CN206148405U - Can realize that battery piece preheats and refrigerated vacuum chuck that cools down - Google Patents
Can realize that battery piece preheats and refrigerated vacuum chuck that cools down Download PDFInfo
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- CN206148405U CN206148405U CN201621062533.3U CN201621062533U CN206148405U CN 206148405 U CN206148405 U CN 206148405U CN 201621062533 U CN201621062533 U CN 201621062533U CN 206148405 U CN206148405 U CN 206148405U
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- chamber
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- 238000001179 sorption measurement Methods 0.000 claims abstract description 32
- 238000001816 cooling Methods 0.000 claims abstract description 22
- 238000010438 heat treatment Methods 0.000 claims abstract description 12
- 238000009434 installation Methods 0.000 claims description 6
- 238000009826 distribution Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 abstract description 4
- 238000012545 processing Methods 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000001727 in vivo Methods 0.000 description 2
- 210000003437 trachea Anatomy 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 208000024891 symptom Diseases 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model relates to a can realize that the battery piece preheats and rapid cooling refrigerated vacuum chuck, including sucking disc and heating device, heating device installs in the sucking disc, has the mobile wind chamber of independent air current in the sucking disc and induced drafts the chamber, be equipped with the air intake and the air outlet that feed through the mobile wind chamber of air current respectively on the sucking disc, air intake department intercommunication is equipped with a the pipe connection, the external high pressurized air source of a the pipe connection, be equipped with the inlet scoop that feeds through the chamber of induced drafting on the sucking disc, inlet scoop department intercommunication is equipped with the 2nd the pipe connection, and the 2nd the pipe connection connects evacuating device, establish to the adsorption plane at the sucking disc top, and the air current flows the wind chamber and lie in the adsorption plane below, and it has a plurality of absorption holes of evenly arranging and feeding through the chamber of induced drafting to open on the adsorption plane. The advantage: convenient to use can add and preheat or cooling the battery piece man -hour adsorbing the battery piece, guarantees that the battery piece can not rise at the excessive speed and the high temperature is damaged because of processing temperature.
Description
Technical field
This utility model is related to a kind of solar battery sheet processing auxiliary equipment, and more particularly to a kind of achievable cell piece is pre-
Heating and the vacuum cup of cooling down.
Background technology
In solar battery sheet manufacture field, to prevent the decay of solar battery sheet, laser need to be carried out to cell piece
Irradiation, temperature can rise rapidly during silicon chip is irradiated with a laser, if the preheating before not laser machining to silicon chip
With plus the cooling in man-hour process, silicon chip can to rise too fast and temperature too high and damage because of temperature.
At present, traditional mode coordinates heating rod to be heated to sucker and freezed using water-cooling pattern mostly, but it is deposited
In problems with:If starting cold water cooling while silicon chip is processed, sucker preheat when high temperature can directly will be water, inhale
Pressure directly can damage in sucker because discharging in disk.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of achievable cell piece and preheats and cooling down
Vacuum cup, effectively overcomes the defect of prior art.
The technical scheme that this utility model solves above-mentioned technical problem is as follows:A kind of achievable cell piece is preheated and lowered the temperature
The vacuum cup of cooling, including sucker and heater, above-mentioned heater is arranged in sucker, is had in above-mentioned sucker independent
Air current flow wind chamber and air draught chamber;Above-mentioned sucker is provided with the air inlet and air outlet for being respectively communicated with air current flow wind chamber, on
State air inlet connection and be provided with the first gas-tpe fitting, the external high-pressure air source of above-mentioned first gas-tpe fitting;Above-mentioned sucker is provided with company
Lead to the inlet scoop of above-mentioned air draught chamber, connection at above-mentioned inlet scoop is provided with the second gas-tpe fitting, and above-mentioned second gas-tpe fitting connection is taken out
Vacuum equipment;Above-mentioned sucker top is set to adsorption plane, and said flow flowing wind chamber is located at above-mentioned adsorption plane lower section, above-mentioned absorption
Multiple adsorption holes for being evenly arranged and connecting air draught chamber are provided with face.
