CN206342938U - Continuous rectification apparatus for preparing high-purity Nitrogen trifluoride - Google Patents
Continuous rectification apparatus for preparing high-purity Nitrogen trifluoride Download PDFInfo
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- CN206342938U CN206342938U CN201621494205.0U CN201621494205U CN206342938U CN 206342938 U CN206342938 U CN 206342938U CN 201621494205 U CN201621494205 U CN 201621494205U CN 206342938 U CN206342938 U CN 206342938U
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- removing column
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- column tower
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Abstract
The utility model belongs to the process units field of chemical products, more particularly to a kind of continuous rectification apparatus for being used to prepare high-purity Nitrogen trifluoride, including lightness-removing column and weight-removing column, lightness-removing column includes horizontal lightness-removing column tower reactor, lightness-removing column tower section is installed in lightness-removing column tower reactor, installed on lightness-removing column tower section and lightness-removing column tower reactor reboiler is installed in lightness-removing column overhead condenser, lightness-removing column tower reactor；Weight-removing column includes horizontal weight-removing column tower reactor, weight-removing column tower section is installed in weight-removing column tower reactor, weight-removing column overhead condenser is installed on weight-removing column tower section, weight-removing column tower reactor reboiler is installed in weight-removing column tower reactor, lightness-removing column tower reactor bottom discharge mouthful connects weight-removing column tower section by connecting line, and connecting line is provided with connecting valve.The utility model flow is simple, reasonable in design, easy to use, can continuously produce, and output capacity is high, the Nitrogen trifluoride purity more than 99.99% of production.
Description
Technical field
The utility model is related to a kind of continuous rectification apparatus for being used to prepare high-purity Nitrogen trifluoride, belongs to the life of chemical products
Produce device field.
Background technology
Nitrogen trifluoride is a kind of excellent plasma etch gases in microelectronics industry, to silicon and silicon nitride etch, is used
Nitrogen trifluoride has higher etch-rate and selectivity than the mixed gas of carbon tetrafluoride and carbon tetrafluoride and oxygen, and to table
Face is pollution-free, especially in the etching that thickness is less than 1.5 μm of integrated circuit material, and Nitrogen trifluoride has very excellent erosion
Etching speed and selectivity, any residuals are not stayed being etched thing surface, while being also very good cleaning agent.With three
Nitrogen fluoride is in the application of semicon industry, purity requirement more and more higher of the application industry to Nitrogen trifluoride.And rectification method is most to hold
The method for the raising Nitrogen trifluoride purity easily realized.
At present, purification prepares the rectifier unit of high-purity Nitrogen trifluoride and mainly uses batch rectification device, it is impossible to continuously
Production, low production efficiency, elapsed time is long, and output capacity is relative can be relatively low, high energy consumption.And complicated, processing and fabricating compares
It is difficult.
Utility model content
The technical problems to be solved in the utility model is：There is provided it is a kind of it is simple in construction, can continuously produce, the use that output capacity is high
In the continuous rectification apparatus for preparing high-purity Nitrogen trifluoride.
The continuous rectification apparatus described in the utility model for being used to prepare high-purity Nitrogen trifluoride, including lightness-removing column and de- weight
Tower, lightness-removing column, which includes installing in horizontal lightness-removing column tower reactor, lightness-removing column tower reactor, installs de- light on lightness-removing column tower section, lightness-removing column tower section
Column overhead condenser, lightness-removing column Ta Jienei installs lightness-removing column liquid distribution trough, and lightness-removing column liquid distribution trough bottom has lightness-removing column to fill out
Lightness-removing column tower reactor reboiler is installed in material, lightness-removing column tower reactor；Weight-removing column includes pacifying in horizontal weight-removing column tower reactor, weight-removing column tower reactor
Fill and weight-removing column overhead condenser is installed on weight-removing column tower section, weight-removing column tower section, weight-removing column Ta Jienei installs weight-removing column liquid distribution
Device, weight-removing column liquid distribution trough bottom, which has, installs weight-removing column tower reactor reboiler, lightness-removing column tower in weight-removing column filler, weight-removing column tower reactor
Bottom portion discharging opening connects weight-removing column tower section by connecting line, and connecting line is provided with connecting valve.
Having at the top of described lightness-removing column overhead condenser at the top of lightness-removing column discharge nozzle, weight-removing column overhead condenser has weight-removing column
Discharge nozzle, lightness-removing column tower section connection lightness-removing column feed pipe, weight-removing column tower reactor bottom connection weight-removing column discharge nozzle.
The present apparatus is by the group such as two rectifying columns (i.e. lightness-removing column, weight-removing column) and more than one connecting valve and connecting line
Into.It is connected between two rectifying columns using pipeline, the charging of first tower is connected with upstream equipment, the discharging of second tower is with after
Continuous equipment is connected.First tower discharges light component from tower top, and lightness-removing column kettle material enters second tower, and second tower is from tower top
Finished product is collected, heavy constituent is discharged from weight-removing column tower reactor.
