CN206114155U - Flexible capacitanc pressure sensor of type that gradually bursts at seams - Google Patents

Abstract

The utility model discloses a flexible capacitanc pressure sensor of type that gradually bursts at seams, include: stratum basale, electrode layer, dielectric layer, supreme setting gradually is down followed to stratum basale, electrode layer, dielectric layer, the electrode layer includes: a plurality of electric capacity, electrode, electric capacity is the matrix composition to be arranged at the stratum basale top surface, and every electric capacity includes: disc electric capacity, gradually burst at the seams, bending line, capacitor electrode, disc electric capacity outside edge is drawn forth two respectively and is gradually burst at the seams, and the every end that gradually bursts at the seams all is connected with bending line, and every bending line end all is connected with capacitor electrode, stratum basale top surface four corners all is provided with the electrode, stratum basale, dielectric layer all adopt PDMS dimethyl silicone polymer or PI polyimide or PET polydiethylene terephthalate or flexible glass or metal forming or test paper. This design capacitor electrode's extension elasticity obtains effectual promotion, can improve the flexible performance of device under the prerequisite of using capacitor electrode.

Description

A kind of involute-type flexible capacitance type pressure transducer

Technical field

This utility model is related to a kind of involute-type flexible capacitance type pressure transducer, belongs to microelectronics technology.

Background technology

Flexible electronic is an emerging technology.In the impression of people, organic material, such as plastics are all good Insulator, few people will recognize that plastics also can be conductive.In recent years, because the research to conducting polymer has new breakthrough, have Machine material can become conductive quasiconductor, flexible electronic from traditional insulator（Flexible Electronics）Just should Transport and give birth to.The development of the technologies such as modern chemistry, promotes the development of the such subject of flexible electronic.The pass of flexible electronic manufacture Key includes manufacturing process, substrate and material etc., and its core is micro-nano patterning（Micro-and Nanopatterning）System Make, be related to the interdisciplinary researchs such as machinery, material, physics, chemistry, electronics.

Flexible electronic technology is a brand-new electronic technology revolution, causes global extensive concern and has obtained rapid Development.The U.S.《Science》Organic electronic technical progress is classified as one of big scientific and technological achievement in the world ten in 2000 by magazine, with mankind's base Find because a group sketch, Cologne technology etc. are great arranged side by side.American scientist Alan's black square, Alan mark Diarmid and day undergraduate course Scholar's Hideki Shirakawa obtains Nobel chemistry Prize in 2000 due to them in the starting sex work of conducting polymer field.

Flexible electronic technology is currently under the starting stage, is also called plastic electronic（Plastic Electronics）, print Brush electronics（Printed Electronics）, organic electronic（Organic Electronics）, polymer electronics（Polymer Electronics）Deng；And with regard to its definition, the clear and definite concept of unification is there is presently no, can be summarized as organic/inorganic materials Electronic device is produced on the new electronic technology on flexibility/Drawability plastics and thin metal matrix plate.Flexible electronic is with its uniqueness Flexibility/ductility and efficient, inexpensive manufacturing process, before the fields such as information, the energy, medical treatment, national defence tool is widely used Scape, such as flexible electronic displays, Organic Light Emitting Diode OLED, printing RFID, thin-film solar cell panel, electronic newspaper, electricity Sub- skin/artificial-muscle etc..Except integrating, electronic circuit, electronic building brick, material, plane show flexible electronic, nanotechnology etc. is led Outside field technique, while across industries such as quasiconductor, envelope survey, material, chemical industry, printed circuit board (PCB), display floaters, traditional product can be assisted Industry, such as plastics, printing, chemical industry, the transition of metal material industry, lifting industry surcharge, therefore flexible electronic technology Development will be that the industrial structure and human lives bring revolutionary change.

At present, partially flexible application of electronic technology is in relevant capacitor formula pressure transducer, but it is processing metal electrode Ductility when also there are problems that very big, the flexible ductility for how lifting the metal electrode on flexible material will be flexible electronic Technology one needs the problem of key breakthrough.

Utility model content

Purpose：In order to overcome the deficiencies in the prior art, this utility model to provide a kind of involute-type flexibility electric capacity Formula pressure transducer.

