CN206232813U - For the silicon chip fetching device of graphite boat equipment - Google Patents
For the silicon chip fetching device of graphite boat equipment Download PDFInfo
- Publication number
- CN206232813U CN206232813U CN201621381566.4U CN201621381566U CN206232813U CN 206232813 U CN206232813 U CN 206232813U CN 201621381566 U CN201621381566 U CN 201621381566U CN 206232813 U CN206232813 U CN 206232813U
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- silicon chip
- graphite boat
- fixed
- baffle
- draw
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Abstract
The utility model discloses a kind of operating efficiency silicon chip fetching device for graphite boat equipment higher.This is used for the silicon chip fetching device of graphite boat equipment, including support, bracket is provided with the support, the bracket is used for placing graphite boat, the bracket top is provided with the manipulator for picking and placeing silicon chip, on the support magazine and silicon slice charging box on silicon chip are fixed with by detachable apparatus, this is used for the silicon chip fetching device of graphite boat equipment operationally, graphite boat need to be only placed on the specified location of bracket, then will be put into after the silicon chip extracting in magazine on silicon chip in graphite boat or will be put into silicon slice charging box after the silicon chip extracting in graphite boat using manipulator, the mechanization and automation of production can be realized, ban artificial dullness, complicated manual labor, greatly reduce the labour intensity of workman, and the silicon chip quantity that is removed and placed into every time is more, substantially increase operating efficiency.It is adapted in the popularization and application of silicon wafer processing equipment field.
Description
Technical field
The utility model is related to silicon wafer processing equipment field, and especially a kind of silicon chip for graphite boat equipment picks and places dress
Put.
Background technology
Because solar irradiation is mapped on the silicon chip of solar cell, a portion sunshine can be reflected, even if to inciting somebody to action
Silicon face is designed to matte, although incident light can produce the multiple reflections can to increase the absorptivity of light, but, still have one
The sunshine for dividing can be reflected, and in order to reduce the reflection loss of sunshine, the method generally taken is in solar cell
Silicon chip surface covers one layer of antireflective coating, and this layer film can reduce the reflectivity of sunshine, increase photoelectric transformation efficiency, in crystalline substance
In body silicon face deposit antireflective coating technology, silicon nitride film has that high-insulativity, chemical stability are good, compactness is good, hardness is high
The features such as, while there is the good ability for sheltering metal and water ion deposition, so as to be widely adopted.
In crystal silicon solar energy battery manufacturing process, the usual using plasma enhancing chemical gaseous phase of silicon nitride film is prepared
Sedimentation, referred to as PECVD (Plasma Enhanced Chemical Vapor Deposition), PECVD is to utilize forceful electric power
Gas source molecular ionization needed for field makes produces plasma, containing the chemical group that many activity are very high in plasma, this
A little groups pass through through a series of chemistry and plasma reaction, and solid film is formed in silicon chip surface.
At present, in crystal silicon solar energy battery manufacturing process, the device for preparing silicon nitride film mainly includes setting
There is the vacuum deposition chamber of fire door, graphite boat is provided with vacuum moulding machine room, silicon chip is positioned on graphite boat, and vacuum deposition chamber is provided with
Air inlet and exhaust outlet, are connected with the air inlet pipe for being passed through process gas on the air inlet, be connected with the exhaust outlet
Delivery pipe, discharge pipe end is connected with vavuum pump, and the import of vavuum pump is connected with the outlet of delivery pipe, the outlet connection of vavuum pump
There is tail comb, wherein, when silicon chip being positioned on graphite boat or silicon chip being taken out from graphite boat by manually realizing silicon chip
Pick and place, this is a kind of dull, manual labor for repeating, and efficiency is very low.
Utility model content
Technical problem to be solved in the utility model be to provide a kind of operating efficiency it is higher for graphite boat equipment
Silicon chip fetching device.