The beneficial effects of the utility model are：
Flow is simple, reasonable in design, easy to use, can continuously produce, and output capacity is high, the Nitrogen trifluoride purity of production
More than 99.99%.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
In figure：1st, lightness-removing column；2nd, lightness-removing column overhead condenser；3rd, lightness-removing column liquid distribution trough；4th, lightness-removing column filler；5th, take off
Light Ta Tajie；6th, lightness-removing column tower reactor；7th, lightness-removing column tower reactor reboiler；8th, weight-removing column tower reactor reboiler；9th, weight-removing column tower reactor；10、
Weight-removing column tower section；11st, weight-removing column filler；12nd, weight-removing column liquid distribution trough；13rd, weight-removing column overhead condenser；14th, weight-removing column；
15th, connecting valve；16th, connecting line.
Embodiment
The utility model is described further below in conjunction with the accompanying drawings：
As shown in figure 1, the continuous rectification apparatus described in the utility model for being used to prepare high-purity Nitrogen trifluoride, including it is de- light
Tower 1 and weight-removing column, lightness-removing column 1 include installing lightness-removing column tower section 5, lightness-removing column in horizontal lightness-removing column tower reactor 6, lightness-removing column tower reactor 6
Installed on tower section 5 and lightness-removing column liquid distribution trough 3 is installed in lightness-removing column overhead condenser 2, lightness-removing column tower section 5, lightness-removing column liquid point
The bottom of cloth device 3, which has, installs lightness-removing column tower reactor reboiler 7 in lightness-removing column filler 4, lightness-removing column tower reactor 6；Weight-removing column includes horizontal take off
Installed in weight tower tower reactor 9, weight-removing column tower reactor 9 and weight-removing column overhead condenser 13 be installed on weight-removing column tower section 10, weight-removing column tower section 10,
Weight-removing column liquid distribution trough 12 is installed, weight-removing column filler 11 is arranged at the bottom of weight-removing column liquid distribution trough 12 in weight-removing column tower section 10, taken off
Weight-removing column tower reactor reboiler 8 is installed, the bottom discharge mouthful of lightness-removing column tower reactor 6 passes through the de- weight of the connection of connecting line 16 in weight tower tower reactor 9
Ta Tajie 10, connecting line 16 is provided with connecting valve 15.Lightness-removing column discharge nozzle is arranged at the top of lightness-removing column overhead condenser 2, takes off weight
Weight-removing column discharge nozzle, the connection lightness-removing column feed pipe of lightness-removing column tower section 5, the bottom of weight-removing column tower reactor 9 are arranged at the top of column overhead condenser 13
Connect weight-removing column discharge nozzle.
During using the utility model, Nitrogen trifluoride crude product is boosted into required pressure first, lightness-removing column 1 is pressed into, into de-
The gas of light tower 1 is cooled down in lightness-removing column overhead condenser 2, and lightness-removing column is back to by lightness-removing column tower section 5 after Nitrogen trifluoride liquefaction
Tower reactor 6, it is impossible to which liquefied light component is discharged from by the top of lightness-removing column overhead condenser 2, while passing through lightness-removing column tower reactor reboiler 7
To the liquid phase material heating in lightness-removing column tower reactor 6, material is set constantly to vaporize to form stable backflow.Liquid phase in lightness-removing column tower reactor 6
Material enters in weight-removing column, weight-removing column tower reactor 9 liquid phase material in weight-removing column from tower reactor by connecting valve 15 and connecting line 16
Vaporized under the heat effect of tower reactor reboiler 8, weight-removing column overhead condenser 13 is reached by weight-removing column tower section 10, finished product is borontrifluoride
Nitrogen enters follow-up equipment by tower top discharging opening, and weight-removing column tower reactor 9 is back to by weight-removing column tower section 10 after heavy constituent condensation, and
It is final to be discharged from bottom.
Claims (2)
1. a kind of continuous rectification apparatus for being used to prepare high-purity Nitrogen trifluoride, it is characterised in that：Including lightness-removing column (1) and weight-removing column
(14), lightness-removing column (1) includes installing lightness-removing column tower section (5), lightness-removing column in horizontal lightness-removing column tower reactor (6), lightness-removing column tower reactor (6)
Installed on tower section (5) and lightness-removing column liquid distribution trough (3) is installed in lightness-removing column overhead condenser (2), lightness-removing column tower section (5), take off light
Tower liquid distribution trough (3) bottom, which has, installs lightness-removing column tower reactor reboiler (7) in lightness-removing column filler (4), lightness-removing column tower reactor (6)；It is de-
Weight tower (14) includes installing weight-removing column tower section (10), weight-removing column tower section in horizontal weight-removing column tower reactor (9), weight-removing column tower reactor (9)
(10) installed on and weight-removing column liquid distribution trough (12) is installed in weight-removing column overhead condenser (13), weight-removing column tower section (10), take off weight
Tower liquid distribution trough (12) bottom, which has, installs weight-removing column tower reactor reboiler (8) in weight-removing column filler (11), weight-removing column tower reactor (9),
Lightness-removing column tower reactor (6) bottom discharge mouthful connects weight-removing column tower section (10) by connecting line (16), and connecting line (16) is provided with
Connecting valve (15).
