CN206175339U - High ultimate vacuum's high -speed diffusion pump - Google Patents
High ultimate vacuum's high -speed diffusion pump Download PDFInfo
- Publication number
- CN206175339U CN206175339U CN201621093180.3U CN201621093180U CN206175339U CN 206175339 U CN206175339 U CN 206175339U CN 201621093180 U CN201621093180 U CN 201621093180U CN 206175339 U CN206175339 U CN 206175339U
- Authority
- CN
- China
- Prior art keywords
- nozzle
- stainless steel
- pump
- steel sleeve
- ultimate vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000009792 diffusion process Methods 0.000 title claims abstract description 26
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 33
- 239000010935 stainless steel Substances 0.000 claims abstract description 33
- 229910001018 Cast iron Inorganic materials 0.000 claims abstract description 29
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052802 copper Inorganic materials 0.000 claims abstract description 15
- 239000010949 copper Substances 0.000 claims abstract description 15
- 239000011810 insulating material Substances 0.000 claims abstract description 6
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 10
- 239000003208 petroleum Substances 0.000 claims description 7
- 238000010304 firing Methods 0.000 claims description 6
- 239000000395 magnesium oxide Substances 0.000 claims description 5
- 239000000843 powder Substances 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- 238000005266 casting Methods 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 abstract description 7
- 238000005086 pumping Methods 0.000 abstract description 4
- 238000002347 injection Methods 0.000 abstract description 2
- 239000007924 injection Substances 0.000 abstract description 2
- 239000004576 sand Substances 0.000 abstract 4
- 230000029058 respiratory gaseous exchange Effects 0.000 abstract 1
- 239000003570 air Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000005253 cladding Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000012080 ambient air Substances 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The utility model discloses a high ultimate vacuum's high -speed diffusion pump, including the pump body, be located the heater of pump body outside, bottom, both sides link respectively about the pump body has breathing pipe and exhaust tube, is equipped with defeated oil pipe in the pump body, and defeated oil pipe goes up from last that the nozzle form is sombrero shape to having at least tertiary nozzle, is equipped with the sand grip of a plurality of and nozzle integrated into one piece's interval setting on the lower surface of sombrero shape nozzle. The sand grip passes through with smooth curve with the lower surface of nozzle, and the sand grip is with vertical axial cone form evenly distributed at the nozzle lower surface, the injection angle of nozzle is 50~75. The utility model discloses owing to adopt the mode of heater strip heating cast iron board for heater and the pump body complete contact in bottom, the last heat -insulating material of parcel of stainless steel sellves cooperation copper heat transfer pole avoids the heat of heater strip to dispel the heat to surrounding air, and the heating is concentrated and rate of heating is fast, the sand grip sets up the jet velocity that has increased the oil vapour under the nozzle for pumping rate is high, it is short to reach the ultimate vacuum time, and ultimate vacuum is high.
Description
Technical field
The utility model is related to vacuum machine apparatus field, and in particular to a kind of high speed diffusion pump of high ultimate vacuum.
Background technology
High speed diffusion pump is called oil diffusion pump, is the capital equipment for obtaining high vacuum, is widely used in vacuum metling, Vacuum Deposition
In de-, spatial simulation experiment and this vacuum system insensitive to oily pollution.Common oil diffusion pump uses water cooling system,
Mainly by the pump housing, divergent nozzle, injection nozzle, steam conduit, oil cauldron, heater, water cooling system and prime oil guard part
Composition.When oil diffusion pump fore pump top is extracted into less than 7 handkerchief vacuum, oil cauldron can begin to warm up.Along steam conduit during oil boiling
The oil vapour jet that high speed is sprayed at nozzle is risen to, pumped gas molecule is diffused into vapor stream, the oil with directed movement
Vapour molecule is collided.Therefore gas molecule obtains momentum, produces and oil vapour molecular motion direction identical directed flow.Penetrate
The cooled pump wall of stream directive, oil vapour is condensed, evolved gas molecule, and by carrying step by step, compression finally by fore pump
Take away and reach pumping purpose.