The beneficial effects of the utility model are:It is easy to use, cell piece is carried out when can be processed cell piece is adsorbed
Preheating cools, it is ensured that cell piece will not be damaged because processing temperature rises too fast too high with temperature.
On the basis of above-mentioned technical proposal, this utility model can also do following improvement.
Further, above-mentioned sucker includes sucker body and cover plate, and above-mentioned cover plate is fixedly mounted on above-mentioned sucker bodies top,
Above-mentioned cover plate constitutes the adsorption plane of above-mentioned sucker, and said flow flowing wind chamber and air draught chamber are arranged at above-mentioned sucker sheet in vivo,
Above-mentioned cover plate is provided with through its upper and lower multiple above-mentioned adsorption hole.
It is that sucker combinative structure is overhauled beneficial to dismounting using the beneficial effect of above-mentioned further scheme.
Further, above-mentioned sucker bodies top is provided with groove, above-mentioned bottom portion of groove side by side and be spaced be provided with multiple strips
Projection, the sucker of multiple above-mentioned underbumps originally arranges in vivo above-mentioned air draught chamber, the equal interval setting in each above-mentioned projection top
There is the fresh air inlet of the above-mentioned air draught chamber of multiple connections, above-mentioned cover plate for sealing is arranged on above-mentioned sucker bodies top and covers above-mentioned recessed
The position of each adsorption hole on groove, and its bottom abuts with the top of multiple above-mentioned projections, above-mentioned fresh air inlet and above-mentioned cover plate
Arrangement is corresponded, above-mentioned adsorption hole connects with above-mentioned fresh air inlet, above-mentioned projection and recess sidewall, cover plate and two neighboring convex
Gap between block forms said flow flowing wind chamber.
It is that sucker body design is simple using the beneficial effect of above-mentioned further scheme, it is rationally distributed, beneficial to the logical of air-flow
Cross.
Further, above-mentioned air inlet is distributed in the both sides of above-mentioned sucker body and connects said flow flowing wind with air outlet
Chamber.
It is that both sides distribution is easily installed miscellaneous part using the beneficial effect of above-mentioned further scheme.
Further, between the position of the above-mentioned air inlet of above-mentioned recess sidewall correspondence and air outlet is respectively equipped with multiple intervals and waits
Away from first venthole and the second venthole of distribution, multiple above-mentioned first ventholes and multiple above-mentioned second ventholes are corresponded to respectively
Connect above-mentioned air inlet and air outlet.
Air-flow is easy for using the beneficial effect of above-mentioned further scheme air-flow air current flow wind intracavity is entered by air inlet
Again Jing air outlets are discharged.
Further, above-mentioned air outlet is provided with two, and each above-mentioned air outlet is connected and is provided with deafener.
It is that exhaust effect is preferable using the beneficial effect of above-mentioned further scheme, and noise is less.
Further, above-mentioned air outlet is embedded with the first side cover plate, each air outlet of correspondence on above-mentioned first side cover plate
The first air holes that position is equipped with through its both sides and connects with corresponding air outlet, above-mentioned deafener is respectively communicated with installed in above-mentioned
At first air holes.
Installation, the dismounting of deafener are easy for using the beneficial effect of above-mentioned further scheme, structural strength is higher, installs
It is relatively more firm.
Further, above-mentioned air inlet is embedded with the second side cover plate, the position of correspondence air inlet on above-mentioned second side cover plate
The second air holes for being provided with through its both sides and connecting with air inlet, above-mentioned first gas-tpe fitting connection is arranged on above-mentioned second air holes
Place.
Installation, the dismounting of the first trachea are easy for using the beneficial effect of above-mentioned further scheme, structural strength is higher, peace
Dress is relatively consolidated.
Further, above-mentioned heater includes the heating rod of multiple arranged side by side and spaced sets, and multiple above-mentioned heating rods are equal
Level is plugged on above-mentioned sucker body near the position of its bottom.