The utility model solves the technical scheme that its technical problem used：The silicon chip for being used for graphite boat equipment is picked and placeed
Device, including support, are provided with bracket on the support, the bracket is used for placing graphite boat, and the bracket top is provided with
Manipulator for picking and placeing silicon chip, magazine and silicon slice charging box, institute on silicon chip are fixed with the support by detachable apparatus
Stating manipulator will be put into graphite boat after the silicon chip extracting in magazine on silicon chip or will be put into silicon after the silicon chip extracting in graphite boat
In piece blanking box；
The manipulator includes mobile platform, two the first slide rails being disposed in parallel relation to one another, and two the first slide rails are fixed on
On support, the lower surface of the mobile platform is provided with two the first chutes parallel to each other, and two the first slide rails are respectively clamped into
In two the first chutes, the first driving means for moving back and forth mobile platform are connected with the mobile platform, it is described
The upper surface of mobile platform is provided with the second chute, and second chute is orthogonal with the first chute, in second chute
The first sliding block is provided with, first sliding block slidably reciprocates along the second chute, is provided with for making first in second chute
The second drive device that sliding block moves back and forth, is fixed with the first supporting plate, the first support plate level on first sliding block
Set, the lower surface of first supporting plate is fixed with the first U-shaped support frame, first supporting plate and the first U-shaped support frame
First through hole is surrounded, the mobile platform passes through first through hole, and the bottom of the first U-shaped support frame is fixed with the second support
Plate, second supporting plate is vertically arranged, and the side of second supporting plate is provided with first support bar, second supporting plate
On be provided with the 3rd drive device for moving up and down first support bar, the first support is fixed with the first support bar
Frame, is provided with the first rotary shaft on first support frame, first rotary shaft is fixed on the first support frame by bearing,
The four-drive device for rotating the first rotary shaft is provided with first support frame, described first rotates the tip of the axis
It is connected with silicon chip suction means；
The silicon chip suction means includes base, and a side surface of the base is fixed on the first rotation the tip of the axis, bottom
Seat another side surface be fixed with multiple clamps, multiple clamps be arranged in parallel successively, the spacing between two adjacent clamps with
The spacing of two adjacent graphite cakes of graphite boat is identical, and the quantity of clamp and the graphite cake quantity of graphite boat are identical, each
Multiple through holes are provided with clamp, the edge of each through hole is provided with multiple fixing holes, one is provided with each fixing hole admittedly
Fixed board, the thickness of the thickness less than clamp of the fixed plate, each through hole is provided centrally with sucker, multiple bullets is connected with sucker
Spring, multiple springs are corresponded with multiple fixing holes, and one end of spring is fixed on sucker, and the other end is fixed in fixed plate,
One side surface of the clamp is provided with multiple metallic channels, and the quantity of metallic channel is identical with the quantity of through hole, each metallic channel with
One through hole connection, is provided with compressed air hose in metallic channel, one end of compressed air hose is connected with air compressor, the other end
It is connected with sucker, the fixed plate in the sucker, multiple springs, each fixing hole, the compressed air hose in each metallic channel are equal
In two clearance spaces of surface composition of clamp；
Magazine includes base plate on the silicon chip, and the upper surface of the base plate is provided with first baffle and second baffle, described
First baffle be arranged in parallel with second baffle, and the first baffle is provided with multiple first and blocks towards a side surface of second baffle
Groove, the second baffle is provided with multiple second draw-in grooves towards a side surface of first baffle, multiple first draw-in grooves and multiple the
Two draw-in groove is corresponded, and one end of silicon chip is snapped in the first draw-in groove, and the other end of silicon chip snaps in corresponding with the first draw-in groove second
In draw-in groove, the spacing between two adjacent first draw-in grooves is identical with the spacing between two adjacent clamps, and described
The quantity of one draw-in groove is identical with the quantity of clamp, and the silicon slice charging box is identical with the structure of magazine on silicon chip.
It is further that the first driving means, the second drive device, the 3rd drive device are electric pushrod.
It is further that the four-drive device is electric rotating machine.
It is further that the quantity of through hole is three on each clamp, and three centers of through hole constitute an isosceles three
It is angular.
It is further that the upper end of the first baffle is connected with the upper end of second baffle by U-shaped connecting plate.
It is further that the detachable apparatus are buckle.
The beneficial effects of the utility model are：This be used for graphite boat equipment silicon chip fetching device operationally, only need by
Graphite boat is placed on the specified location of bracket, then will be put into graphite boat after the silicon chip extracting in magazine on silicon chip using manipulator
It is interior or will be put into silicon slice charging box after the silicon chip extracting in graphite boat, it is possible to achieve the mechanization and automation of production, ban
Artificial dull, complicated manual labor, greatly reduces the labour intensity of workman, has saved human cost, and take out every time
It is more with the silicon chip quantity being put into, substantially increase operating efficiency.
