CN107731352B - Flexible electronic glass transparent conductive oxide film circuit preparation method - Google Patents
Flexible electronic glass transparent conductive oxide film circuit preparation method Download PDFInfo
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- CN107731352B CN107731352B CN201710573171.7A CN201710573171A CN107731352B CN 107731352 B CN107731352 B CN 107731352B CN 201710573171 A CN201710573171 A CN 201710573171A CN 107731352 B CN107731352 B CN 107731352B
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- flexible
- transparent conductive
- glass
- oxide
- roll
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04102—Flexible digitiser, i.e. constructional details for allowing the whole digitising part of a device to be flexed or rolled like a sheet of paper
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Abstract
The invention discloses a kind of flexible electronic glass transparent conductive oxide film circuit preparation methods, plated film matrix be 25-100 microns of plastic circuit template thickness required for covering can the curved glass of pitch of the laps, transparent conductive oxide raw material is transparent conductive oxide plane or cylinder rotary magnetron sputtering target material, such as indium tin oxide (ITO), aluminium-doped zinc oxide (AZO), fluorine tin-oxide (FTO), Ga-doped zinc oxide (GZO), indium Ga-doped zinc oxide (IGZO), antimony tin oxide (STO) etc., this method comprises: the cleaning of flexible glass, plastic circuit template fits in flexible glass；Pad pasting is protected in roll-to-roll (R2R) the magnetron sputtering atomic deposition of vacuum plasma, temperature modifier treatment, thickness and quality testing.The transparent oxide film is with a thickness of 50-500 nanometers；Conductive sheet resistance is 5-500 ohm/；Light transmittance 75-95%.
Description
Technical field
The present invention relates to flexible electronic transparent conductive oxide film circuit and its technology of preparing, especially a kind of flexible electrical
Sub- glass transparent conductive oxide film circuit preparation method.
Background technique
Flexible electronic is exactly the emerging electricity being produced on electronic device on flexible Drawability plastics, glass or thin metal matrix plate
Sub- technology is led with its unique flexible, ductility and efficient, low cost manufacturing technique in information, the energy, medical treatment, national defence etc.
Domain has wide application prospect, such as flexible electronic displays, thin-film solar cell panel, electronics surface mount.Flexible electrical
Son have it is soft, deformable, light, portable, can the characteristics such as large-area applications, and by widely applying new material and new process production
A large amount of new opplications are born, including RFID, Flexible Displays, OLED shine, the storage of sensor, flexible photovoltaic, logical AND, flexible electrical
Pond.In future, ultraviolet light degree of illumination can be detected on the back of the hand by pasting " paster "；Pacemaker no longer changes battery；
Battery can directly wind production simultaneously.In recent years, this new branch of science of flexible electronic caused domestic and international scientific and technological circle with
The extensive concern of industry attracts the R&D process that numerous companies put into this sciemtifec and technical sphere, accelerates flexible electronic
Practical product exploitation and commercialization process.In development in science and technology " 13 " planning, country is passing through policy guide and money
Gold is helped will push the flexible research and industrialization with printed electronic of China energetically.China is electronic industry big country, but is not skill
Art power, flexible electronic is the chance that China strives for electronic industry great-leap-forward development.Flexible electronic has broad mass market, market rule
Mould is expanded rapidly, and national pillar industry can be become.
Flexible electronic transparent conductive film is exactly that generated film is not only conductive with more the transparency, is flexible
Thin film solar, display screen, electroluminescent device, thin film transistor (TFT), capacitor and electric resistance touch screen, transparent heater etc. it is important
Material.Compared with rigid substrate transparent conductive film, in addition to the conductive and transparency, also there is flexibility and may extend away
Property, it is the important materials for developing flexible electronic device.
Summary of the invention
Goal of the invention: providing a kind of flexible electronic glass conductive transparent oxide thin film circuit, and further provides for volume pair
Magnetron sputtering template atomic deposition film plating process is rolled up, basic flexible glass transparent is provided leads for the development of flexible electronic device
Electroxidation object templated films circuit production method.