It is rationally distributed, homogeneous heating using the beneficial effect of above-mentioned further scheme, by heat exchange pattern to cover plate
The silicon chip of upper absorption is heated.
Further, above-mentioned inlet scoop is provided with multiple, and is distributed in the same side of above-mentioned sucker body, each above-mentioned inlet scoop
Above-mentioned second gas-tpe fitting is installed in place's connection.
It is rationally distributed using the beneficial effect of above-mentioned further scheme, is easy to the installation of the second gas-tpe fitting, air draught effect
Fruit is preferably.
Description of the drawings
Fig. 1 be achievable cell piece of the present utility model preheat and cooling down vacuum cup structural representation;
Fig. 2 be achievable cell piece of the present utility model preheat and cooling down vacuum cup Structure explosion diagram.
In accompanying drawing, the list of parts representated by each label is as follows:
1st, sucker, 2, heater, 11, sucker body, 12, cover plate, the 13, first gas-tpe fitting, the 14, second trachea connects
Head, 15, adsorption hole, 16, deafener, the 17, first side cover plate, the 18, second side cover plate, 111, groove, 1111, projection, 1112,
One venthole, the 1113, second venthole, the 171, first air holes, the 181, second air holes.
Specific embodiment
Principle of the present utility model and feature are described below in conjunction with accompanying drawing, example is served only for explaining this practicality
It is new, it is not intended to limit scope of the present utility model.
Embodiment:As shown in figure 1, the achievable cell piece of the present embodiment is preheated and the vacuum cup of cooling down includes
Sucker 1 and heater 2, above-mentioned heater 2 is arranged in sucker 1, has air current flow wind chamber and air draught in above-mentioned sucker 1
Chamber, above-mentioned sucker 1 is provided with the air inlet and air outlet for being respectively communicated with air current flow wind chamber, and above-mentioned air inlet connection is provided with the
One gas-tpe fitting 13, is communicated with the inlet scoop of above-mentioned air draught chamber on above-mentioned sucker 1, connection at above-mentioned inlet scoop is provided with the second gas
Pipe joint 14, the top of above-mentioned sucker 1 is set to adsorption plane, and said flow flowing wind chamber is arranged on adsorption plane lower section, above-mentioned absorption
Multiple adsorption holes 15 being uniformly arranged are provided with face, above-mentioned adsorption hole 15 connects above-mentioned air draught chamber.
When using, cell piece to be processed is adsorbed on the adsorption plane of sucker 1, its concrete principle is, the second gas-tpe fitting
14 external vacuum generators, vacuum generator persistently takes the air of air draught intracavity away so that negative pressure is formed at adsorption hole 15, will
Cell piece tightly adsorbs on adsorption plane, next step, and heater 2 is powered, and whole sucker 1 is heated, and heat is further
It is delivered on cell piece by adsorption plane, realization is preheated to cell piece so as to will not go up temperature when laser irradiates is carried out
Rise too fast and damage, next, carrying out laser irradiation to cell piece, cell piece is persistently overheating in irradiation process, now, first
Gas-tpe fitting 13 be passed through it is normal temperature compressed after air, air-flow enter air current flow wind chamber after again Jing air outlets discharge, in secondary process
In, the heat of Jing cell pieces transmission can be taken away rapidly by the compressed air of air current flow wind intracavity on adsorption plane, so as to prevent silicon
The silicon chip that piece temperature is too high and causes is damaged.
Preferably, above-mentioned sucker 1 includes sucker body 11 and cover plate 12, and above-mentioned cover plate 12 is fixedly mounted on above-mentioned sucker sheet
The top of body 11, above-mentioned cover plate 12 constitutes the adsorption plane of above-mentioned sucker 1, and said flow flowing wind chamber and air draught chamber are arranged at above-mentioned
In sucker body 11, above-mentioned cover plate 12 is provided with through its upper and lower multiple above-mentioned adsorption hole 15, and cover plate 12 is detachable, and it is right to be easy to
Whole sucker is dismounted, cleared up, very easy to use.
