CN206200999U - A kind of mechanical arm - Google Patents
A kind of mechanical arm Download PDFInfo
- Publication number
- CN206200999U CN206200999U CN201621218828.5U CN201621218828U CN206200999U CN 206200999 U CN206200999 U CN 206200999U CN 201621218828 U CN201621218828 U CN 201621218828U CN 206200999 U CN206200999 U CN 206200999U
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- CN
- China
- Prior art keywords
- arm
- mechanical arm
- photomask
- removable pin
- way cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model is related to technical field of manufacturing semiconductors, more particularly to a kind of mechanical arm for being applied to pick and place box for photomask from shelf, by setting two-way cylinder so that the distance between the first arm and the second arm extend and shorten, it is beneficial to and picks and places box for photomask, and in set location sensor on two-way cylinder, in setting removable pin on the first arm and the second arm, catch and light sensor, indication signal is sent with the position sensor when mechanical arm picks and places box for photomask and light sensor, remarkable action is picked and placeed such that it is able to discovery in time, stop mechanical arm abnormal operation, box for photomask is avoided to be damaged, and then improve board stability and reliability, reduction is delayed machine phenomenon.
Description
Technical field
The utility model is related to technical field of semiconductors, more particularly to one kind to be applied to be picked and placeed from shelf (Stocker)
The mechanical arm of box for photomask.
Background technology
At present, mainly by estimating come whether inspecting manipuator arm is normal to the placement of box for photomask, therefore mechanical arm
It may happen that situations below, the first situation is mechanical arm collision box for photomask, i.e. machinery during box for photomask is picked and placeed
Arm is not put box for photomask well and is blocked, and box for photomask is retracted in company with arm, and is collided when other one piece of box for photomask is taken, and is led
Light shield is caused to be damaged；Second situation is that box for photomask is extracted and fallen down by mechanical arm from shelf, i.e., because foreign matter makes to be placed on shelf
Box for photomask jack-up, cause mechanical arm to take box for photomask out of when retracting, cause box for photomask to fall down impaired, these are all this area skills
Art personnel do not expect what is seen.
Utility model content
For above-mentioned problem, the utility model discloses a kind of mechanical arm, wherein, including：It is arm assembly, double
To cylinder, the first arm and the second arm；
The two-way cylinder is arranged on the arm assembly, and first arm connects the two-way gas by connecting rod
One end of cylinder, second arm connects the other end of the two-way cylinder by connecting rod；
Wherein, removable pin, the first spring, catch and light biography are provided with first arm and second arm
Sensor, the catch closes on first arm and institute by first spring and the activity pin connection, the removable pin
The inner side for stating the second arm is set, and so that when the mechanical arm takes object, the removable pin stress is moved, and then drives described
Catch is moved between the transmitting terminal of the light sensor and receiving terminal and blocks passage of light, sends the light sensor
Indication signal.
Above-mentioned mechanical arm, wherein, the two-way cylinder is provided with second spring and magnetic valve, by the magnetic valve
Supply and second spring described in gas exhaust inspecting extensional motion or reseting movement.
Above-mentioned mechanical arm, wherein, position sensor is set on the two-way cylinder, to detect the second spring
Whether extensional motion and reseting movement reach setting position.
Above-mentioned mechanical arm, wherein, the mechanical arm is connected with a control assembly, the control assembly control
The light sensor, the position sensor and the magnetic valve.
Above-mentioned mechanical arm, wherein, the light sensor, the position sensor connect from different indicator lamps
Connect.
Above-mentioned mechanical arm, wherein, the mechanical arm is applied to pick and place box for photomask.
Above-mentioned mechanical arm, wherein, triangular groove is provided with the box for photomask, the removable pin is and described three
The triangle removable pin of angular groove match.
Above-mentioned mechanical arm, wherein, first arm, the second arm, the arm assembly, the removable pin, institute
The material for stating connecting rod and the catch is aluminium alloy.
Above-mentioned mechanical arm, wherein, the distance that the catch is moved up in the mechanical arm folding side for 4~
6mm。
Above-mentioned mechanical arm, wherein, the height of the removable pin is 8~12mm.
