CN215962183U - Heat recovery type combined distillation device for nitrogen trifluoride - Google Patents
Heat recovery type combined distillation device for nitrogen trifluoride Download PDFInfo
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- CN215962183U CN215962183U CN202122052915.5U CN202122052915U CN215962183U CN 215962183 U CN215962183 U CN 215962183U CN 202122052915 U CN202122052915 U CN 202122052915U CN 215962183 U CN215962183 U CN 215962183U
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- reboiler
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
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Abstract
The utility model provides a heat energy recovery type combined distillation device for nitrogen trifluoride, which comprises a plurality of groups of purification devices, wherein each group of purification devices comprises a distillation device, a condensing device, a reboiler and a compressor, the plurality of groups of purification devices are arranged in series, the upper end of the distillation device is connected with the lower end of the condensing device, the reboiler is connected with the condensing device in the previous group of purification devices, the reboiler is connected with the reboiler in the next group of purification devices, the reboiler in the previous group of purification devices is connected with the condensing device in the next group of purification devices, and the compressors are connected between the reboiler; the distillation device is characterized in that a plurality of feed liquid guide pipes are arranged inside the distillation device, two supporting legs and an impurity discharge port are arranged at the bottom end of the reboiler, and the impurity discharge port is located between the two supporting legs. The utility model ensures that nitrogen trifluoride can be distilled for many times to obtain a high-purity product by connecting the distillation devices in a multi-effect connection mode.
Description
Technical Field
The utility model belongs to the technical field of chemical product production equipment, and particularly relates to a heat energy recovery type combined distillation device for nitrogen trifluoride.
Background
Nitrogen trifluoride (nitrogen trifluoride) of formula NF3It is a colorless, odorless and stable gas at normal temperature, and is a strong oxidant. Nitrogen trifluoride is used as an excellent plasma etching gas in the microelectronics industry, is cracked into active fluorine ions during ion etching, and the fluorine ions have excellent etching rate and selectivity (for silicon oxide and silicon) to silicon and tungsten compounds, and high-purity nitrogen trifluoride does not leave any residue on the surface of an etching object during etching, is a very good cleaning agent, and is widely applied to chip manufacturing and high-energy lasers.
With the wider application range of nitrogen trifluoride, the application industry has higher requirements on the yield and purity of nitrogen trifluoride, but the existing equipment for preparing and purifying nitrogen trifluoride has lower yield, complex structure and low purity. Therefore, the design of the heat energy recovery type combined distillation device for nitrogen trifluoride is significant.
SUMMERY OF THE UTILITY MODEL
The technical problem to be solved by the present invention is to provide a heat energy recovery type combined distillation apparatus for nitrogen trifluoride, which can obtain a high-purity product by multi-effect distillation, and can transport the excess heat in the condensing unit of the previous group of purification apparatuses to the reboiler of the next group of purification apparatuses for use, thereby realizing secondary utilization of heat and being applicable to popularization.
In order to solve the technical problems, the utility model adopts the technical scheme that: a heat energy recovery type combined distillation device for nitrogen trifluoride comprises a plurality of groups of purification devices, wherein each group of purification devices comprises a distillation device, a condensing device, a reboiler and a compressor, the plurality of groups of purification devices are arranged in series, the upper end of the distillation device is connected with the lower end of the condensing device, the condensing device in the previous group of purification devices is connected with the reboiler in the next group of purification devices, the reboiler in the previous group of purification devices is connected with the condensing device in the next group of purification devices, and the compressor is further connected between the reboiler in the previous group of purification devices and the condensing device in the next group of purification devices; the distillation device is characterized in that a plurality of feed liquid guide pipes are arranged inside the distillation device, two supporting legs and an impurity discharge port are arranged at the bottom end of the reboiler, and the impurity discharge port is located between the two supporting legs.
