CN114427550A - Zone heating formula diffusion pump - Google Patents
Zone heating formula diffusion pump Download PDFInfo
- Publication number
- CN114427550A CN114427550A CN202210211928.9A CN202210211928A CN114427550A CN 114427550 A CN114427550 A CN 114427550A CN 202210211928 A CN202210211928 A CN 202210211928A CN 114427550 A CN114427550 A CN 114427550A
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- Prior art keywords
- heating
- injection
- oil injection
- area
- oil
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 159
- 238000009792 diffusion process Methods 0.000 title claims abstract description 24
- 238000002347 injection Methods 0.000 claims abstract description 183
- 239000007924 injection Substances 0.000 claims abstract description 183
- 238000005507 spraying Methods 0.000 claims abstract description 19
- 230000001105 regulatory effect Effects 0.000 claims abstract description 7
- 239000007921 spray Substances 0.000 claims description 10
- 238000009413 insulation Methods 0.000 claims description 9
- 238000005192 partition Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 238000005086 pumping Methods 0.000 abstract description 11
- 230000000694 effects Effects 0.000 abstract description 5
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 230000007547 defect Effects 0.000 description 2
- 238000009835 boiling Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F9/00—Diffusion pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
- F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
- F04F5/46—Arrangements of nozzles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F9/00—Diffusion pumps
- F04F9/02—Diffusion pumps of multi-stage type
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Coating Apparatus (AREA)
Abstract
The invention relates to the technical field of coating equipment, in particular to a sectional heating type diffusion pump, wherein a first spraying area, a second spraying area, a third spraying area and a fourth spraying area are sequentially arranged in a spraying tower from outside to inside; the bottom of the injection tower is provided with heating devices respectively corresponding to the four injection areas, and the heating device corresponding to each injection area is respectively provided with a power regulator capable of independently regulating heating power. The jet pressure of each jet area is adjusted by changing the heating power, and the air supply quantity is changed, so that the characteristics of the pump are changed; all heating devices are combined into the pumping states of various pumps by independently adjusting power so as to be suitable for different use conditions, and meanwhile, the pumping states can be adjusted to the optimal state according to functions through PLC control or microprocessor processing, so that the energy-saving effect is achieved.
Description
Technical Field
The invention relates to the technical field of coating equipment, in particular to a sectional heating type diffusion pump.
Background
The pump oil in the diffusion pump oil pan is heated to boiling temperature in vacuum to generate a large amount of oil vapor, and the oil vapor is directionally sprayed out at high speed from nozzles at all stages through a flow guide pipe. Since the partial pressure of the evacuated gas near the inlet of the diffusion pump is higher than the partial pressure of the gas in the vapor stream, molecules of the evacuated gas are continuously diffused into the vapor stream. The oil vapor impacts the molecules of the pumped body, so that the molecules of the pumped body flow to the pump wall along the vapor flow direction, are reflected after being collided for several times, and flow to the pump wall along the vapor flow direction again after being collided by the vapor flow. After several collisions, the gas molecules are compressed to the bottom vacuum end, then the vapor flow sprayed by the next stage nozzles is compressed in multiple stages, finally the vapor flow is pumped by the preceding stage vacuum pump, and the oil vapor is condensed on the cooled pump wall and then returns to the oil pan to be heated again, thus the cycle work is carried out.
The existing diffusion pump has the following defects: 1. the diffusion pump adjusts the oil injection quantity by the nozzle gap to change the pumping speed characteristic, and the oil injection quantity cannot be changed once the diffusion pump leaves a factory, so that different requirements are difficult to meet; 2. the heating parts are gathered together, so that energy-saving treatment is difficult to carry out, and the change of the power can cause the change of the air extraction characteristics.
Disclosure of Invention
The invention aims to provide a sectional heating type diffusion pump aiming at the defects of the existing diffusion pump and solve the technical problems.
In order to solve the problems, the technical scheme adopted by the invention is as follows:
a first injection area, a second injection area, a third injection area and a fourth injection area are sequentially arranged in an injection tower from outside to inside; the bottom of the injection tower is provided with heating devices respectively corresponding to the four injection zones, and the heating device corresponding to each injection zone is respectively provided with a power regulator capable of independently regulating heating power;
each power regulator is respectively connected with a PLC control device or a microprocessor for processing, or is adjusted to an optimal state according to functions and saves energy; the heating power is changed through the power regulator, so that the air injection pressure and the air supply quantity of each stage are changed, the characteristics of the pump are changed, and meanwhile, all the heating devices respectively adjust the power through the corresponding power regulators to form various air exhaust states of the diffusion pump so as to be suitable for different use conditions.
