CN206164982U - Golden finger, printed circuit board and be used for making printed circuit board's base plate - Google Patents

Golden finger, printed circuit board and be used for making printed circuit board's base plate Download PDF

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Publication number
CN206164982U
CN206164982U CN201621096496.8U CN201621096496U CN206164982U CN 206164982 U CN206164982 U CN 206164982U CN 201621096496 U CN201621096496 U CN 201621096496U CN 206164982 U CN206164982 U CN 206164982U
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China
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golden finger
layer
circuit board
printed circuit
golden
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CN201621096496.8U
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张志强
吴香兰
张金强
王志建
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Wuhan Xinchuangyuan Semiconductor Co ltd
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Wuhan Optical Valley Chuan Yuan Electronics Co Ltd
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Abstract

The utility model relates to a golden finger, printed circuit board and be used for making printed circuit board's base plate. The golden finger is including electrically conductive basal portion, golden coating and be located the middle conductive layer between electrically conductive basal portion and the golden coating, and this centre conductive layer includes ion implantation layer and/or plasma sedimentary deposit and/or sputtering sedimentation layer. Printed circuit board includes the substrate and at the circuit that forms on the surface and the golden finger of substrate, the golden finger electricity is connected to the circuit. An electrically conductive basal portion, middle conductive layer include to be got rid of as the conducting layer and in finished product printed circuit board when electroplating the formation golden finger in ion implantation layer and/or plasma sedimentary deposit and/or sputtering sedimentation layer for making printed circuit board's base plate includes the substrate, at the circuit that forms on the surface of substrate and middle the conductive layer that forms on both on the surface of the surface of substrate and circuit, partly constitution golden finger of circuit.

Description

Golden finger, printed circuit board (PCB) and the substrate for manufacturing printed circuit board (PCB)
Technical field
This utility model is related to art of printed circuit boards, more particularly to golden finger, printed circuit board (PCB) and for manufacturing print The substrate of printed circuit board.
Background technology
With the fast development of surface mounting technology (SMT), particularly under the promotion of leadless environment-friendly, to printed circuit board (PCB) (PCB) the requirement more and more higher of surface treatment, various new process of surface treatment also arise at the historic moment.Every kind of process of surface treatment exists Excellent, the shortcoming of the aspects such as the flatness of coating surface, solderability, wear-resisting and corrosion resistance, non-oxidizability, cost and range of application It is different.Gold plate has extremely low contact resistance, good corrosion resistance and weldability, be widely used in PCB, half In the fields such as conductor, IC package technology.It is used to form the surface treatment of gold plate in conventional circuit board or base plate for packaging Technique generally includes immersion Ni/Au (ENIG), NiPdAu (ENEPIG), electroplates (soft) gold (Electrolytic Gold or Soft gold) or the hard gold (Hard gold) of plating etc..Wherein, the wire-bonding package (wire that gold is particularly suitable for chip is electroplated Bonding), have a good application prospect.
The plating gold process of traditional circuit-board includes etching line pattern in advance, by addition lead by the orphan of figure Vertical block is coupled together carries out plating gold, and on the regional area of isolated block golden finger is formed, and finally removes lead again and obtains electricity Road plate.That is, the circuit 104 shown in Fig. 1 and the position of golden finger 106 are etched in advance, in the position of golden finger 106 and board substrate Add lead (not shown) between 102 edge, be then covered by protecting film and only expose golden finger position, with plating grips Lead simultaneously carries out plating gold, finally removes lead.This technique is applied to circuit board of the space between solder balls more than 800 μm, in gained Golden finger in easily remain leaded, such as to project from the left side of golden finger 106 shown in Fig. 2 (a) part.Lead can cause The waste of wiring space, its residual can produce noise etc. and adversely affect to signal.And, lead processing generally requires employing The methods such as alkaline medicinal liquid etching, cutting or laser ablation, technique is relatively complicated, and the quality for remaining lead is difficult to control to.
In order to realize the design without lead, current people are generally using the technique that full plate is gold-plated, i.e. the electricity on PCB imposite After copper facing, visuals when forming outer-layer circuit to needing exposes copper face, and unwanted visuals is covered with dry film, Then whole board electroplating is carried out, plating Jin Houzai carries out taking off film etching, to etch away not gold-plated region, leaves gold-plated pad (golden finger) and line pattern.This technique is applied to circuit board of the space between solder balls more than 500 μm, but can cause noble metal gold It is a large amount of to waste, and Gold plated Layer is weaker with the adhesion of welding resistance, falls welding resistance very risky.In the golden finger 106 for so obtaining, As shown in Fig. 2 (b), golden coating 118 only covers the upper surface of conductive base 108, but does not cover the side of conductive base 108, Because the part beyond golden coating 118 is etched.In addition to full plate is gold-plated, can be changed with adopting after circuit is formed It is conductive to realize parcel plating gold to substitute " lead " to learn heavy layers of copper.The technique had not only been capable of achieving without lead but also can avoid golden waste, And three faces of pad energy plated with gold, lateral erosion can be avoided to project or hang nickel and to fall golden phenomena impair subsequent terminal electronic product Reliability.But, because, through electroless copper plating, noble metal containing palladium remains and is difficult to remove, thus is susceptible to plating between circuit Golden problem, brings challenges the insulating properties between dense wire, reliability.
Utility model content
This utility model is made in view of the above problems, be its object is to, there is provided a kind of golden finger, printed circuit board (PCB) With for manufacturing the substrate of printed circuit board (PCB), this golden finger is not comprising lead and is firmly bonded to the line of printed circuit board (PCB) Road floor.