Above-mentioned sucker body 11 and cover plate 12 are both designed as the square body structure for matching, profile better appearance.
As shown in Fig. 2 the top of above-mentioned sucker body 11 is provided with groove 111, the bottom of above-mentioned groove 111 is side by side and setting of being spaced
There is the projection 1111 of multiple strips, above-mentioned air draught chamber is set in the sucker body 11 of the lower section of multiple above-mentioned projections 1111, on each
The fresh air inlet that the top of projection 1111 is arranged at intervals with the above-mentioned air draught chamber of multiple connections is stated, above-mentioned cover plate 12 is sealingly mounted at above-mentioned
The top of sucker body 11 simultaneously covers above-mentioned groove 111, and its bottom abuts with the top of multiple above-mentioned projections 1111, above-mentioned air intake
The position of each adsorption hole 15 on hole and above-mentioned cover plate 12 corresponds arrangement, and above-mentioned adsorption hole 15 and above-mentioned fresh air inlet connect
Logical, above-mentioned projection 1111 and the side wall of groove 111, the gap between cover plate 12 and two neighboring projection 1111 form said flow
Flowing wind chamber so that the air current flow wind chamber and air draught chamber layout comparison in sucker body 11 is reasonable, sucker body 11 and cover plate
Cooperation between 12 is also compact, and whole device stability is preferable.
Above-mentioned sucker body 11 and cover plate 12 adopts the preferable aluminum alloy material of thermal conduction effect, its structural strength
It is higher.
Because the first gas-tpe fitting 13 and the second gas-tpe fitting 14 are respectively provided with certain dimensional height, sucker body 11 sets in itself
Meter is general also relatively thin, therefore above-mentioned air inlet is distributed in the both sides of above-mentioned sucker body 11 and connects said flow stream with air outlet
Wind symptom chamber so that the first gas-tpe fitting 13 and the layout comparison of the second gas-tpe fitting 14 are reasonable, beneficial to dismounting, meanwhile, still must press
Good circulation of the contracting air in air current flow wind intracavity.
The position of the above-mentioned air inlet of the side wall correspondence of above-mentioned groove 111 and air outlet is respectively equipped with multiple intervals and equidistantly divides
First venthole 1112 and the second venthole 1113 of cloth, multiple above-mentioned first ventholes 1112 and multiple above-mentioned second ventholes
1113 correspond to respectively the above-mentioned air inlet of connection and air outlet, and rationally, multiple position of opening do not interfere with sucker body to design comparison
11 structural strength, meanwhile, also will not clash between cover plate 12.
Preferably, above-mentioned air outlet is provided with two, and each above-mentioned air outlet is connected and is provided with deafener 16, is easy to
It is quick to discharge gas, and noise when reducing aerofluxuss.
Above-mentioned air outlet is embedded with the first side cover plate 17, the position of each air outlet of correspondence on above-mentioned first side cover plate 17
The first air holes 171 for being equipped with through its both sides and connecting with corresponding air outlet, above-mentioned deafener 16 is respectively communicated with installed in upper
State at the first air holes 171, because deafener 16 needs in use dismounting and cleaning, if being directly installed on air outlet, frequently
It is easy to damage air outlet after dismounting, the sealing for affecting deafener is installed.
Above-mentioned air inlet is embedded with the second side cover plate 18, and the position of correspondence air inlet is provided with above-mentioned second side cover plate 18
The second air holes 181 connected through its both sides and with air inlet, the above-mentioned connection of first gas-tpe fitting 13 is arranged on above-mentioned second wind
At hole 181, during use, the first gas-tpe fitting 13 needs dismounting and cleaning, if being directly installed on air inlet, frequently after dismounting
It is easy to damage air inlet, affects the later stage normally to use.