Technical scheme：To solve above-mentioned technical problem, the technical solution adopted in the utility model is：

A kind of involute-type flexible capacitance type pressure transducer, including：Basal layer, electrode layer, dielectric layer, the substrate Layer, electrode layer, dielectric layer set gradually from bottom to up；The electrode layer includes：Multiple electric capacity, electrode, the electric capacity is in matrix In basal layer top surface, each electric capacity includes structural arrangement：Disk electric capacity, involute, sweep, capacitance electrode, the disk electricity Hold outer ledge and draw two involutes respectively, every involute end is respectively connected with sweep, and every sweep end connects It is connected to capacitance electrode；The basal layer top surface corner is provided with electrode；The basal layer, dielectric layer adopt the poly- diformazans of PDMS Radical siloxane or PI polyimides or PET polyethylene terephthalate or flexible glass or metal forming or reagent paper.

Also include sacrifice layer, the basal layer bottom is provided with sacrifice layer, and the sacrifice layer surrounding sets with basal layer bottom It is equipped with the space of 1-10mm；The sacrifice layer is using photoresist layer or magnalium layer or nickel aluminium lamination.

Preferably, the basal layer, thickness of dielectric layers are set to 200-1000nm.

Preferably, the electrode layers thickness is set to 1 μm -5 μm.

Preferably, the live width of the sweep is set to 200nm-500nm.

A kind of preparation method of involute-type flexible capacitance type pressure transducer, comprises the steps：

Step one：One layer of photoresist is applied using sol evenning machine is even on silicon chip, then baking-curing, cleans a cast at edge Into sacrifice layer；

Step 2：PDMS polydimethylsiloxane liquids are coated into uniform one layer on sacrifice layer using sol evenning machine, then Baking-curing forms basal layer；

Step 3, is schemed using Auto CAD Software on Drawing electric capacity and electrode lay-out, and is fabricated to film mask piece；It is single Disk electric capacity is drawn using two involutes, and involute exit is connected to capacitance electrode using sweep, and multiple electric capacity are into square Configuration is arranged；Then, using photoetching, sputtering, electric capacity and electrode deposition are become on the base layer electrode layer by additional galvanoplastic；

Step 4, using sol evenning machine is even on electrode layer one layer of PDMS polydimethylsiloxane liquid is applied, and then toasts solid Change forms dielectric layer.

Beneficial effect：A kind of involute-type flexible capacitance type pressure transducer that this utility model is provided, it is poly- using PDMS Dimethyl siloxane and PI polyimides as basal layer and dielectric layer, and on flexible high molecular material Direct precipitation metal and New departure of flexible device is prepared, electrode layer can be copper, aluminum.Wherein, sweep is adopted between disk electric capacity and capacitance electrode Connection so that the extension retractility of capacitance electrode is effectively lifted, and better adapts to the flexibility of flexible substrates and dielectric layer, The flex capability of device can be greatly enhanced on the premise of using capacitance electrode.The capacitance profile of matrix form, by measurement Nearby the change in voltage of multiple electric capacity, can sense and accurately calculate depressed position and its pressure size.

Advantage of the present utility model is：

1st, flexible electronic device fusion conventional pressure inductance capacitance manufacture method of the present utility model and flexible electronic device Technique is in one, novel uniqueness.

2nd, device preparation technology of the present utility model is simple, and possesses good flex capability.

3rd, the device is accurately inductively measured out pressurized as a kind of universal performance for possessing pressure capacitance of electric capacity in the eyes Position and its pressure size.Meanwhile, the flex capability of itself allows the device to better adapt to diverse surface Structure.

Description of the drawings

Fig. 1 is section of structure of the present utility model；

Fig. 2 is the structural representation of basal layer of the present utility model and electrode layer；

Fig. 3 is the structural representation of single electric capacity.

Specific embodiment

This utility model is further described below in conjunction with the accompanying drawings.