First technical scheme of the present utility model is a kind of golden finger being arranged on printed circuit board (PCB), and it includes conductive base Portion, golden coating and the intermediate conductor layer between conductive base and golden coating, intermediate conductor layer include ion implanted layer and/or Plasma deposited layers and/or sputtering depositing layer.
Second technical scheme of the present utility model is, in above-mentioned first scheme, ion implanted layer is included by the gold for injecting The flush of the doped structure of the material composition of category material and conductive base, its outer surface and conductive base, and inner surface position In the depth of lower face 0-500nm of conductive base.
3rd technical scheme of the present utility model is, in above-mentioned first scheme, plasma deposited layers or sputtering sedimentation Layer is made up of metal material, and positioned at the surface of conductive base.
4th technical scheme of the present utility model is, in above-mentioned second or third program, metal material include Ni, Cr, One kind in Ti, Cu, Al, Ag, Pd and the alloy between them.
5th technical scheme of the present utility model is, in any one of above-mentioned the first to third program, Jin Fucengbao Include the one kind in immersion Ni/Au, NiPdAu, electroplating mild alloy, the hard gold of plating.
This golden finger is formed with intermediate conductor layer between conductive base and golden coating, and the intermediate conductor layer includes ion Implanted layer and/or plasma deposited layers and/or sputtering depositing layer.During ion implanting, conductive material ion is with very high Speed is forcibly injected into the lower face of circuit, and between the conductive material and the material molecule of circuit of injection doping is defined Structure, equivalent in the inside of circuit large number of foundation pile is squeezed into.Due to the anchoring effect of foundation pile, ion implanted layer and follow-up The golden coating of formation is not easy from the line layer of printed circuit board (PCB) to depart from.In plasma-deposited period, conductive material ion exists In the presence of accelerating field with higher speed fly to circuit and be deposited on above, formed plasma deposited layers.In the sputtering phase Between, conductive material particle out and with higher speed is flown to circuit and be deposited on above, shape by the Bombardment of ion beam of high-energy Into sputtering depositing layer.Due to higher incidence rate, also have between plasma deposited layers or sputtering depositing layer and line material There is larger adhesion so that final obtained golden finger is not easy from the line layer of printed circuit board (PCB) to depart from.Sum it up, by In the presence of intermediate conductor layer, golden finger of the present utility model is not easy from printed circuit board (PCB) to come off and affect subsequent terminal electronics The reliability of product.In addition, generally there is nanoscale for ion implanting, plasma-deposited or sputtering conductive material particle Size, be distributed in injection or deposition process more uniform and little to the incident angle difference of circuit surface.Therefore, The golden coating for being able to ensure that golden finger has the good uniformity and compactness, it is not easy to the defects such as pin hole or crackle occur.
6th technical scheme of the present utility model is a kind of printed circuit board (PCB), including base material and on the surface of base material The circuit and golden finger of formation, golden finger is electrically connected to circuit and including the golden handss according to any one in claim 1 to 5 Refer to.
7th technical scheme of the present utility model is, in above-mentioned 6th scheme, on golden finger and the side of printed circuit board (PCB) There is no lead between edge.
8th technical scheme of the present utility model is that in above-mentioned 7th scheme, the conductive base of golden finger is electrically connected to A part for circuit or composition circuit, projects laterally from the surface of base material, and is coated by intermediate conductor layer.
In this printed circuit board (PCB), golden finger is not easy de- from printed circuit board (PCB) due to the presence of intermediate conductor layer Fall.The intermediate conductor layer for being additionally, since golden finger is obtained by methods such as ion implanting, plasma-deposited or sputterings , thus electroless copper plating technique need not be adopted during manufacture printed circuit board (PCB), so as to noble metal containing palladium will not occur The problems such as residual or plating gold, the printed circuit board (PCB) without lead can be easily obtained.Additionally, the conductive base of golden finger Top surface and side are completely coated with by intermediate conductor layer, and intermediate conductor layer is covered by golden coating again, it is thus possible to fully sent out Wave the excellent process based prediction model such as low contact resistance, high corrosion resistance and the weldability of golden finger.
9th technical scheme of the present utility model is a kind of substrate for manufacturing printed circuit board (PCB), it include base material, The circuit formed on the surface of base material and the intermediate conductor layer being respectively formed on the surface on the surface of base material and circuit, it is middle Conductor layer includes ion implanted layer and/or plasma deposited layers and/or sputtering depositing layer, is used as when plating forms golden finger Conducting medium and it is removed in the printed circuit board (PCB) of finished product, a part for circuit constitutes the conductive base of golden finger.
Tenth technical scheme of the present utility model is that in above-mentioned 9th scheme, ion implanted layer is included by the gold for injecting The doped structure of the material composition of category material and base material or circuit, surface or the flush of circuit of its outer surface with base material, And inner surface is located at the depth of lower face 0-500nm on the surface or circuit of base material.
11st technical scheme of the present utility model is, in above-mentioned 9th scheme, plasma deposited layers or sputtering are heavy Lamination is made up of metal material, and positioned at the surface of base material or the surface of circuit.
12nd technical scheme of the present utility model is, in the above-mentioned tenth or the 11st in scheme, metal material include Ni, One kind in Cr, Cu, Al, Ag, Pd and the alloy between them.