Above-mentioned utility model has the following advantages that or beneficial effect：
The utility model discloses a kind of mechanical arm, it is applied to be picked and placeed from shelf the mechanical arm of box for photomask, passes through
Two-way cylinder is set so that the distance between the first arm and the second arm elongation and shorten, be beneficial to and pick and place box for photomask, and in
Set location sensor on two-way cylinder, in setting removable pin, catch and light sensor on the first arm and the second arm, with
When mechanical arm picks and places box for photomask, position sensor and light sensor send indication signal, are picked and placeed such that it is able to discovery in time
Remarkable action, stops mechanical arm abnormal operation, it is to avoid box for photomask is damaged, and then improves board stability and reliability, reduces
Delay machine phenomenon.
Brief description of the drawings
The detailed description made to non-limiting example with reference to the following drawings by reading, the utility model and its spy
Levy, profile and advantage will become more apparent.Identical mark indicates identical part in whole accompanying drawings.Can be by
Accompanying drawing is drawn according to ratio, it is preferred that emphasis is purport of the present utility model is shown.
Fig. 1 is the top view of mechanical arm in the utility model embodiment；
Fig. 2 is the side view of mechanical arm in the utility model embodiment；
Fig. 3 is that mechanical arm puts in the structural representation that shelf take box for photomask in the utility model embodiment；
Fig. 4 is the structural representation that mechanical arm takes out box for photomask from shelf in the utility model embodiment.
Specific embodiment
The utility model is further described with specific embodiment below in conjunction with the accompanying drawings, but not as this practicality
New restriction.
As depicted in figs. 1 and 2, the present embodiment is related to a kind of mechanical arm, can be applied to be picked and placeed from shelf (Stocker)
Box for photomask, specifically, the mechanical arm is including arm assembly 1, the two-way cylinder 2 on arm assembly 1, by connecting rod
41 the first arms 51 being connected with one end of two-way cylinder 2 and be connected with the other end of two-way cylinder 2 by connecting rod 42
Two arms 52, wherein, removable pin 6, the first spring 7, catch 8 and light are provided with the first arm 51 and the second arm 52 and are passed
Sensor 9, catch 8 is connected by the first spring 7 with removable pin 6, and removable pin 6 closes on the inner side of the first arm 51 and the second arm 52
Set, so that when mechanical arm takes object, the stress of removable pin 6 is moved, and then drive catch 8 to be moved to the hair of light sensor 9
Passage of light is blocked between sending end 91 and receiving terminal 92, light sensor 9 is sent indication signal, it is preferred that light sensor 9
It is connected with an indicator lamp, lighting or extinguish the transmitting terminal 91 and receiving terminal that can learn light sensor 9 by the indicator lamp
Passage of light between 92 whether be blocked (catch 8 is moved to when between the transmitting terminal 91 of light sensor 9 and receiving terminal 92,
Passage of light is blocked, and the indicator lamp being connected with light sensor 9 extinguishes；Conversely, transmitting terminal of the catch 8 from light sensor 9
When being removed between 91 and receiving terminal 92, passage of light is unimpeded, and the indicator lamp being connected with light sensor 9 is lighted), so as to learn work
Whether stress is moved dynamic pin 6, and then obtains whether mechanical arm gets object.
In a preferred embodiment of the present utility model, above-mentioned two-way cylinder 2 is provided with second spring 21 and electromagnetism
Valve (is not indicated) in figure, by the supply and the extensional motion or reseting movement of gas exhaust inspecting second spring 21 of magnetic valve.
On this basis, further, position sensor 3 is set on above-mentioned two-way cylinder 2, to detect second spring 21
Whether extensional motion and reseting movement reach setting position, it is preferred that the position sensor 3 is connected by with position sensor 3
Two indicator lamps (such as red led and green indicating lamp) for connecing show that the extensional motion of second spring 21 and reseting movement are
(if second spring 21 is stretched to specified location, red led is lighted, if reseting movement resets to finger for no arrival setting position
Positioning is put, then green indicating lamp is lighted).
In a preferred embodiment of the present utility model, mechanical arm is total with robot (robot base) controller
Into (not shown) connection, control assembly control light sensor 9, position sensor 3 and magnetic valve, due to the controller
Assembly is the common control assembly being connected with mechanical arm in present technical field of semiconductors, and just it will not go into details herein, by
Pass through existing circuit in the connection of light sensor, position sensor, indicator lamp, the alarm of board, just refuse herein
To repeat.
In a preferred embodiment of the present utility model, triangular groove (triangle is provided with above-mentioned box for photomask
Connected in star is arranged on the left side and right side of box for photomask), removable pin 6 is the triangle removable pin matched with triangular groove.
In a preferred embodiment of the present utility model, above-mentioned first arm 51, the second arm 52, arm assembly 1,
The material of removable pin 6, connecting rod 4 and catch 8 is aluminium alloy.
