CN203929705U - Nox sensor chip - Google Patents
Nox sensor chip Download PDFInfo
- Publication number
- CN203929705U CN203929705U CN201420357889.4U CN201420357889U CN203929705U CN 203929705 U CN203929705 U CN 203929705U CN 201420357889 U CN201420357889 U CN 201420357889U CN 203929705 U CN203929705 U CN 203929705U
- Authority
- CN
- China
- Prior art keywords
- electrode
- substrate
- cavity
- pump oxygen
- nox sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The utility model relates to a kind of NOx sensor chip, its principal feature is, comprise the first substrate, the second substrate, the 3rd substrate, the 4th substrate, the 5th substrate and the 6th substrate laminate from top to bottom successively, the first described substrate upper surface is provided with pump oxygen external electrode, in the second described substrate, comprise the first cavity, the second cavity, the 3rd cavity and the 4th cavity, between be provided with gas diffusion barrier layer, in the 3rd described cavity, be provided with main pump oxygen electrode, in the 4th described cavity, be provided with service pump oxygen electrode and test electrode, on described test electrode, cover the second porous protective layer, the 4th described substrate is provided with reference gas passage, and channel roof is provided with contrast electrode, between the 5th described substrate and the 6th described substrate, be provided with heating electrode.The pollution that adopts the advantage of this kind of structure to be to avoid the volatilization of gold in electrode to cause, make substrate sintered compact simple in conjunction with, technological process simple structure, can accurately measure oxynitride concentration in vehicle exhaust.
Description
Technical field
The utility model relates to automobile emission gas analyzer system field, and particularly tail gas detecting sensor chip, relates in particular to a kind of NOx sensor chip.
Background technology
NOx sensor is a very important sensor in present automobile, for detection of the concentration content of NOx in motor vehicle exhaust emission.Countries in the world are the problem to environment for motor vehicle exhaust emission, and it is more and more stricter that the Standard andRegulation of appearance is also becoming.The NOx concentration of this sensor based on ceramic sensor element in can measured automobiles tail gas, and input signal is sent to engine electronic control unit (ECU), in order to realize the most efficiently controlling engine combustion process and exhaust aftertreatment.In diesel locomotive, this realizes by ammoniacal liquor being injected to SCR (SCR) system; In petrol engine, by control the regeneration period of NOx storage catalyst in conjunction with lean-combustion engine technology, realize.Therefore, ceramic component NOx sensor is being brought into play very important effect in this respect.
General N Ox sensor chip is slice structure, mainly by six layers or more multi-layered yttrium stable zirconium oxide potsherd, is formed by stacking, and manufacture craft is all very complicated.Owing to containing in disactivation electrode the oxynitrides metal material gold of catalytically inactive almost, the fusing point of gold is 1064 ℃, and solid electrolyte ZrO
2sintering temperature when material is used for making sensor chip is up to 1400～1500 ℃, and in sintering process, the volatilization of gold can be polluted activated electrode, and the performance of activated electrode is significantly reduced, and has had a strong impact on the performance of NOx sensor.
In order to prevent in sintering process that the volatilization of gold in disactivation electrode pollutes activated electrode, Jap.P. (JP090171015) discloses separately to be made main part and ejectment element, and then by both adhesive bond low-temperature sinterings together.Figure 1 shows that the STRUCTURE DECOMPOSITION figure of this utility model, ZrO
2-1, ZrO
2-2, ZrO
2-3, ZrO
2-4, ZrO
2-5, ZrO
2-7 what represent is zirconium oxide substrate; Al
2o
3-6 what represent is compact aluminum oxide matter insulation course.
The method can be avoided the pollution of the volatilization of noble metal Au in nonactive electrode to activated electrode, the NOx sensor of making also can be realized the measuring ability to NOx concentration, but technological process is very complicated, is difficult to realize large-scale production, and still exists following problem to need to solve:
1, thermal expansion matching and the sealing problem of main part and ejectment element and jointing material.
2, the bonding rear heat resistanceheat resistant of main part and the ejectment element endurance issues of shaking is difficult to solve.
3, between main part and ejectment element, because causing contact conductor, out-of-flatness connects difficult problem.
Chinese patent (CN102043007A) discloses and on the 4th electrode, has covered last layer Woelm Alumina protective seam; the pollution of the volatilization of gold to activated electrode in nonactive electrode in the time of can avoiding sintering in structure, and only need be by the superimposed rear disposable sinter molding of six substrates.Although well solved an overall time sintering and moulding technology difficult problem, but still had the problems such as cost is large, technological process is loaded down with trivial details.