Brief description of the drawings
The structural representation of Fig. 1 silicon chip fetching devices for graphite boat equipment described in the utility model；
The part-structure schematic diagram of Fig. 2 manipulators described in the utility model；
Fig. 3 is the structural representation of silicon chip suction means described in the utility model；
Fig. 4 is the structural representation of clamp described in the utility model；
Fig. 5 is the structural representation of magazine on silicon chip described in the utility model；
Description of symbols in figure：Support 1, bracket 2, manipulator 3, mobile platform 301, the first slide rail 302, the first chute 303,
First driving means 304, the second chute 305, the first sliding block 306, the second drive device 307, the first supporting plate 308, the first U-shaped
Support frame 309, first through hole 310, the second supporting plate 311, first support bar 312, the 3rd drive device 313, the first support frame
314th, the first rotary shaft 315, four-drive device 316, silicon chip suction means 317, base 31701, clamp 31702, fixing hole
31703rd, magazine on fixed plate 31704, sucker 31705, spring 31706, metallic channel 31707, compressed air hose 31708, silicon chip
4th, under base plate 401, first baffle 402, second baffle 403, the first draw-in groove 404, the second draw-in groove 405, U-shaped connecting plate 406, silicon chip
Magazine 5.
Specific embodiment
The utility model is further illustrated below in conjunction with the accompanying drawings.
As shown in Fig. 1 to 5, this is used for the silicon chip fetching device of graphite boat equipment, including support 1, is set on the support 1
There is bracket 2, the bracket 2 is used for placing graphite boat, and the top of the bracket 2 is provided with the manipulator 3 for picking and placeing silicon chip, described
Magazine 4 and silicon slice charging box 5 on silicon chip are fixed with by detachable apparatus, the manipulator 3 is by magazine 4 on silicon chip on support 1
It is put into after interior silicon chip extracting in graphite boat or will be put into silicon slice charging box 5 after the silicon chip extracting in graphite boat；The machinery
Hand 3 includes the first slide rail 302 that mobile platform 301, two is disposed in parallel relation to one another, and two the first slide rails 302 are fixed on support 1
On, the lower surface of the mobile platform 301 is provided with two the first chutes 303 parallel to each other, and two the first slide rails 302 are distinguished
Snap in two the first chutes 303, be connected with the mobile platform 301 for move back and forth mobile platform 301 first
Drive device 304, the upper surface of the mobile platform 301 is provided with the second chute 305, and second chute 305 and first is slided
Groove 303 is orthogonal, and the first sliding block 306 is provided with second chute 305, and first sliding block 306 is along the second chute 305
Slidably reciprocate, the second drive device 307 for moving back and forth the first sliding block 306, institute are provided with second chute 305
State and the first supporting plate 308 is fixed with the first sliding block 306, first supporting plate 308 is horizontally disposed with, first supporting plate
308 lower surface is fixed with the first U-shaped support frame 309, and the U-shaped support frame 309 of first supporting plate 308 and first surrounds first
Through hole 310, the mobile platform 301 passes through first through hole 310, and the bottom of the first U-shaped support frame 309 is fixed with second
Fagging 311, second supporting plate 311 is vertically arranged, and the side of second supporting plate 311 is provided with first support bar
312312, the 3rd drive device for moving up and down first support bar 312312 is provided with second supporting plate 311
313, the first support frame 314 is fixed with the first support bar 312312, it is provided with first turn on first support frame 314
Moving axis 315, first rotary shaft 315 is fixed on the first support frame 314 by bearing, is set on first support frame 314
The four-drive device 316 for rotating the first rotary shaft 315 is equipped with, the end of first rotary shaft 315 is connected with silicon
Piece suction means 317；The silicon chip suction means 317 includes base 31701, and a side surface of the base 31701 is fixed on
The end of the first rotary shaft 315, another side surface of base 31701 is fixed with multiple clamps 31702, multiple clamps 31702 according to
Secondary to be arranged in parallel, the spacing between two adjacent clamps 31702 is identical with the spacing of two adjacent graphite cakes of graphite boat,
And the quantity of clamp 31702 is identical with the graphite cake quantity of graphite boat, multiple through holes are provided with each clamp 31702, each
The edge of through hole is provided with multiple fixing holes 31703, and a fixed plate 31704 is provided with each fixing hole 31703, described solid
The thickness of fixed board 31704 is less than the thickness of clamp 31702, and each through hole is provided centrally with sucker 31705, connects on sucker 31705
Multiple springs 31706 are connected to, multiple springs 31706 are corresponded with multiple fixing holes 31703, and one end of spring 31706 is fixed
On sucker 31705, the other end is fixed in fixed plate 31704, and a side surface of the clamp 31702 is provided with multiple wires
Groove 31707, the quantity of metallic channel 31707 is identical with the quantity of through hole, and each metallic channel 31707 is connected with a through hole, wire
Compressed air hose 31708 is provided with groove 31707, one end of compressed air hose 31708 is connected with air compressor, the other end and