Preferably, above-mentioned heater 2 includes the heating rod 21 of multiple arranged side by side and spaced sets, multiple above-mentioned heating rods
21 equal levels are plugged on above-mentioned sucker body 11 near the position of its bottom, and it uses more convenient, installs uniform, beneficial to right
The uniform heating of whole sucker body 11.
There is certain size in view of the second gas-tpe fitting, the thickness of sucker body 11 is also partially thin, and above-mentioned inlet scoop is provided with many
It is individual, and the same side of above-mentioned sucker body 11 is distributed in, above-mentioned second gas-tpe fitting of installation is connected at each above-mentioned inlet scoop
14 so that the installation of the second gas-tpe fitting 14 will not be clashed with miscellaneous part, and layout comparison is reasonable.
Preferred embodiment of the present utility model is the foregoing is only, it is all in this practicality not to limit this utility model
Within new spirit and principle, any modification, equivalent substitution and improvements made etc. should be included in guarantor of the present utility model
Within the scope of shield.
Claims (10)
1. the vacuum cup that a kind of achievable cell piece is preheated and fast cooling is cooled down, it is characterised in that:Including sucker (1) and
Heater (2), the heater (2) has independent air current flow wind in sucker (1), in the sucker (1)
Chamber and air draught chamber;The sucker (1) is provided with the air inlet and air outlet for being respectively communicated with air current flow wind chamber, the air inlet
Connection is provided with the first gas-tpe fitting (13), the external high-pressure air source of first gas-tpe fitting;Institute is communicated with the sucker (1)
The inlet scoop of air draught chamber is stated, connection at the inlet scoop is provided with the second gas-tpe fitting (14), and the second gas-tpe fitting connection is taken out
Vacuum equipment;Sucker (1) top is set to adsorption plane, and the air current flow wind chamber is located at adsorption plane lower section, described
Multiple adsorption holes (15) for being evenly arranged and connecting air draught chamber are provided with adsorption plane.
2. the vacuum cup that a kind of achievable cell piece according to claim 1 is preheated and fast cooling is cooled down, it is special
Levy and be:The sucker (1) includes sucker body (11) and cover plate (12), and the cover plate (12) is fixedly mounted on the sucker sheet
Body (11) top, the cover plate (12) constitutes the adsorption plane of the sucker (1), and the air current flow wind chamber and air draught chamber are respectively provided with
In the sucker body (11), the cover plate (12) is provided with through its upper and lower multiple described adsorption hole (15).
3. the vacuum cup that a kind of achievable cell piece according to claim 2 is preheated and fast cooling is cooled down, it is special
Levy and be:The sucker body (11) top is provided with groove (111), groove (111) bottom side by side and be spaced be provided with many
The air draught chamber is set in the projection (1111) of individual strip, the sucker body (11) below multiple projections (1111), each
Projection (1111) top is arranged at intervals with the fresh air inlet of multiple connections air draught chamber, and cover plate (12) sealing is installed
At the sucker body (11) top and cover the groove (111), and the top of its bottom and multiple projections (1111)
Abut, the position of each adsorption hole (15) on the fresh air inlet and the cover plate (12) corresponds arrangement, the adsorption hole
(15) connect with the fresh air inlet, the projection (1111) and groove (111) side wall, cover plate (12) and two neighboring projection
(1111) gap between forms the air current flow wind chamber.
4. the vacuum cup that a kind of achievable cell piece according to claim 3 is preheated and fast cooling is cooled down, it is special
Levy and be:The air inlet is distributed in the both sides of the sucker body (11) and connects the air current flow wind chamber with air outlet.
5. the vacuum cup that a kind of achievable cell piece according to claim 4 is preheated and fast cooling is cooled down, it is special
Levy and be:The position of groove (111) side wall correspondence air inlet and air outlet is respectively equipped with multiple interval and equidistant
First venthole (1112) and the second venthole (1113) of distribution, multiple first ventholes (1112) and multiple described the
Two ventholes (1113) correspond to respectively the connection air inlet and air outlet.