As a preferred one of the above technical solutions, the heating device is a built-in heating pipe, the bottom of each of the four injection zones of the injection tower is equipped with a built-in heating pipe, and each built-in heating pipe is connected with a power regulator; the built-in heating pipe is directly contacted with oil, so that the heating efficiency is high and the heat loss is small.
As a second preferred technical scheme, the heating device is a heating chassis, the heating chassis comprises a heating plate and a top plate, heat conducting grooves are uniformly distributed on the heating plate, the heat radiating area is enlarged, and the heating efficiency is high; the top plate is provided with a spray tower fixing groove for clamping and fixing the spray tower; the heating chassis is provided with a first oil injection area, a second oil injection area, a third oil injection area and a fourth oil injection area which respectively correspond to the first injection area, the second injection area, the third injection area and the fourth injection area; a first oil injection port, a second oil injection port, a third oil injection port and a fourth oil injection port are respectively arranged on the top plates corresponding to the first oil injection zone, the second oil injection zone, the third oil injection zone and the fourth oil injection zone; the heating plates corresponding to the first oil injection area, the second oil injection area and the third oil injection area are fan-shaped heating plates; the heating plate corresponding to the fourth oil injection area is a circular heating plate; heat insulation grooves are arranged among the fan-shaped heating plates, the central circular heating plate and the fan-shaped heating plates, and heat insulation support partition plates are assembled in the heat insulation grooves to reduce the mutual influence of the heating plates; the circular heating plate and each fan-shaped heating plate are respectively connected with a power regulator.
As a third preferable technical scheme, the heating device is a heating chassis, and a top plate of the heating chassis is provided with a spraying tower fixing groove for clamping and fixing a spraying tower; the heating chassis is provided with a first oil injection area, a second oil injection area, a third oil injection area and a fourth oil injection area which respectively correspond to the first injection area, the second injection area, the third injection area and the fourth injection area; a first oil injection port, a second oil injection port, a third oil injection port and a fourth oil injection port are respectively arranged on the top plates corresponding to the first oil injection zone, the second oil injection zone, the third oil injection zone and the fourth oil injection zone; each oil spraying area of the heating chassis is provided with a heating rod, and each heating rod is provided with a heating fin; the heating rod of each oil injection area is respectively connected with a power regulator; the heating fins have large heat dissipation area and high efficiency.
Has the advantages that: compared with the prior art, the bottom of the injection tower of the diffusion pump is provided with the heating devices corresponding to each injection area, the heating device corresponding to each injection area is provided with the power regulator capable of independently adjusting the heating power, the injection pressure of each injection area is adjusted by changing the heating power, the air supply quantity is changed, and therefore the characteristics of the pump are changed; all heating devices are combined into the air pumping states of various pumps by independently adjusting the power so as to be suitable for different use conditions, and meanwhile, the air pumping states can be adjusted to the optimal state according to functions through PLC control or microprocessor processing, so that the energy-saving effect is achieved.
Drawings
FIG. 1 is a schematic structural view of example 1;
FIG. 2 is a schematic structural view of example 2;
FIG. 3 is a schematic top view of the heating base plate according to embodiment 2;
FIG. 4 is a schematic perspective view of the heating base plate according to embodiment 2;
FIG. 5 is a schematic structural view of example 3;
FIG. 6 is a schematic top view showing the structure of the heating base plate according to embodiment 3;
fig. 7 is a schematic perspective view of the heating base plate according to embodiment 3.
In the figure: 1-a spray tower; 11-a first injection zone; 12-a second injection zone; 13-a third injection zone; 14-a fourth injection zone; 2-a built-in heating pipe; 3-power regulator; 41-circular heating plate; 42-sector heating plate; 43-thermally insulating support baffles; 51-first oil spray zone; 52-second oil injection zone; 53-third oil injection zone; 54-a fourth oil spray zone; 61-a first oil jet; 62-a second oil jet; 63-a third oil jet; 64-a fourth oil jet; 7-spray tower fixing groove; 81-heating fins; 82-heating rod.
Detailed Description
The invention is further described with reference to the following figures and detailed description.
