CN109848897A - A kind of vacuum chuck with heating function - Google Patents
A kind of vacuum chuck with heating function Download PDFInfo
- Publication number
- CN109848897A CN109848897A CN201910206011.8A CN201910206011A CN109848897A CN 109848897 A CN109848897 A CN 109848897A CN 201910206011 A CN201910206011 A CN 201910206011A CN 109848897 A CN109848897 A CN 109848897A
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- China
- Prior art keywords
- suction surface
- vacuum
- true suction
- thermal insulation
- insulation board
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention discloses a kind of vacuum chuck with heating function, including vaccum suction pipe, thermal insulation board, heating wire module, thermally conductive brass sheet and true suction surface, and the true suction surface is equipped with groove；The heating wire module and thermally conductive brass sheet are installed in the groove of true suction surface；The thermal insulation board is installed on true suction surface, and is additionally provided with through-hole on the thermal insulation board；The vaccum suction pipe passes through thermal insulation board, heating wire module and thermally conductive brass sheet and is connected on true suction surface.Vacuum chuck of the invention uses uniform layout's heating wire, and even heat is transmitted to sucker silica gel face, the runner that vacuum pneumatic passes through accurate layout, it can be ensured that sucker plane is fitted closely with by suction workpiece by heating conduction extremely strong brass.
Description
Technical field
The invention belongs to vacuum chuck technical fields, and in particular to a kind of vacuum chuck with heating function.
Background technique
Vacuum chuck is to adsorb workpiece by vacuum pressure, generally makes sucker ontology using silicon rubber, nitrile rubber.And
And existing vacuum chuck does not have heating function, is applied to when tearing screen field open, the heating module that needs to arrange in pairs or groups uses, and heating module is again
Product screen space can be occupied, sucker can not adsorb screen whole surface, mutability when causing to tear open screen completely, and frangible screen is asked
Topic；Sucker using the production of existing sucker material has very strong heat resistance, but heating conduction is very poor, is not suitable for increasing heating
Function.
Summary of the invention
In view of the problems of the existing technology, the present invention provides a kind of vacuum chuck with heating function.
The technical scheme is that
A kind of vacuum chuck with heating function, including vaccum suction pipe, thermal insulation board, heating wire module, thermally conductive brass sheet and
True suction surface, the true suction surface are equipped with groove；The heating wire module and thermally conductive brass sheet are installed on the groove of true suction surface
It is interior；The thermal insulation board is packaged in vacuum and inhales the one side of groove on panel surface, and is additionally provided with through-hole on the thermal insulation board；The vaccum suction pipe is worn
It crosses thermal insulation board, heating wire module and thermally conductive brass sheet and is connected to true suction surface.
Preferably, the true suction surface is made of heat conductive silica gel, for enhancing the thermal conductivity of true suction surface.
Preferably, it includes sealing ring, vacuum pneumatic runner, primary inlet port and extra-air inlet that the vacuum, which inhales face, it is described true
Air stream runner is located at the bottom of true suction surface, is used for airflow；The sealing ring is embedded in vacuum pneumatic runner, is used for
Improve the vacuum degree of vacuum chuck；The primary inlet port and extra-air inlet are located at the bottom of true suction surface, and connect vaccum suction pipe.
Preferably, the size of the sealing ring can adjust as needed, the true suction surface suitable for different shapes.
Preferably, the quantity of the extra-air inlet is 2.
Using technical solution of the present invention, have the advantages that
1, sucker itself has heating function, does not need to give heating module spacing, can adsorb entire screen completely, tear screen open
Uniform force in the process avoids hooking, is crushed；
2, heating surface be silica gel material, be bonded with product it is closer, heat more evenly；
3, different sizes, the true suction surface of different shapes can be constructed by adjusting sealing ring embedded location；
4, it can be bonded completely with absorption workpiece using the true suction surface of sealing ring building, it is air tight, to form high vacuum
The binding domain of degree.
Detailed description of the invention
Fig. 1 is schematic structural view of the invention；
Fig. 2 is explosive view of the present invention；
Fig. 3 is the true suction surface structural schematic diagram of the present invention.
Attached drawing mark:
1, vaccum suction pipe；2, thermal insulation board；3, heating wire module；4, thermally conductive brass sheet；5, true suction surface；501, sealing ring；
502, vacuum pneumatic runner；503, primary inlet port；504, extra-air inlet.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is further described.
Referring to figs. 1 to Fig. 3, the present invention provides a kind of vacuum chuck with heating function, including vaccum suction pipe 1, thermal insulation board
2, heating wire module 3, thermally conductive brass sheet 4 and true suction surface 5, the true suction surface 5 are equipped with groove；3 He of heating wire module
Thermally conductive brass sheet 4 is installed in the groove of true suction surface 5；The thermal insulation board 2 is packaged in true suction surface 5 one side with groove, and
Through-hole is additionally provided on the thermal insulation board 2；The vaccum suction pipe 1 passes through thermal insulation board 2, heating wire module 3 and thermally conductive brass sheet 4 and is connected to
True suction surface.
The true suction surface 5 is made of heat conductive silica gel, for enhancing the thermal conductivity of true suction surface 5.
The true suction surface 5 includes sealing ring 501, vacuum pneumatic runner 502, primary inlet port 503 and extra-air inlet 504,
The vacuum pneumatic runner 502 is located at the bottom of true suction surface, is used for airflow；The sealing ring 501 is embedded in vacuum gas
It flows in runner 502, for improving the vacuum degree of vacuum chuck；The primary inlet port 503 and extra-air inlet 504 are located at true suction surface
5 bottom, and connect vaccum suction pipe 1.