Sucker 31705 is connected, fixed plate 31704 in the sucker 31705, multiple spring 31706, each fixing hole 31703, each
Compressed air hose 31708 in metallic channel 31707 is respectively positioned in two clearance spaces of surface composition of clamp 31702；It is described
Magazine 4 includes base plate 401 on silicon chip, and the upper surface of the base plate 401 is provided with first baffle 402 and second baffle 403, described
First baffle 402 be arranged in parallel with second baffle 403, and the first baffle 402 is set towards a side surface of second baffle 403
There are multiple first draw-in grooves 404, the second baffle 403 is provided with multiple second draw-in grooves towards a side surface of first baffle 402
405, multiple first draw-in grooves 404 are corresponded with multiple second draw-in grooves 405, and one end of silicon chip is snapped in the first draw-in groove 404, silicon chip
The other end snap in in corresponding second draw-in groove 405 of the first draw-in groove 404, between two adjacent first draw-in grooves 404
Spacing between spacing and two adjacent clamps 31702 is identical, the quantity of first draw-in groove 404 and the number of clamp 31702
Amount is identical, and the silicon slice charging box 5 is identical with the structure of magazine on silicon chip 4.This is used for the silicon chip fetching device of graphite boat equipment
Operation principle it is as described below：When needing for silicon chip to be put into graphite boat, graphite boat is placed on the specific bit of bracket 2 first
Put, and magazine 4 on empty silicon chip is removed from support 1, magazine 4 on the silicon chip for fill silicon chip are changed, due to adjacent two
Spacing between first draw-in groove 404 is identical with the spacing between two adjacent clamps 31702, therefore can control the first driving
Device 304, the second drive device 307, the 3rd drive device 313, four-drive device 316 make each clamp 31702 insert
Between two silicon chips adjacent in magazine 4 on silicon chip, and because the quantity of the first draw-in groove 404 is identical with the quantity of clamp 31702,
Each silicon chip can correspond to a clamp 31702, now air compressor work, and each sucker 31705 is by corresponding silicon
Piece holds, because the spacing between two adjacent clamps 31702 is identical with the spacing of two adjacent graphite cakes of graphite boat,
Therefore control first driving means 304, the second drive device 307, the 3rd drive device 313, four-drive device 316 can make
Clamp 31702 takes out in magazine 4 from silicon chip and inserts between graphite cake adjacent in graphite boat, while by empty silicon chip feeding
Box 4 removes magazine 4 on the silicon chip changed and fill silicon chip, and now air compressor is stopped, and each sucker 31705 will be right therewith
The silicon chip answered is unclamped, and silicon chip is fallen into graphite boat, because the quantity of clamp 31702 and the graphite cake quantity of graphite boat are identical, often
It is secondary to place row's silicon chip, then control first driving means 304, the second drive device 307, the 3rd drive device 313, the
Four-drive device 316 makes clamp 31702 be taken out from graphite boat and inserted between two silicon chips adjacent in magazine 4 on silicon chip,
Carry out silicon chip next time to place, repeating said process just can be sequentially placed into graphite boat silicon chip, and be driven by first
Device 304, the second drive device 307, the 3rd drive device 313 can control three sides front and rear up and down of clamp 31702
To displacement, by four-drive device 316 control clamp 31702 rotation, so as to realize being accurately positioned for clamp 31702,
When needing to take out silicon chip from graphite boat, first driving means 304, the second drive device the 307, the 3rd is controlled to drive dress first
Putting 313, four-drive device 316 makes each clamp 31702 insert between graphite cake adjacent in graphite boat, now air pressure
Contracting machine works, and each sucker 31705 holds corresponding silicon chip, due to the quantity and the graphite of graphite boat of clamp 31702
Plate quantity is identical, and row's silicon chip can be taken out every time, and first driving means 304, the second drive device 307, are then controlled again
Three drive devices 313, four-drive device 316 make clamp 31702 be taken out from graphite boat and inserted in silicon slice charging box 5, and
And the two ends of each silicon chip is all inserted into first draw-in groove 404 and the second draw-in groove 405, now air compressor stops work
Make, each sucker 31705 unclamps corresponding silicon chip, and silicon chip fallen on silicon chip in magazine 4, while by full silicon slice charging
Box 5 removes the silicon slice charging box 5 for changing sky, then controls first driving means 304, the second drive device 307, the 3rd drive device
313rd, four-drive device 316 makes clamp 31702 be taken out from silicon slice charging box 5 and inserts the graphite with silicon chip in graphite boat
Between plate, silicon chip extracting next time is carried out, repeating said process just silicon chip can successively be taken out graphite boat and be put under silicon chip
In magazine 5, whole process can be carried out automatically, it is possible to achieve the mechanization and automation of production, ban artificial dull, complicated
Manual labor, greatly reduces the labour intensity of workman, and the silicon chip quantity being removed and placed into every time is more, substantially increases
Operating efficiency.