Technical solution: the invention adopts the following technical scheme: a kind of flexible electronic glass transparent conductive oxide film is electric
Road preparation method, the transparent conductive oxide film electric circuit deposition in 25-100 microns of flexible flexible glass rather than
On current nonbreakable glass；
Preparation method includes the following steps:
Step 1. is cleaned by ultrasonic flexible flexible glass matrix, is dried；The roll-to-roll magnetic control of vacuum is put into splash
It penetrates and carries out plasma cleaning in coating machine；
Step 2. attaches to the template with circuit plastics in flexible glass with roll-to-roll laminator；
The flexible glass for posting circuit plastic formwork is put into unreeling for the roll-to-roll magnetron sputtering coater of vacuum by step 3.
On device, an end of flexible glass is connected on coiler；
Step 4. is evacuated down to 10-6To 10-8Torr；According to the characteristic of different transparent oxides, power 10- is regulated
30Kw is filled with argon gas 30-100SCCM, keeps vacuum degree 2-50mTorr, carries out magnetic control with planar targets or cylinder rotary target material
Sputtered atom plated film；
The flexible glass for being coated with transparent oxide circuit pattern is carried out quenched place by step 5. at a temperature of 120-180 DEG C
Reason；
Step 6. carries out thickness to the transparent conductive oxide circuit in flexible glass, sheet resistance carries out quality；
Step 7. takes out winding flexible glass removal circuit plastic formwork in vacuum magnetic-control sputtering machine and carries out surface inspection
Looking into ensures no slight crack, then carries out protection pad pasting；
Step 8. hollow template and silk-screen printing are made into a four line touch screen panels；It prints between silver electrode and point
Every top panel and lower panel are carefully assembled and form transparent conductive oxide flexible touch screen electronic instrument.
Further, which is 50-500 nanometers；Conductive sheet resistance is 5-500 ohm
/；Light transmittance 75-95%.
Further, transparent conductive oxide raw material is transparent conductive oxide plane or cylinder rotary magnetron sputtering target
Material, i.e. indium tin oxide, aluminium-doped zinc oxide, fluorine tin-oxide, Ga-doped zinc oxide, indium Ga-doped zinc oxide or the oxidation of antimony tin
Object.
The utility model has the advantages that the present invention is compared with prior art:
(1) the transparent oxide film circuit of flexible glass, the development for flexible electronic device are directly formed；
(2) electronic circuit formed is flexible and extends；Performance is suitable with the thin film circuit performance on nonbreakable glass.
(3) compared with flexible electronic Method of printing, this roll-to-roll magnetron sputtering atomic deposition plated film circuit impurity low resistance
It is small, it is reproducible, it is highly reliable.
(4) this method is suitable for the production of large area thin film circuits, and speed is fast, high yield rate.
Specific embodiment
A kind of flexible electronic glass transparent conductive oxide film circuit preparation method, the transparent conductive oxide are thin
Film electric circuit deposition is in 25-100 microns of flexible flexible glass rather than on current nonbreakable glass；The transparent conductive oxide
Thin film circuit is with a thickness of 50-500 nanometers；Conductive sheet resistance is 5-500 ohm/；Light transmittance 75-95%；Transparent conductive oxide
Raw material is transparent conductive oxide plane or cylinder rotary magnetron sputtering target material, such as indium tin oxide, aluminium-doped zinc oxide, fluorine tin
Oxide, Ga-doped zinc oxide, indium Ga-doped zinc oxide or antimony tin oxide, but it is not limited only to such, what is listed is only preferred
Material.
Steps are as follows for the roll-to-roll magnetron sputtering atomic deposition transparent conductive oxide film circuit methods of the present invention:
Step 1. is cleaned by ultrasonic flexible flexible glass matrix, is dried；It is roll-to-roll (R2R) to be put into vacuum
Plasma cleaning is carried out in magnetron sputtering coater.
Step 2. attaches to the template of circuit plastics in flexible glass with roll-to-roll laminator.