In this substrate, intermediate conductor layer is formed by methods such as ion implanting, plasma-deposited or sputterings On the surface of the surface of base material and circuit, thus no longer need using electroless copper plating work during manufacture printed circuit board (PCB) Skill, will not occur the problems such as residual of noble metal containing palladium or golden plating.Additionally, intermediate conductor layer is used when plating forms golden finger Make conducting medium and be removed in the printed circuit board (PCB) of finished product, thus no longer need to be separately provided lead etc., can be easily The printed circuit board (PCB) without lead is obtained, it is to avoid residual lead negatively affects the electric property of circuit board.
Description of the drawings
After the following detailed description is read referring to the drawings, those skilled in the art will be better understood of the present utility model These and other feature, aspect and advantage.For the sake of clarity, accompanying drawing is not drawn necessarily to scale, but some of which portion Dividing may be exaggerated to show detail.In all of the figs, identical reference number represents same or analogous part, its In:
Fig. 1 illustrates the schematic top plan view without lead printed circuit board (PCB);
Fig. 2 (a) illustrates the generalized section by golden finger obtained in prior art to 2 (b);
Fig. 3 illustrates a kind of process chart of the method for manufacturing golden finger of the present utility model;
Fig. 4 (a), (b), (c), (d) and (e) are shown respectively five steps of method shown in Fig. 3;
Fig. 5 (a) illustrates that the section of the printed circuit board (PCB) corresponding with each step of method shown in Fig. 3 is illustrated to 5 (e) Figure;
Fig. 6 illustrates the generalized section according to golden finger of the present utility model;
Fig. 7 illustrates the operation principle schematic diagram of ion implanting;
Fig. 8 (a) illustrates the generalized section of the various golden fingers with intermediate conductor layer to 8 (c);
Fig. 9 illustrates the process chart of another kind of method for manufacturing golden finger of the present utility model;
Figure 10 (a), (b), (c), (d), (e), (f) are shown respectively six steps of method shown in Fig. 9;
Figure 11 (a) illustrates that the section of the printed circuit board (PCB) corresponding with each step of method shown in Fig. 9 is illustrated to 11 (f) Figure;And
Figure 12 (a) to 12 (c) is illustrated according to the section for manufacturing the various substrates of printed circuit board (PCB) of the present utility model Schematic diagram.
Reference number:
10 printed circuit board (PCB)s
102 base materials
104 circuits
106 golden fingers
108 conductive bases
The surface of 110 conductive bases
112 intermediate conductor layers
114 ion implanted layers
116 plasma deposited layers
118 gold medal coating
120 coverlays
The surface of 122 base materials
20 substrates.
Specific embodiment
Hereinafter, with reference to the accompanying drawings, embodiment of the present utility model is described in detail.Those skilled in the art should be easy Understand, these descriptions only list exemplary embodiment of the present utility model, and are in no way intended to limit guarantor of the present utility model Shield scope.For example, the element or feature described in some accompanying drawing of the present utility model or embodiment can be with one or more Other elements or feature illustrated in many other accompanying drawings or embodiment combine.Additionally, for the ease of describing between each material layer Position relationship, used herein space relative terms, such as " top " and " lower section " and " interior " and " outward " etc., this A little terms are for the surface of base material or circuit.If A layer materials relative to B layer materials be located towards base material or On the direction on the surface of circuit, then it is assumed that A layer materials are located at the top or outside of B layer materials, and vice versa.
Turning now to Fig. 3, this illustrates a kind of process chart of the method for manufacturing golden finger of the present utility model.Specifically For, the method typically comprises following steps:Outer-layer circuit is formed on the base material of printed circuit board (PCB), the outer-layer circuit includes For forming the conductive base (step S1) of golden finger;Ion implanting, sputtering or plasma-deposited process are carried out to base material, Intermediate conductor layer (step S2) is respectively formed on the surface on the surface of base material and circuit;Stick coverlay and be exposed, show Shadow, expose will carry out electroplate gold region (that is, conductive base region) and base material both sides for connecting plating gripping head Region (step S3);Region to opening a window carries out plating gold, to form the golden coating (step S4) for covering conductive base;And Film, etching are taken off, to get rid of intermediate conductor layer, the golden finger (step S5) of outer-layer circuit and gained is only left.Fig. 4 (a), B (), (c), (d) and (e) correspond respectively to this five step S1 to S5, and represented using the block diagram of different colours base material, Circuit, intermediate conductor layer, coverlay and golden coating.In the electroplating process shown in Fig. 4 (d), the base material of circuit board is placed into electricity In coating bath and it is plated chuck and clamps and be used as an electrode, so as to electroplates on the conductive base region that uncovered film is covered Form one layer of golden coating.
Fig. 5 (a) illustrates that the section of the printed circuit board (PCB) corresponding with each step of method shown in Fig. 3 is illustrated to 5 (e) Figure, corresponds respectively to (a) to (e) in Fig. 4.First, as shown in Fig. 5 (a), the line of outer layer is formed on the surface of base material 102 Road 104 a, part for the circuit constitutes the conductive base 108 of golden finger.Then, as shown in Fig. 5 (b), using ion implanting, splash Penetrate or plasma-deposited processing method, intermediate conductor layer is all defined on both surfaces of the surface of base material and circuit 112.Then, as shown in Fig. 5 (c), pasted last layer coverlay 120 on the surface of base material 102, and partly opened a window with Expose the conductive base 108 of golden finger.Next, with plating gripping head clamp board substrate uncovered membrane cover live two Lateral edges, are electroplated and are formed the golden coating 118 of coated with conductive base portion 108, as shown in Fig. 5 (d).Finally, coverlay is taken off 120, and the intermediate conductor layer 112 of the lower section of coverlay 120 is etched away, so as to obtaining golden finger 106 and possessing this golden finger 106 printed circuit board (PCB) 10, such as shown in Fig. 5 (e).Golden coating 118 has highly stable chemical property, will not be in last erosion It is etched during quarter.