Also there is researcher to change the zirconia of heating electrode levels into fine and close alumina substrate, reduced the manufacture craft of heating electrode top and the bottom compact aluminum oxide insulation courses, but due to the difference of aluminium oxide and zirconia material character, the superimposed sintered compact of the substrate of two kinds of materials is in conjunction with still there being some technical difficulties.
So, a kind of pollution that can either avoid volatilization golden in electrode to cause, can make again the combination of substrate sintered compact and the simple NOx sensor chip of technological process is extremely to have practical value.
Utility model content
The utility model is in order to address the above problem, pollution that a kind of volatilization that can avoid in electrode gold causes is provided, make substrate sintered compact in conjunction with, technological process simple structure is simple, the efficiency of heating surface is high and good uniformity, the NOx sensor chip that can accurately measure oxynitride concentration in vehicle exhaust.
To achieve these goals, the NOx sensor chip that the utility model provides, forms by substrate is stacked, comprises that the first substrate, the second substrate, the 3rd substrate, the 4th substrate, the 5th substrate and the 6th substrate laminate from top to bottom successively,
The first described substrate upper surface is provided with pump oxygen external electrode, on described pump oxygen external electrode, covers the first porous protective layer;
In the second described substrate, comprise the first cavity, the second cavity, the 3rd cavity and the 4th cavity,
Between the first described cavity and the second described cavity, be provided with the first diffusion barrier layer, between the second described cavity and described the 3rd cavity, be provided with the second diffusion barrier layer, between the 3rd described cavity and the 4th described cavity, be provided with the 3rd diffusion barrier layer, the first described diffusion barrier layer, the second described diffusion barrier layer and the 3rd diffusion barrier layer are porous medium diffusion barrier layer, in the 3rd described cavity, be provided with main pump oxygen electrode, in the 4th described cavity, be provided with service pump oxygen electrode and test electrode, on described test electrode, cover the second porous protective layer;
The 4th described substrate is provided with the reference gas passage being connected with atmosphere, and the lower surface that is positioned at the top of described reference gas passage and is positioned at the 3rd described substrate is provided with contrast electrode;
Between the 5th described substrate and the 6th described substrate, be provided with heating electrode.
Preferably, described main pump oxygen electrode is the metallic ceramics main pump oxygen electrode without catalytic action to NOx compound.
Preferably, described service pump oxygen electrode is the metallic ceramics service pump oxygen electrode without catalytic action to NOx compound, comprises Pt service pump oxygen electrode, Ag service pump oxygen electrode and ZrO
2a kind of in service pump oxygen electrode.
Preferably, described substrate is 5YSZ substrate.
Preferably, described test electrode is Pt-Pd test electrode or Pt-Rh test electrode.
Preferably, described pump oxygen dispatch from foreign news agency Pt pump oxygen external electrode very.
Preferably, described contrast electrode is Pt electrode.
Preferably, described the second porous protective layer is aluminum oxide porous protective seam or zirconia porous protective layer.
Preferably, the upper and lower surface of described heating electrode is all covered with insulation course.
More preferably, described insulation course is compact aluminum oxide insulation course.
Preferably, the first described diffusion barrier layer, described the second diffusion barrier layer and the 3rd diffusion barrier layer are zirconia diffusion barrier layer.
The beneficial effects of the utility model are specifically: in structure of the present invention, need in reference air duct, on contrast electrode, not cover porous alumina layer, in structure, simplified preparation process, and by the unique heating electrode of design, make sensor chip reach soon working temperature, and remaining on relatively stable working temperature region, the Real-Time Monitoring of temperature control electrode and information feedback have realized the control of this function.The manufacture craft process of whole sensor chip is simple, cost-saving, is easy to scale production.
During this technical application is novel, on test electrode, cover the porous protective layer that last layer is made by aluminium oxide or zirconia material, prevent the pollution that in sintering process, in service pump oxygen electrode, the volatilization of gold causes test electrode.Adopt six layers of substrate superimposed static pressure that waits successively after typography, the once sintered preparation technology who forms, the NOx sensor chip of preparation can be applied to the accurate measurement of NOx gas concentration in vehicle exhaust exhaust.
Accompanying drawing explanation
Fig. 1 is the sensor construction exploded view of existing Jap.P. JP090171015.
Fig. 2 is the sensor construction sectional view of existing Chinese patent CN102043007A.