Preferably, the number of the groups of the purification devices is 3, the purification devices are communicated in series, a compressor is arranged between two connected purification devices, the distillation devices in the 3 groups of purification devices are respectively defined as a first-effect distillation device, a second-effect distillation device and a third-effect distillation device, the condensing unit connected with the upper end of the first-effect distillation unit is connected with the reboiler connected with the lower end of the second-effect distillation unit through a first communicating pipe, a reboiler connected with the lower end of the first-effect distillation device is connected with a condensing device connected with the upper end of the second-effect distillation device through a second communicating pipe, the condensing device connected with the upper end of the double-effect distillation device is connected with the reboiler connected with the lower end of the triple-effect distillation device through a fourth communicating pipe, the reboiler that two effect distillation plant lower extremes are connected links to each other through the condensing equipment that fifth communicating pipe and three effect distillation plant upper end are connected, the second communicating pipe with all install the compressor on the fifth communicating pipe.
Preferably, a first valve is arranged on the first communicating pipe, a second valve is arranged on the second communicating pipe, and valves are arranged on the fourth communicating pipe and the fifth communicating pipe.
Preferably, a gas outlet is arranged at the top end of the condensing device.
Preferably, the gas outlet connected to the condensing device in the terminal purification device is connected to a gas storage tank.
Preferably, the bottom end of the impurity discharge port is connected through a third communicating pipe, and an outlet of the third communicating pipe is connected with a recovery device.
Preferably, a third valve is arranged on the third communicating pipe.
Compared with the prior art, the utility model has the following advantages:
1. the utility model ensures that nitrogen trifluoride can be distilled for many times to obtain a high-purity product by connecting the upper end of the distillation device with the condensing device and connecting the lower end of the distillation device with the reboiler in a multi-effect connection manner.
2. The utility model adopts the condensing device in the previous group of purifying devices to be connected with the reboiler in the next group of purifying devices through the communicating pipe, and the reboiler in the previous group of purifying devices is connected with the condensing device in the next group of purifying devices through the communicating pipe, so that the heat generated by the condensing device in the previous group of purifying devices is transmitted to the reboiler in the next group of purifying devices to be used for the second time, and the aim of saving energy is achieved while the process flow is normally operated.
3. The utility model ensures that the impurity materials can be recycled, purified and utilized again by connecting the impurity discharge port with the recovery device through the third communicating pipe, and conforms to the principle of sustainable development.
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Description of reference numerals:
1-a distillation apparatus; 2-a condensing unit; 3-a reboiler; 4, a first communicating pipe; 5-a second communicating pipe; 6-a first valve; 7-a second valve; 8-feed liquid guide pipe; 9-supporting legs; 10-impurity discharge port; 11-gas outlet; 12-a gas storage tank; 13-a recovery unit; 14-a third valve; 15-third communicating pipe.
Detailed Description
As shown in fig. 1, the present invention includes a plurality of groups of purification devices, each group of purification devices includes a distillation device 1, a condensation device 2, a reboiler 3 and a compressor, the plurality of groups of purification devices are arranged in series, the upper end of the distillation device 1 is connected with the lower end of the condensation device 2 and is connected with the reboiler 3, the condensation device 2 in the previous group of purification devices is connected with the reboiler 3 in the next group of purification devices, the reboiler 3 in the previous group of purification devices is connected with the condensation device 2 in the next group of purification devices, and the compressor is further connected between the reboiler 3 in the previous group of purification devices and the condensation device 2 in the next group of purification devices; the distillation device 1 is internally provided with a plurality of feed liquid guide pipes 8, the bottom end of the reboiler 3 is provided with two support legs 9 and an impurity discharge port 10, and the impurity discharge port 10 is positioned between the two support legs 9.
In the embodiment, the number of groups of the purification devices is 3, the purification devices are connected in series, a compressor is arranged between two connected purification devices, the distillation devices 1 in the 3 groups of purification devices are respectively defined as a first-effect distillation device 1, a second-effect distillation device 1 and a third-effect distillation device 1, a condensing device 2 connected with the upper end of the first-effect distillation device 1 is connected with a reboiler 3 connected with the lower end of the second-effect distillation device 1 through a first communicating pipe 4, the reboiler 3 connected with the lower end of the first-effect distillation device 1 is connected with a condensing device 2 connected with the upper end of the second-effect distillation device 1 through a second communicating pipe 5, the condensing device 2 connected with the upper end of the second-effect distillation device 1 is connected with the reboiler 3 connected with the lower end of the third-effect distillation device through a fourth communicating pipe, the reboiler 3 connected with the lower end of the second-effect distillation device 1 is connected with the condensing device 2 connected with the upper end of the third-effect distillation device through a fifth communicating pipe, and the second communicating pipe 5 and the fifth communicating pipe are both provided with compressors.