Example 1:
referring to fig. 1, in the zoned heating type diffusion pump according to the present embodiment, a first injection zone 11, a second injection zone 12, a third injection zone 13, and a fourth injection zone 14 are sequentially provided from outside to inside in an injection tower 1; the bottom of the injection tower 1 is provided with heating devices corresponding to the four injection areas respectively, and the heating device corresponding to each injection area is provided with a power regulator 3 capable of independently regulating heating power. The heating device is a built-in heating pipe 2, the built-in heating pipes 2 are respectively assembled at the bottoms of four injection areas of the injection tower 1, and each built-in heating pipe 2 is respectively connected with a power regulator 3.
The bottom of the injection tower of the diffusion pump is provided with the built-in heating pipes 2 corresponding to each injection area, and the built-in heating pipes 2 are directly contacted with oil, so that the heating efficiency is high and the heat loss is small. Each built-in heating pipe 2 is respectively provided with a power regulator which can independently regulate heating power, the jet pressure of each jet area is regulated by changing the heating power, and the air supply quantity is changed, so that the characteristics of the pump are changed; all heating devices are combined into the air pumping states of various pumps by independently adjusting the power so as to be suitable for different use conditions, and meanwhile, the air pumping states can be adjusted to the optimal state according to functions through PLC control or microprocessor processing, so that the energy-saving effect is achieved.
Example 2:
referring to fig. 2 to 4, in the zoned heating type diffusion pump according to the present embodiment, a first injection zone 11, a second injection zone 12, a third injection zone 13, and a fourth injection zone 14 are sequentially disposed from outside to inside in an injection tower 1; the bottom of the injection tower 1 is provided with heating devices corresponding to the four injection zones respectively, and the heating device corresponding to each injection zone is provided with a power regulator 3 capable of independently adjusting heating power. The heating device is a heating chassis which comprises a heating plate and a top plate, heat conducting grooves 44 are uniformly distributed on the heating plate, the heat radiating area is enlarged, and the heating efficiency is high. The top plate is provided with a spray tower fixing groove 7 for clamping and fixing the spray tower 1; the heating chassis is provided with a first oil injection area 51, a second oil injection area 52, a third oil injection area 53 and a fourth oil injection area 54 which respectively correspond to the first injection area 11, the second injection area 12, the third injection area 13 and the fourth injection area 14; a first oil injection port 61, a second oil injection port 62, a third oil injection port 63 and a fourth oil injection port 64 are respectively arranged on the top plate corresponding to the first oil injection zone 51, the second oil injection zone 52, the third oil injection zone 53 and the fourth oil injection zone 54; the heating plates corresponding to the first oil spraying area 51, the second oil spraying area 52 and the third oil spraying area 53 are fan-shaped heating plates 42; the heating plate corresponding to the fourth oil injection area 54 is a circular heating plate 41; heat insulation grooves are arranged between each fan-shaped heating plate 42 and the central circular heating plate 41 and between each fan-shaped heating plate 42, and heat insulation support partition plates 43 are assembled in the heat insulation grooves so as to reduce the mutual influence among the heating plates of all the spraying areas; the circular heating plate 41 and each fan-shaped heating plate 42 are respectively connected with the power adjuster 3.
In this embodiment, the bottom of the injection tower of the diffusion pump is provided with heating plates corresponding to each injection zone, the heating plates corresponding to each injection zone are respectively provided with a power regulator capable of independently regulating heating power, and the injection pressure of each injection zone is regulated by changing the heating power, so as to change the air supply amount, thereby changing the characteristics of the pump; all heating devices are combined into the air pumping states of various pumps by independently adjusting the power so as to be suitable for different use conditions, and meanwhile, the air pumping states can be adjusted to the optimal state according to functions through PLC control or microprocessor processing, so that the energy-saving effect is achieved.