Fig. 3 is the NOx sensor chip section of structure of the utility model embodiment.
Fig. 4 is the NOx sensor chip heating electrode vertical view of the utility model embodiment.
Embodiment
Below in conjunction with accompanying drawing, specific implementation method of the present utility model is described further.
Fig. 3 is the NOx sensor chip section of structure of the utility model embodiment.As shown in Figure 3, the chip of the NOx sensor of the present embodiment, comprise by six layers of substrate, be overrided to form successively, six layers of substrate are all the substrate through casting technique moulding by 5YSZ powder, in second layer substrate 2, contain four cavitys, between the first cavity 7, the second cavity 8, the 3rd cavity 9 and 10, four cavitys of the 4th cavity, by three groups of diffusion barrier layers 11,12,13, separated respectively.On ground floor substrate 1, being provided with external electrode is pump oxygen external electrode 14, on pump oxygen external electrode 14, be coated with one deck porous protective layer 20, in second layer substrate 2, being provided with the first electrode in the 3rd cavity 9 is main pump oxygen electrode 15, in the 4th cavity 10, being provided with the second electrode is that service pump oxygen electrode 16 and third electrode are test electrode 17, the 4th layer of substrate 4 is provided with the reference gas passage 23 being connected with atmosphere, in reference gas passage 23, the 3rd layer of substrate 3 has contrast electrode 18, between layer 5 substrate 5 and layer 6 substrate 6, be provided with heating electrode 19, heating electrode 19 is respectively coated with a layer insulating 22 up and down, third electrode is on test electrode 17, to be coated with one deck porous protective layer 21.
The first electrode and the second electrode are the cermet electrodes without catalytic performance to NOx compound.
The first electrode and the second electrode for containing precious metals pt, Au and a small amount of ZrO
2the cermet electrodes forming.
Third electrode is the metal material palladium of precious metals pt and high catalytic activity or the electrode that rhodium forms.
Three groups of diffusion barriers between four cavitys be porous medium zirconia diffusion barrier layer.
The protective seam covering on third electrode is Woelm Alumina or zirconia protective seam.
The insulation course that heating electrode covers is up and down fine and close alumina insulating layer.
During measurement, first cavity 7 of auto exhaust tail gas on second layer substrate 2 enters into the second cavity 8 through diffusion barrier layer 11, the second cavity 8 is also referred to as gas buffer chamber, be that gas obtains certain buffered in this cavity 8, gas in the second cavity 8 enters into the 3rd cavity 9 through second diffusion barrier layer 12 again, this district is main pump oxygen unit, and the pump of mainly realizing oxygen enters and pumps function, and oxygen concentration is controlled in a certain rated range.Gas in the 3rd cavity 9 enters into the 4th cavity 10 through San road diffusion barrier layer 13 again, and this cavity 10 is mainly realized decomposition and the measurement function of service pump oxygen function and oxynitrides.The zirconia diffusion barrier layer that is porous medium of above three road diffusion barrier layers forms.
Main pump oxygen unit is comprised of pump oxygen external electrode 14, second layer substrate 2 and the first electrode 15.When NOx working sensor, main pump oxygen unit provides a variable power supply by peripheral control unit, the oxygen in the 3rd cavity 9 is pumped or outside oxygen pump is entered in the 3rd cavity 9, guarantees that oxygen concentration in the 3rd cavity 9 is at a certain rated range.In addition, the first electrode 15 also plays the effect of the materials such as carbon monoxide in catalytic decomposition tail gas, hydrocarbon, but its to oxynitrides without catalytic decomposition function, be non-reactivity electrode.
By electrode in pump oxygen the contrast electrode 18 in the first electrode 15, the 3rd layer of substrate 3 and reference channel forms oxygen concentration cell type measuring unit, play a part oxygen concentration in detection and FEEDBACK CONTROL the 3rd cavity 9.
In pump oxygen external electrode 14 in main pump oxygen unit and pump oxygen, electrode is that the first electrode 15 is all porous metallic ceramics.Wherein in pump oxygen, electrode is that the first electrode 15 is the disactivation electrode without catalytic decomposition function to NOx compound, the metal material of useful noble metal platinum, catalytically inactive and a small amount of zirconia are made, wherein the metal material of catalytically inactive precious metal material for example: gold.
Cavity Zhong San road diffusion barrier layer 11,12,13 material are the porous medium that zirconia is made.One deck porous protective layer of pump oxygen external electrode surface coverage, its main material is magnesium aluminate spinel, plays pollution and damage effect that protection pump oxygen external electrode 14 is not caused it by oily matter in vehicle exhaust and particle.