In this embodiment, the first communicating pipe 4 is provided with a first valve 6, the second communicating pipe 5 is provided with a second valve 7, and the fourth communicating pipe and the fifth communicating pipe are both provided with valves; a gas discharge hole 11 is formed in the top end of the condensing device 2 at the upper end of the distillation device 1; an outlet of the gas discharge port 11 connected to the condensing device 2 in the purification apparatus located at the end is connected to a gas storage tank 12, and the gas storage tank 12 stores the purified high-purity nitrogen trifluoride gas.
In this embodiment, the bottom ends of the impurity discharging ports 10 are connected through a third communicating pipe 15, an outlet of the third communicating pipe 15 is connected with a recycling device 13, and a third valve 14 is arranged on the third communicating pipe 15. The recovery device 13 ensures that the impurity materials can be recovered, purified and utilized again, and conforms to the principle of sustainable development.
In this embodiment, the upper end of distillation apparatus 1 is connected with condensing equipment 2, and the lower extreme is connected with reboiler 3, and distillation apparatus 1 adopts the mode of triple effect connection to link to each other, has guaranteed that nitrogen trifluoride can obtain high-purity product through the cubic distillation.
The process using the heat energy recovery type combined distillation apparatus for nitrogen trifluoride of this example comprises the steps of:
crude nitrogen trifluoride is pressurized to a required pressure to be changed into liquid nitrogen trifluoride, then the liquid nitrogen trifluoride is led into a condensing device 2 connected with the upper end of a primary distillation device 1, the liquid nitrogen trifluoride passing through the condensing device 2 can release heat, the liquid nitrogen trifluoride flows through a plurality of feed liquid guide pipes 8 in the primary distillation device 1 and then enters a reboiler 3 connected with the lower end of the primary distillation device 1, the reboiler 3 of the primary distillation device 1 has an external function and only carries out heat conduction, the liquid nitrogen trifluoride is changed into gas again in the reboiler 3 and enters the condensing device 2 of a secondary distillation device 1 through a second communicating pipe 5, a compressor is arranged at a part, close to the secondary condensing device 2, of the second communicating pipe 5, the compressor re-pressurizes the gaseous nitrogen trifluoride to be changed into liquid nitrogen trifluoride and then enters the condensing device 2 of the secondary distillation device 1, the liquid nitrogen trifluoride flows through the secondary distillation device 1 and then enters the reboiler 3 connected with the lower end, the liquid nitrogen trifluoride is changed into gas again in the reboiler 3, then is changed into liquid through a fourth communicating pipe and a compressor, and enters a condensing device 2 connected with the upper end of the three-way distillation device 1, and the liquid nitrogen trifluoride is subjected to a distillation process of nitrogen trifluoride in the three-way distillation device 1;
the impurity gas discharged from a gas discharge port 11 connected with the upper end of a condensing device 2 at the upper end of a first-effect distillation device 1 is most of O2And N2Impurity row connected to the lower end of reboiler 3 at the lower end of first effect distillation device 1The impurity discharged from the outlet 10 is NO2。
The impurity gas discharged from a gas discharge port 11 connected with the upper end of a condensing device 2 at the upper end of a double-effect distillation device 1 is a residual small part O2And N2The impurity discharged from an impurity discharge port 10 connected to the lower end of a reboiler 3 at the lower end of the two-effect distillation apparatus 1 is NO2。
High-purity nitrogen trifluoride gas is discharged from a gas discharge port 11 connected with the upper end of a condensing unit 2 at the upper end of a three-effect distilling device 1, the high-purity nitrogen trifluoride gas enters a gas storage tank 12 for storage, and the impurities discharged from an impurity discharge port 10 connected with the lower end of a reboiler 3 at the lower end of the three-effect distilling device 1 are NO2。
In particular, condensing equipment 2 of first effect distillation plant 1 links to each other through first communicating pipe 4 and two effect distillation plant 1's reboiler 3, liquid nitrogen trifluoride can be exothermic through first effect distillation plant 1's condensing equipment 2, the heat of production is recycled in getting into two effect distillation plant 1's reboiler 3 through first communicating pipe 4, two effect distillation plant 1's condensing equipment 2 is connected with three effect distillation plant 1's reboiler 3 through fourth communicating pipe, liquid nitrogen trifluoride can be exothermic through two effect distillation plant 1's condensing equipment 2, the heat of production is recycled in getting into three effect distillation plant 1's reboiler 3 through fourth communicating pipe 4, can guarantee the recycle of the energy, resources are saved.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention in any way. Any simple modifications, alterations and equivalent changes made to the above embodiments according to the technical essence of the present invention are still within the scope of the technical solution of the present invention.
