CN206258074U - A kind of high-accuracy large-scale comprehensive measurement device based on laser and image - Google Patents

Abstract

A kind of high-accuracy large-scale comprehensive measurement device based on laser and image, for limitation of the existing testing equipment when large sized object is detected, the utility model set function of laser interferometer and image measurer, main body is guide rail structure, main body is provided with two big slide units, can be along main body slide, guide rail is housed on two big slide units, two small slide units are separately mounted on big slide unit guide rail, along the slide on big slide unit laser interferometer and image measurer can be respectively provided with two small slide units.Monitor station is located at the side of main body, and No. two guide rails extend out in the side of monitor station, and image measurer can be made to move to directly over monitor station, monitor station is multi-segment structure, every section of two ends are provided with screw, when linear scale is examined and determine, can be used to install linear scale fixing device.

Description

A kind of high-accuracy large-scale comprehensive measurement device based on laser and image

Technical field

The present invention relates to a kind of high-accuracy large-scale comprehensive measurement device based on laser and image.

Background technology

With manufacturing development, the continuous improvement of required precision, large-scale metrology is always that domestic and international researcher grinds The hot issue studied carefully, especially for length up to the high-acruracy survey of tens meters of object, sets there is presently no a set of special It is standby to carry out this work.Laser interferometer and image measurer are now widely used high precision measuring instruments, and laser is done The measurement range of interferometer can reach more than 50m, be mainly used in dynamic measurement, such as displacement of accurate measurement lathe, but for The size of static object but cannot be measured accurately, and image measurer can accurately measure the size of static object, but Its measurement range is limited, it is impossible to the measurement of correspondence large scale object.Therefore, the measurement of large sized object is realized, it is necessary to tie The characteristics of closing both laser interferometer and image measurer, develops a kind of laser interferometer and image measurer function gathered Comprehensive measurement device carries out the measurement work of large scale object.

The content of the invention

To achieve these goals, the technical solution adopted by the present invention is:A kind of high accuracy based on laser and image is big Dimension synthesis measurement apparatus, including test desk main body, a big slide unit, No. two big slide units and monitor station, main body is guide rail structure, Length is general between 5-50m, and a big slide unit and No. two big slide units are respectively disposed on the two ends of main body guide rail, can be along main body Slide, monitor station is located at the side of main body, and total length is equal with main body.

A guide rail and No. two guide rails, a guide rail and No. two guide rails are respectively provided with a number big slide unit and No. two big slide units Direction it is vertical with main body guide rail, a small slide unit and No. two small slide units are separately mounted on a guide rail and No. two guide rails, can Along a guide rail and No. two slides, generating laser is equipped with a small slide unit, surveyed equipped with image on No. two small slide units Amount instrument.

The monitor station is multi-segment structure, and every section of monitor station monitor station size is identical, in the same plane, every section of detection There are two screws at two ends respectively on platform, and for installing linear scale fixing device, the effect of linear scale fixing device is to use this Play fixed linear scale during invention calibrating linear scale.

The two bottom sides of the main body are equipped with two row's legs, for supporting whole detection means.

The guide rail all uses air-float guide rail.

No. two guide rails extend out in that side near monitor station, can make the image measurer on No. two guide rails Move to the surface of monitor station.

The beneficial effects of the present invention are：1. large-scale metrology device, image measurer and laser interferometer are combined To use, the edge or measurement point position of measured piece are clearly captured using image measurer, accurately surveyed using laser interferometer Go out displacement, can exactly measure the size of determinand, efficiently solve large scale object cannot accurate measurement problem； 2. while determinand overall dimensions are measured, for the measurement of some fine structures on object under test, can directly use Image measurer is completed, i.e., accurate to save the time again, improves operating efficiency.

Brief description of the drawings

Fig. 1 is side structure schematic diagram of the invention, and Fig. 2 is dimensional structure diagram of the invention, and Fig. 3 is use of the present invention Schematic diagram when object is measured, the partial schematic diagram of monitor station position when Fig. 4 is with present invention calibrating linear scale.

Wherein, 1 is main body, and 2 is a big slide unit, and 3 is No. two big slide units, and 4 is a guide rail, and 5 is No. two guide rails, and 6 are A number small slide unit, 7 is No. two small slide units, and 8 is laser interferometer, and 9 is image measurer, and 10 is interference mirror, and 11 is speculum, 12 It is monitor station, 13 is leg, and 14 is screw, and 15 is object under test, and 16 is linear scale fixing device, and 17 is linear scale.