The pumping speed of current high vacuum oil diffuse pump is small, and speed of exhaust maximum is only capable of reaching 8500L/S, and end vacuum is low,
Final vacuum is up to 7 × 10-5Pa, the vacuum time that reaches capacity is long, and fluid return rate is high, and power consumption is big.
Utility model content
The technical problem that the utility model is mainly solved is, there is provided a kind of high speed diffusion pump of high ultimate vacuum.
The utility model solves the technical scheme that its technical problem used：The high speed diffusion pump of high ultimate vacuum, bag
The pump housing is included, positioned at pump housing outside, the heater of bottom, the upper and lower both sides of the pump housing are connected with air intake duct and exhaust tube, are set in the pump housing respectively
There is petroleum pipeline, be provided with least three-level nozzle on petroleum pipeline from top to bottom, the nozzle form is umbrella crown shape, under umbrella crown shape nozzle
Surface is provided with several and the integrally formed spaced raised line of nozzle.The setting of raised line causes oil vapour in spray under nozzle
Its jet diminishes when going out, and it can be seen from bernoulli's equation, can so increase in the case where nozzle spray angle is not changed
The jet velocity of oiling steam so that the speed of exhaust is high, the vacuum time that reaches capacity is short, and end vacuum is also improved.
As the further improvement of the high speed diffusion pump of the utility model high ultimate vacuum, the lower surface of raised line and nozzle with
Smooth curved transition, raised line is tapered centered on vertical axes to be evenly distributed on nozzle lower surface；The jet angle of the nozzle is
50°~75°.Such setting accumulates in raised line and nozzle joint when oil vapour can be avoided to spray；Compared to using identical spray
The same type high speed diffusion pump of firing angle degree, this high speed diffusion pump speed of exhaust improves more than 47%, and pumping speed is 12500L/S.
Used as the further improvement of the high speed diffusion pump of the utility model high ultimate vacuum, heater is included in " Jiong "
The cast iron plate of font, stainless steel sleeve pipe and heater strip；Stainless steel sleeve pipe is provided with the cast iron plate, the stainless steel sleeve pipe is built-in
Have and magnesia powder is filled with the heater strip, the stainless steel sleeve pipe, the heater strip is evenly distributed on down " Jiong " font
In the level board and vertical plate of cast iron plate.Heater strip is loaded in stainless steel sleeve pipe, magnesia powder is loaded into stainless steel sleeve pipe, then
Cast in after stainless steel sleeve pipe is coiled by spacing in cast iron plate, such heater strip will not be aoxidized by air, by cast iron plate
Surface is heated to high speed diffusion pump, and so increased heating surface (area) (HS, and the unit thermal force for heating surface is greatly increased, plus
Hot device directly contact pump bottom, substantially increases the thermal efficiency, reduces thermal losses.And in view of the height of fluid, by cast iron plate
It is arranged to down " Jiong " font so that heater " cladding " completely has the pump housing bottom of pump oil so that firing rate is improved,
Time needed for reducing heat transfer.
As the further improvement of the high speed diffusion pump of the utility model high ultimate vacuum, the cast iron plate of " Jiong " font
Level board in the top of stainless steel sleeve pipe be fixedly linked by copper heat transfer pole with cast iron plate, the cast iron of " Jiong " font
One end towards pump housing outer wall of stainless steel sleeve pipe in the vertical plate of plate is fixedly linked by copper heat transfer pole and cast iron plate.Copper
Splendid conduction of heat is played in the setting of heat transfer pole processed so that the heat of stainless steel sleeve pipe is tended to by copper heat transfer pole
On conduction to cast iron plate, heat transfer rate is improved.
As the further improvement of the high speed diffusion pump of the utility model high ultimate vacuum, the appearance surface cover of stainless steel sleeve pipe
If setting heat-insulating material jaggy, being shaped as of breach does not influence copper heat transfer pole to be connected with stainless steel sleeve pipe.Such setting
The heat for reducing stainless steel sleeve pipe is distributed so that heating is concentrated, and is passed directly to cast iron plate, to greatest extent avoids heat from dissipating
It is sent in the air by stainless steel sleeve pipe, firing rate is fast.