As Figure 1-3, a kind of involute-type flexible capacitance type pressure transducer, including：Basal layer 1, electrode layer 2, Jie Matter layer 3, the basal layer 1, electrode layer 2, dielectric layer 3 set gradually from bottom to up；The electrode layer 2 includes：Multiple electric capacity 21, Electrode 22, in matrix structure in the top surface of basal layer 1, each electric capacity 21 includes the electric capacity 21：Disk electric capacity 211, gradually open Line 212, sweep 213, capacitance electrode 214, the outer ledge of disk electric capacity 211 draws respectively two involutes 212, per root The end of involute 212 is respectively connected with sweep 213, and the every end of sweep 213 is respectively connected with capacitance electrode 214；The substrate 1 top surface corner of layer is provided with electrode 22；The basal layer 1, dielectric layer 3 are using PDMS polydimethylsiloxane or PI polyamides Imines or PET polyethylene terephthalate or flexible glass or metal forming or reagent paper.

Also include sacrifice layer 4, the bottom of the basal layer 1 is provided with sacrifice layer 4, the surrounding of the sacrifice layer 4 and the bottom of basal layer 1 Portion is provided with the space of 1-10mm；The sacrifice layer 4 is using photoresist layer or magnalium layer or nickel aluminium lamination.

Concrete processing technology is as follows：

Sacrifice layer：Purpose is easy for the disengaging of device and substrate, and one layer is applied on clean substrate uniformly using sol evenning machine Photoresist, then marginal portion is wiped, then baking-curing is formed.

Basal layer：A strata dimethyl siloxane is applied on sacrifice layer with sol evenning machine is even（PDMS）Liquid, then 90 DEG C of bakings Roasting 30 min solidify to form.

Electrode layer：To above-mentioned polydimethylsiloxane（PDMS）Basal layer does a hydrophilic and hydrophobic and processes, in vacuum cleaned With oxygen plasma bombardment PDMS top layers in instrument, radio frequency 8W continues 10 min, to recycle and do light on ready-made film mask piece bottom Carve, development, then one layer of copper of sputtering sedimentation, then adds thick metal layers using electroplating technology.Finally, removal non-electrical is cleaned with acetone Hold and electrode part, form electrode layer.

Dielectric layer：First, the even resist coating on electrode layer, according to film mask piece figure, does photoetching, development, then The electrode not manifested is pasted with PI glue band.Then, one layer is uniformly applied in above-mentioned metal electrode layer surface with sol evenning machine Polydimethylsiloxane（PDMS）Liquid, then 90 DEG C of baking 30 min solidifications are formed.

Scratch to sacrifice layer is exposed along substrate edge blade, device is immersed in acetone soln, sacrifice layer（Photoetching Glue）Dissolving, device takes out complete device from the substrate that comes off.

The above is only preferred implementation of the present utility model, it should be pointed out that：For the common skill of the art For art personnel, on the premise of without departing from this utility model principle, some improvements and modifications can also be made, these improve and Retouching also should be regarded as protection domain of the present utility model.

Claims (5)

1. a kind of involute-type flexible capacitance type pressure transducer, including：Basal layer, electrode layer, dielectric layer, it is characterised in that： The basal layer, electrode layer, dielectric layer set gradually from bottom to up；The electrode layer includes：Multiple electric capacity, electrode, the electricity Hold in matrix structure in basal layer top surface, each electric capacity includes：Disk electric capacity, involute, sweep, capacitance electrode, institute State disk electric capacity outer ledge and draw two involutes respectively, every involute end is respectively connected with sweep, every sweep End is respectively connected with capacitance electrode；The basal layer top surface corner is provided with electrode；The basal layer, dielectric layer are adopted PDMS polydimethylsiloxane or PI polyimides or PET polyethylene terephthalate or flexible glass or metal forming or examination Paper.

2. a kind of involute-type flexible capacitance type pressure transducer according to claim 1, it is characterised in that：Also include sacrificial Domestic animal layer, the basal layer bottom is provided with sacrifice layer, and the sacrifice layer surrounding is provided with the space of 1-10mm with basal layer bottom； The sacrifice layer is using photoresist layer or magnalium layer or nickel aluminium lamination.

3. a kind of involute-type flexible capacitance type pressure transducer according to claim 1 and 2, it is characterised in that：It is described Basal layer, thickness of dielectric layers are set to 200-1000nm.

4. a kind of involute-type flexible capacitance type pressure transducer according to claim 1 and 2, it is characterised in that：It is described Electrode layers thickness is set to 1 μm -5 μm.

5. a kind of involute-type flexible capacitance type pressure transducer according to claim 1, it is characterised in that：The bending The live width of line is set to 200nm-500nm.