Claims (7)
1. The heat energy recovery type combined distillation device for nitrogen trifluoride is characterized by comprising a plurality of groups of purification devices, wherein each group of purification devices comprises a distillation device (1), a condensation device (2), a reboiler (3) and a compressor, the purification devices are connected in series, the lower end of the condensation device (2) is connected to the upper end of the distillation device (1), the reboiler (3) is connected to the condensation device (2) in the previous group of purification devices, the reboiler (3) is connected to the condensation device (2) in the next group of purification devices, and the compressor is further connected between the reboiler (3) in the previous group of purification devices and the condensation device (2) in the next group of purification devices; the distillation device is characterized in that a plurality of feed liquid guide pipes (8) are arranged inside the distillation device (1), two supporting legs (9) and an impurity discharge port (10) are arranged at the bottom end of the reboiler (3), and the impurity discharge port (10) is located between the two supporting legs (9).
2. The heat energy recovery type combined distillation device for nitrogen trifluoride according to claim 1, wherein the number of the groups of the purification devices is 3, the purification devices are connected in series, a compressor is arranged between two connected purification devices, the distillation devices (1) in the 3 groups of purification devices are respectively defined as a first-effect distillation device (1), a second-effect distillation device (1) and a third-effect distillation device (1), the condensing device (2) connected to the upper end of the first-effect distillation device (1) is connected with the reboiler (3) connected to the lower end of the second-effect distillation device (1) through a first communicating pipe (4), the reboiler (3) connected to the lower end of the first-effect distillation device (1) is connected with the condensing device (2) connected to the upper end of the second-effect distillation device (1) through a second communicating pipe (5), and the condensing device (2) connected to the upper end of the second-effect distillation device (1) is connected with the reboiler (3) connected to the lower end of the third-effect distillation device through a fourth communicating pipe ) And the reboiler (3) connected with the lower end of the secondary-effect distillation device (1) is connected with the condensing device (2) connected with the upper end of the tertiary-effect distillation device through a fifth communicating pipe, and compressors are installed on the second communicating pipe (5) and the fifth communicating pipe.
3. The heat energy recovery type combined distillation device for nitrogen trifluoride according to claim 2, wherein a first valve (6) is provided on the first connection pipe (4), a second valve (7) is provided on the second connection pipe (5), and valves are provided on the fourth connection pipe and the fifth connection pipe.
4. The combined distillation apparatus for nitrogen trifluoride heat energy recovery according to claim 1, wherein the top of the condensing unit (2) is provided with a gas outlet (11).
5. A combined distillation apparatus for nitrogen trifluoride heat energy recovery type according to claim 4, wherein said gas outlet port (11) connected to the condensing means (2) of the terminal purification apparatus is connected to a gas storage tank (12).
6. The combined distillation apparatus for nitrogen trifluoride heat energy recovery according to claim 1, wherein the bottom ends of the impurity outlets (10) are connected by a third connection pipe (15), and the outlet of the third connection pipe (15) is connected to a recovery unit (13).
7. The combined distillation apparatus for nitrogen trifluoride heat energy recovery according to claim 6, wherein a third valve (14) is provided in the third connection pipe (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122052915.5U CN215962183U (en) | 2021-08-27 | 2021-08-27 | Heat recovery type combined distillation device for nitrogen trifluoride |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122052915.5U CN215962183U (en) | 2021-08-27 | 2021-08-27 | Heat recovery type combined distillation device for nitrogen trifluoride |
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| CN215962183U true CN215962183U (en) | 2022-03-08 |
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| CN202122052915.5U Active CN215962183U (en) | 2021-08-27 | 2021-08-27 | Heat recovery type combined distillation device for nitrogen trifluoride |
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