2. the continuous rectification apparatus according to claim 1 for being used to prepare high-purity Nitrogen trifluoride, it is characterised in that：Lightness-removing column
Having at the top of overhead condenser (2) at the top of lightness-removing column discharge nozzle, weight-removing column overhead condenser (13) has weight-removing column discharge nozzle, lightness-removing column
Tower section (5) connects lightness-removing column feed pipe, weight-removing column tower reactor (9) bottom connection weight-removing column discharge nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621494205.0U CN206342938U (en) | 2016-12-31 | 2016-12-31 | Continuous rectification apparatus for preparing high-purity Nitrogen trifluoride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621494205.0U CN206342938U (en) | 2016-12-31 | 2016-12-31 | Continuous rectification apparatus for preparing high-purity Nitrogen trifluoride |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206342938U true CN206342938U (en) | 2017-07-21 |
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ID=59319894
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621494205.0U Active CN206342938U (en) | 2016-12-31 | 2016-12-31 | Continuous rectification apparatus for preparing high-purity Nitrogen trifluoride |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206342938U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109364510A (en) * | 2018-11-09 | 2019-02-22 | 中盐安徽红四方股份有限公司 | The device of high-purity methyl formate is extracted from the by-product of preparation of ethanediol by dimethyl oxalate hydrogenation |
| CN111056540A (en) * | 2019-12-25 | 2020-04-24 | 中船重工（邯郸）派瑞特种气体有限公司 | Electrolytic NF3Continuous pre-purification device and continuous pre-purification method |
| CN112390230A (en) * | 2020-11-20 | 2021-02-23 | 苏州金宏气体股份有限公司 | Purification method and purification system of chlorine trifluoride |
| WO2022166270A1 (en) * | 2021-02-02 | 2022-08-11 | 福建德尔科技股份有限公司 | Electronic grade chlorine trifluoride separation device, and separation method |
-
2016
- 2016-12-31 CN CN201621494205.0U patent/CN206342938U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109364510A (en) * | 2018-11-09 | 2019-02-22 | 中盐安徽红四方股份有限公司 | The device of high-purity methyl formate is extracted from the by-product of preparation of ethanediol by dimethyl oxalate hydrogenation |
| CN109364510B (en) * | 2018-11-09 | 2020-09-25 | 中盐安徽红四方股份有限公司 | Device for extracting high-purity methyl formate from by-product of preparing ethylene glycol by dimethyl oxalate hydrogenation |
| CN111056540A (en) * | 2019-12-25 | 2020-04-24 | 中船重工（邯郸）派瑞特种气体有限公司 | Electrolytic NF3Continuous pre-purification device and continuous pre-purification method |
| CN111056540B (en) * | 2019-12-25 | 2023-09-15 | 中船(邯郸)派瑞特种气体股份有限公司 | Electrolytic NF 3 Continuous prepurification device and continuous prepurification method |
| CN112390230A (en) * | 2020-11-20 | 2021-02-23 | 苏州金宏气体股份有限公司 | Purification method and purification system of chlorine trifluoride |
| WO2022166270A1 (en) * | 2021-02-02 | 2022-08-11 | 福建德尔科技股份有限公司 | Electronic grade chlorine trifluoride separation device, and separation method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190820 Address after: 256300 No. 5, No. 4 Road, Gaoqing Chemical Industrial Park, Gaocheng Town, Gaoqing County, Zibo City, Shandong Province Patentee after: Shandong Feiyuan Gas Co.,Ltd. Address before: 256300 Qinghe Industrial Park, Gaoqing County, Shandong, Zibo Patentee before: SHANDONG FEIYUAN TECHNOLOGY Co.,Ltd. |
|
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Song Xuezhang Inventor after: Qi Xiangdong Inventor after: Zhao Xiuli Inventor after: Wang Bin Inventor after: Li Xinghu Inventor before: Song Xuezhang Inventor before: Qi Xiangdong Inventor before: Zhao Xiuli Inventor before: Wang Bin Inventor before: Li Xinghu |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No.5, No.4 Road, Gaoqing Chemical Industrial Park, Gaocheng Town, Gaoqing County, Zibo City, Shandong Province, 256300 Patentee after: Nanda Optoelectronics (Zibo) Co.,Ltd. Address before: No.5, No.4 Road, Gaoqing Chemical Industrial Park, Gaocheng Town, Gaoqing County, Zibo City, Shandong Province, 256300 Patentee before: Shandong Feiyuan Gas Co.,Ltd. |