Specific embodiment

Referring to Fig. 1, the present invention includes test desk master, 1, number big slide unit 2, No. two big slide units 3 and monitor station 12, main body 1 It is guide rail structure, a big slide unit 2 and No. two big slide units 3 are respectively disposed on the both sides of the guide rail of main body 1, can be along the guide rail of main body 1 Slide, monitor station 12 is located at the side of main body 1.A guide rail 4 and two is respectively provided with a number big slide unit 2 and No. two big slide units 3 Number guide rail 5, a guide rail 4 and No. two directions of guide rail 5 are vertical with the guide rail of main body 1, a small slide unit 6 and No. two 7 points of small slide units An Zhuan not can be slided along a guide rail 4 and No. two guide rails 5 on a guide rail 4 and No. two guide rails 5, be filled on a small slide unit 6 There is laser interferometer 8, image measurer 9 is housed on No. two small slide units 7.Monitor station 12 is multi-segment structure, every section of monitor station detection Platform size is identical, in the same plane, and two ends are equipped with linear scale fixing device 14 on every section of monitor station 12, for examining and determine strain line Linear scale is fixed during chi.The two bottom sides of main body are equipped with two row's legs, for supporting whole detection means.Guide rail all uses gas Floating guide rail.Referring to Fig. 2, No. two guide rails 5 extend out in that side near monitor station 12, can make the shadow on No. two guide rails 5 The surface of monitor station 12 is moved to as measuring instrument 9.Every section of two ends of monitor station 12 are provided with screw, can be used to install linear scale and consolidate Determine device.

Referring to Fig. 3, in actually measurement 15 length of object under test, first object under test 15 is placed on monitor station 12, adjusted After whole good laser interferometer 8, mobile No. two big slide units 3 reach the position being substantially flush with the measurement point of object under test 15, No. two small slide units 7 are moved again, image measurer 9 is moved to the position directly above of determinand, now observe image measurer Image interface, adjusting focal length after treating image clearly, adjusts No. two big slide units and No. two positions of small slide unit, until image survey Cross hairs on amount instrument image interface and the lateral edges of determinand one have measured initial line and have alignd, now the data in laser interferometer Reset, No. two big slide units are moved afterwards, until the cross hairs on measuring instrument image interface terminates side with another lateral edges or measurement Alignment, now, the numerical value shown in laser interferometer is the length value of this determinand.Need to measure some on object under test During trickle spot size, No. two big slide units and No. two positions of small slide unit are adjusted, image measurer is moved into detected part Top measures.

When carrying out the measurement of small-size object, small-size object to be measured is placed on No. two big slide units, image is surveyed Amount instrument moved to and measured above object under test.

Referring to Fig. 4, when the error of indication for carrying out long range linear scale is examined and determine, monitor station 12 is placed on by strain line to be measured, 17 On, linear scale to be measured 17 is fixed with linear scale fixing device 16, No. two big slide units 3 and No. two positions of small slide unit 7 are adjusted, make Cross hairs on the image interface of image measurer 9 aligns with the dead-center position of linear scale to be measured 17, and the data of laser interferometer 8 are clear Zero, No. two big slide units 3 are moved afterwards, according to linear scale vertification regulation, corresponding strain line is moved to, the indicating value for obtaining linear scale is missed Difference.

Claims (3)

1. a kind of high-accuracy large-scale composite measurement calibrating installation based on laser and image, it is characterised in that：By main body, No. one Big slide unit, No. two big slide units, a guide rail, No. two guide rails, a small slide unit, No. two small slide units, laser interferometer, radiographic measurement Instrument, monitor station composition, main body is long guideway structure, and length is 5-50m, and monitor station is located at the side of main body, is multi-segment structure, always Length is identical with main body, in the same plane in the highly identical of every section of monitor station, and a big slide unit and two is housed in main body Number big slide unit, can be respectively provided with a guide rail and two along the slide of main body on a number big slide unit and No. two big slide units , perpendicular to the guide rail of main body, a small slide unit and No. two small slide units are respectively mounted for number guide rail, a guide rail and No. two guide rail directions On a guide rail and No. two guide rails, along slide laser interferometer can be housed on a number small slide unit, laser interferometer Speculum is placed on No. two big slide units, and image measurer is housed on No. two small slide units, and No. two guide rails are in that side by monitor station Extend out, by mobile No. two small slide units image measurer camera can be made to be located at the surface of monitor station.

2. a kind of high-accuracy large-scale composite measurement calibrating installation based on laser and image according to claim 1, its It is characterised by：Guide rail used is air-float guide rail.

3. a kind of high-accuracy large-scale composite measurement calibrating installation based on laser and image according to claim 1, its It is characterised by, two ends are provided with screw on monitor station, can be used to that linear scale fixing device is installed, for the calibrating of linear scale long.