Service pump oxygen unit is comprised of pump oxygen external electrode 14, ground floor substrate 1 and the second electrode 16.When the gas in the 3rd cavity 9 enters into the 4th cavity 10 by San road diffusion barrier layer 13, service pump oxygen unit is under additional variable voltage, oxygen concentration in the 4th cavity 10 is controlled to an extremely low concentration value, is enough to make the concentration of oxynitrides generation decomposition reaction.
The interior electrode of service pump oxygen unit i.e. the second electrode 16 is similarly the disactivation electrode without catalytic decomposition function to NOx compound, and material composition is identical with the first electrode 15.
The contrast electrode 18 of measuring unit in third electrode 17, the 3rd layer of substrate and reference channel 23 forms.When the oxygen concentration in the 4th cavity 10 is controlled in an extremely low specified concentration value, now oxynitrides resolves into the chemolysis reaction of nitrogen and oxygen, measuring unit is worked under alive effect outside, size by limiting current in measuring circuit draws the oxygen density value producing when corresponding oxynitrides decomposes, and then can converse the concentration of oxynitrides in vehicle exhaust, it is identical with the measuring principle of limit-current type oxygen sensor that this measures principle of work of oxygen concentration.
Contrast electrode 18 is that the second electrode 16 passes through external wire with the interior electrode of service pump oxygen, by the voltage system of measuring between two electrodes, detect the oxygen density value in the 4th cavity 10, and this measurement feedback service pump oxygen unit, guarantee that oxygen concentration in the 4th cavity 10 is in the extremely low scope setting, oxynitrides gas can issue in the condition of this low oxygen concentration raw decomposition reaction.
Electrode third electrode 17 in measuring unit is for having the activated electrode material of catalytic decomposition function to oxynitrides, can adopt noble metal platinum, high catalytic activity metal material and a small amount of zirconia to make, wherein high catalytic activity metal material is as noble metal: palladium, rhodium etc.
In the 4th layer of substrate 4, be designed with air reference channel 23, air reference channel 23 is connected with atmosphere, guarantees that the contrast electrode 18 in potential electrode unit communicates with atmosphere all the time.
Between layer 5 substrate 5 and layer 6 substrate 6, be designed with heating electrode 19.In order to make NOx sensor chip just enter in a short period of time duty, the heat that depending merely on tail gas provides cannot meet the demands far away, heating electrode, by impressed voltage heating system, can reach required working temperature within very short time, and sensor enters duty very soon.
Fig. 4 is the NOx sensor chip heating electrode vertical view of the utility model embodiment.
As shown in Figure 4, the heating part 194 of heating electrode 19 is designed to similar rectangular shaft symmetric offset spread, and heating region adds uniform and stable and efficiency is high; Lead-in wire 192 is identical with lead-in wire 193 size shape, its resistance sum (R
192+ R
193) be heating part 194 (R
194) 5～15 times; Temperature control electrode 191 plays a part monitoring and feedback transducer working temperature.
Heating electrode 19 upper and lower surfaces are coated with the alumina insulation protective seam 22 of one deck densification.
In the present embodiment structure, optimized the porous alumina layer covering on contrast electrode in reference air duct, and by the unique heating electrode of design, make sensor chip reach soon working temperature, and remaining on relatively stable working temperature region, the Real-Time Monitoring of temperature control electrode and information feedback have realized the control of this function.The manufacture craft process of whole sensor chip is simple, cost-saving, is easy to scale production.
In the present embodiment utility model, on third electrode, cover the porous protective layer that last layer is made by aluminium oxide or zirconia material, prevent the pollution that in sintering process, in the second electrode, the volatilization of noble metal Au causes third electrode.Adopt six layers of substrate superimposed static pressure that waits successively after typography, the once sintered preparation technology who forms, the NOx sensor chip of preparation can be applied to the accurate measurement of NOx gas concentration in vehicle exhaust exhaust.
In this instructions, the utility model is described with reference to its specific embodiment.But, still can make various modifications and conversion obviously and not deviate from spirit and scope of the present utility model.Therefore, instructions is regarded in an illustrative, rather than a restrictive.