In a preferred embodiment of the present utility model, above-mentioned catch 8 is moved up in the non-side of mechanical arm folding
Distance be 4~6mm (such as 4mm, 4.5mm, 5mm and 6mm etc.).
In a preferred embodiment of the present utility model, the height of above-mentioned removable pin 6 for 8~12mm (such as 8mm,
9mm, 10mm and 12mm etc.).
In a specific embodiment of the present utility model, the thickness of the arm 52 of above-mentioned first arm 51 and second is
5mm, width is 20mm, and length is 80mm, and mechanical arm when opening the inner distance of the first arm 51 and the second arm 52 be
245mm, the inner distance of the first arm 51 and the second arm 52 is 205mm when mechanical arm is closed.
Application to mechanical arm below in conjunction with the accompanying drawings is described in detail：
When mechanical arm takes box for photomask 10, control assembly sends solenoid signal, and magnetic valve is supplied to two-way cylinder 2
Gas, to drive two-way cylinder 2 to be opened towards both direction, second spring 21 is in extended state, the first arm 51 and the second arm
52 open, and the inner distance of the first arm 51 and the second arm 52 reaches maximum, the instruction being now connected with position sensor 3
Lamp sends feux rouges, structure as shown in Figure 3.Stop to being double when mechanical arm reaches magnetic valve after shelf take box for photomask 10 afterwards
Supplied to cylinder 2, two-way cylinder 2 resets, second spring 21 carries out reseting movement, the first arm 51 and the second arm 52 are closed,
And first the inner distance of arm 51 and the second arm 52 reach minimum, at the same time, removable pin 6 is outwards pushed up by box for photomask 10
Go out, under the drive of spring, catch 8 is displaced outwardly, catch 8 shuts out the light sensor 9, the first arm 51 and the second arm 52 to
On lift taking-up box for photomask 10, structure as shown in Figure 4.
When mechanical arm puts box for photomask 10, arm is overall to place downwards box for photomask 10, and control assembly sends magnetic valve
Signal, magnetic valve is supplied to two-way cylinder 2, and to drive two-way cylinder 2 to be opened towards both direction, catch 8 and removable pin 6 are first
Return to original position in the presence of spring 7, structure as shown in Figure 3, and after magnetic valve stops being supplied to two-way cylinder 2, second
Spring 21 resets.
During box for photomask 10 is picked and placeed, the indicator lamp that is connected with light sensor 9 of detection either with or without while bright or go out,
I.e. under normal circumstances, while box for photomask 10 is taken out from shelf, due to the movement of the stress of removable pin 6, catch 8 can be moved to
Between the transmitting terminal 91 and receiving terminal 92 of light sensor 9, then the indicator lamp being connected with light sensor 9 extinguishes；By light shield
Box 10 is placed into while on shelf, and the first arm 51 and the second arm 52 open, removable pin 6 spring reset response next time
To origin, catch 8 is also removed between the transmitting terminal 91 and receiving terminal 92 of light sensor 9, then be connected with light sensor 9
Indicator lamp is lighted, and (such as while box for photomask 10 is taken out from shelf, is connected with light sensor 9 if abnormal
Indicator lamp does not extinguish, or while box for photomask 10 is placed on shelf, point non-with the indicator lamp that light sensor 9 is connected
It is bright), then pick and place remarkable action, board alarm.
During box for photomask 10 is picked and placeed, the indicator lamp that is connected with position sensor 3 of detection either with or without and meanwhile light or
Extinguish, or the lamp of which color is lighted；I.e. under normal circumstances, while box for photomask 10 is taken out from shelf, manipulator is worked as
Arm reaches magnetic valve after shelf take box for photomask 10 to be stopped to being that two-way cylinder 2 is supplied, and two-way cylinder 2 resets, and second spring 21 is entered
Row reseting movement and setting back is put, then the green indicating lamp being connected with position sensor 3 is lighted；It is placed into by box for photomask 10
While on shelf, magnetic valve is supplied to two-way cylinder 2, and two-way cylinder 2 opens, and second spring 21 carries out extended state and stretches
During to maximum position, then the red led being connected with position sensor 3 is lighted；If abnormal (such as by box for photomask 10
While taking-up from shelf, the indicator lamp being connected with position sensor 3 is non-lit up or red led is lighted, or by light
Cover box 10 is placed into while on shelf, and the indicator lamp being connected with position sensor 3 is non-lit up or green indicating lamp is lighted),
Then pick and place remarkable action, board alarm.