In the above-described embodiment, the first driving means 304, the second drive device 307, the 3rd drive device 313
Electric pushrod is, the four-drive device 316 is electric rotating machine.Just can so be driven to first by PLC control program
Dynamic device 304, the second drive device 307, the 3rd drive device 313, four-drive device 316 enter freely setting for line parameter,
Precise control can be realized, and it is time saving and laborsaving.
In order that silicon chip suction means 317 avoids generation silicon chip from dropping in moving process, through hole on each clamp 31702
Quantity be three, and the centers of three through holes constitute an isosceles triangles, and so each silicon chip is with three generals of suckers 31705
It holds, and sucker 31705 constitutes an isosceles triangle, and its suction firmly can uniformly hold silicon chip, it is to avoid silicon occurs
Piece drops.
In order to ensure the structural stability of magazine 4 and silicon slice charging box 5 on silicon chip, the upper end of the first baffle 402 with
The upper end of second baffle 403 is connected by U-shaped connecting plate 406.
Magazine on silicon chip 4 and silicon slice charging box 5 are arranged on support 1 for convenience, are both and are also allowed for being dismantled down
Come, the detachable apparatus are preferably buckle.
Claims (6)
1. the silicon chip fetching device of graphite boat equipment is used for, it is characterised in that：Including support (1), it is provided with the support (1)
Bracket (2), the bracket (2) is provided with the manipulator for picking and placeing silicon chip for placing graphite boat, bracket (2) top
(3) magazine on silicon chip (4) and silicon slice charging box (5), the manipulator, are fixed with by detachable apparatus on the support (1)
(3) will be put into after the silicon chip extracting in magazine on silicon chip (4) in graphite boat or silicon chip will be put into after the silicon chip extracting in graphite boat
In blanking box (5)；
The first slide rail (302) that the manipulator (3) is disposed in parallel relation to one another including mobile platform, two, two the first slide rails
(302) it is fixed on support (1), the lower surface of the mobile platform (301) is provided with two the first chutes parallel to each other
(303), two the first slide rails (302) are respectively clamped into two the first chutes (303), are connected with the mobile platform (301)
For the first driving means (304) for moving back and forth mobile platform (301), the upper surface of the mobile platform (301) is set
There is the second chute (305), second chute (305) is orthogonal with the first chute (303), in second chute (305)
The first sliding block (306) is provided with, first sliding block (306) slidably reciprocates along the second chute (305), second chute
(305) the second drive device (307) for moving back and forth the first sliding block (306), first sliding block (306) are provided with
On be fixed with the first supporting plate (308), first supporting plate (308) is horizontally disposed with, the following table of first supporting plate (308)
Face is fixed with the first U-shaped support frame (309), and first supporting plate (308) surrounds first and leads to the first U-shaped support frame (309)
Hole (310), the mobile platform (301) is fixed with through first through hole (310), the bottom of the first U-shaped support frame (309)
Second supporting plate (311), second supporting plate (311) is vertically arranged, and the side of second supporting plate (311) is provided with
One support bar (312), be provided with second supporting plate (311) for move up and down first support bar (312) the 3rd
Drive device (313), is fixed with the first support frame (314), first support frame (314) on the first support bar (312)
On be provided with the first rotary shaft (315), first rotary shaft (315) is fixed on the first support frame (314) by bearing, institute
State the four-drive device (316) being provided with the first support frame (314) for rotating the first rotary shaft (315), described the
The end of one rotary shaft (315) is connected with silicon chip suction means (317)；
The silicon chip suction means (317) includes base (31701), and a side surface of the base (31701) is fixed on first
The end of rotary shaft (315), another side surface of base (31701) is fixed with multiple clamps (31702), multiple clamps
(31702) it be arranged in parallel successively, two adjacent graphite cakes of the spacing between two adjacent clamps (31702) and graphite boat
Spacing it is identical, and the quantity of clamp (31702) and the graphite cake quantity of graphite boat are identical, are set on each clamp (31702)