Fig. 6 illustrate by obtained in said method according to the generalized section of golden finger of the present utility model.As illustrated, Golden finger 106 is located on the surface of the base material 102 of printed circuit board (PCB), and including conductive base 108, golden coating 118, Yi Jiwei Intermediate conductor layer 112 between conductive base 108 and golden coating 118.Conductive base 108 is shown in Fig. 4 (a) and Fig. 5 (a) The step of in formed, the outer-layer circuit for being electrically connected to printed circuit board (PCB) or the part for constituting the circuit.Conductive base 108 Project laterally from the surface of base material 102, its upper surface and side are coated by intermediate conductor layer 112.Intermediate conductor layer 112 is Formed in the step shown in Fig. 4 (b) and Fig. 5 (b), its preparation method will be illustrated more specifically below.Golden coating 118 is Formed by plating gold process in the step shown in Fig. 4 (d) and Fig. 5 (d), coat the dew upward of intermediate conductor layer 112 The surface for going out.Due to having carried out taking off film and etching in S5 the step of being described above, intermediate conductor layer 112 not by golden coating 118 parts for covering are etched, thus the peripheral side of intermediate conductor layer 112 does not have fully to be covered by golden coating 118, and It is to direct out side to expose.That is, golden coating 118 not with base material 102 and the directly contact of conductive base 108, but via Intermediate conductor layer 112 is electrically connected to conductive base 108.
In by printed circuit board (PCB) obtained in said method, such as shown in Fig. 1 and Fig. 5 (e), printed circuit board (PCB) 10 includes base Material 102 and the circuit 104 formed on the surface of base material 102 and golden finger 106.Golden finger 106 is electrically connected to circuit 104, And with the cross-section structure shown in Fig. 6.There is no any lead between the edge of golden finger 106 and printed circuit board (PCB) 10, i.e. Define the printed circuit board (PCB) without lead.
As the base material of printed circuit board (PCB), rigid insulation base material (also known as hardboard), such as organic polymer can be adopted Rigid plate, ceramic wafer (such as silica plate), glass plate.Organic polymer rigid plate may include again LCP, PTFE, CTFE, FEP, PPE, synthetic rubber plate, glass-fiber-fabric/ceramic packing strengthens one or more in plate, and wherein glass-fiber-fabric/ceramic packing increases Strong plate be based on high-molecular organic material such as epoxy resin, modified epoxy, PTFE, PPO, CE, BT material, with Glass-fiber-fabric/ceramic packing is used as the sheet material for strengthening phase.Further, it is also possible to using flex plate (also known as soft board) as printed circuit The base material of plate, such as PI, PTO, PC, PSU, PES, PPS, PS, PE, PP, PEI, PTFE, PEEK, PA, PET, PEN, LCP or PPA Deng organic polymer thin film.
When forming the outer-layer circuit of printed circuit board (PCB) in step sl, subtraction can be carried out using Copper Foil is first pressed and subsequently The method of etching, it would however also be possible to employ the electric plating of whole board or graphic plating method of routine.The centre of golden finger is formed in step s 2 During conductive layer, one or more method in ion implanting, plasma-deposited, sputtering can be adopted, so as to correspondingly form One or more in ion implanted layer, plasma deposited layers, sputtering depositing layer.
Ion implanting can be carried out by the following method:Using conductive material as target, under vacuum conditions, pass through Arcing (for example with vacuum cathode vacuum arc plasma source) makes the conductive material in target ionize and produce a large amount of ions, so Make the acceleration of ions under the electric field afterwards and obtain the energy of 1keV-1000keV, such as 5,10,50,100,200,300,400, 500th, 600,700,800,900keV etc..The conductive material ion of high energy then directly impinges base material or line with higher speed On the surface on road, and it is injected at the certain depth of the lower face of base material or circuit.In the conductive material ion for being injected Relatively stable chemical bond (such as ionic bond or covalent bond), the two common structure are formed between base material or the material molecule of circuit Into doped structure.The outer surface of the doped structure (that is, ion implanted layer) is flushed with the surface of base material or circuit, and its interior table Face is then deep into the inside of base material or circuit, i.e. positioned at base material or the lower face of circuit.
In ion implantation process, it is preferred to use the larger metal of adhesion between line material or gold plate or Alloy is carrying out ion implanting so that ion implanted layer or even gold plate not readily disengage from printed circuit board (PCB), so that it is guaranteed that golden handss Refer to and play good conducting function.The line material of printed circuit board (PCB) generally using Ag, Cu, Au, Al etc., thus for carry out from The metal material of son injection correspondingly adopts Ni, Cr, Ti, Cu, Al, Ag, Pd and the one kind in the alloy between them, for example Ni-Cr alloy, Ni-Cu alloys, Cr-Cu alloys, Ni-Cr-Cu alloys etc..By the various parameters for controlling ion implantation process (such as voltage, electric current, vacuum, ion implantation dosage etc.), can comparatively easy adjust depth, the Yi Jijin of ion implanting Adhesion between coating and circuit.For example, the injection depth of ion can be adjusted to 0-500nm (such as 10,50,100, 200th, 300,400nm etc.), and the adhesion between gold plate and circuit can be adjusted to more than 0.5N/mm (such as 0.8, 1.0th, 1.5N/mm etc.).