The flexible glass for posting plastic formwork is put into the unreeling on device of the roll-to-roll magnetron sputtering coater of vacuum by step 3.,
One end of flexible glass is connected on coiler.
Step 4. is evacuated down to 10-6To 10-8Torr；According to the characteristic of different transparent oxides, power 10- is regulated
30Kw is filled with argon gas 30-100SCCM, keeps vacuum degree 2-50mTorr, carries out magnetic control with planar targets or cylinder rotary target material
Sputtered atom plated film.
The flexible glass for being coated with transparent oxide master die is carried out modifier treatment by step 5. at a temperature of 120-180 DEG C
Step 6. carries out thickness to the transparent conductive oxide circuit in flexible glass, sheet resistance carries out quality
Winding flexible glass removal plastic formwork is taken out in vacuum magnetic-control sputtering machine for step 7. and to carry out surface inspection true
No slight crack is protected, protection pad pasting is then carried out.
Step 8. hollow template and silk-screen printing are made into a four line touch screen panels；It prints between silver electrode and point
Every top panel and lower panel are carefully assembled and form transparent conductive oxide flexible touch screen electronic instrument.
Embodiment 1
(1) flexible 25 microns of flexible glass matrix is cleaned by ultrasonic, dried；It is roll-to-roll to be put into vacuum
(R2R) plasma cleaning is carried out in magnetron sputtering coater.
(2) circuit plastic formwork is attached in flexible glass with roll-to-roll laminator.
(3) flexible glass for posting plastic formwork is put into the unreeling on device of the roll-to-roll magnetron sputtering coater of vacuum, it is soft
One end of property glass is connected on coiler.
(4) 10 are evacuated down to-6Torr；The preparation of transparent sull circuit is carried out, power 30Kw is filled with flow
30SCCM argon gas keeps vacuum degree 2mTorr, carries out magnetron sputtering atom plated film with ITO cylinder rotary target material.
(5) flexible glass for being coated with transparent oxide film circuit is subjected to modifier treatment at a temperature of 120 DEG C
(6) thickness is carried out to the transparent conductive oxide film circuit in flexible glass, sheet resistance carries out quality；Thickness
500 nanometers；5 ohm/ of sheet resistance (7) takes out winding flexible glass removal pattern plastic and is carried out in vacuum magnetic-control sputtering machine
Surface inspection ensures no slight crack, sticks PE protective film.
(8) a four line touch screen panels are made into hollow template and silk-screen printing；Silver electrode and point interval are printed, it will
Top panel and lower panel, which carefully assemble, forms transparent conductive oxide flexible touch screen electronic instrument.
Embodiment 2
(1) flexible 50 microns of flexible glass matrix is cleaned by ultrasonic, dried；It is roll-to-roll to be put into vacuum
(R2R) plasma cleaning is carried out in magnetron sputtering coater.
(2) plastic formwork is attached in flexible glass with roll-to-roll laminator.
(3) device is unreeled by what the flexible glass for posting circuit plastic formwork was put into the roll-to-roll magnetron sputtering coater of vacuum
On, an end of flexible glass is connected on coiler.
(4) 10 are evacuated down to-7Torr；The preparation of AZO transparent oxide film circuit is carried out, power 20Kw is filled with flow
50SCCM argon gas keeps vacuum degree 25mTorr, carries out magnetron sputtering atom plated film with AZO planar targets.
(5) flexible glass for being coated with transparent oxide film circuit is subjected to modifier treatment at a temperature of 150 DEG C
(6) thickness is carried out to the AZO transparent conductive oxide film circuit in flexible glass, sheet resistance carries out quality；Thickness
200 nanometers；100 ohm/ of sheet resistance (7) takes out winding flexible glass removal plastic formwork in vacuum magnetic-control sputtering machine and goes forward side by side
Row surface inspection ensures no slight crack, sticks PE protective film.
(8) a four line touch screen panels are made into hollow template and silk-screen printing；Silver electrode and point interval are printed, it will
Top panel and lower panel, which carefully assemble, forms transparent conductive oxide flexible touch screen electronic instrument.