Claims (10)
1. a chip for NOx sensor, is characterized in that, by substrate is stacked, forms, and comprises that the first substrate, the second substrate, the 3rd substrate, the 4th substrate, the 5th substrate and the 6th substrate laminate from top to bottom successively,
The first described substrate upper surface is provided with pump oxygen external electrode, on described pump oxygen external electrode, covers the first porous protective layer;
In the second described substrate, comprise the first cavity, the second cavity, the 3rd cavity and the 4th cavity;
Between the first described cavity and the second described cavity, be provided with the first gas diffusion barrier layer, between the second described cavity and described the 3rd cavity, be provided with the second gas diffusion barrier layer, between the 3rd described cavity and the 4th described cavity, be provided with the 3rd gas diffusion barrier layer, in the 3rd described cavity, be provided with main pump oxygen electrode, in the 4th described cavity, be provided with service pump oxygen electrode and test electrode, on described test electrode, cover the second porous protective layer;
The 4th described substrate is provided with the reference gas passage being connected with atmosphere, and the lower surface that is positioned at the top of described reference gas passage and is positioned at the 3rd described substrate is provided with contrast electrode;
Between the 5th described substrate and the 6th described substrate, be provided with heating electrode.
2. the chip of NOx sensor according to claim 1, is characterized in that, described main pump oxygen electrode is the metallic ceramics main pump oxygen electrode without catalytic action to NOx compound.
3. the chip of NOx sensor according to claim 1, is characterized in that, described service pump oxygen electrode is the metallic ceramics service pump oxygen electrode without catalytic action to NOx compound.
4. the chip of NOx sensor according to claim 1, is characterized in that, described substrate is 5YSZ substrate.
5. the chip of NOx sensor according to claim 1, is characterized in that, described test electrode is Pt-Pd test electrode or Pt-Rh test electrode.
6. the chip of NOx sensor according to claim 1, is characterized in that, described pump oxygen external electrode and described contrast electrode are Pt electrode.
7. the chip of NOx sensor according to claim 1, is characterized in that described the second porous protective layer is aluminum oxide porous protective seam or zirconia porous protective layer.
8. the chip of NOx sensor according to claim 1, is characterized in that, the upper and lower surface of described heating electrode is all covered with insulation course.
9. the chip of NOx sensor according to claim 8, is characterized in that, described insulation course is compact aluminum oxide insulation course.
10. the chip of NOx sensor according to claim 1, is characterized in that, the first described diffusion barrier layer, the second described diffusion barrier layer and the 3rd diffusion barrier layer are zirconia diffusion barrier layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420357889.4U CN203929705U (en) | 2014-06-30 | 2014-06-30 | Nox sensor chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420357889.4U CN203929705U (en) | 2014-06-30 | 2014-06-30 | Nox sensor chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203929705U true CN203929705U (en) | 2014-11-05 |
Family
ID=51825504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420357889.4U Expired - Fee Related CN203929705U (en) | 2014-06-30 | 2014-06-30 | Nox sensor chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203929705U (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104049018A (en) * | 2014-06-30 | 2014-09-17 | 东风电子科技股份有限公司 | Nox sensor chip |
| CN104897763A (en) * | 2015-04-30 | 2015-09-09 | 武汉爱德威科技有限责任公司 | Nitrogen-oxygen sensor and tail gas NOx content measurement method |
| CN104924594A (en) * | 2014-03-17 | 2015-09-23 | 苏州春秋电子科技有限公司 | Novel notebook shell automatic nail burying device |
| CN107328837A (en) * | 2017-07-24 | 2017-11-07 | 深圳安培龙科技股份有限公司 | A kind of structure improved nitrogen oxide sensor |
| CN108120756A (en) * | 2018-01-29 | 2018-06-05 | 上海艾瓷传感科技有限公司 | A kind of sensing element of micro lambda sensor |