Fig. 7 schematically shows the fundamental diagram of ion implanting.As illustrated, the equipment for performing ion implanting Mainly it is made up of plasma formation region (triggering system) and ion beam forms district (extraction system) this two parts.The plasma bodily form Include negative electrode, anode and trigger electrode into area, ion beam forms district is typically made up of one group of electrode of porous three.In trigger voltage Under effect, highdensity plasma is formed between negative electrode and anode and to draw-out area diffusion.In the acceleration for drawing electric field Under, the charged ion in plasma is brought out and accelerates to form ion beam, and the species and purity of the ion beam is by cathode targets Material is determined.Typically, negative electrode trigger electrode and anode are coaxial configuration.Negative electrode is cylindrical and by the conductive material of desired ion Make.Anode is cylinder barrel shaped and is enclosed within negative electrode outside, and center drilling is plasma channel.Using high voltage pulse triggering side Formula, for example, be enclosed within trigger electrode outside negative electrode, between insulated with boron nitride, trigger voltage is 10kV or so, and triggering pulsewidth is 10ms or so.When trigger voltage is applied on negative electrode and trigger electrode, by spark discharge produce plasma make negative electrode and Anode circuit is connected and forms vacuum arc discharge, forms only micron order size in cathode surface but electric current density is up to 106A/ cm2Negative electrode speckle, cause cathode target material evaporation and highly ionized into plasma.Plasma is with about 104The speed of m/s Injection a, part is diffused into extraction electrode by anodes centre hole.Then, plasma is drawn in the presence of electric field is drawn Go out, form the ion beam of high speed.The arc voltage being applied between yin, yang electrode is higher, and arc current is bigger, produced plasma Body density is also higher, it is possible to drawing bigger line.Educt beaming flow size also with ionogenic running parameter, extraction Voltage, deriving structure and cathode material etc. are relevant.For example, the extraction voltage of ion beam forms district (extraction system) is higher, powered The ion beam of particle is just accelerated to higher speed, the deeper position in the inside such that it is able to be injected into base material.In addition, vacuum Arc discharge also produces not charged microgranule of many sizes at 0.1 to 10 micron while plasma is produced.These microgranules Exist and the performance of institute's deposition film had significant effect, cause film surface coarse, compactness is poor, glossiness and with base material Adhesion decline etc..In order to remove or reducing the bulky grain of cathode vacuum arc generation, magnetic filter can be adopted, i.e. set up one The magnetic field of individual bending, is filled into uncharged bulky grain, is only directed to the current-carrying plasma of needs along the magnetic field of bending The surface of base material.
It is plasma-deposited carrying out, only to apply relatively low in the course of the work using with ion implanting similar mode Accelerating potential.That is, equally use conductive material as target, under vacuum conditions, leading in target is made by arcing Electric material is ionized and produces ion, is then ordered about the acceleration of ions under electric field action and is obtained certain energy, deposits to base Plasma deposited layers are constituted on the surface of material and circuit.In plasma-deposited period, can pass through to adjust adding for electric field Fast voltage and make conductive material ion obtain 1-1000eV (such as 5,10,50,100,200,300,400,500,600,700, 800th, 900eV etc.) energy, and can by controlling the ion deposition time, thickness is obtained by electric current etc. for 10- 1000nm (such as 50,100,200,300,400,500,600,700,800,900nm etc.) plasma deposited layers.
Further, it is also possible to form intermediate conductor layer using sputtering method:Indifferent gas is filled with the sputtering chamber of condition of high vacuum degree Body, ionized inert gas are made under the electric field of high-frequency and high-voltage and glow discharge is produced, and the ion stream of high-energy are formed, using this Ion stream is bombarding target electrode, so that the material of target electrode is deposited on the surface of base material and circuit and forms conductive film, That is, intermediate conductor layer.
In step s 2, one or more technique in ion implanting, plasma-deposited, sputtering can be adopted, so as to Correspondingly form the intermediate conductor layer including one or more in ion implanted layer, plasma deposited layers, sputtering depositing layer. Fig. 8 (a) shows the generalized section of the various golden fingers with intermediate conductor layer to 8 (c).As shown in Fig. 8 (a), golden finger 106 are located on the surface of the base material 102 of printed circuit board (PCB), and including conductive base 108, golden coating 118 and positioned at conduction Ion implanted layer 114 between base portion 108 and golden coating 118, wherein ion implanted layer 114 constitute the middle conductor being described above Layer 112.Ion implanted layer 114 includes the doped structure being made up of the material of the metal material and conductive base that inject, its appearance Face is concordant with the surface 110 of conductive base 108, and inner surface is located at the lower section of surface 110 of conductive base 108.In Fig. 8 (b) institutes In the example shown, golden finger 106 includes conductive base 108, golden coating 118 and positioned at conductive base 108 and golden coating 118 Between ion implanted layer 114 and plasma deposited layers 116, wherein ion implanted layer 114 and the structure of plasma deposited layers 116 Into the intermediate conductor layer 112 being described above.Ion implanted layer 114 is located at the inside of conductive base 108, its outer surface and conductive base The surface 110 in portion 108 is concordant, and inner surface is located at the lower section of surface 110 of conductive base 108.Plasma deposited layers 116 are by sinking Long-pending metal material composition, is attached directly to the surface of ion implanted layer 114, i.e. positioned at the surface of conductive base 108 110 tops, in other words positioned at the outside of conductive base 108.In the example shown in Fig. 8 (c), golden finger 106 includes conductive base Portion 108, golden coating 118 and the plasma deposited layers 116 between conductive base 108 and golden coating 118, its is medium Plasma deposition layer 116 constitutes the intermediate conductor layer 112 being described above.Plasma deposited layers 116 are by the metal material for depositing Composition, positioned at the top of surface 110 of conductive base 108.