The edge for having multiple through holes, each through hole is provided with multiple fixing holes (31703), and one is provided with each fixing hole (31703)
Individual fixed plate (31704), the thickness of the thickness less than clamp (31702) of the fixed plate (31704), each through hole is centrally disposed
There is sucker (31705), multiple springs (31706), multiple springs (31706) and multiple fixing holes are connected with sucker (31705)
(31703) correspond, one end of spring (31706) is fixed on sucker (31705), and the other end is fixed on fixed plate
(31704) on, a side surface of the clamp (31702) is provided with multiple metallic channels (31707), the number of metallic channel (31707)
Amount is identical with the quantity of through hole, and each metallic channel (31707) is connected with a through hole, and compression is provided with metallic channel (31707)
Air hose (31708), one end of compressed air hose (31708) is connected with air compressor, the other end and sucker (31705) phase
Even, the sucker (31705), multiple spring (31706), the fixed plate (31704) in each fixing hole (31703), each leads
Compressed air hose (31708) in wire casing (31707) is respectively positioned in two clearance spaces of surface composition of clamp (31702)；
Magazine (4) includes base plate (401) on the silicon chip, the upper surface of the base plate (401) be provided with first baffle (402) with
Second baffle (403), the first baffle (402) be arranged in parallel with second baffle (403), first baffle (402) direction
One side surface of second baffle (403) is provided with multiple first draw-in grooves (404), and the second baffle (403) is towards first baffle
(402) a side surface is provided with multiple second draw-in grooves (405), multiple first draw-in grooves (404) and multiple second draw-in grooves (405)
One correspondence, one end of silicon chip is snapped in the first draw-in groove (404), and the other end of silicon chip snaps in corresponding with the first draw-in groove (404) the
In two draw-in groove (405), spacing and two adjacent clamps (31702) between two adjacent first draw-in grooves (404) it
Between spacing it is identical, the quantity of first draw-in groove (404) is identical with the quantity of clamp (31702), the silicon slice charging box (5)
Structure with magazine on silicon chip (4) is identical.
2. the silicon chip fetching device of graphite boat equipment is used for as claimed in claim 1, it is characterised in that：Described first drives dress
Put (304), the second drive device (307), the 3rd drive device (313) and be electric pushrod.
3. the silicon chip fetching device of graphite boat equipment is used for as claimed in claim 2, it is characterised in that：Described 4th drives dress
It is electric rotating machine to put (316).
4. the silicon chip fetching device of graphite boat equipment is used for as claimed in claim 3, it is characterised in that：Each clamp
(31702) quantity of through hole is three on, and three centers of through hole constitute an isosceles triangle.
5. the silicon chip fetching device of graphite boat equipment is used for as claimed in claim 4, it is characterised in that：The first baffle
(402) upper end is connected with the upper end of second baffle (403) by U-shaped connecting plate (406).
6. the silicon chip fetching device of graphite boat equipment is used for as claimed in claim 5, it is characterised in that：The detachable apparatus
It is buckle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621381566.4U CN206232813U (en) | 2016-12-15 | 2016-12-15 | For the silicon chip fetching device of graphite boat equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621381566.4U CN206232813U (en) | 2016-12-15 | 2016-12-15 | For the silicon chip fetching device of graphite boat equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206232813U true CN206232813U (en) | 2017-06-09 |
Family
ID=58992039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621381566.4U Expired - Fee Related CN206232813U (en) | 2016-12-15 | 2016-12-15 | For the silicon chip fetching device of graphite boat equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206232813U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106435521A (en) * | 2016-12-15 | 2017-02-22 | 乐山新天源太阳能科技有限公司 | Silicon slice taking and placing device for graphite boat equipment |
-
2016
- 2016-12-15 CN CN201621381566.4U patent/CN206232813U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106435521A (en) * | 2016-12-15 | 2017-02-22 | 乐山新天源太阳能科技有限公司 | Silicon slice taking and placing device for graphite boat equipment |
| CN106435521B (en) * | 2016-12-15 | 2018-09-04 | 乐山新天源太阳能科技有限公司 | Silicon chip fetching device for graphite boat equipment |
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