As the further improvement of the high speed diffusion pump of the utility model high ultimate vacuum, it is fixed with the side wall of the pump housing
Fan, fan is located on the pump oil liquid level of pump housing bottom wall.Fan can using and heater series connection by the way of, once heater
Start-up operation fan also begins to work；Fan cross blowing accelerates the evaporation of pump oil, then coordinates the heater can to accelerate pump oil
Vaporescence, therefore further such that the speed of exhaust is high, the vacuum time that reaches capacity is shorter.
The utility model is due to by the way of heater strip heating cast iron plate so that heater completely connects with pump housing bottom
Touch, heat-insulating material is wrapped up in stainless steel sleeve pipe and coordinates copper heat transfer pole to avoid the heat spreader of heater strip to ambient air, heat
Concentrate and firing rate is fast；The setting of raised line increased the jet velocity of oil vapour under nozzle so that the speed of exhaust is high, reach pole
Limit vacuum time is short, and end vacuum is high.And in view of the height of fluid, cast iron plate is arranged to down " Jiong " font so that plus
Hot device " cladding " completely has the pump housing bottom of pump oil so that firing rate is improved, the time needed for reducing heat transfer.
Brief description of the drawings
Fig. 1 is the structural representation of the high speed diffusion pump of the utility model high ultimate vacuum；
Fig. 2 is the enlarged diagram of nozzle in Fig. 1；
Fig. 3 is the enlarged diagram of heater in Fig. 1；
Fig. 4 is the enlarged diagram of heater strip and copper heat transfer post part in Fig. 3.
In figure：1st, the pump housing 2, heater 3, air intake duct 4, exhaust tube 5, petroleum pipeline 6, nozzle 7, raised line
8th, copper heat transfer pole 9, set heat-insulating material jaggy 10, fan 2-1, cast iron plate 2-2, stainless steel sleeve pipe 2-3,
Heater strip 2-4, magnesia powder 2-1-1, level board 2-1-2, vertical plate.
Specific embodiment
Clearly understand to have to technical characteristic of the present utility model, purpose and effect, now compare accompanying drawing detailed
Describe bright specific embodiment of the present utility model in detail.
As shown in Figures 1 to 4, the high speed diffusion pump of high ultimate vacuum, including the pump housing 1, positioned at the pump housing 1 outside, bottom
Heater 2, the pump housing is connected with air intake duct 3 and exhaust tube 4 in both sides respectively about 1, and petroleum pipeline 5 is provided with the pump housing 1, on petroleum pipeline 5 from
At least three-level nozzle 6 is up to had, the nozzle 6 is shaped as umbrella crown shape, and the lower surface of umbrella crown shape nozzle 6 is provided with several
Spaced raised line 7 integrally formed with nozzle 6., with smooth curved transition, raised line 7 is with perpendicular for the lower surface of raised line 7 and nozzle 6
It is tapered centered on d-axis to be evenly distributed on the lower surface of nozzle 6；The jet angle of the nozzle 6 is 50 ° ~ 75 °.Heater 2 includes
In the cast iron plate 2-1, stainless steel sleeve pipe 2-2 and heater strip 2-3 of " Jiong " font；Stainless steel sleeve is provided with the cast iron plate 2-1
Pipe 2-2, the stainless steel sleeve pipe 2-2 are filled with magnesia powder built with the heater strip 2-3 in the stainless steel sleeve pipe 2-2
2-4, the heater strip 2-3 are evenly distributed on down the level board 2-1-1 and vertical plate 2-1-2 of the cast iron plate 2-1 of " Jiong " font
It is interior.The top of the stainless steel sleeve pipe 2-2 in the level board 2-1-1 of the cast iron plate 2-1 of " Jiong " font passes through with cast iron plate 2-1
Copper heat transfer pole 8 is fixedly linked, the face of the stainless steel sleeve pipe 2-2 in the vertical plate 2-1-2 of the cast iron plate 2-1 of " Jiong " font
It is fixedly linked with cast iron plate 2-1 by copper heat transfer pole 8 to one end of the outer wall of the pump housing 1.The outer surface of stainless steel sleeve pipe 2-2 is arranged
If heat-insulating material jaggy 9, being shaped as of breach does not influence copper heat transfer pole 8 to be connected with stainless steel sleeve pipe 2-2.The pump housing 1
Fan 10 is fixed with the wall of side, fan 10 is located on the pump oil liquid level of the bottom wall of the pump housing 1.