It is easy to understand, can be replaced using the sputtering depositing layer formed by sputtering method shown in Fig. 8 (b) and Fig. 8 (c) Plasma deposited layers 116.Now, the intermediate conductor layer 112 of golden finger 106 is by including outer surface and conductive base 108 The concordant ion implanted layer in surface 110 and the sputtering depositing layer above the ion implanted layer, or only include be located at lead The sputtering depositing layer of the top of surface 110 of electric base portion 108.Further, it is also possible to note to the ion shown in Fig. 8 (c) in Fig. 8 (a) Enter layer 114 and/or the top of plasma deposited layers 116, one layer of sputtering depositing layer is additionally formed by sputtering method.Now, The sputtering depositing layer being additionally formed between the ion implanted layer 114 shown in Fig. 8 (a) and golden coating 118, or will be located at Between plasma deposited layers 116 and golden coating 118 shown in Fig. 8 (b) and 8 (c).Certainly, this sputtering depositing layer with wait from The position of daughter sedimentary 116 can also exchange.
It is also appreciated that, ion implanting, plasma-deposited or sputtering can be carried out using multiple targets simultaneously.This When, will simultaneously there are various target components in same ion implanted layer, plasma deposited layers or sputtering depositing layer.This Outward, can be with during ion implanting, plasma-deposited or sputtering, one after the other using multiple identical or different targets Material, so as to form the multiple ion implanted layers, the plasma deposited layers that are made up of identical material component or different materials component Or sputtering depositing layer.
After intermediate conductor layer is formed, need to stick coverlay in step s3 and be exposed, develop, to expose Will carry out electroplating the region (that is, conductive base region) of gold and the region for connecting plating gripping head of base material both sides.So Afterwards, the both sides of the base material for being formed with intermediate conductor layer are clamped with plating gripping head in step s 4, in exposed conductive base region Middle plating last layer gold, as the golden coating of golden finger.Although electroplating mild alloy is described herein as golden coating, hold It is readily understood, conventional immersion Ni/Au, NiPdAu can also be adopted, hard gold etc. is electroplated as golden coating.
As described above, being formed with middle conductor between conductive base and golden coating according to golden finger of the present utility model Layer, the intermediate conductor layer includes ion implanted layer and/or plasma deposited layers and/or sputtering depositing layer.In the ion implanting phase Between, conductive material ion is forcibly injected into the lower face of circuit with very high speed, in the conductive material and circuit of injection Material molecule between define doped structure, squeeze into large number of foundation pile equivalent in the inside of circuit.Due to foundation pile Anchoring effect, ion implanted layer and the golden coating being subsequently formed are not easy from the line layer of printed circuit board (PCB) to depart from.In plasma During body is deposited, conductive material ion flies to circuit and is deposited on above, shape in the presence of accelerating field with higher speed Into plasma deposited layers.During sputtering, conductive material particle is by the Bombardment of ion beam of high-energy out and with higher speed Degree flies to circuit and is deposited on above, forms sputtering depositing layer.Due to higher incidence rate, plasma deposited layers or sputtering Also there is larger adhesion so that final obtained golden finger is not easy from printed circuit board (PCB) between sedimentary and line material Line layer depart from.Sum it up, due to the presence of intermediate conductor layer, golden finger of the present utility model is not easy from printed circuit Plate comes off and affects the reliability of subsequent terminal electronic product.In addition, for ion implanting, it is plasma-deposited or sputtering lead Electric material particle generally has nano level size, is distributed in injection or deposition process more uniformly, and to circuit surface Incident angle difference it is little.It is accordingly possible to ensure the golden coating of golden finger has the good uniformity and compactness, it is not easy to There is the defect such as pin hole or crackle.
The circuit formed including base material and on the surface of base material according to printed circuit board (PCB) of the present utility model and electricity The golden finger of the circuit is connected to, there is no lead between golden finger and the edge of printed circuit board (PCB), and golden finger is led Electric base portion is coated by intermediate conductor layer.Similarly, golden finger is not easy from printed circuit board (PCB) due to the presence of intermediate conductor layer Come off.The intermediate conductor layer for being additionally, since golden finger is obtained by methods such as ion implanting, plasma-deposited or sputterings , thus electroless copper plating technique need not be adopted during manufacture printed circuit board (PCB), so as to noble metal containing palladium will not occur The problems such as residual or plating gold, the printed circuit board (PCB) without lead can be easily obtained.Additionally, the conductive base of golden finger Top surface and side are completely coated with by intermediate conductor layer, and intermediate conductor layer is covered by golden coating again, it is thus possible to fully sent out Wave the excellent process based prediction model such as low contact resistance, high corrosion resistance and the weldability of golden finger.
Fig. 9 illustrates the process chart of another kind of method for manufacturing golden finger of the present utility model. specifically, the method Comprise the following steps:Outer-layer circuit is formed on the base material of printed circuit board (PCB), the outer-layer circuit is included for forming golden finger Conductive base (step S01);Ion implanting, sputtering or plasma-deposited process are carried out to base material, with the surface of base material Intermediate conductor layer (step S02) is respectively formed on the surface of circuit;Stick coverlay and be exposed, develop, expose etch window Mouth (conductive base of golden finger is located in the window) and the region (step for connecting plating gripping head of base material both sides S03);Windowed regions are etched, intermediate conductor layer therein (step S04) is got rid of;Electroplate in region to opening a window Gold, to form the golden coating (step S05) for covering conductive base;And film, etching are taken off, to get rid of the centre below coverlay Conductor layer, only leaves outer-layer circuit and golden finger (step S06).This six step S01 to S06 correspond respectively to Figure 10 (a), (b), (c), (d), (e) and (f).Step S01, S02, S03, S05 compared with the former approach shown in Fig. 3, in this method The step of corresponding respectively to former approach with S06 S1, S2, S3, S4 and S5, only increased step S04 between S3 and S4, That is, windowed regions are etched, get rid of intermediate conductor layer therein.
