CN208236782U - A kind of diffusion pump that steam jet speed can be improved - Google Patents

A kind of diffusion pump that steam jet speed can be improved Download PDF

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Publication number
CN208236782U
CN208236782U CN201820555236.5U CN201820555236U CN208236782U CN 208236782 U CN208236782 U CN 208236782U CN 201820555236 U CN201820555236 U CN 201820555236U CN 208236782 U CN208236782 U CN 208236782U
Authority
CN
China
Prior art keywords
pump core
pump
steam jet
improved
lock pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201820555236.5U
Other languages
Chinese (zh)
Inventor
夏春波
朱洪国
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenyang Blue Diamond Vacuum Equipment Manufacturing Co Ltd
Original Assignee
Shenyang Blue Diamond Vacuum Equipment Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenyang Blue Diamond Vacuum Equipment Manufacturing Co Ltd filed Critical Shenyang Blue Diamond Vacuum Equipment Manufacturing Co Ltd
Priority to CN201820555236.5U priority Critical patent/CN208236782U/en
Application granted granted Critical
Publication of CN208236782U publication Critical patent/CN208236782U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Air Humidification (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

A kind of diffusion pump that steam jet speed can be improved, is related to diffusion pump field.Umbrella shaped spray nozzle is improved, conical lock pin and pump core outer is set to form airflow channel, when the subtended angle angle of umbrella shaped spray nozzle is between 40-45 degree, speed of the steam jet at nozzle, which can crouch, reaches 300m/s or more, and it is ejected into pump chamber inner wall and forms the downward steam jet in the biggish direction of area, more air can be carried to output flow, it is more satisfactory to be evacuated effect.This is reasonable in design, substantially increases the working efficiency of diffusion pump.

Description

A kind of diffusion pump that steam jet speed can be improved
Technical field
The utility model relates to diffusion pump field, in particular to a kind of diffusion pump that steam jet speed can be improved.
Background technique
The diffusion pump that steam jet speed can be improved is current one of the most important tool for obtaining vacuum, and principle is logical The pumped gas molecule crossed under molecular state diffuses into the oil vapour of high speed directed movement, is transmitted by momentum and is taken Band completes air-extraction function to prime.The existing diffusion Unit injector that steam jet speed can be improved, subtended angle angle are generally set 50~60 degree are set to, the steam jet ejected from nozzle is almost close to diversion pipe and is sprayed straight down, although in nozzle Place's speed can reach 280m/s or so, but steam jet area coverage is smaller, is not injected into pump chamber inner wall and has only formed one A very little at closed circuit, cause the volume of air that steam jet is carried by this time smaller, cause be evacuated effect pay no attention to Think.
Summary of the invention
In view of the deficienciess of the prior art, the purpose of the utility model is to provide a kind of steam jet speed of can be improved Diffusion pump, device design is reasonable, structure is simple, is easily installed and safeguards.
The technical scheme adopted by the utility model is a kind of diffusion pump that steam jet speed can be improved, including have Hollow oil pocket, air inlet and air outlet outer cover, be socketed in shroud surface water-cooled jacket, the heating device of oil pocket bottom is set And pump core square on the heating is set, pump core upper end is equipped with umbrella shaped spray nozzle, is characterized in that, pump core is cylinder, Upper opening outer is set at the top of pump core, the internal diameter of the outer is slightly larger than the internal diameter of pump core, in the umbrella shaped spray nozzle inner wall On be additionally provided with coniform lock pin, the coniform lock pin is plugged in the opening of pump core outer, outside coniform lock pin and pump core Gap between forms airflow channel.
In above scheme, the heating device includes heating wire and control cabinet, and heating wire is arranged in oil liquid to oil liquid Heating, the both ends of heating wire are stretched out outside pump core and are connect with control cabinet, and the control cabinet connects controller.
The beneficial effects of the utility model are: the diffusion pump of steam jet speed can be improved in this, umbrella shaped spray nozzle is changed Into making conical lock pin and pump core outer form airflow channel, when the subtended angle angle of umbrella shaped spray nozzle is between 40-45 degree, steam Speed of the jet stream at nozzle, which can crouch, reaches 300m/s or more, and it is downward to be ejected into the pump chamber inner wall formation biggish direction of area Steam jet, more air can be carried to output flow, it is more satisfactory to be evacuated effect.This is reasonable in design, significantly Improve the working efficiency of diffusion pump.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only the utility model Some embodiments for those of ordinary skill in the art without creative efforts, can also be according to these Attached drawing obtains other attached drawings.
Fig. 1 is the structural schematic diagram that the diffusion pump of steam jet speed can be improved in the utility model embodiment;
Number explanation is as follows in figure: 1 outer cover, 1-1 oil pocket, 1-2 air inlet, 2 water-cooled jackets, 3 gas outlets, 4 keep off oily elbow, 5 Control cabinet, 6 heating wire, 7 oil liquid, 8 pump cores, 9 outers, 10 umbrella shaped spray nozzles, 10-1 cone lock pin.
Specific embodiment
Keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing 1 and specific Embodiment is described in further detail the utility model.
Embodiment 1:
The diffusion pump that steam jet speed can be improved in the present embodiment, including have hollow oil pocket 1-1 and air inlet 1-2 Outer cover 1, the outside of outer cover 1 is set water-cooled jacket 2, the heating device of the bottom oil pocket 1-1 is set and is arranged in heating device The pump core 8 of top is additionally provided with umbrella shaped spray nozzle 10 in the upper end of pump core 8, and pump core 8 is cylinder, is equipped at the top of pump core 8 upper The outer 9 of opening, the internal diameter of outer 9 are slightly larger than the internal diameter of pump core 8, are additionally provided with coniform lock pin on 10 inner wall of umbrella shaped spray nozzle 10-1, coniform lock pin 10-1 are plugged in the opening of 8 outer of pump core, the sky between 8 outer coniform lock pin 10-1 and pump core Gap forms airflow channel.The subtended angle of umbrella shaped spray nozzle 10 is 40 degree, and the steam jet that nozzle sprays shape can be kept for one section in pump chamber Longer high-speed jet, effect are best.
The internal diameter of pump core 8 is set as 4mm.It is also connected with the gear oil elbow 4 with gas outlet 3, on outer cover 1 convenient for extraction gas Body.
Heating device in the present embodiment includes heating wire 6 and control cabinet 5, and heating wire 6 is arranged in oil liquid 7 to oil liquid 7 Heating, the both ends of heating wire 6 are stretched out pump core 8 and are connect with the control cabinet 5 being located at outside pump core 8.It is equipped in the oil liquid 7 of the present embodiment Multiple groups heating device, this structure increase heating surface (area) (HS, improve heat conduction velocity, keep loss lower, not only save the energy Cost, and the diffusion tired heating-up time is shortened, improve its working efficiency.The control cabinet of each heating device is separately connected the external world Controller acquires oil liquid temperature in conjunction with temperature sensor, realizes the control respectively to each heating device.In addition, this add Thermal structure, also can avoid due to some heating device damage and influence heating effect, user can as needed at any time into Row replacement, it is convenient and reliable.
Embodiment 2:
The present embodiment the difference from embodiment 1 is that, the subtended angle of umbrella shaped spray nozzle 10 is 43 degree.
Embodiment 3:
The present embodiment the difference from embodiment 1 is that, the subtended angle of umbrella shaped spray nozzle 10 is 45 degree.
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to In this, anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in variation Or replacement, it should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be with the power Subject to the protection scope that benefit requires.