Embodiment 3
(1) flexible 100 microns of flexible glass matrix is cleaned by ultrasonic, dried；It is roll-to-roll to be put into vacuum
(R2R) plasma cleaning is carried out in magnetron sputtering coater.
(2) it will be attached in flexible glass with circuit pattern plastics with roll-to-roll laminator.
(3) flexible glass with circuit pattern plastic adhesive film is put into unreeling for the roll-to-roll magnetron sputtering coater of vacuum
On device, an end of flexible glass is connected on coiler.
(4) 10 are evacuated down to-8Torr；The preparation of FTO transparent oxide film circuit is carried out, power 25Kw is filled with flow
50SCCM argon gas keeps vacuum degree 50mTorr, carries out magnetron sputtering atom plated film with FTO cylinder rotary target material.
(5) flexible glass for being coated with transparent oxide film circuit is subjected to modifier treatment at a temperature of 180 DEG C
(6) thickness is carried out to the FTO transparent conductive oxide film circuit in flexible glass, sheet resistance carries out quality；Thickness
400 nanometers；16 ohm/ of sheet resistance (7) takes out winding flexible glass removal pattern plastic and is carried out in vacuum magnetic-control sputtering machine
Surface inspection ensures no slight crack, sticks PE protective film.
(8) a four line touch screen panels are made into hollow template and silk-screen printing；Silver electrode and point interval are printed, it will
Top panel and lower panel, which carefully assemble, forms transparent conductive oxide flexible touch screen electronic instrument.
Embodiment 4
(1) flexible 80 microns of flexible glass matrix is cleaned by ultrasonic, dried；It is roll-to-roll to be put into vacuum
(R2R) plasma cleaning is carried out in magnetron sputtering coater.
(2) circuit plastic formwork is attached in flexible glass with roll-to-roll laminator.
(3) device is unreeled by what the flexible glass for posting circuit plastic formwork was put into the roll-to-roll magnetron sputtering coater of vacuum
On, an end of flexible glass is connected on coiler.
(4) it is evacuated down to 5x10-7Torr；The preparation of GZO transparent oxide film circuit is carried out, power 15Kw is filled with flow
80SCCM argon gas keeps vacuum degree 30mTorr, carries out magnetron sputtering atom plated film with GZO planar targets.
(5) flexible glass for being coated with GZO transparent oxide film circuit is subjected to modifier treatment (6) at a temperature of 160 DEG C
Thickness is carried out to the GZO transparent conductive oxide film circuit in flexible glass, sheet resistance carries out quality；250 nanometers of thickness；Sheet resistance
Taking out winding flexible glass removal plastic formwork for 30 ohm/ (7) in vacuum magnetic-control sputtering machine and carrying out surface inspection ensures
There is no slight crack, sticks PE protective film.
(8) a four line touch screen panels are made into hollow template and silk-screen printing；Silver electrode and point interval are printed, it will
Top panel and lower panel, which carefully assemble, forms transparent conductive oxide flexible touch screen electronic instrument.
Claims (3)
1. a kind of flexible electronic glass transparent conductive oxide film circuit preparation method, which is characterized in that described transparent to lead
Oxide film electric circuit deposition is in 25-100 microns of flexible flexible glass rather than on current nonbreakable glass；
Preparation method includes the following steps:
Step 1. is cleaned by ultrasonic flexible flexible glass matrix, is dried；It is put into the roll-to-roll magnetron sputtering of vacuum
Plasma cleaning is carried out in film machine；
Step 2. attaches to the template with circuit plastics in flexible glass with roll-to-roll laminator；
The flexible glass for posting circuit plastic formwork is put into the unreeling on device of the roll-to-roll magnetron sputtering coater of vacuum by step 3.,
One end of flexible glass is connected on coiler；
Step 4. is evacuated down to 10-6To 10-8Torr；According to the characteristic of different transparent oxides, power 10-30kW is regulated, is filled
Enter argon gas 30-100SCCM, keeps vacuum degree 2-50mTorr, carry out magnetron sputtering atom with planar targets or cylinder rotary target material
Plated film；
The flexible glass for being coated with transparent oxide circuit pattern is carried out modifier treatment by step 5. at a temperature of 120-180 DEG C；
Step 6. carries out thickness to the transparent conductive oxide circuit in flexible glass, sheet resistance carries out quality；
Winding flexible glass removal circuit plastic formwork is taken out in vacuum magnetic-control sputtering machine for step 7. and to carry out surface inspection true
No slight crack is protected, protection pad pasting is then carried out；
Step 8. hollow template and silk-screen printing are made into a four line touch screen panels；Silver electrode and point interval are printed, it will
Top panel and lower panel, which carefully assemble, forms transparent conductive oxide flexible touch screen electronic instrument.