Figure 11 (a) illustrates that the section of the printed circuit board (PCB) corresponding with each step of method shown in Fig. 9 is illustrated to 11 (f) Figure, corresponds respectively to (a) to (f) in Figure 10.First, as shown in Figure 11 (a), outer layer is formed on the surface of base material 102 Circuit 104 a, part for the circuit constitutes the conductive base 108 of golden finger.Then, as shown in Figure 11 (b), noted using ion Enter, sputter or plasma-deposited processing method, centre is all defined on both surfaces of the surface of base material and circuit and is led Body layer 112.Then, as shown in Figure 11 (c), last layer coverlay 120 is pasted on the surface of base material 102, and is partly carried out Open a window to expose the conductive base 108 of golden finger.Next, as shown in Figure 11 (d), being etched to windowed regions, remove Fall the intermediate conductor layer 112 on the substrate surface and conductive base surface in windowed regions.Then, circuit is clamped with plating gripping head The both sides of the edge that the uncovered membrane cover of plate base material is lived, are electroplated and are formed the golden coating 118 of coated with conductive base portion 108, such as Shown in Figure 11 (e).Finally, coverlay 120 is taken off, and etches away the intermediate conductor layer 112 below coverlay 120, so as to To golden finger 106 and the printed circuit board (PCB) 10 for possessing this golden finger 106, such as shown in Figure 11 (f).
In this approach, windowed regions are etched in step S04, get rid of intermediate conductor layer therein, and The conductive base of golden finger is located in the windowed regions again, thus the middle conductor being formed in step S02 in conductive base Layer is not present in the golden finger for ultimately forming.As shown in Figure 11 (f), golden finger 106 only includes conductive base and covering The golden coating of conductive base, but do not include the intermediate conductor layer being located between conductive base and golden coating.And, with Fig. 5 (c) phases Than this method can open up larger window in step S03 to coverlay, as long as the window is not fully insulated karat gold finger Conductive base.That is, during the conductive base of golden finger exists via the lower section of the coverlay in window-external Between conductor layer and be electrically connected to the edge of base material, make intermediate conductor layer serve as conducting medium and conductive base during plating gold Top plating forms golden coating.
It should be readily apparent to one skilled in the art that the product formed in step S02 can individually be taken out, as making Making printed circuit board, the especially substrate 20 without lead printed circuit board (PCB).This substrate includes base material, the shape on the surface of base material Into circuit and the intermediate conductor layer that is respectively formed on the surface on the surface of base material and circuit, the intermediate conductor layer include from Sub- implanted layer and/or plasma deposited layers and/or sputtering depositing layer.
Figure 12 (a) shows the generalized section of this substrate to 12 (c), similar to Fig. 8 (a) to 8 (c).Such as Figure 12 (a) Shown, substrate 20 is including base material 102, the circuit 114 formed on the surface of base material 102 and in the surface of base material and circuit The ion implanted layer 114 that is respectively formed on of surface, wherein ion implanted layer 114 constitutes the intermediate conductor layer 112 being described above.From The outer surface of sub- implanted layer 114 and the surface 122 of base material or the flush of circuit, and inner surface is located at the surface 122 of base material Or the lower face of circuit.In the example shown in Figure 12 (b), substrate 20 includes base material 102, the shape on the surface of base material 102 Into circuit 114 and the ion implanted layer 114 that is respectively formed on the surface on the surface of base material and circuit and plasma-deposited Layer 116, wherein ion implanted layer 114 and plasma deposited layers 116 constitute the intermediate conductor layer 112 being described above.Ion is noted Enter layer 114 positioned at base material 102 or the inside of circuit 104, plasma deposited layers 116 are attached directly to ion implanted layer 114 Surface, i.e. positioned at the surface 122 or the surface of circuit of base material, in other words positioned at the outer of base material 102 or circuit 104 Portion.In the example shown in Figure 12 (c), substrate 20 include base material 102, on the surface of base material 102 formed circuit 114, with And the plasma deposited layers 116 being respectively formed on the surface on the surface of base material and circuit, the wherein structure of plasma deposited layers 116 Into the intermediate conductor layer 112 being described above, positioned at the top of surface 110 of conductive base 108.
As it was noted above, can be replaced using the sputtering depositing layer formed by sputtering method in Figure 12 (b) and Figure 12 (c) Shown plasma deposited layers 116, can be with Figure 12 (a) be to the ion implanted layer 114 shown in Figure 12 (c) and/or waits The top of plasma deposition layer 116 is additionally formed one layer of sputtering depositing layer by sputtering method, this sputtering depositing layer with wait from The position of daughter sedimentary 116 can exchange.Further, it is also possible to adopt multiple targets in step S02, formed by identical material Component multiple ion implanted layers, plasma deposited layers or sputtering depositing layer that either different materials component is constituted.