Example 3:
referring to fig. 5 to 7, in the zoned heating type diffusion pump according to the present embodiment described in the present embodiment, a first injection zone 11, a second injection zone 12, a third injection zone 13, and a fourth injection zone 14 are sequentially arranged from outside to inside in an injection tower 1; the bottom of the injection tower 1 is provided with heating devices corresponding to the four injection zones respectively, and the heating device corresponding to each injection zone is provided with a power regulator 3 capable of independently adjusting heating power. The heating device is a heating chassis, and a top plate of the heating chassis is provided with a spraying tower fixing groove for clamping and fixing the spraying tower 1; the heating chassis is provided with a first oil injection area, a second oil injection area, a third oil injection area and a fourth oil injection area which respectively correspond to the first injection area 11, the second injection area 12, the third injection area 13 and the fourth injection area 14; a first oil injection port 61, a second oil injection port 62, a third oil injection port 63 and a fourth oil injection port 64 are respectively arranged on the top plates corresponding to the first oil injection zone, the second oil injection zone, the third oil injection zone and the fourth oil injection zone; every oil injection district on heating chassis all is provided with heating rod 82, all installs heating fin 81 on each heating rod 82, and heating fin 81's heat radiating area is big, and is efficient. The heating rod 82 of each oil spraying area is respectively connected with the power regulator 3.
In this embodiment, the bottom of the injection tower of the diffusion pump is provided with a heating rod and a heating fin corresponding to each injection zone, the heating rod corresponding to each injection zone is respectively provided with a power regulator capable of independently adjusting heating power, and the heating power is changed to adjust the air injection pressure of each injection zone and change the air supply quantity, thereby changing the characteristics of the pump; all heating devices are combined into the pumping states of various pumps by independently adjusting power so as to be suitable for different use conditions, and meanwhile, the pumping states can be adjusted to the optimal state according to functions through PLC control or microprocessor processing, so that the energy-saving effect is achieved.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all equivalent structures made by using the contents of the specification and the drawings of the present invention can be directly or indirectly applied to other related technical fields, and are within the scope of the present invention.
Claims (4)
1. A sectional heating type diffusion pump is characterized in that a first injection region (11), a second injection region (12), a third injection region (13) and a fourth injection region (14) are sequentially arranged in an injection tower (1) from outside to inside; the method is characterized in that: the bottom of the injection tower (1) is provided with heating devices respectively corresponding to the four injection areas, and the heating device corresponding to each injection area is respectively provided with a power regulator (3) capable of independently regulating heating power;
each power regulator is respectively connected with a PLC control device or a microprocessor for processing, or is adjusted to an optimal state according to functions and saves energy; the heating power is changed through the power regulator, so that the air injection pressure and the air supply quantity of each stage are changed, the characteristics of the pump are changed, and meanwhile, all the heating devices respectively adjust the power through the corresponding power regulators to form various air exhaust states of the diffusion pump so as to be suitable for different use conditions.
2. The zone-heating diffusion pump according to claim 1, characterized in that: the heating device is a built-in heating pipe (2), the bottoms of four injection areas of the injection tower (1) are respectively provided with the built-in heating pipes (2), and each built-in heating pipe (2) is respectively connected with the power adjuster (3).
3. The zone-heating diffusion pump according to claim 1, characterized in that: the heating device is a heating chassis which comprises a heating plate and a top plate, and heat conducting grooves (44) are uniformly distributed on the heating plate; the top plate is provided with a spray tower fixing groove (7) for clamping and fixing the spray tower (1); the heating chassis is provided with a first oil injection area (51), a second oil injection area (52), a third oil injection area (53) and a fourth oil injection area (54) which respectively correspond to the first injection area (11), the second injection area (12), the third injection area (13) and the fourth injection area (14); a first oil injection port (61), a second oil injection port (62), a third oil injection port (63) and a fourth oil injection port (64) are respectively arranged on the top plates corresponding to the first oil injection zone (51), the second oil injection zone (52), the third oil injection zone (53) and the fourth oil injection zone (54); the heating plates corresponding to the first oil injection area (51), the second oil injection area (52) and the third oil injection area (53) are fan-shaped heating plates (42); the heating plate corresponding to the fourth oil injection area (54) is a circular heating plate (41); heat insulation grooves are arranged among the fan-shaped heating plates (42), the central circular heating plate (41) and the fan-shaped heating plates (42), and heat insulation support partition plates (43) are assembled in the heat insulation grooves; the circular heating plate (41) and each fan-shaped heating plate (42) are respectively connected with the power regulator (3).