| CN109507262A (en) * | 2018-11-21 | 2019-03-22 | 温州百岸汽车零部件有限公司 | A kind of NOx sensor chip pumping current adjustment |
| CN111141803A (en) * | 2020-01-14 | 2020-05-12 | 浙江百岸科技有限公司 | Nitrogen-oxygen sensor |
| CN111474230A (en) * | 2020-05-21 | 2020-07-31 | 江苏惟哲新材料有限公司 | Nitrogen oxygen sensor ceramic chip |
| CN113075277A (en) * | 2021-05-20 | 2021-07-06 | 中国科学技术大学先进技术研究院 | Nitrogen oxide sensor |
| CN115598189A (en) * | 2022-10-08 | 2023-01-13 | 浙江百岸科技有限公司（Cn） | Nitrogen-oxygen sensor chip with hidden circuit |
-
2014
- 2014-06-30 CN CN201420357889.4U patent/CN203929705U/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104924594A (en) * | 2014-03-17 | 2015-09-23 | 苏州春秋电子科技有限公司 | Novel notebook shell automatic nail burying device |
| CN104049018A (en) * | 2014-06-30 | 2014-09-17 | 东风电子科技股份有限公司 | Nox sensor chip |
| CN104897763A (en) * | 2015-04-30 | 2015-09-09 | 武汉爱德威科技有限责任公司 | Nitrogen-oxygen sensor and tail gas NOx content measurement method |
| CN107328837A (en) * | 2017-07-24 | 2017-11-07 | 深圳安培龙科技股份有限公司 | A kind of structure improved nitrogen oxide sensor |
| CN108120756A (en) * | 2018-01-29 | 2018-06-05 | 上海艾瓷传感科技有限公司 | A kind of sensing element of micro lambda sensor |
| CN108120756B (en) * | 2018-01-29 | 2024-03-08 | 上海艾瓷传感科技有限公司 | Sensitive element of trace oxygen sensor |
| CN109507262A (en) * | 2018-11-21 | 2019-03-22 | 温州百岸汽车零部件有限公司 | A kind of NOx sensor chip pumping current adjustment |
| CN111141803A (en) * | 2020-01-14 | 2020-05-12 | 浙江百岸科技有限公司 | Nitrogen-oxygen sensor |
| CN111474230A (en) * | 2020-05-21 | 2020-07-31 | 江苏惟哲新材料有限公司 | Nitrogen oxygen sensor ceramic chip |
| CN113075277A (en) * | 2021-05-20 | 2021-07-06 | 中国科学技术大学先进技术研究院 | Nitrogen oxide sensor |
| CN113075277B (en) * | 2021-05-20 | 2022-08-02 | 中国科学技术大学先进技术研究院 | Nitrogen oxide sensor |
| CN115598189A (en) * | 2022-10-08 | 2023-01-13 | 浙江百岸科技有限公司（Cn） | Nitrogen-oxygen sensor chip with hidden circuit |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203929705U (en) | Nox sensor chip | |
| CN104049018A (en) | Nox sensor chip | |
| JP4262743B2 (en) | NOx decomposition electrode and method of manufacturing NOx sensor | |
| CN202083663U (en) | Chip type wide-area automobile oxygen sensor | |
| US10697926B2 (en) | Sensor material and gas sensor element and gas sensor derived therefrom | |
| US3914169A (en) | Oxygen detector having a platinum electrode on a zirconia electrolyte | |
| EP3258256B1 (en) | Material for sensing electrode of nox gas sensor | |
| CN102466654B (en) | Wide-range oxygen sensor with double-pump structure and manufacturing method of wide-range oxygen sensor | |
| CN207488226U (en) | A kind of nitrogen oxide sensor into gas shielded | |
| CN104359959A (en) | YSZ-based mixed-potential type NH3 sensor with Ni3V2O8 serving as sensitive electrode and preparation method of YSZ-based mixed-potential type NH3 sensor with Ni3V2O8 serving as sensitive electrode | |
| CN101706470A (en) | All-solid mixed-potential NOx sensor and preparation method thereof | |
| CN112683979A (en) | Electrochemical ammonia gas sensor chip and use method thereof | |
| US6635162B2 (en) | Gas sensor | |
| CN208689005U (en) | A kind of heating electrode is the nitrogen oxide sensor of aluminium oxide structure | |
| CN104897763A (en) | Nitrogen-oxygen sensor and tail gas NOx content measurement method | |
| CN207007765U (en) | A kind of nitrogen oxide sensor of electrode covering Woelm Alumina | |
| CN101995425A (en) | Nitrogen oxide sensor chip for automobile | |
| CN201594086U (en) | All solid state mixed potential type NOx sensor | |
| CN204008549U (en) | A kind of slice structure lambda sensor | |
| CN108760823B (en) | Sheet type oxygen sensor for motorcycle and preparation method thereof | |
| CN1493774A (en) | Manufacturing method of electric current type automobile tail gas sensor | |
| CN105044174A (en) | Novel limited current type plate oxygen sensor | |
| CN201828543U (en) | Oxynitride sensor chip for automobile | |
| CN105717185B (en) | A kind of manufacture method of chip of sheet oxygen sensor | |
| CN104407035A (en) | Gas sensor chip |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141105 Termination date: 20150630 |
|
| EXPY | Termination of patent right or utility model |