In this substrate, intermediate conductor layer is formed by methods such as ion implanting, plasma-deposited or sputterings On the surface of the surface of base material and circuit, thus no longer need using electroless copper plating work during manufacture printed circuit board (PCB) Skill, will not occur the problems such as residual of noble metal containing palladium or golden plating.Additionally, intermediate conductor layer is used when plating forms golden finger Make conducting medium and be removed in the printed circuit board (PCB) of finished product, thus no longer need to be separately provided lead etc., can be easily The printed circuit board (PCB) without lead is obtained, it is to avoid residual lead negatively affects the electric property of circuit board.
Above-described content is only referred to desired embodiment of the present utility model.However, this utility model is not received The specific embodiment being limited to described in text.Those skilled in the art will readily occur to, without departing from main idea of the present utility model In the range of, these embodiments can be carried out with various obvious modifications, adjustment and replaced, with make it suitable for specific feelings Shape.In fact, protection domain of the present utility model is defined by the claims, and may include that those skilled in the art can be pre- The other examples expected.If such other examples have the structural element with the literal language zero difference of claim, or If person they include the equivalent structural elements that there are non-limiting difference with the literal language of claim, then they will fall In scope of the claims.

Claims (12)

1. a kind of golden finger being arranged on printed circuit board (PCB), including conductive base, golden coating and positioned at the conductive base with Intermediate conductor layer between the golden coating, the intermediate conductor layer include ion implanted layer and/or plasma deposited layers and/ Or sputtering depositing layer.
2. golden finger according to claim 1, it is characterised in that the ion implanted layer is included by the metal material for injecting The doped structure constituted with the material of the conductive base, the flush of its outer surface and the conductive base, and inner surface Positioned at the depth of lower face 0-500nm of the conductive base.
3. golden finger according to claim 1, it is characterised in that the plasma deposited layers or the sputtering depositing layer It is made up of metal material, and positioned at the surface of the conductive base.
4. the golden finger according to Claims 2 or 3, it is characterised in that the metal material include Ni, Cr, Ti, Cu, Al, One kind in Ag, Pd and the alloy between them.
5. the golden finger described in any one in claims 1 to 3, it is characterised in that the golden coating includes chemistry One kind in heavy nickel gold, NiPdAu, electroplating mild alloy, the hard gold of plating.
6. a kind of printed circuit board (PCB), including base material and the circuit formed on the surface of the base material and golden finger, the gold Finger is electrically connected to the circuit and including the golden finger described in any one in claim 1 to 5.
7. printed circuit board (PCB) according to claim 6, it is characterised in that in the golden finger and the printed circuit board (PCB) There is no lead between edge.
8. printed circuit board (PCB) according to claim 7, it is characterised in that the conductive base of the golden finger is electrically connected to institute State circuit or constitute a part for the circuit, project laterally from the surface of the base material, and by the middle conductor Layer cladding.
9. a kind of substrate for manufacturing printed circuit board (PCB), including base material, on the surface of the base material formed circuit and In the intermediate conductor layer that the surface on the surface of the base material and the circuit is respectively formed on, the intermediate conductor layer is noted including ion Enter layer and/or plasma deposited layers and/or sputtering depositing layer, conducting medium is used as when plating forms golden finger and in finished product Printed circuit board (PCB) in be removed, the part of the circuit constitutes the conductive base of the golden finger.
10. substrate according to claim 9, it is characterised in that the ion implanted layer is included by the metal material for injecting The doped structure constituted with the material of the base material or the circuit, the surface of its outer surface and the base material or the circuit Flush, and inner surface is located at the depth of lower face 0-500nm on the surface or the circuit of the base material.
11. substrates according to claim 9, it is characterised in that the plasma deposited layers or the sputtering depositing layer It is made up of metal material, and positioned at the surface of the base material or the surface of the circuit.
12. substrates according to claim 10 or 11, it is characterised in that the metal material include Ni, Cr, Cu, Al, One kind in Ag, Pd and the alloy between them.
CN201621096496.8U 2016-09-30 2016-09-30 Golden finger, printed circuit board and be used for making printed circuit board's base plate Active CN206164982U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107318224A (en) * 2017-07-31 2017-11-03 瑞声声学科技(苏州)有限公司 The preparation method of circuit board and circuit board
CN107517541A (en) * 2017-07-31 2017-12-26 瑞声精密电子沭阳有限公司 The preparation method of circuit board and circuit board
CN108207085A (en) * 2017-12-29 2018-06-26 深圳欣强智创电路板有限公司 A kind of grading connecting finger optic module PCB plate surface treatment method
CN113038725A (en) * 2021-03-08 2021-06-25 深圳市迅捷兴科技股份有限公司 Method for forming conductive layer circuit side wall and surface gold plating by high-frequency circuit board chemical copper deposition

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107318224A (en) * 2017-07-31 2017-11-03 瑞声声学科技(苏州)有限公司 The preparation method of circuit board and circuit board
CN107517541A (en) * 2017-07-31 2017-12-26 瑞声精密电子沭阳有限公司 The preparation method of circuit board and circuit board
CN108207085A (en) * 2017-12-29 2018-06-26 深圳欣强智创电路板有限公司 A kind of grading connecting finger optic module PCB plate surface treatment method
CN113038725A (en) * 2021-03-08 2021-06-25 深圳市迅捷兴科技股份有限公司 Method for forming conductive layer circuit side wall and surface gold plating by high-frequency circuit board chemical copper deposition

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Patentee after: Wuhan Xinchuangyuan Semiconductor Co.,Ltd.

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Patentee before: RICHVIEW ELECTRONICS Co.,Ltd.