Preferred embodiment of the present utility model is described above.It is to be appreciated that the utility model not office
It is limited to above-mentioned particular implementation, wherein the equipment and structure that do not describe in detail to the greatest extent are construed as with the common side in this area
Formula is practiced；Any those of ordinary skill in the art, in the case where technical solutions of the utility model ambit is not departed from, may be used
Technical solutions of the utility model are made with many possible variations and modification using the methods and techniques content of the disclosure above, or is repaiied
The Equivalent embodiments of equivalent variations are changed to, this has no effect on substance of the present utility model.Therefore, it is every without departing from this practicality
The content of new technique scheme, according to technical spirit of the present utility model to any simple modification made for any of the above embodiments, etc.
With change and modification, still fall within the range of technical solutions of the utility model protection.
Claims (10)
1. a kind of mechanical arm, it is characterised in that including：Arm assembly, two-way cylinder, the first arm and the second arm；
The two-way cylinder is arranged on the arm assembly, and first arm connects the two-way cylinder by connecting rod
One end, second arm connects the other end of the two-way cylinder by connecting rod；
Wherein, removable pin, the first spring, catch and light level are provided with first arm and second arm
Device, by first spring and the activity pin connection, the removable pin closes on first arm and described to the catch
The inner side of the second arm is set, and so that when the mechanical arm takes object, the removable pin stress is moved, and then drives the gear
Piece is moved between the transmitting terminal of the light sensor and receiving terminal and blocks passage of light, the light sensor is sent finger
Show signal.
2. mechanical arm as claimed in claim 1, it is characterised in that the two-way cylinder is provided with second spring and electromagnetism
Valve, by the extensional motion or reseting movement of second spring described in the supply and gas exhaust inspecting of the magnetic valve.
3. mechanical arm as claimed in claim 2, it is characterised in that position sensor is set on the two-way cylinder, with
Detect whether the second spring extensional motion and reseting movement reach setting position.
4. mechanical arm as claimed in claim 3, it is characterised in that the mechanical arm is connected with control assembly, described
Control assembly controls the light sensor, the position sensor and the magnetic valve.
5. mechanical arm as claimed in claim 3, it is characterised in that the light sensor, the position sensor with
Different indicator lamp connections.
6. mechanical arm as claimed in claim 1, it is characterised in that the mechanical arm is applied to pick and place box for photomask.
7. mechanical arm as claimed in claim 6, it is characterised in that triangular groove is provided with the box for photomask, it is described
Removable pin is the triangle removable pin matched with the triangular groove.
8. mechanical arm as claimed in claim 1, it is characterised in that first arm, the second arm, the arm are total
Into the material of the removable pin, the connecting rod and the catch is aluminium alloy.
9. mechanical arm as claimed in claim 1, it is characterised in that the catch is moved on the mechanical arm folding direction
Dynamic distance is 4~6mm.
10. mechanical arm as claimed in claim 1, it is characterised in that the height of the removable pin is 8~12mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621218828.5U CN206200999U (en) | 2016-11-11 | 2016-11-11 | A kind of mechanical arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621218828.5U CN206200999U (en) | 2016-11-11 | 2016-11-11 | A kind of mechanical arm |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206200999U true CN206200999U (en) | 2017-05-31 |
Family
ID=58752573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621218828.5U Active CN206200999U (en) | 2016-11-11 | 2016-11-11 | A kind of mechanical arm |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206200999U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107485808A (en) * | 2017-10-17 | 2017-12-19 | 张兴荣 | Intelligent holographic deep well rescue system |
| CN109129551A (en) * | 2018-11-05 | 2019-01-04 | 哈尔滨岛田大鹏工业股份有限公司 | A kind of robot clamp with the tight device of spring self-lock |
-
2016
- 2016-11-11 CN CN201621218828.5U patent/CN206200999U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107485808A (en) * | 2017-10-17 | 2017-12-19 | 张兴荣 | Intelligent holographic deep well rescue system |
| CN107485808B (en) * | 2017-10-17 | 2022-10-11 | 张兴荣 | Intelligent holographic deep well rescue system |
| CN109129551A (en) * | 2018-11-05 | 2019-01-04 | 哈尔滨岛田大鹏工业股份有限公司 | A kind of robot clamp with the tight device of spring self-lock |
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| GR01 | Patent grant | ||
| GR01 | Patent grant |