2. flexible electronic glass transparent conductive oxide film circuit preparation method according to claim 1, feature exist
In the transparent conductive oxide film circuit thickness is 50-500 nanometers；Conductive sheet resistance is 5-500 ohm/；Light transmittance 75-
95%.
3. flexible electronic glass transparent conductive oxide film circuit preparation method according to claim 1, feature exist
In, transparent conductive oxide raw material be transparent conductive oxide plane or cylinder rotary magnetron sputtering target material, i.e. indium tin oxide,
Aluminium-doped zinc oxide, fluorine tin-oxide, Ga-doped zinc oxide, indium Ga-doped zinc oxide or antimony tin oxide.
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| CN201710573171.7A CN107731352B (en) | 2017-07-14 | 2017-07-14 | Flexible electronic glass transparent conductive oxide film circuit preparation method |
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| CN201710573171.7A CN107731352B (en) | 2017-07-14 | 2017-07-14 | Flexible electronic glass transparent conductive oxide film circuit preparation method |
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| CN107731352B true CN107731352B (en) | 2019-10-18 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108417313A (en) * | 2018-03-14 | 2018-08-17 | 中南大学 | A kind of flexibility roll-to-roll wet etching of indium tin oxide transparent conducting film and patterned method |
| CN110205867A (en) * | 2019-06-14 | 2019-09-06 | 陕西科技大学 | A kind of multi-functional paper base flexible sensing material and its preparation method and application |
| CN110928012A (en) * | 2019-12-06 | 2020-03-27 | 深圳市康盛光电科技有限公司 | Anti-electric breakdown preparation method of ITO conductive film for light modulation film |
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| JP2010183083A (en) * | 2009-02-06 | 2010-08-19 | Zylum Beteiligungs Gmbh & Co Patente Ii Kg | Method for manufacturing photovoltaic thin film device and the same |
| CN102899624A (en) * | 2012-09-20 | 2013-01-30 | 上海大学 | Preparation method of transparent conductive oxide composite film material |
| CN104651791A (en) * | 2015-02-18 | 2015-05-27 | 南京汇金锦元光电材料有限公司 | Energy-saving flexible transparent conducting film and preparation method thereof |
| CN106158144A (en) * | 2016-06-23 | 2016-11-23 | 无锡格菲电子薄膜科技有限公司 | A kind of preparation method of ultra-thin super Flexible graphene conductive film |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1431414A1 (en) * | 2001-09-27 | 2004-06-23 | Idemitsu Kosan Co., Ltd. | Sputtering target and transparent electroconductive film |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010183083A (en) * | 2009-02-06 | 2010-08-19 | Zylum Beteiligungs Gmbh & Co Patente Ii Kg | Method for manufacturing photovoltaic thin film device and the same |
| CN102899624A (en) * | 2012-09-20 | 2013-01-30 | 上海大学 | Preparation method of transparent conductive oxide composite film material |
| CN104651791A (en) * | 2015-02-18 | 2015-05-27 | 南京汇金锦元光电材料有限公司 | Energy-saving flexible transparent conducting film and preparation method thereof |
| CN106158144A (en) * | 2016-06-23 | 2016-11-23 | 无锡格菲电子薄膜科技有限公司 | A kind of preparation method of ultra-thin super Flexible graphene conductive film |
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