4. The novel zone heating type diffusion pump according to claim 1, characterized in that: the heating device is a heating chassis, and a top plate of the heating chassis is provided with a spraying tower fixing groove for clamping and fixing the spraying tower (1); the heating chassis is provided with a first oil injection area, a second oil injection area, a third oil injection area and a fourth oil injection area which respectively correspond to the first injection area (11), the second injection area (12), the third injection area (13) and the fourth injection area (14); a first oil injection port (61), a second oil injection port (62), a third oil injection port (63) and a fourth oil injection port (64) are respectively arranged on the top plates corresponding to the first oil injection zone, the second oil injection zone, the third oil injection zone and the fourth oil injection zone; each oil spraying area of the heating chassis is provided with a heating rod (82), and each heating rod (82) is provided with a heating fin (81); the heating rod (82) of each oil spraying area is respectively connected with the power regulator (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210211928.9A CN114427550A (en) | 2022-03-04 | 2022-03-04 | Zone heating formula diffusion pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210211928.9A CN114427550A (en) | 2022-03-04 | 2022-03-04 | Zone heating formula diffusion pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114427550A true CN114427550A (en) | 2022-05-03 |
Family
ID=81312861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210211928.9A Pending CN114427550A (en) | 2022-03-04 | 2022-03-04 | Zone heating formula diffusion pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114427550A (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201265565Y (en) * | 2008-09-19 | 2009-07-01 | 宁波科宁达工业有限公司 | Vacuum oil diffusion pump |
| CN203352843U (en) * | 2013-06-21 | 2013-12-18 | 湖北桑夏太阳能产业有限公司 | An electromagnetic eddy current heating device for a diffusion pump of a film plating machine |
| CN204729362U (en) * | 2015-04-28 | 2015-10-28 | 上海宏昊企业发展有限公司 | diffusion pump energy-saving control system |
| CN106793190A (en) * | 2015-11-19 | 2017-05-31 | 扬州强明电热电器有限公司 | Diffusion pump sector heater |
| CN208236782U (en) * | 2018-04-19 | 2018-12-14 | 沈阳蓝菱真空设备制造有限公司 | A kind of diffusion pump that steam jet speed can be improved |
| CN209456566U (en) * | 2019-01-17 | 2019-10-01 | 青州市宝丰镀膜科技有限公司 | A kind of pumped vacuum systems of vacuum coating equipment |
| CN209458204U (en) * | 2018-10-11 | 2019-10-01 | 上海繁枫真空科技有限公司 | A kind of 36 inches of diffusion pump pump cores |
| CN209992870U (en) * | 2019-06-20 | 2020-01-24 | 四川蓉腾自动化设备有限公司 | Power regulator heating control system based on PLC |
| CN210317948U (en) * | 2019-08-23 | 2020-04-14 | 常州市乐萌压力容器有限公司 | Four-stage fractionating type oil diffusion pump with flow distribution plate |
| CN215058507U (en) * | 2021-03-22 | 2021-12-07 | 上海宏端精密机械有限公司 | Heating disk for diffusion pump |
-
2022
- 2022-03-04 CN CN202210211928.9A patent/CN114427550A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201265565Y (en) * | 2008-09-19 | 2009-07-01 | 宁波科宁达工业有限公司 | Vacuum oil diffusion pump |
| CN203352843U (en) * | 2013-06-21 | 2013-12-18 | 湖北桑夏太阳能产业有限公司 | An electromagnetic eddy current heating device for a diffusion pump of a film plating machine |
| CN204729362U (en) * | 2015-04-28 | 2015-10-28 | 上海宏昊企业发展有限公司 | diffusion pump energy-saving control system |
| CN106793190A (en) * | 2015-11-19 | 2017-05-31 | 扬州强明电热电器有限公司 | Diffusion pump sector heater |
| CN208236782U (en) * | 2018-04-19 | 2018-12-14 | 沈阳蓝菱真空设备制造有限公司 | A kind of diffusion pump that steam jet speed can be improved |
| CN209458204U (en) * | 2018-10-11 | 2019-10-01 | 上海繁枫真空科技有限公司 | A kind of 36 inches of diffusion pump pump cores |
| CN209456566U (en) * | 2019-01-17 | 2019-10-01 | 青州市宝丰镀膜科技有限公司 | A kind of pumped vacuum systems of vacuum coating equipment |
| CN209992870U (en) * | 2019-06-20 | 2020-01-24 | 四川蓉腾自动化设备有限公司 | Power regulator heating control system based on PLC |
| CN210317948U (en) * | 2019-08-23 | 2020-04-14 | 常州市乐萌压力容器有限公司 | Four-stage fractionating type oil diffusion pump with flow distribution plate |
| CN215058507U (en) * | 2021-03-22 | 2021-12-07 | 上海宏端精密机械有限公司 | Heating disk for diffusion pump |
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