Claims (2)

1. a kind of diffusion pump that steam jet speed can be improved, including outer cover, set with hollow oil pocket, air inlet and air outlet Connect outer cover outer surface water-cooled jacket, oil pocket bottom is set heating device and setting square pump core on the heating, pump core Upper end is equipped with umbrella shaped spray nozzle, which is characterized in that pump core is cylinder, and upper opening outer is set at the top of pump core, the outer Internal diameter is slightly larger than the internal diameter of pump core, and coniform lock pin, the coniform lock pin are additionally provided on the umbrella shaped spray nozzle inner wall It is plugged in the opening of pump core outer, the gap between coniform lock pin and pump core outer forms airflow channel.
2. the diffusion pump of steam jet speed can be improved as described in claim 1, which is characterized in that the heating device packet Include heating wire and control cabinet, heating wire, which is arranged in oil liquid, heats oil liquid, the both ends of heating wire stretch out pump core it is outer and with control Cabinet connection, the control cabinet connect controller.
CN201820555236.5U 2018-04-19 2018-04-19 A kind of diffusion pump that steam jet speed can be improved Expired - Fee Related CN208236782U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820555236.5U CN208236782U (en) 2018-04-19 2018-04-19 A kind of diffusion pump that steam jet speed can be improved

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820555236.5U CN208236782U (en) 2018-04-19 2018-04-19 A kind of diffusion pump that steam jet speed can be improved

Publications (1)

Publication Number Publication Date
CN208236782U true CN208236782U (en) 2018-12-14

Family

ID=64583379

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820555236.5U Expired - Fee Related CN208236782U (en) 2018-04-19 2018-04-19 A kind of diffusion pump that steam jet speed can be improved

Country Status (1)

Country Link
CN (1) CN208236782U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114427550A (en) * 2022-03-04 2022-05-03 山东省宝丰镀膜有限公司 Zone heating formula diffusion pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114427550A (en) * 2022-03-04 2022-05-03 山东省宝丰镀膜有限公司 Zone heating formula diffusion pump

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GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20181214

Termination date: 20190419