concentration is maintained at 1~5ppm level.
- 2. nitrogen oxide sensor as claimed in claim 1, it is characterised in that the cermet is made up of Pt and YSZ.
- 3. nitrogen oxide sensor as claimed in claim 1, it is characterised in that a coating is attached with the measuring electrode, The material of the coating is the 0%~10%Vol of element containing Mn brilliant sharp stone.
- 4. a kind of method of NOx content in nitrogen oxide sensor measurement tail gas based on described in claim 1, it is characterised in that bag Include following step：S1:Heated by the heating electrode pair nitrogen oxide sensor so that the oxygen in each chamber of nitrogen oxide sensor Pumped out in the form of oxonium ion from each chamber interior；Determine oxygen chamber (4) when under test gas is entered by the first diffusion barrier layer (2) When, by main electrode (1) and determining to apply main pump voltage between oxygen electrode (3) so that determine oxygen in oxygen chamber (4) with oxygen from The form of son pumps out；Remaining gas enters reduction chamber (7) by the second diffusion barrier layer (5), by adjusting main pump voltage, control Formulate the pump output of oxygen in oxygen chamber (4) so that reference voltage Vc is maintained at 450mv or so, so that in reduction chamber (7) Oxygen concentration be maintained at 1~5ppm level；Pass through application -2v~+2v between measuring electrode (8) and main electrode (1) Voltage so that decomposite the O come2 Constantly pumped out, produce pump electric current Ip1；S2:Gather pump electric current Ip1；S3:The content of NOx under test gas is obtained according to the pump electric current Ip1.
- 5. method as claimed in claim 4, it is characterised in that the main pump voltage is -2v~+2v.
- 6. method as claimed in claim 4, it is characterised in that step S3 is specially：It is 0ppm's by measuring concentration respectively Pump electric current Ip1 under the conditions of the NOx that NOx and full journey are 1000ppm~3000ppm, different NOx content and pump electric current can be drawn Proportionate relationship between Ip1, so as to obtain NOx content according to any current value Ip1 measured.
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| CN107328837B (en) * | 2017-07-24 | 2019-07-19 | 深圳安培龙科技股份有限公司 | A kind of structure improved nitrogen oxide sensor |
| CN108872482B (en) * | 2018-06-22 | 2022-03-04 | 西安创联电气科技（集团）有限责任公司 | Diaphragm of nitrogen oxygen sensor ceramic chip |
| CN109298057A (en) * | 2018-09-03 | 2019-02-01 | 上海长园维安电子线路保护有限公司 | A kind of nitrogen oxide sensor ceramic chip |
| CN109507262A (en) * | 2018-11-21 | 2019-03-22 | 温州百岸汽车零部件有限公司 | A kind of NOx sensor chip pumping current adjustment |
| CN109375513B (en) * | 2018-11-28 | 2020-05-19 | 华中科技大学 | Nitrogen oxygen sensor control system |
| CN110907522A (en) * | 2019-12-03 | 2020-03-24 | 湖北丹瑞新材料科技有限公司 | Method for improving measurement precision of nitrogen-oxygen sensor |
| CN112198206A (en) * | 2020-09-21 | 2021-01-08 | 苏州禾苏传感器科技有限公司 | Electrochemical gas sensor chip |
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| US5034112A (en) * | 1988-05-19 | 1991-07-23 | Nissan Motor Company, Ltd. | Device for measuring concentration of nitrogen oxide in combustion gas |
| DE69837023T2 (en) * | 1997-03-28 | 2007-11-22 | NGK Spark Plug Co., Ltd., Nagoya | NOx sensor |
| JP4028289B2 (en) * | 2002-04-26 | 2007-12-26 | 日本碍子株式会社 | NOx decomposition electrode and NOx concentration measuring device |
| JP5053151B2 (en) * | 2008-03-31 | 2012-10-17 | 日本碍子株式会社 | Gas sensor and NOx sensor |
| US20100057375A1 (en) * | 2008-08-29 | 2010-03-04 | Park Jinsu | Structure of NOx sensor and its calculating method of total total NOx concentration |
| CN102608183B (en) * | 2012-03-13 | 2014-03-12 | 华中科技大学 | Nitrogen-oxygen sensor |
| CN103880423B (en) * | 2014-03-21 | 2017-01-18 | 天津锦美碳材科技发展有限公司 | Graphite/Al2O3 composite material and preparation method thereof |
| CN203929705U (en) * | 2014-06-30 | 2014-11-05 | 东风电子科技股份有限公司 | Nox sensor chip |
| CN104483367B (en) * | 2014-12-08 | 2017-02-22 | 西安交通大学 | Solid thin film electrolyte current mode SO2 gas sensor and preparation method thereof |
| CN204613147U (en) * | 2015-04-30 | 2015-09-02 | 武汉爱德威科技有限责任公司 | A kind of nitrogen oxide sensor |
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