Above content is to combine specific optimal technical scheme further detailed description of the utility model, it is impossible to
Assert that specific implementation of the present utility model is confined to these explanations.For the ordinary skill of the utility model art
For personnel, without departing from the concept of the premise utility, some simple deduction or replace can also be made, should all regarded
To belong to protection domain of the present utility model.
Claims (6)
1. the high speed diffusion pump of high ultimate vacuum, it is characterised in that including the pump housing, positioned at pump housing outside, the heater of bottom, pump
The upper and lower both sides of body are connected with air intake duct and exhaust tube respectively, and petroleum pipeline is provided with the pump housing, are provided with least three on petroleum pipeline from top to bottom
Level nozzle, the nozzle form is umbrella crown shape, and the lower surface of umbrella crown shape nozzle is provided with several and between nozzle is integrally formed
Every the raised line for setting.
2. the high speed diffusion pump of high ultimate vacuum according to claim 1, it is characterised in that under the raised line and nozzle
With smooth curved transition, raised line is tapered centered on vertical axes to be evenly distributed on nozzle lower surface on surface；The spray of the nozzle
Firing angle is 50 ° ~ 75 °.
3. the high speed diffusion pump of high ultimate vacuum according to claim 1 and 2, it is characterised in that the heater includes
In the cast iron plate of " Jiong " font, stainless steel sleeve pipe and heater strip；Stainless steel sleeve pipe is provided with the cast iron plate, it is described stainless
Steel sleeve is filled with magnesia powder built with the heater strip in the stainless steel sleeve pipe, the heater strip is evenly distributed on down
In the level board and vertical plate of the cast iron plate of " Jiong " font.
4. the high speed diffusion pump of high ultimate vacuum according to claim 3, it is characterised in that the cast iron of " Jiong " font
The top of the stainless steel sleeve pipe in the level board of plate is fixedly linked with cast iron plate by copper heat transfer pole, the casting of " Jiong " font
One end towards pump housing outer wall of stainless steel sleeve pipe in the vertical plate of iron plate is fixedly linked by copper heat transfer pole and cast iron plate.
5. the high speed diffusion pump of high ultimate vacuum according to claim 4, it is characterised in that the stainless steel sleeve pipe it is outer
Surface is arranged and sets heat-insulating material jaggy, and being shaped as of breach does not influence copper heat transfer pole to be connected with stainless steel sleeve pipe.
6. the high speed diffusion pump of the high ultimate vacuum according to claim 4 or 5, it is characterised in that solid on the side wall of the pump housing
Surely fan is provided with, fan is located on the pump oil liquid level of pump housing bottom wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621093180.3U CN206175339U (en) | 2016-09-30 | 2016-09-30 | High ultimate vacuum's high -speed diffusion pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621093180.3U CN206175339U (en) | 2016-09-30 | 2016-09-30 | High ultimate vacuum's high -speed diffusion pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206175339U true CN206175339U (en) | 2017-05-17 |
Family
ID=58678233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621093180.3U Expired - Fee Related CN206175339U (en) | 2016-09-30 | 2016-09-30 | High ultimate vacuum's high -speed diffusion pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206175339U (en) |
-
2016
- 2016-09-30 CN CN201621093180.3U patent/CN206175339U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 214400 Changshan Road, Jiangyin High-tech Park, Wuxi City, Jiangsu Province Patentee after: JIANGYIN GKVAC MACHINERY Co.,Ltd. Address before: 214400 Changshan Road, Jiangyin High-tech Park, Wuxi City, Jiangsu Province Patentee before: JIANGYIN GUANGKE VACUUM MACHINERY Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170517 |