The size of the sealing ring 501 can adjust as needed, the true suction surface suitable for different shapes.
The quantity of the extra-air inlet 504 is 2.
Working principle of the present invention are as follows:
Using vacuum pneumatic by the runner of accurate layout, chuck surface is made to form uniform vacuum pressure adsorbent article.It adopts
Vacuum chuck, vacuum chuck surface reasonable layout airslide, by embedded in airslide are made with the mode of metal packet silicon rubber
Enter sealing ring to construct true suction surface；By replace sealing ring embedded location, it can be achieved that true suction surface size, outer deformation
Change, thus compatible different sizes, the true suction surface requirement of shape.
The above description is only a preferred embodiment of the present invention, is not intended to limit the scope of the invention, all at this
Under the inventive concept of invention, using equivalent structure transformation made by description of the invention and accompanying drawing content, or directly/use indirectly
It is included in other related technical areas in scope of patent protection of the invention.
Claims (4)
1. a kind of vacuum chuck with heating function, it is characterised in that: including vaccum suction pipe, thermal insulation board, heating wire module, thermally conductive
Brass sheet and true suction surface, the true suction surface are equipped with groove；The heating wire module and thermally conductive brass sheet are installed on vacuum suction
In the groove in face；The thermal insulation board is packaged in vacuum and inhales the one side of groove on panel surface, and is additionally provided with through-hole on the thermal insulation board；It is described true
Suction pipe passes through thermal insulation board, heating wire module and thermally conductive brass sheet and is connected to true suction surface.
2. the vacuum chuck according to claim 1 with heating function, it is characterised in that: the true suction surface is using thermally conductive
Silica gel production, for enhancing the thermal conductivity of true suction surface.
3. the vacuum chuck according to claim 1 with heating function, it is characterised in that: it includes sealing that the vacuum, which inhales face,
Circle, vacuum pneumatic runner, primary inlet port and extra-air inlet, the vacuum pneumatic runner are located at the bottom of true suction surface, are used for gas
Stream circulation；The sealing ring is embedded in vacuum pneumatic runner, for improving the vacuum degree of vacuum chuck；The primary inlet port and
Extra-air inlet is located at the bottom of true suction surface, and connects vaccum suction pipe.
4. the vacuum chuck according to claim 3 with heating function, it is characterised in that: the quantity of the extra-air inlet is
2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910206011.8A CN109848897A (en) | 2019-03-18 | 2019-03-18 | A kind of vacuum chuck with heating function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910206011.8A CN109848897A (en) | 2019-03-18 | 2019-03-18 | A kind of vacuum chuck with heating function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109848897A true CN109848897A (en) | 2019-06-07 |
Family
ID=66901135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910206011.8A Pending CN109848897A (en) | 2019-03-18 | 2019-03-18 | A kind of vacuum chuck with heating function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109848897A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111065177A (en) * | 2019-12-23 | 2020-04-24 | 南京航空航天大学 | High-temperature and high-pressure resistant electromagnetic chuck and method for heating workpiece adsorbed by same |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03205215A (en) * | 1989-12-29 | 1991-09-06 | Matsushita Electric Ind Co Ltd | Fixed itch separating device of element |
| US20130244441A1 (en) * | 2007-12-19 | 2013-09-19 | Lam Research Corporation | Composite showerhead electrode assembly for a plasma processing apparatus |
| CN103846646A (en) * | 2012-12-07 | 2014-06-11 | 富泰华工业（深圳）有限公司 | Dismounting device |
| CN206148405U (en) * | 2016-09-19 | 2017-05-03 | 武汉帝尔激光科技股份有限公司 | Can realize that battery piece preheats and refrigerated vacuum chuck that cools down |
| CN107611077A (en) * | 2017-09-21 | 2018-01-19 | 深圳市环基实业有限公司 | A kind of IC package processing unit and processing method |
| CN108120855A (en) * | 2016-11-30 | 2018-06-05 | 细美事有限公司 | For supporting substrates sucker module and include the probe station of the sucker module |
| CN208073962U (en) * | 2018-01-31 | 2018-11-09 | 段夫亮 | A kind of sucker |
-
2019
- 2019-03-18 CN CN201910206011.8A patent/CN109848897A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03205215A (en) * | 1989-12-29 | 1991-09-06 | Matsushita Electric Ind Co Ltd | Fixed itch separating device of element |
| US20130244441A1 (en) * | 2007-12-19 | 2013-09-19 | Lam Research Corporation | Composite showerhead electrode assembly for a plasma processing apparatus |
| CN103846646A (en) * | 2012-12-07 | 2014-06-11 | 富泰华工业（深圳）有限公司 | Dismounting device |
| CN206148405U (en) * | 2016-09-19 | 2017-05-03 | 武汉帝尔激光科技股份有限公司 | Can realize that battery piece preheats and refrigerated vacuum chuck that cools down |
| CN108120855A (en) * | 2016-11-30 | 2018-06-05 | 细美事有限公司 | For supporting substrates sucker module and include the probe station of the sucker module |
| CN107611077A (en) * | 2017-09-21 | 2018-01-19 | 深圳市环基实业有限公司 | A kind of IC package processing unit and processing method |
| CN208073962U (en) * | 2018-01-31 | 2018-11-09 | 段夫亮 | A kind of sucker |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111065177A (en) * | 2019-12-23 | 2020-04-24 | 南京航空航天大学 | High-temperature and high-pressure resistant electromagnetic chuck and method for heating workpiece adsorbed by same |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190607 |
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| RJ01 | Rejection of invention patent application after publication |