6. the vacuum cup that a kind of achievable cell piece according to claim 4 or 5 is preheated and fast cooling is cooled down, its
It is characterised by:The air outlet is provided with two, and each described air outlet is connected and is provided with deafener (16).
7. the vacuum cup that a kind of achievable cell piece according to claim 6 is preheated and fast cooling is cooled down, it is special
Levy and be:The air outlet is embedded with the first side cover plate (17), each air outlet of correspondence on first side cover plate (17)
The first air holes (171) that position is equipped with through its both sides and connects with corresponding air outlet, the deafener (16) is respectively communicated with
Installed in the first air holes (171) place.
8. the vacuum cup that a kind of achievable cell piece according to claim 6 is preheated and fast cooling is cooled down, it is special
Levy and be:The air inlet is embedded with the second side cover plate (18), the position of correspondence air inlet on second side cover plate (18)
The second air holes (181) for being provided with through its both sides and connecting with air inlet, the first gas-tpe fitting (13) connection is arranged on institute
State the second air holes (181) place.
9. the vacuum that a kind of achievable cell piece according to any one of claim 3 to 5 is preheated and fast cooling is cooled down
Sucker, it is characterised in that:The heater (2) including it is multiple side by side and spaced sets heating rod (21), it is multiple described
Heating rod (21) level is plugged on the sucker body (11) near the position of its bottom.
10. the vacuum that a kind of achievable cell piece according to any one of claim 3 to 5 is preheated and fast cooling is cooled down
Sucker, it is characterised in that:The inlet scoop is provided with multiple, and is distributed in the same side of the sucker body (11), described in each
Installation second gas-tpe fitting (14) is connected at inlet scoop.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201621062533.3U CN206148405U (en) | 2016-09-19 | 2016-09-19 | Can realize that battery piece preheats and refrigerated vacuum chuck that cools down |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201621062533.3U CN206148405U (en) | 2016-09-19 | 2016-09-19 | Can realize that battery piece preheats and refrigerated vacuum chuck that cools down |
Publications (1)
Publication Number | Publication Date |
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CN206148405U true CN206148405U (en) | 2017-05-03 |
Family
ID=58618840
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201621062533.3U Active CN206148405U (en) | 2016-09-19 | 2016-09-19 | Can realize that battery piece preheats and refrigerated vacuum chuck that cools down |
Country Status (1)
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CN (1) | CN206148405U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107367525A (en) * | 2017-08-30 | 2017-11-21 | 如皋市双亚环保科技有限公司 | A kind of alloy material welding gas test system cooling structure |
CN107855667A (en) * | 2017-11-29 | 2018-03-30 | 深圳市冰海科技有限公司 | For cutting the laser cutting device of FPC |
CN109848897A (en) * | 2019-03-18 | 2019-06-07 | 深圳市优界科技有限公司 | A kind of vacuum chuck with heating function |
-
2016
- 2016-09-19 CN CN201621062533.3U patent/CN206148405U/en active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107367525A (en) * | 2017-08-30 | 2017-11-21 | 如皋市双亚环保科技有限公司 | A kind of alloy material welding gas test system cooling structure |
CN107855667A (en) * | 2017-11-29 | 2018-03-30 | 深圳市冰海科技有限公司 | For cutting the laser cutting device of FPC |
CN109848897A (en) * | 2019-03-18 | 2019-06-07 | 深圳市优界科技有限公司 | A kind of vacuum chuck with heating function |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP02 | Change in the address of a patent holder | ||
CP02 | Change in the address of a patent holder |
Address after: No. 88 Jiulonghu Street, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430223 Patentee after: WUHAN DR LASER TECHNOLOGY Co.,Ltd. Address before: No. 4, Huashiyuan 2nd Road, Guanggu Industrial Park, Donghu Development Zone, Wuhan City, Hubei Province, 430223 Patentee before: WUHAN DR LASER TECHNOLOGY Co.,Ltd. |